JP2009502034A5 - - Google Patents

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Publication number
JP2009502034A5
JP2009502034A5 JP2008521970A JP2008521970A JP2009502034A5 JP 2009502034 A5 JP2009502034 A5 JP 2009502034A5 JP 2008521970 A JP2008521970 A JP 2008521970A JP 2008521970 A JP2008521970 A JP 2008521970A JP 2009502034 A5 JP2009502034 A5 JP 2009502034A5
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JP
Japan
Prior art keywords
optical element
contact
module according
holder
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008521970A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009502034A (ja
JP5620638B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2006/064427 external-priority patent/WO2007010011A2/en
Publication of JP2009502034A publication Critical patent/JP2009502034A/ja
Publication of JP2009502034A5 publication Critical patent/JP2009502034A5/ja
Application granted granted Critical
Publication of JP5620638B2 publication Critical patent/JP5620638B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008521970A 2005-07-19 2006-07-19 光学結像装置 Expired - Fee Related JP5620638B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US70051705P 2005-07-19 2005-07-19
US60/700,517 2005-07-19
PCT/EP2006/064427 WO2007010011A2 (en) 2005-07-19 2006-07-19 Optical element module

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014116037A Division JP5993894B2 (ja) 2005-07-19 2014-06-04 光学結像装置

Publications (3)

Publication Number Publication Date
JP2009502034A JP2009502034A (ja) 2009-01-22
JP2009502034A5 true JP2009502034A5 (enExample) 2009-09-10
JP5620638B2 JP5620638B2 (ja) 2014-11-05

Family

ID=37076216

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008521970A Expired - Fee Related JP5620638B2 (ja) 2005-07-19 2006-07-19 光学結像装置
JP2014116037A Expired - Fee Related JP5993894B2 (ja) 2005-07-19 2014-06-04 光学結像装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014116037A Expired - Fee Related JP5993894B2 (ja) 2005-07-19 2014-06-04 光学結像装置

Country Status (3)

Country Link
US (2) US7859641B2 (enExample)
JP (2) JP5620638B2 (enExample)
WO (1) WO2007010011A2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5055384B2 (ja) * 2007-02-27 2012-10-24 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学結像装置
US8416386B2 (en) * 2007-03-13 2013-04-09 Nikon Corporation Conforming seats for clamps used in mounting an optical element, and optical systems comprising same
DE102009054549A1 (de) 2008-12-11 2010-06-17 Carl Zeiss Smt Ag Gravitationskompensation für optische Elemente in Projektionsbelichtungsanlagen
JP5535108B2 (ja) 2011-02-18 2014-07-02 ギガフォトン株式会社 極端紫外光源装置
DE202013011933U1 (de) * 2013-01-23 2014-10-28 Jenoptik Optical Systems Gmbh Thermisch kompensierte optische Baugruppe mit einem formschlüssig gehaltenen optischen Bauelement
CN103389558B (zh) * 2013-07-29 2015-12-02 中国科学院长春光学精密机械与物理研究所 光刻物镜中透镜轴向调整装置
DE102013110750B3 (de) * 2013-09-27 2014-11-13 Jenoptik Optical Systems Gmbh Optische Baugruppe mit einer Fassung mit thermisch abhängigem Kraftausgleich
CN108345081B (zh) * 2017-01-25 2022-01-04 台湾东电化股份有限公司 支撑机构
US10386595B2 (en) * 2017-01-25 2019-08-20 Tdk Taiwan Corp. Support mechanism
US11256059B2 (en) 2017-01-25 2022-02-22 Tdk Taiwan Corp. Driving module
JP7102860B2 (ja) * 2018-03-30 2022-07-20 住友大阪セメント株式会社 光モジュール
DE102021214140A1 (de) * 2021-12-10 2023-06-15 Carl Zeiss Smt Gmbh Fassung für eine linse, anordnung, lithographieanlage sowie verfahren
DE102022201007A1 (de) 2022-01-31 2022-11-17 Carl Zeiss Smt Gmbh Vorrichtung zur Verbindung wenigstens einer ersten und einer zweiten Modulkomponente, Modul eines Lithografiesystems, optisches Element und Lithografiesystem
DE102022207148A1 (de) * 2022-07-13 2024-01-18 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Halbleiterlithographie

