JP2009172749A - End face grinding device for glass plate and method therefor - Google Patents

End face grinding device for glass plate and method therefor Download PDF

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JP2009172749A
JP2009172749A JP2008160801A JP2008160801A JP2009172749A JP 2009172749 A JP2009172749 A JP 2009172749A JP 2008160801 A JP2008160801 A JP 2008160801A JP 2008160801 A JP2008160801 A JP 2008160801A JP 2009172749 A JP2009172749 A JP 2009172749A
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glass plate
grinding
end surface
grindstone
glass substrate
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JP2008160801A
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JP5177520B2 (en
Inventor
Teruyoshi Tanaka
輝好 田中
Koichi Kitajima
浩市 北嶋
Sukeyuki Takahashi
祐之 高橋
Naoki Nishimura
直樹 西村
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Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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Priority to JP2008160801A priority Critical patent/JP5177520B2/en
Priority to CN2008801223758A priority patent/CN101909818B/en
Priority to KR1020107004066A priority patent/KR101502903B1/en
Priority to PCT/JP2008/067808 priority patent/WO2009081637A1/en
Priority to TW097141623A priority patent/TWI436857B/en
Publication of JP2009172749A publication Critical patent/JP2009172749A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/12Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To suppress effectively a grinding liquid from being splashed to the surface of a glass plate when its end face is subjected to grinding processing, and to recover the grinding liquid efficiently. <P>SOLUTION: A shielding plate 6 has a surrounding part 9 to surround a contacting part 4 from the center of the surface of a glass substrate 2 wherein one end of the surrounding part 9 extends crossing the end face 2a of the glass substrate 2 on the front side of the rotating direction of a grinder element 3. On the side opposite the grinder element 3 with the shielding plate 6 between, a purge nozzle 7 is installed. The purge nozzle 7 is provided in in-line arrangement with a plurality of nozzle apertures to jet purge water 13 in order to hinder the grinding liquid from intruding to the surface of the glass substrate 2 via the gap between the shielding plate 6 and the glass substrate 2. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、ガラス板の端面研削装置およびその方法に関し、詳しくは、回転する砥石をガラス板の端面に接触させ、この接触部に研削液を供給しながら砥石とガラス板とをガラス板の端面の長手方向に相対移動させることでガラス板の端面を研削する技術に関する。   The present invention relates to a glass plate end surface grinding apparatus and method, and more specifically, a rotating grindstone is brought into contact with the end surface of the glass plate, and the grindstone and the glass plate are joined to the end surface of the glass plate while supplying a grinding liquid to the contact portion. It is related with the technique which grinds the end surface of a glass plate by making it move relatively in the longitudinal direction of.

周知のように、液晶ディスプレイ、プラズマディスプレイ、エレクトロルミネッセンスディスプレイ、フィールドエミッションディスプレイなどの各種画像表示機器の製作に際しては、大型のガラス基板に対して複数の表示素子を形成した後に、各表示素子の区画ごとに分割する、いわゆる多面取りという手法が採用されるに至っている。そのため、ガラスメーカー等で製造されるガラス基板の大型化が推進されている現状がある。   As is well known, when manufacturing various image display devices such as a liquid crystal display, a plasma display, an electroluminescence display, and a field emission display, a plurality of display elements are formed on a large glass substrate, and then each display element is partitioned. A so-called multi-chamfering method that divides every time has been adopted. For this reason, there is a current situation in which a glass substrate manufactured by a glass manufacturer or the like is being increased in size.

これらのガラス基板は、成形後の素材ガラスを矩形状かつ所定の大きさに切断した後、その切断端面を研削する処理などを行うことにより、ガラス基板製品として得られる。   These glass substrates can be obtained as glass substrate products by cutting the formed material glass into a rectangular shape and a predetermined size and then grinding the cut end surface.

この種のガラス基板の端面研削は、通常、ガラス基板の端面に回転状態の砥石を接触させた状態で、かかる砥石をガラス基板に対してその端面に沿った向きに相対移動させることで行われる。この際、砥石とガラス基板の端面との接触部(研削部)の冷却や摩擦低減等の目的で、研削部に研削液を供給する場合が多い。しかしながら、研削部に供給された研削液は、研削液の供給方向や、砥石の回転等に起因してガラス基板の表面にも飛散し、この飛散した研削液に含まれている切粉等がガラス基板の表面に付着することでガラス基板の表面性状が悪化したり、後の洗浄工程が煩雑化したりする事態を招き得る。そのため、この種の端面研削装置においては、以下に示すような対策が講じられている。   End grinding of this type of glass substrate is usually performed by moving the grindstone relative to the glass substrate in a direction along the end face while a rotating grindstone is in contact with the end face of the glass substrate. . At this time, in many cases, the grinding fluid is supplied to the grinding portion for the purpose of cooling the frictional portion or the contact portion (grinding portion) between the grindstone and the end surface of the glass substrate. However, the grinding fluid supplied to the grinding part is also scattered on the surface of the glass substrate due to the grinding fluid supply direction, the rotation of the grinding stone, etc., and the chips contained in the scattered grinding fluid are By adhering to the surface of a glass substrate, the surface property of a glass substrate may deteriorate or the subsequent washing | cleaning process may be complicated. Therefore, in this type of end surface grinding apparatus, the following countermeasures are taken.

例えば、下記の特許文献1には、略鉛直に保持されたガラス基板の表裏面のうちプラズマディスプレイパネルの構成要素が形成された面上に、ガラス基板の鉛直下方に位置する砥石と前記構成要素との間を遮蔽する遮蔽板を配置し、この状態で、研削すべき割断面に砥石を接触させ、砥石に液体を供給しながら、保持されたガラス基板を割断面の長手方向に移動させつつ砥石を回転させて割断面を研削する方法が開示されている。
特開2005−317235号公報
For example, in Patent Document 1 below, a grindstone positioned vertically below the glass substrate on the surface on which the constituent elements of the plasma display panel are formed on the front and back surfaces of the glass substrate held substantially vertically and the constituent elements described above. In this state, the grindstone is brought into contact with the fractured surface to be ground, and while the liquid is supplied to the grindstone, the held glass substrate is moved in the longitudinal direction of the fractured surface. A method for grinding a cut section by rotating a grindstone is disclosed.
JP 2005-317235 A

ところで、最近では、液晶ディスプレイやプラズマディスプレイなど、各種画像表示ディスプレイの高精細化がなされており、これに伴い、PDPをはじめとする各ディスプレイ用ガラス基板についても高精細化の要求が高まっている。かかる要求に応えるためには、ガラス基板の表面性状を一層良好なものとする必要があり、このために、研削部に供給された研削液をガラス基板の表面に飛散させないようにすることが肝要となる。   By the way, recently, various image display displays such as liquid crystal displays and plasma displays have been improved in definition, and accordingly, there is an increasing demand for higher definition of glass substrates for displays such as PDPs. . In order to meet such demands, it is necessary to make the surface properties of the glass substrate better. For this reason, it is important to prevent the grinding liquid supplied to the grinding part from splashing on the surface of the glass substrate. It becomes.

