JP2009231322A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP2009231322A JP2009231322A JP2008071321A JP2008071321A JP2009231322A JP 2009231322 A JP2009231322 A JP 2009231322A JP 2008071321 A JP2008071321 A JP 2008071321A JP 2008071321 A JP2008071321 A JP 2008071321A JP 2009231322 A JP2009231322 A JP 2009231322A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- lead
- leads
- plating layer
- die pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 110
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 238000007747 plating Methods 0.000 claims abstract description 124
- 239000000725 suspension Substances 0.000 claims abstract description 45
- 238000005452 bending Methods 0.000 claims description 4
- 238000005304 joining Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 25
- 230000007547 defect Effects 0.000 abstract description 8
- 238000005336 cracking Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 87
- 238000007789 sealing Methods 0.000 description 16
- 239000000853 adhesive Substances 0.000 description 13
- 230000001070 adhesive effect Effects 0.000 description 13
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229910000510 noble metal Inorganic materials 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 241000272168 Laridae Species 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
Landscapes
- Lead Frames For Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008071321A JP2009231322A (ja) | 2008-03-19 | 2008-03-19 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008071321A JP2009231322A (ja) | 2008-03-19 | 2008-03-19 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009231322A true JP2009231322A (ja) | 2009-10-08 |
JP2009231322A5 JP2009231322A5 (enrdf_load_stackoverflow) | 2011-03-03 |
Family
ID=41246440
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008071321A Pending JP2009231322A (ja) | 2008-03-19 | 2008-03-19 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2009231322A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012074495A (ja) * | 2010-09-28 | 2012-04-12 | Dainippon Printing Co Ltd | 半導体装置 |
US9263374B2 (en) | 2010-09-28 | 2016-02-16 | Dai Nippon Printing Co., Ltd. | Semiconductor device and manufacturing method therefor |
JP2018117009A (ja) * | 2017-01-17 | 2018-07-26 | 株式会社三井ハイテック | リードフレームの製造方法およびリードフレーム |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5818947A (ja) * | 1981-07-27 | 1983-02-03 | Toshiba Corp | リ−ドフレ−ム |
JPS61292928A (ja) * | 1985-06-21 | 1986-12-23 | Hitachi Ltd | 半導体装置 |
JPS62145754A (ja) * | 1985-12-20 | 1987-06-29 | Hitachi Ltd | 半導体装置 |
JPH03185855A (ja) * | 1989-12-15 | 1991-08-13 | Mitsui High Tec Inc | リードフレームの製造方法 |
JPH0982870A (ja) * | 1995-09-14 | 1997-03-28 | Toshiba Corp | 半導体装置、リードフレーム及びその製造方法 |
JPH09219486A (ja) * | 1996-02-08 | 1997-08-19 | Toppan Printing Co Ltd | リードフレーム |
JP2002329829A (ja) * | 1992-03-27 | 2002-11-15 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
-
2008
- 2008-03-19 JP JP2008071321A patent/JP2009231322A/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5818947A (ja) * | 1981-07-27 | 1983-02-03 | Toshiba Corp | リ−ドフレ−ム |
JPS61292928A (ja) * | 1985-06-21 | 1986-12-23 | Hitachi Ltd | 半導体装置 |
JPS62145754A (ja) * | 1985-12-20 | 1987-06-29 | Hitachi Ltd | 半導体装置 |
JPH03185855A (ja) * | 1989-12-15 | 1991-08-13 | Mitsui High Tec Inc | リードフレームの製造方法 |
JP2002329829A (ja) * | 1992-03-27 | 2002-11-15 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
JPH0982870A (ja) * | 1995-09-14 | 1997-03-28 | Toshiba Corp | 半導体装置、リードフレーム及びその製造方法 |
JPH09219486A (ja) * | 1996-02-08 | 1997-08-19 | Toppan Printing Co Ltd | リードフレーム |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012074495A (ja) * | 2010-09-28 | 2012-04-12 | Dainippon Printing Co Ltd | 半導体装置 |
US9263374B2 (en) | 2010-09-28 | 2016-02-16 | Dai Nippon Printing Co., Ltd. | Semiconductor device and manufacturing method therefor |
JP2018117009A (ja) * | 2017-01-17 | 2018-07-26 | 株式会社三井ハイテック | リードフレームの製造方法およびリードフレーム |
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