Family Cites Families (26)

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Publication number Priority date Publication date Assignee Title
US4147413A (en) * 1977-03-07 1979-04-03 Hewlett-Packard Company Temperature compensated lens mount
JPS5926706A (ja) * 1982-08-05 1984-02-13 Olympus Optical Co Ltd レンズ保持装置
JPS6117110A (ja) * 1984-07-03 1986-01-25 Konishiroku Photo Ind Co Ltd レンズ保持装置
DE3525813A1 (de) * 1984-07-23 1986-02-27 Olympus Optical Co., Ltd., Tokio/Tokyo Vorrichtung zur halterung von linsen
US4733945A (en) * 1986-01-15 1988-03-29 The Perkin-Elmer Corporation Precision lens mounting
JPH07191248A (ja) * 1993-12-27 1995-07-28 Chinon Ind Inc レンズ構体
US5523893A (en) * 1994-08-24 1996-06-04 Northrop Grumman Corporation Strain free temperature-compensated optical mounts
JPH0886948A (ja) * 1994-09-20 1996-04-02 Canon Inc 光学機器
JPH09113781A (ja) * 1995-10-19 1997-05-02 Canon Inc シリアルスキャナの光学系固定装置
JPH1096843A (ja) * 1996-09-19 1998-04-14 Minolta Co Ltd 光学素子保持構造
JPH10253872A (ja) * 1997-03-13 1998-09-25 Nikon Corp 反射光学部材の保持装置及び露光装置
JPH10186196A (ja) * 1996-12-20 1998-07-14 Canon Inc 光学素子支持装置およびこれを備えた光学機器、露光装置
JPH11271586A (ja) * 1998-03-25 1999-10-08 Fuji Photo Optical Co Ltd レンズの支持構造
DE19904152A1 (de) * 1999-02-03 2000-08-10 Zeiss Carl Fa Baugruppe aus einem optischen Element und einer Fassung
JP4809987B2 (ja) * 2000-03-30 2011-11-09 キヤノン株式会社 光学要素の支持構造、それを用いた露光装置及び半導体デバイスの製造方法
JP2002175964A (ja) * 2000-12-06 2002-06-21 Nikon Corp 観察装置およびその製造方法、露光装置、並びにマイクロデバイスの製造方法
JP2002236242A (ja) * 2001-02-09 2002-08-23 Nikon Corp 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法
US6747730B2 (en) * 2001-12-04 2004-06-08 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and method of manufacturing an optical element
JP2003241051A (ja) * 2002-02-15 2003-08-27 Canon Inc 光学素子の支持手段、該光学素子の支持手段による光学系、露光装置、デバイス製造方法
TW200402606A (en) * 2002-06-11 2004-02-16 Nippon Kogaku Kk Exposure system and exposure method
JP2004062091A (ja) * 2002-07-31 2004-02-26 Canon Inc 保持装置、露光装置及びデバイス製造方法
JP2004264782A (ja) * 2003-03-04 2004-09-24 Canon Inc レンズ鏡筒
JP4590205B2 (ja) * 2003-05-14 2010-12-01 キヤノン株式会社 ミラー保持方法、光学装置、露光装置、およびデバイス製造方法
JP2005017020A (ja) * 2003-06-24 2005-01-20 Canon Inc ３次元形状計測装置
US8854602B2 (en) * 2003-11-24 2014-10-07 Asml Netherlands B.V. Holding device for an optical element in an objective
DE102006038634A1 (de) * 2006-08-17 2008-02-21 Carl Zeiss Smt Ag Halteeinrichtung für ein optisches Element mit Stützkraftausgleich

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