ここで、上記特許文献1に開示の遮蔽板はフラットな形状をなし、研削対象となるガラス板の端面に対して平行にかつ所定距離だけ上方に配置されている。砥石とガラス板の端面との接触部に供給された研削液は、砥石の回転とガラス板の相対移動に伴って該接触部から斜め上方に飛散して遮蔽板に至る。そして、遮蔽板に至った研削液の大半は、遮蔽板に沿ってガラス板の端面と平行な方向に流れ、流速が低下した位置で自重により流下してガラス板より下方に落下する。そのため、飛散した研削液が遮蔽板に至り、遮蔽板に沿ってガラス板の端面と平行な方向に流れる領域では、研削液が遮蔽板とガラス板との間の間隙を通ってガラス板の平面中央側に侵入しやすく、同文献の図3に示されているようなガス供給ノズル23を設けたとしても、ガラス板の平面中央側への研削液の侵入を効果的に抑制することは難しい。特に、ガラス板を水平姿勢にして加工する場合は、その傾向が顕著である。また、同文献は、接触部(研削部)に供給した研削液の回収について特に配慮していない。   Here, the shielding plate disclosed in Patent Document 1 has a flat shape, and is disposed in parallel to the end surface of the glass plate to be ground and a predetermined distance above. The grinding fluid supplied to the contact portion between the grindstone and the end surface of the glass plate is scattered obliquely upward from the contact portion and reaches the shielding plate with the rotation of the grindstone and the relative movement of the glass plate. And most of the grinding fluid that has reached the shielding plate flows along the shielding plate in a direction parallel to the end face of the glass plate, and flows down by its own weight at a position where the flow velocity is lowered, and falls below the glass plate. Therefore, in a region where the scattered grinding liquid reaches the shielding plate and flows in a direction parallel to the end face of the glass plate along the shielding plate, the grinding liquid passes through the gap between the shielding plate and the glass plate and the plane of the glass plate. Even if it is easy to enter the center side and the gas supply nozzle 23 as shown in FIG. 3 of the same document is provided, it is difficult to effectively suppress the penetration of the grinding liquid into the plane center side of the glass plate. . This tendency is particularly noticeable when the glass plate is processed in a horizontal posture. Further, this document does not particularly take into consideration the recovery of the grinding fluid supplied to the contact portion (grinding portion).

以上の事情に鑑み、本発明では、ガラス板の端面研削工程において、研削液がガラス板の平面へ飛散するのを効果的に抑制し、また、研削液の効率的な回収を図ることを技術的課題とする。   In view of the above circumstances, in the present invention, in the edge grinding process of the glass plate, it is possible to effectively suppress the grinding fluid from scattering to the flat surface of the glass plate and to efficiently collect the grinding fluid. As an objective.

前記課題の解決は、本発明に係るガラス板の研削装置により達成される。すなわち、このガラス板の研削装置は、回転させつつガラス板の端面に接触させることで端面を研削する砥石と、砥石とガラス板の端面との接触部に研削液を供給する研削液供給部と、接触部に供給された研削液からガラス板の平面を遮蔽するための遮蔽板とを備えたガラス板の端面研削装置において、遮蔽板は、接触部をガラス板の平面中央側から包囲する包囲部を有し、包囲部の一端は、接触部よりも砥石の回転方向前方側でガラス板の端面と交差して延びている点をもって特徴づけられる。   The solution to the above problem is achieved by the glass plate grinding apparatus according to the present invention. That is, this glass plate grinding apparatus includes a grinding wheel that grinds the end surface by contacting the end surface of the glass plate while rotating, and a grinding fluid supply unit that supplies a grinding fluid to a contact portion between the grindstone and the end surface of the glass plate. In the glass plate end surface grinding apparatus comprising a shielding plate for shielding the flat surface of the glass plate from the grinding liquid supplied to the contact portion, the shielding plate surrounds the contact portion from the plane center side of the glass plate And one end of the surrounding portion is characterized by a point extending from the contact portion on the front side in the rotation direction of the grindstone so as to intersect with the end surface of the glass plate.

このような構成によれば、接触部に供給された研削液は、接触部での加工に寄与した後、接触部を包囲する包囲部に到達し、包囲部に沿って、接触部よりも砥石の回転方向前方側でガラス板の端面と交差する位置を超える位置まで誘導される。すなわち、接触部から砥石の回転方向前方側において、研削液は包囲部に沿って、ガラス板の平面中央側から離れる方向に流れ、ガラス板の端面を超える位置まで誘導される。これにより、接触部で飛散した研削液がガラス板の平面中央側に流れて、平面中央側に付着することが効果的に防止される。また、研削液は包囲部によって流れの方向性を与えられるため、研削液を効率的に回収することもできる。   According to such a configuration, after the grinding fluid supplied to the contact portion contributes to the processing at the contact portion, it reaches the surrounding portion surrounding the contact portion, and along the surrounding portion, the grindstone is more than the contact portion. It is induced | guided | derived to the position beyond the position which cross | intersects the end surface of a glass plate in the rotation direction front side. That is, on the front side in the rotation direction of the grindstone from the contact portion, the grinding liquid flows in a direction away from the plane center side of the glass plate along the surrounding portion, and is guided to a position exceeding the end surface of the glass plate. Thereby, it is effectively prevented that the grinding fluid scattered at the contact portion flows to the plane center side of the glass plate and adheres to the plane center side. In addition, since the grinding fluid is given flow direction by the surrounding portion, the grinding fluid can be efficiently recovered.

この場合、包囲部は、ガラス板の平面に対する平面視で、砥石の外周面に沿った湾曲形状を有していることが好ましい。   In this case, the surrounding portion preferably has a curved shape along the outer peripheral surface of the grindstone in a plan view with respect to the plane of the glass plate.

包囲部を上記の形状とすることで、包囲部に到達した研削液を砥石の回転方向に沿って円滑に誘導して、上記の効果を高めることができる。   By making the surrounding part into the above-described shape, the grinding liquid that has reached the surrounding part can be smoothly guided along the rotation direction of the grindstone, and the above-described effects can be enhanced.

また、包囲部は、ガラス板の一面側に位置する構成とする他、その両面側に位置している構成とすることもできる。   Moreover, the surrounding part can also be set as the structure located in the both surfaces side besides the structure located in the one surface side of a glass plate.

包囲部がガラス板の両面側に位置するように遮蔽板を配設することで、包囲部による上記作用をガラス板の両面に対して得ることができる。そのため、当該研削装置により得られたガラス板を、高精細な液晶ディスプレイやプラズマディスプレイ等の各種画像表示機器用のガラス基板として広く提供することができる。   By disposing the shielding plate so that the surrounding portion is positioned on both sides of the glass plate, the above-described action by the surrounding portion can be obtained on both sides of the glass plate. Therefore, the glass plate obtained by the grinding apparatus can be widely provided as a glass substrate for various image display devices such as a high-definition liquid crystal display and a plasma display.

また、包囲部がガラス板の両面側に位置する構成とする場合、包囲部は、ガラス板の端面を含む一部を挿通するためのスリットを有していることが好ましい。   Moreover, when it is set as the structure where an enclosure part is located in the both surfaces side of a glass plate, it is preferable that the enclosure part has a slit for inserting a part including the end surface of a glass plate.

このような形状とすることで、ガラス板の両面側に位置する包囲部を1つの遮蔽板で構成して、構造の簡素化を図ることができる。   By setting it as such a shape, the surrounding part located in the both surfaces side of a glass plate can be comprised with one shielding board, and simplification of a structure can be aimed at.

また、上記構成に加えて、包囲部を挟んで砥石と反対側の位置に、パージ流体を噴射するパージノズルが配設されている構成としてもよい。この場合、パージ流体は、前記包囲部とガラス板との間の間隙に供給される。   Further, in addition to the above configuration, a purge nozzle that injects a purge fluid may be disposed at a position opposite to the grindstone across the surrounding portion. In this case, the purge fluid is supplied to the gap between the surrounding portion and the glass plate.

かかる構成とすることで、包囲部とガラス板との間の間隙を通ってガラス板の平面中央側に侵入しようとする研削液は、パージノズルから噴出するパージ流体によって砥石の側に押し戻される。よって、ガラス板の平面中央側への研削液の付着をより効果的に防止することができる。なお、ここでいう「パージ流体」には、水等の液体、空気等の気体が含まれるが、包囲部とガラス板との間隙を通ってガラス板の平面中央側に侵入しようとする研削液を砥石側に押し戻すのに十分な圧力を付与するとの観点からは、水等の液体がより好ましい。また、その圧力は研削液の供給量に応じて適宜設定すればよい。   By adopting such a configuration, the grinding liquid that attempts to enter the plane center side of the glass plate through the gap between the surrounding portion and the glass plate is pushed back toward the grindstone by the purge fluid ejected from the purge nozzle. Therefore, it is possible to more effectively prevent the grinding liquid from adhering to the plane center side of the glass plate. Here, the “purge fluid” includes a liquid such as water and a gas such as air, but the grinding fluid which tries to enter the plane center side of the glass plate through the gap between the surrounding portion and the glass plate. From the viewpoint of applying a pressure sufficient to push back to the grindstone side, a liquid such as water is more preferable. The pressure may be appropriately set according to the supply amount of the grinding fluid.

この場合、パージノズルは、パージ流体が包囲部とガラス板との間の間隙を通ってガラス板に達するように、その設置角度が設定されていることが好ましい。   In this case, it is preferable that the installation angle of the purge nozzle is set so that the purge fluid reaches the glass plate through the gap between the surrounding portion and the glass plate.

上述の如くパージノズルの設置角度を定めることで、パージ流体によって、遮蔽板とガラス板の間隙よりも砥石に近い位置で研削液を押し戻すことができ、当該間隙を介して研削液がガラス板の平面中央側に侵入する事態をより一層効果的に防止することができる。   By determining the installation angle of the purge nozzle as described above, the grinding fluid can be pushed back by the purge fluid at a position closer to the grindstone than the gap between the shielding plate and the glass plate, and the grinding fluid passes through the gap on the plane of the glass plate. The situation of entering the center side can be more effectively prevented.

また、パージノズルは、遮蔽板の包囲部と同様、ガラス板の一面側に配置する他、その両面側に配置することもできる。   Further, the purge nozzle can be arranged on one side of the glass plate as well as on the both sides thereof, like the surrounding portion of the shielding plate.

このような構成とすることで、上記パージノズルによる作用と同一の作用をガラス板の両面側で得ることができる。   By setting it as such a structure, the effect | action same as the effect | action by the said purge nozzle can be acquired on the both surfaces side of a glass plate.

また、この場合、包囲部を有する遮蔽板とパージノズルとはユニット化されたものであってもよい。   In this case, the shielding plate having the surrounding portion and the purge nozzle may be unitized.

このようにユニット化されていれば、砥石の交換のために上記端面研削装置を分解した場合であっても、遮蔽板とパージノズル相互の位置関係を維持したままで当該ユニットを取り外しできる。そのため、砥石交換後の再組立時に砥石と上記ユニットとの位置関係を調整するだけで済み、砥石の交換作業に要する時間を短縮することができる。   If unitized in this way, the unit can be removed while maintaining the positional relationship between the shielding plate and the purge nozzle even when the end face grinding device is disassembled for exchanging the grindstone. Therefore, it is only necessary to adjust the positional relationship between the grindstone and the unit at the time of reassembly after exchanging the grindstone, and the time required for exchanging the grindstone can be shortened.

もちろん、遮蔽板とパージノズルに加えて、研削液供給部もユニット化することも可能である。すなわち、遮蔽板と研削液供給部、およびパージノズルとがユニット化されたものであってもよい。   Of course, in addition to the shielding plate and the purge nozzle, the grinding fluid supply unit can be unitized. That is, the shielding plate, the grinding fluid supply unit, and the purge nozzle may be unitized.

上記構成に係るガラス板の端面研削装置は、少なくとも砥石と研削液供給部とを収容するハウジングをさらに備え、このハウジングは、所定の端面に、ガラス板の一部を挿通し、当該ガラス板の端面を砥石に接触可能とするための開口部を有することが好ましい。   The end face grinding apparatus for a glass plate according to the above configuration further includes a housing for accommodating at least a grindstone and a grinding fluid supply unit, and the housing passes a part of the glass plate through a predetermined end face, It is preferable to have an opening for allowing the end face to contact the grindstone.

このような構成とすることで、ガラス板の挿通側となる開口部を除き、砥石がハウジングで覆われる。そのため、上記遮蔽板あるいはパージノズルによる上記作用と相俟って、研削液のガラス板平面中央側への飛散を一層確実に防止することができる。また、砥石と研削液供給部がハウジングで覆われることで、包囲部によりガラス板から遠ざかる向きに誘導された研削液を漏れなく回収することができる。   By setting it as such a structure, a grindstone is covered with a housing except for the opening part used as the insertion side of a glass plate. Therefore, in combination with the above action by the shielding plate or the purge nozzle, it is possible to more reliably prevent the grinding liquid from scattering toward the center of the glass plate plane. Further, since the grindstone and the grinding fluid supply unit are covered with the housing, the grinding fluid guided in the direction away from the glass plate by the surrounding portion can be collected without leakage.

また、上記構成に係るガラス板の端面研削装置は、ガラス板を水平姿勢にして加工する場合に特に好適である。   The glass plate end surface grinding apparatus according to the above configuration is particularly suitable for processing a glass plate in a horizontal posture.

一方、前記課題の解決は、本発明に係るガラス板の端面研削方法によっても達成される。すなわち、このガラス板の研削方法は、砥石を回転させながらガラス板の端面に接触させることで端面の研削を行う方法であって、砥石とガラス板の端面との接触部に研削液を供給すると共に、接触部に供給された研削液からガラス板の平面を遮蔽するための遮蔽板を配設した状態で端面の研削を行うガラス板の端面研削方法において、遮蔽板は、接触部をガラス板の平面中央側から包囲する包囲部を有し、包囲部の一端は、接触部よりも砥石の回転方向前方側で端面と交差して延びている点をもって特徴づけられる。   On the other hand, the solution of the above problem is also achieved by the method for grinding an end face of a glass plate according to the present invention. That is, this glass plate grinding method is a method of grinding the end surface by contacting the end surface of the glass plate while rotating the grindstone, and supplying the grinding liquid to the contact portion between the grindstone and the end surface of the glass plate. In addition, in the method for grinding an end face of a glass plate in which the end face is ground in a state in which a shielding plate for shielding the flat surface of the glass plate from the grinding liquid supplied to the contact portion is provided, the shielding plate includes the contact portion of the glass plate. And an end portion of the surrounding portion is characterized in that it extends across the end surface on the front side in the rotational direction of the grindstone from the contact portion.

このような方法によれば、先に述べた本発明に係るガラス板の研削装置についての事項と、同一の事項が当てはまり、故に当該装置による作用効果と同一の作用効果を得ることができる。   According to such a method, the same matter as the above-described matter regarding the glass sheet grinding apparatus according to the present invention applies, and therefore, the same effect as the effect of the device can be obtained.

また、この場合、包囲部を挟んで砥石と反対側の位置に、パージ流体を噴射するパージノズルが配設され、パージ流体が遮蔽板とガラス板との間の間隙に供給されるように構成されていることが好ましい。   Further, in this case, a purge nozzle for injecting a purge fluid is disposed at a position opposite to the grindstone across the surrounding portion, and the purge fluid is supplied to the gap between the shielding plate and the glass plate. It is preferable.

このように、上述した端面研削方法においても、上記供給態様のパージノズルを配設することで、先に述べた端面研削装置におけるパージノズルについての事項と、同一の事項が当てはまり、故に当該装置による作用効果と同一の作用効果を得ることができる。   Thus, also in the end surface grinding method described above, by disposing the purge nozzle of the above supply mode, the same matter as the purge nozzle in the above-described end surface grinding apparatus applies, and therefore the effect of the apparatus The same effect can be obtained.

以上のように、本発明に係るガラス板の研削装置およびその方法によれば、ガラス板の端面研削工程において、研削水がガラス板の平面へ飛散するのが可及的に抑制される。そのため、ガラス板の表面性状を良好なものとして、液晶ディスプレイやプラズマディスプレイ等の各種画像表示機器用の表示素子の高精細化を図ることができる。また、研削液の効率的な回収を図ることができる。   As described above, according to the glass plate grinding apparatus and method therefor according to the present invention, in the end face grinding process of the glass plate, it is possible to suppress as much as possible that the grinding water is scattered on the plane of the glass plate. Therefore, the surface property of the glass plate can be improved, and the display elements for various image display devices such as a liquid crystal display and a plasma display can be made high definition. Moreover, efficient collection | recovery of a grinding fluid can be aimed at.

以下、本発明の実施形態を添付図面を参照して説明する。   Embodiments of the present invention will be described below with reference to the accompanying drawings.

まず、図1に示す平面図に基づいて、本発明の一実施形態に係るガラス板の研削装置の全体構成を説明する。なお、本実施形態では、液晶ディスプレイ用のガラス基板の端面を研削する場合を例にとって説明する。   First, based on the top view shown in FIG. 1, the whole structure of the grinding device of the glass plate which concerns on one Embodiment of this invention is demonstrated. In the present embodiment, a case where the end surface of a glass substrate for a liquid crystal display is ground will be described as an example.

同図に示すように、ガラス基板の端面研削装置1は、成形後の素板ガラスから切り出されたガラス基板2の端面2a(切断面)に対して研削加工を施すための装置であり、水平姿勢で所定の方向に搬送されるガラス基板2の一方の側(又は両方の側)に配設される。ここで、この端面研削装置1は、ガラス基板2の搬送方向の一辺に沿った端面2aを回転を伴って研削する砥石3と、砥石3とガラス基板2との接触部(研削部)4を基準として砥石3の回転方向後方側(図1でいえば、接触部4よりも右側領域)に配設され、接触部4の周辺に向けて研削液(ここでは純水)を供給する研削液供給ノズル5と、後述する遮蔽板6、および、パージノズル7とを備える。また、本実施形態では、上記構成要素(砥石3、研削液供給ノズル5、遮蔽板6、パージノズル7)が略矩形状のハウジング8内に収容されると共に、このハウジング8の一端面に設けた開口部8aにより、ガラス基板2の一部がハウジング8内部に挿通でき、かつ、挿通したガラス基板2の一部に係る端面2aを砥石3の外周面と接触できるように構成されている。   As shown in the figure, the glass substrate end surface grinding apparatus 1 is an apparatus for grinding the end surface 2a (cut surface) of the glass substrate 2 cut out from the green glass after forming, and has a horizontal posture. Are arranged on one side (or both sides) of the glass substrate 2 conveyed in a predetermined direction. Here, the end surface grinding apparatus 1 includes a grindstone 3 that grinds the end surface 2a along one side in the conveyance direction of the glass substrate 2 with rotation, and a contact portion (grinding portion) 4 between the grindstone 3 and the glass substrate 2. As a reference, a grinding fluid that is disposed on the rear side in the rotational direction of the grindstone 3 (in the region on the right side of the contact portion 4 in FIG. 1) and supplies a grinding fluid (pure water here) toward the periphery of the contact portion 4. A supply nozzle 5, a shielding plate 6 and a purge nozzle 7 described later are provided. In the present embodiment, the above-described components (the grindstone 3, the grinding fluid supply nozzle 5, the shielding plate 6, and the purge nozzle 7) are accommodated in a substantially rectangular housing 8 and provided on one end face of the housing 8. The opening 8 a is configured such that a part of the glass substrate 2 can be inserted into the housing 8 and the end surface 2 a related to a part of the inserted glass substrate 2 can be brought into contact with the outer peripheral surface of the grindstone 3.

砥石3は、ガラス基板2の平面に直交する軸と平行な軸まわりに回転するように構成されており、その回転方向は、ガラス基板2の研削部(接触部4)においてガラス基板2の搬送方向と相対する方向(図1中、反時計回りの方向)とされている。なお、研削面となる砥石3の外周面3aは、例えば図4に示すように、略凹部円弧状の断面輪郭形状をなし、ガラス基板2の端面2aの両縁部を一度にR面取りできるように構成されている。   The grindstone 3 is configured to rotate around an axis parallel to an axis orthogonal to the plane of the glass substrate 2, and the rotation direction of the grindstone (contact portion 4) of the glass substrate 2 is to transport the glass substrate 2. The direction is opposite to the direction (counterclockwise direction in FIG. 1). As shown in FIG. 4, for example, the outer peripheral surface 3a of the grindstone 3 serving as a grinding surface has a substantially concave arc-shaped cross-sectional contour so that both edges of the end surface 2a of the glass substrate 2 can be rounded at a time. It is configured.

研削液供給ノズル5は、ガラス基板2と砥石3との接触部4を基準として、砥石3の回転方向後方側から、接触部4に向けて研削液を供給するように構成されている。   The grinding fluid supply nozzle 5 is configured to supply the grinding fluid toward the contact portion 4 from the rear side in the rotation direction of the grinding stone 3 with reference to the contact portion 4 between the glass substrate 2 and the grinding stone 3.

遮蔽板6は、図2に示すように、長手方向に沿って湾曲状、例えば略円弧状(円弧状を含む)に形成された部分を有しており、この円弧状部が接触部4を含む砥石3のガラス基板2側の周囲を包囲する包囲部9となる。詳細には、包囲部9は、ガラス基板2の平面を平面視した状態では、図1に示すように、砥石3の外周面3aに沿った略円弧状をなし、また、その長手方向に沿って幅寸法一定のスリット10を有している。そして、このスリット10にガラス基板2の一部を挿通し、挿通部分の端面2aを砥石3と接触させた状態では、図4に示すように、包囲部9が接触部4よりもガラス基板2の平面中央側の位置に配置される。また、包囲部9の一端が、接触部4を基準として砥石3の回転方向前方側(図1中、接触部4よりも左側領域)でガラス基板2の端面2aと交差して延びるように、遮蔽板6がハウジング8に固定されている。上記構成の包囲部9は、ガラス基板2の表裏双方の平面側に配置される。なお、スリット10の幅寸法に関し、上述の如くガラス基板2が挿通できる程度の大きさは少なくとも必要であり、できれば、研削時のガラス基板2のバタつき(板厚方向への振幅)を考慮して当該幅寸法を設定するのが好ましい。   As shown in FIG. 2, the shielding plate 6 has a portion formed in a curved shape along the longitudinal direction, for example, a substantially arc shape (including an arc shape). It becomes the surrounding part 9 which surrounds the circumference | surroundings of the glass substrate 2 side of the grindstone 3 containing. Specifically, the surrounding portion 9 has a substantially arc shape along the outer peripheral surface 3a of the grindstone 3 as shown in FIG. 1 in a state where the plane of the glass substrate 2 is viewed in plan view, and is along the longitudinal direction thereof. And a slit 10 having a constant width dimension. Then, in a state in which a part of the glass substrate 2 is inserted into the slit 10 and the end surface 2a of the insertion portion is in contact with the grindstone 3, the surrounding portion 9 is more glass substrate 2 than the contact portion 4 as shown in FIG. It is arrange | positioned in the position of the plane center side. Further, one end of the surrounding portion 9 extends so as to intersect with the end surface 2a of the glass substrate 2 on the front side in the rotation direction of the grindstone 3 with respect to the contact portion 4 (a region on the left side of the contact portion 4 in FIG. 1). A shielding plate 6 is fixed to the housing 8. The surrounding portion 9 having the above-described configuration is disposed on both the front and back plane sides of the glass substrate 2. In addition, regarding the width dimension of the slit 10, it is necessary to have at least a size that allows the glass substrate 2 to be inserted as described above. If possible, the flutter of the glass substrate 2 during grinding (amplitude in the plate thickness direction) is taken into consideration. It is preferable to set the width dimension.

パージノズル7は、本実施形態では、図3に示すように、複数のノズル開口部11を集約してなるノズルユニットとして構成されており、遮蔽板6を挟んで砥石3とは反対側の位置に配設されている。ここで、パージノズル7は、遮蔽板6と同様、ガラス基板2を挿通するためのスリットを有し、このスリットを間に挟んで対向する一対の斜面12,12には、各斜面12,12の長手方向に沿って複数のノズル開口部11がそれぞれ一列に配置されている。また、これらノズル開口部11は、一律に同じ方向を指向するように配置されている。そのため、パージノズル7の斜面12,12間(スリット)にガラス基板2の一部を挿通し、その端面2aを砥石3に接触させた状態では、これら複数のノズル開口部11から噴射されたパージ水(例えば純水)13が、当該複数のノズル開口部11とガラス基板2の平面との間にカーテン状の水壁を形成するようになっている。なお、パージノズル7に設けられたスリットの幅寸法に関しては、遮蔽板6のスリット10と同様、挿通されるガラス基板2の厚みに応じて設定されるのがよく、好ましくは、研削時のガラス基板2のバタつき度合いをも考慮して設定されるのがよい。   In the present embodiment, as shown in FIG. 3, the purge nozzle 7 is configured as a nozzle unit formed by integrating a plurality of nozzle openings 11, and is located at a position opposite to the grindstone 3 with the shielding plate 6 interposed therebetween. It is arranged. Here, similarly to the shielding plate 6, the purge nozzle 7 has a slit for inserting the glass substrate 2, and a pair of inclined surfaces 12, 12 facing each other with the slit interposed therebetween is provided with each of the inclined surfaces 12, 12. A plurality of nozzle openings 11 are arranged in a line along the longitudinal direction. Further, these nozzle openings 11 are arranged so as to be uniformly oriented in the same direction. Therefore, when a part of the glass substrate 2 is inserted between the slopes 12 and 12 (slits) of the purge nozzle 7 and the end surface 2a is in contact with the grindstone 3, the purge water sprayed from the plurality of nozzle openings 11 is used. (For example, pure water) 13 forms a curtain-like water wall between the plurality of nozzle openings 11 and the plane of the glass substrate 2. The width dimension of the slit provided in the purge nozzle 7 should be set in accordance with the thickness of the glass substrate 2 to be inserted, and preferably the glass substrate at the time of grinding, like the slit 10 of the shielding plate 6. It is desirable to set the degree of flutter of 2 in consideration.

ここで、パージノズル7から吐出されるパージ水13の鉛直方向における指向態様について詳述すると、図5に示すように、各ノズル開口部11は、当該ノズル開口部11から噴射されたパージ水13が、砥石3と接触状態にあるガラス基板2と遮蔽板6との間隙に供給されるように指向されている。ここで、好ましくは、ノズル開口部11から噴射されたパージ水13のガラス基板2の平面に対する入射角θが10度以上45度以下となるように、より好ましくは、入射角θが25度以上35度以下となるように、パージノズル7の取り付け角度、もしくはノズル開口部11の形成角度が設定される。これは、パージ水13のガラス基板2平面への着地点が砥石3の側に近いほど、研削液の押し戻し作用は高い一方で、ガラス基板2との干渉を回避するには、両者間(ガラス基板2とパージノズル7)の鉛直方向隙間をなるべく大きく取るほうがよい、との理由に基づく。逆に言えば、上述の理由から、パージノズル7のノズル開口部11は、パージ水13が包囲部9とガラス基板2との間の間隙を通ってガラス基板2の平面に達するように、その設置角度が設定されていることが好ましい。 Here, the directing mode in the vertical direction of the purge water 13 discharged from the purge nozzle 7 will be described in detail. As shown in FIG. 5, each nozzle opening 11 has the purge water 13 injected from the nozzle opening 11. The glass substrate 2 and the shielding plate 6 in contact with the grindstone 3 are directed to be supplied to the gap. Here, preferably, the incident angle θ 1 of the purge water 13 sprayed from the nozzle opening 11 with respect to the plane of the glass substrate 2 is 10 degrees or more and 45 degrees or less, and more preferably, the incident angle θ 1 is 25. The attachment angle of the purge nozzle 7 or the formation angle of the nozzle opening 11 is set so that the angle is 35 degrees or more and 35 degrees or less. This is because the closer the landing point of the purge water 13 to the plane of the glass substrate 2 is to the grindstone 3 side, the higher the action of pushing back the grinding fluid. This is based on the reason that the vertical gap between the substrate 2 and the purge nozzle 7) should be as large as possible. Conversely, for the reasons described above, the nozzle opening 11 of the purge nozzle 7 is installed so that the purge water 13 reaches the plane of the glass substrate 2 through the gap between the surrounding portion 9 and the glass substrate 2. It is preferable that an angle is set.

また、ガラス基板2の平面を平面視した状態でパージ水13の指向態様を詳述すると、図6に示すように、各ノズル開口部11は、当該ノズル開口部11から噴射されたパージ水13が砥石3と接触状態にあるガラス基板2の端面2aのうち未研削の部分を斜めに横切って砥石3に向かうよう指向されている。言い換えると、ノズル開口部11から噴射されたパージ水13の噴出方向と、砥石3の接触部4における接線方向V(回転方向前方側。図6を参照)とのなす角θが90度を越え180度未満となるようにノズル開口部11の指向角度が設定されている。 Further, the directing mode of the purge water 13 in a state where the plane of the glass substrate 2 is viewed in plan will be described in detail. As shown in FIG. 6, each nozzle opening portion 11 is purged water 13 ejected from the nozzle opening portion 11. Is oriented so as to cross the unground portion of the end surface 2a of the glass substrate 2 in contact with the grindstone 3 obliquely toward the grindstone 3. In other words, the angle θ 2 formed by the ejection direction of the purge water 13 ejected from the nozzle opening 11 and the tangential direction V at the contact portion 4 of the grindstone 3 (the front side in the rotational direction, see FIG. 6) is 90 degrees. The directivity angle of the nozzle opening 11 is set so as to be more than 180 degrees.

以下、上記構成の装置を用いたガラス基板の研削方法につき、図7および図8を参照して説明する。なお、図7は遮蔽板6の作用に焦点を当てて当該作用を説明するための要部平面図であり、図8はパージノズル7の作用に焦点を当てて当該作用を説明するための要部平面図を示している。   Hereinafter, a glass substrate grinding method using the apparatus having the above-described configuration will be described with reference to FIGS. 7 is a plan view of a main part for explaining the action focusing on the action of the shielding plate 6, and FIG. 8 is a main part for explaining the action focusing on the action of the purge nozzle 7. A plan view is shown.

まず、遮蔽板6の作用について説明する。図7に示すように、研削時、接触部4の近傍に向けて供給された研削液(同図中、太矢印で示されている)は、接触部4に到った後、その周囲に向けて飛散する。この際、接触部4は、遮蔽板6に設けた包囲部9によって包囲されているため、接触部4の周囲に飛散した研削液は、包囲部9に沿って、接触部4よりも砥石3の回転方向前方側でガラス基板2の端面2aとの交差位置を超える位置まで誘導される。すなわち、接触部4から砥石3の回転方向前方側において、研削液は包囲部9に沿って、ガラス基板2の平面中央側から離れる方向に流れ、ガラス基板2の端面2aを超える位置まで誘導される。これにより、接触部4で飛散した研削液がガラス基板2の平面中央側に流れて、平面中央側に付着することが効果的に防止される。また、研削液は包囲部9によって流れの方向性を与えられるため、研削液が効率的に回収される。   First, the operation of the shielding plate 6 will be described. As shown in FIG. 7, at the time of grinding, the grinding liquid (indicated by a thick arrow in the figure) supplied toward the vicinity of the contact portion 4 reaches the contact portion 4 and then around it. Scattered towards. At this time, since the contact portion 4 is surrounded by the surrounding portion 9 provided on the shielding plate 6, the grinding fluid scattered around the contact portion 4 is more along the surrounding portion 9 than the contact portion 4. Is guided to a position exceeding the crossing position with the end surface 2a of the glass substrate 2 on the front side in the rotation direction. That is, on the front side in the rotation direction of the grindstone 3 from the contact portion 4, the grinding fluid flows in a direction away from the plane center side of the glass substrate 2 along the surrounding portion 9 and is guided to a position exceeding the end surface 2 a of the glass substrate 2. The Thereby, it is effectively prevented that the grinding fluid scattered at the contact portion 4 flows to the plane center side of the glass substrate 2 and adheres to the plane center side. In addition, since the grinding fluid is given flow direction by the surrounding portion 9, the grinding fluid is efficiently recovered.

また、本実施形態のように、包囲部9を砥石3の外周面3aに沿って略円弧状に形成していれば、包囲部9に到達した研削液を砥石3の回転方向に沿って円滑に誘導して、上記の効果を高めることができる。また、当該形状とすることで、ガラス基板2を平面視した状態では、包囲部9と砥石3との間に半径方向の対向間隔が略一定な流路が形成され、これによっても研削液の送出がスムーズに行われる。   Moreover, if the surrounding part 9 is formed in the substantially circular arc shape along the outer peripheral surface 3a of the grindstone 3 like this embodiment, the grinding fluid which reached the surrounding part 9 will be smoothly along the rotation direction of the grindstone 3. The above effects can be enhanced. Further, by adopting such a shape, in a state where the glass substrate 2 is viewed in plan, a flow path having a substantially constant radial distance is formed between the surrounding portion 9 and the grindstone 3, and this also causes the grinding liquid to flow. Sending is performed smoothly.

次に、パージノズル7の作用について説明すると、図8に示すように、パージノズル7(のノズル開口部)から噴射されたパージ水13は、接触部4から見て斜め前方側から遮蔽板6とガラス基板2との隙間に供給される。そのため、包囲部9とガラス基板2との間の間隙を通じてガラス基板2の平面に侵入しようとする研削液は、パージ水13により砥石3の側に押し戻される。また、接触部4から砥石3の回転方向前方側へ飛散した研削液は当該飛散方向への勢いを弱められると共に、その飛散方向(流動方向)を変え、ガラス基板2から遠ざかる向きに誘導される。加えて、包囲部9によりガラス基板2から遠ざかる向きに誘導されている研削液に対しては、包囲部9による誘導を促進する向きに押し込むように作用する。以上より、遮蔽板6とガラス基板2との間隙を通じて研削液がガラス基板2の平面中央側へ侵入するのを防ぐと共に、この遮蔽板6とガラス基板2との隙間を通じて研削液がハウジング8の外部へ漏れ出すのを防ぐことができる。   Next, the operation of the purge nozzle 7 will be described. As shown in FIG. 8, the purge water 13 injected from the purge nozzle 7 (nozzle opening thereof) is seen from the contact portion 4 from the oblique front side and the shielding plate 6 and the glass. It is supplied to the gap with the substrate 2. Therefore, the grinding fluid that tries to enter the plane of the glass substrate 2 through the gap between the surrounding portion 9 and the glass substrate 2 is pushed back toward the grindstone 3 by the purge water 13. In addition, the grinding fluid scattered from the contact portion 4 to the front side in the rotation direction of the grindstone 3 is weakened in the direction of the scattering direction, and is changed in the scattering direction (flow direction) to be guided away from the glass substrate 2. . In addition, it acts to push the grinding liquid guided in the direction away from the glass substrate 2 by the surrounding portion 9 in the direction of promoting the guidance by the surrounding portion 9. As described above, the grinding liquid is prevented from entering the center of the plane of the glass substrate 2 through the gap between the shielding plate 6 and the glass substrate 2, and the grinding liquid is passed through the gap between the shielding plate 6 and the glass substrate 2. It is possible to prevent leakage to the outside.

また、本実施形態のように、砥石3や研削液供給ノズル5を収容するハウジング8を設けることで、ガラス基板2の挿通側となる開口部8aを除き、砥石3がハウジング8で覆われる。よって、上記遮蔽板6による遮蔽作用や、上記パージノズル7によるパージ作用(排出作用)と相乗的に作用し合って、ガラス基板2の平面中央側への研削液の漏れ出しだけでなく、ハウジング8外への研削液の漏れ出しも可及的に防止される。また、包囲部9によりガラス基板2から遠ざける向きに逃がした研削液を漏れなく回収することができる。これにより、例えば研削工程後の検査工程にて検出が困難な微小なガラスパーティクルや砥粒残渣がガラス板の平面に残存付着している可能性をできる限り零に近づけて、上記ディスプレイ用パネルの高精細化を図ることができる。   Further, as in the present embodiment, by providing the housing 8 that accommodates the grindstone 3 and the grinding fluid supply nozzle 5, the grindstone 3 is covered with the housing 8 except for the opening 8 a that is the insertion side of the glass substrate 2. Accordingly, the shielding action by the shielding plate 6 and the purging action (discharge action) by the purge nozzle 7 synergistically interact with each other, and not only the leakage of the grinding liquid to the plane center side of the glass substrate 2 but also the housing 8. Leakage of the grinding fluid to the outside is prevented as much as possible. Further, the grinding liquid that has escaped in the direction away from the glass substrate 2 by the surrounding portion 9 can be collected without leakage. As a result, for example, the possibility of minute glass particles or abrasive grain residues that are difficult to detect in the inspection process after the grinding process remaining on the flat surface of the glass plate as close to zero as possible is achieved. High definition can be achieved.

以上、本発明の一実施形態を説明したが、本発明に係るガラス板の端面研削装置もしくはその方法は、本発明の範囲内において任意に変更が可能であることはもちろんである。   As mentioned above, although one Embodiment of this invention was described, it cannot be overemphasized that the end surface grinding apparatus or method of the glass plate which concerns on this invention can be changed arbitrarily within the scope of the present invention.

例えば上記実施形態では包囲部9の形状を部分的に略円弧状に湾曲させた形状としたが、特にこれに限ることはない。包囲部9としての機能を有する限りにおいて、その形状は任意である。例えば図示は省略するが、包囲部9は円弧状以外の湾曲形状を有するものでもよく、また、フラットな面を部分的に含むものであってもよい。あるいは、上記長手方向に沿った形状のみならず、これと直交する向き(ガラス基板2の厚み方向)に沿って湾曲する形状をなすものでもよい。   For example, in the above-described embodiment, the shape of the surrounding portion 9 is partially curved in a substantially arc shape, but is not particularly limited thereto. As long as it has a function as the surrounding part 9, the shape is arbitrary. For example, although illustration is omitted, the surrounding portion 9 may have a curved shape other than an arc shape, or may partially include a flat surface. Or not only the shape along the said longitudinal direction but the shape which curves along the direction (thickness direction of the glass substrate 2) orthogonal to this may be made.

また、パージノズル7に形成されるノズル開口部11の配列態様に関し、全てのノズル開口部11がガラス基板2上に配置されている必要はなく、並列された複数のノズル開口部11の一部がガラス基板2の端面2aを境として砥石3の側に配置されていてもよい。また、上記実施形態では、ガラス基板2の両面側に複数のノズル開口部11を1列に配置したが、2列以上の複列とすることも可能である。なお、ノズル開口部11の形状に関しても、丸穴形状に限ることなく、例えばスリット状にしてもよい。   Further, regarding the arrangement mode of the nozzle openings 11 formed in the purge nozzle 7, it is not necessary that all the nozzle openings 11 are arranged on the glass substrate 2, and some of the plurality of nozzle openings 11 arranged in parallel are arranged. The glass substrate 2 may be disposed on the grindstone 3 side with the end surface 2a as a boundary. Moreover, in the said embodiment, although the several nozzle opening part 11 was arrange | positioned in 1 row on the both surfaces side of the glass substrate 2, it is also possible to make it 2 or more rows. The shape of the nozzle opening 11 is not limited to the round hole shape, and may be a slit shape, for example.

また、上記実施形態ではそれぞれ別体に形成し、配置した遮蔽板6とパージノズル7とを一体化した構成を採ることも可能である。この場合、図示は省略するが、遮蔽板6に設けられたスリット10の砥石3側の角部を面取りし、このスリット長手方向に沿った面取り部に例えば図3に示す複数のノズル開口部11を並列配置した構成が上記一体化(ユニット化)の一例として挙げられる。かかる構成によれば、ハウジング8への取り付け部品を1部品に集約できるため、ハウジング8への取り付け精度が向上する。もちろん、遮蔽板6やパージノズル7をそれぞれハウジング8と一体化することもできる。   Moreover, in the said embodiment, it is also possible to take the structure which formed separately the shield plate 6 and the purge nozzle 7 which were formed separately and arrange | positioned. In this case, although not shown in the figure, the corners on the grindstone 3 side of the slit 10 provided in the shielding plate 6 are chamfered, and a plurality of nozzle openings 11 shown in FIG. 3 are chamfered along the slit longitudinal direction, for example. A configuration in which these are arranged in parallel is an example of the integration (unitization). According to such a configuration, the attachment parts to the housing 8 can be integrated into one part, so that the attachment accuracy to the housing 8 is improved. Of course, the shielding plate 6 and the purge nozzle 7 can be integrated with the housing 8, respectively.

ここで、図9は、上記ユニット化の他の構成例を示し、具体的には、遮蔽板と研削液供給ノズル、およびパージノズルをユニット化した研削液飛散防止ユニット20の斜視図を示している。また、図10は、上記研削液飛散防止ユニット20を組み込んだ端面研削装置の要部平面図を示している。この研削液飛散防止ユニット20は図2に示す遮蔽板6を一体に有する略箱状に形成されており、その側面に設けられた包囲部9’がスリット10’により上下に分割された形態をなす。そして、上記実施形態と同様、このスリット10’にガラス基板2の一部を挿通し、挿通部分の端面2aを砥石3と接触させた状態では、図10に示すように、包囲部9’の一端が、接触部4を基準として砥石3の回転方向前方側(図10中、接触部4よりも左側領域)でガラス基板2の端面2aと交差して延びるように、研削液飛散防止ユニット20が例えば図1に示す形状のハウジング8に固定されている。また、包囲部9’を挟んで砥石3とは反対の側には複数のノズル開口部11’が配置されており(図10を参照)、研削時、ガラス基板2の平面に向けてパージ水13を噴射できるように研削液飛散防止ユニット20内に配置されている。なお、この図示例では、研削液飛散防止ユニット20の上部に研削液供給ノズル5’が一体に配設されているが、代わりに下部に研削液供給ノズル5’を配設することもでき、あるいは、上部と下部の双方にそれぞれ配設することもできる。   Here, FIG. 9 shows another configuration example of the unitization, and specifically shows a perspective view of the grinding fluid scattering prevention unit 20 in which the shielding plate, the grinding fluid supply nozzle, and the purge nozzle are unitized. . FIG. 10 is a plan view of the main part of an end surface grinding apparatus in which the grinding fluid scattering prevention unit 20 is incorporated. The grinding fluid scattering prevention unit 20 is formed in a substantially box shape integrally including the shielding plate 6 shown in FIG. 2, and a surrounding portion 9 ′ provided on a side surface thereof is vertically divided by a slit 10 ′. Eggplant. And like the said embodiment, in the state which penetrated a part of glass substrate 2 to this slit 10 ', and contacted the end surface 2a of the penetration part with the grindstone 3, as shown in FIG. The grinding fluid scattering prevention unit 20 has one end extending so as to intersect with the end surface 2a of the glass substrate 2 on the front side in the rotation direction of the grindstone 3 with respect to the contact portion 4 (a region on the left side of the contact portion 4 in FIG. 10). Is fixed to the housing 8 having the shape shown in FIG. Further, a plurality of nozzle openings 11 ′ are arranged on the opposite side of the surrounding portion 9 ′ from the grindstone 3 (see FIG. 10), and purge water is directed toward the plane of the glass substrate 2 during grinding. It is arrange | positioned in the grinding fluid scattering prevention unit 20 so that 13 can be injected. In the illustrated example, the grinding fluid supply nozzle 5 ′ is integrally disposed on the upper portion of the grinding fluid scattering prevention unit 20, but instead, the grinding fluid supply nozzle 5 ′ can be disposed on the lower portion. Alternatively, it can be arranged on both the upper part and the lower part.

このように構成することで、砥石3の交換時には、研削液飛散防止ユニット20を脱着するのみで砥石3の交換が可能となる。加えて、研削液供給ノズル5’や包囲部9’、およびパージノズルのノズル開口部11’相互間の位置関係を改めて調整し直す必要がないので、砥石3の交換に要する時間が短縮される。   With this configuration, when the grindstone 3 is replaced, it is possible to replace the grindstone 3 only by detaching the grinding fluid scattering prevention unit 20. In addition, since it is not necessary to readjust the positional relationship among the grinding fluid supply nozzle 5 ′, the surrounding portion 9 ′, and the nozzle opening 11 ′ of the purge nozzle, the time required for exchanging the grindstone 3 is shortened.

また、上記実施形態では、ガラス基板2の上下両面側に遮蔽板6やパージノズル7(ノズル開口部11)を配置した場合を例示したが、必ずしも両面側に配置する必要はなく、例えばガラス基板2の上面側にのみ遮蔽板6とパージノズル7の一方または双方を配置してもよい。また、この際、ガラス基板2の一面側にのみ遮蔽板6(包囲部9)とパージノズル7とが配置されるように、両構成要素9,7をユニット化した構成を採ることも可能である。   Moreover, although the case where the shielding board 6 and the purge nozzle 7 (nozzle opening part 11) are arrange | positioned on the upper and lower both surfaces side of the glass substrate 2 was illustrated in the said embodiment, it is not necessary to necessarily arrange | position on both surfaces side, for example, the glass substrate 2 One or both of the shielding plate 6 and the purge nozzle 7 may be disposed only on the upper surface side. At this time, it is also possible to adopt a configuration in which both components 9 and 7 are unitized so that the shielding plate 6 (enclosure 9) and the purge nozzle 7 are arranged only on one side of the glass substrate 2. .

また、以上の説明に係るガラス基板の端面研削装置1は、ガラス基板2の両方の側に配置されているが、素板ガラスから切り出されたガラス基板2の4辺に係る端面全てを研削する場合には、例えば、ガラス基板2の搬送ラインの相対的に上流側となる位置および下流側となる位置に、当該搬送方向に直交する向きにそれぞれ2台の端面研削装置1を対向配置した構成を採ることも可能である。また、ガラス基板2のサイズ変更等に同一の端面研削装置1で対応できるよう、端面研削装置1を搬送方向に直交する向きに移動可能に構成することも可能である。あるいは、砥石3など特定の構成要素のみをハウジング8内で搬送直交方向に相対移動可能に構成することも可能である。   Moreover, although the end surface grinding apparatus 1 of the glass substrate which concerns on the above description is arrange | positioned at the both sides of the glass substrate 2, when grinding all the end surfaces which concern on the 4 sides of the glass substrate 2 cut out from the base plate glass For example, a configuration in which two end grinding devices 1 are arranged opposite to each other in a direction orthogonal to the transport direction at a position on the relatively upstream side and a position on the downstream side of the transport line of the glass substrate 2. It is also possible to take. Further, the end face grinding apparatus 1 can be configured to be movable in a direction orthogonal to the transport direction so that the same end face grinding apparatus 1 can cope with a size change of the glass substrate 2 or the like. Alternatively, only specific components such as the grindstone 3 can be configured to be relatively movable in the conveyance orthogonal direction within the housing 8.

なお、搬送手段は、ここでは図示は省略するが、ベルトコンベア等の搬送手段により構成されていてもよい。また、この際、真空吸着等によりガラス基板2を搬送手段を構成する要素(例えばベルト)の所定位置に固定するように構成されていてもよい。もちろん、ガラス基板2と砥石3との間で相対移動がなされる限りにおいて、その構成は任意であり、例えば、ガラス基板2を固定し、砥石3を含むガラス板の端面研削装置1をガラス基板2の配列方向に沿って移動可能に構成することも可能である。   In addition, although illustration is abbreviate | omitted here, the conveyance means may be comprised by conveyance means, such as a belt conveyor. Further, at this time, the glass substrate 2 may be configured to be fixed at a predetermined position of an element (for example, a belt) constituting the conveying means by vacuum suction or the like. Of course, as long as the relative movement between the glass substrate 2 and the grindstone 3 is performed, the configuration thereof is arbitrary. For example, the glass substrate 2 is fixed, and the end face grinding apparatus 1 for the glass plate including the grindstone 3 is used as the glass substrate. It is also possible to configure so as to be movable along the two arrangement directions.

以上、本発明を液晶用ディスプレイ用のガラス基板の研削工程に適用する場合を例にとって説明したが、本発明に係るガラス板の研削装置およびその方法は、液晶ディスプレイ用のガラス基板の他に、プラズマディスプレイ、エレクトロルミネッセンスディスプレイ、フィールドエミッションディスプレイ等の各種画像表示機器用のガラス基板や、各種電子表示機能素子や薄膜を形成するための基材として用いられるガラス基板のように、高い面精度が要求されるガラス板の端面を研削するに際しても好適に利用することができる。   As described above, the case where the present invention is applied to a grinding process of a glass substrate for a liquid crystal display has been described as an example. However, the glass plate grinding apparatus and method according to the present invention include a glass substrate for a liquid crystal display, High surface accuracy is required, such as glass substrates for various image display devices such as plasma displays, electroluminescence displays, field emission displays, and glass substrates used as substrates for forming various electronic display functional elements and thin films. It can also be suitably used when grinding the end face of the glass plate to be used.

本発明の一実施形態に係るガラス基板の研削装置の平面図である。It is a top view of the grinding device of the glass substrate concerning one embodiment of the present invention. ガラス基板の研削装置を構成する遮蔽板の斜視図である。It is a perspective view of the shielding board which comprises the grinding device of a glass substrate. ガラス基板の研削装置を構成するパージノズルの要部斜視図である。It is a principal part perspective view of the purge nozzle which comprises the grinding device of a glass substrate. 図1に示すガラス基板の研削装置の要部A−A断面図である。It is principal part AA sectional drawing of the grinding device of the glass substrate shown in FIG. パージノズルの鉛直方向での指向態様を説明する研削装置の要部拡大断面図である。It is a principal part expanded sectional view of the grinding device explaining the directivity aspect in the perpendicular direction of a purge nozzle. ガラス基板を平面視した状態におけるパージノズルの指向態様を説明する研削装置の要部拡大平面図である。It is a principal part enlarged plan view of a grinding device explaining the directing mode of a purge nozzle in the state where planarly viewed a glass substrate. 遮蔽板による作用を説明するための研削装置の要部平面図である。It is a principal part top view of the grinding device for demonstrating the effect | action by a shielding board. パージノズルによる作用を説明するための研削装置の要部平面図である。It is a principal part top view of the grinding device for demonstrating the effect | action by a purge nozzle. 遮蔽板と研削液供給ノズル、およびパージノズルとを一体に有する研削液飛散防止ユニットの斜視図である。It is a perspective view of the grinding fluid scattering prevention unit which has a shielding board, the grinding fluid supply nozzle, and the purge nozzle integrally. 研削液飛散防止ユニットを有する端面研削装置の要部平面図である。It is a principal part top view of the end surface grinding apparatus which has a grinding fluid scattering prevention unit.

符号の説明Explanation of symbols

1 研削装置
2 ガラス基板
3 砥石
4 接触部
5 研削液供給ノズル
6 遮蔽板
7 パージノズル
9 包囲部
10 スリット
11 ノズル開口部
13 パージ水
θ1 入射角
θ2 パージ水の噴射方向と端面の接線方向とがなす角
DESCRIPTION OF SYMBOLS 1 Grinding device 2 Glass substrate 3 Grinding wheel 4 Contact part 5 Grinding liquid supply nozzle 6 Shielding plate 7 Purge nozzle 9 Enclosing part 10 Slit 11 Nozzle opening 13 Purge water θ1 Incident angle θ2 The jet direction of purge water and the tangential direction of the end surface Corner

Claims (12)

回転させつつガラス板の端面に接触させることで該端面を研削する砥石と、該砥石と前記ガラス板の端面との接触部に研削液を供給する研削液供給部と、前記接触部に供給された研削液から前記ガラス板の平面を遮蔽するための遮蔽板とを備えたガラス板の端面研削装置において、
前記遮蔽板は、前記接触部を前記ガラス板の平面中央側から包囲する包囲部を有し、該包囲部の一端は、前記接触部よりも前記砥石の回転方向前方側で前記ガラス板の端面と交差して延びていることを特徴とするガラス板の端面研削装置。
A grindstone that grinds the end surface by contacting the end surface of the glass plate while rotating, a grinding fluid supply unit that supplies a grinding fluid to a contact portion between the grindstone and the end surface of the glass plate, and is supplied to the contact portion In the glass plate end surface grinding device comprising a shielding plate for shielding the flat surface of the glass plate from the ground grinding liquid,
The shielding plate includes an enclosing portion that surrounds the contact portion from the plane center side of the glass plate, and one end of the enclosing portion is an end surface of the glass plate on the front side in the rotation direction of the grindstone with respect to the contact portion. An end surface grinding apparatus for a glass plate, characterized in that the glass plate end surface is extended.
前記包囲部は、前記ガラス板の平面に対する平面視で、前記砥石の外周面に沿った湾曲形状を有している請求項1に記載のガラス板の端面研削装置。   The said surrounding part is an end surface grinding apparatus of the glass plate of Claim 1 which has the curved shape along the outer peripheral surface of the said grindstone by planar view with respect to the plane of the said glass plate. 前記包囲部は、前記ガラス板の両面側に位置している請求項1又は2に記載のガラス板の端面研削装置。   The said surrounding part is an end surface grinding apparatus of the glass plate of Claim 1 or 2 located in the both surfaces side of the said glass plate. 前記包囲部は、前記ガラス板の前記端面を含む一部を挿通するためのスリットを有している請求項3に記載のガラス板の端面研削装置。   The said surrounding part is an end surface grinding apparatus of the glass plate of Claim 3 which has a slit for inserting a part including the said end surface of the said glass plate. 前記包囲部を挟んで前記砥石と反対側の位置に、パージ流体を噴射するパージノズルが配設され、前記パージ流体が前記遮蔽板と前記ガラス板との間の間隙に供給されるように構成されている請求項1から4の何れか1項に記載のガラス板の端面研削装置。   A purge nozzle for injecting a purge fluid is disposed at a position opposite to the grindstone across the surrounding portion, and the purge fluid is configured to be supplied to a gap between the shielding plate and the glass plate. The glass sheet end surface grinding apparatus according to any one of claims 1 to 4. 前記パージノズルは、前記パージ流体が前記包囲部と前記ガラス板との間の間隙を通って前記ガラス板に達するように、その設置角度が設定されている請求項5に記載のガラス板の端面研削装置。   6. The glass plate end surface grinding according to claim 5, wherein the purge nozzle is set so that the purge fluid reaches the glass plate through a gap between the surrounding portion and the glass plate. apparatus. 前記パージノズルが、前記ガラス板の両面側にそれぞれ配置されている請求項5に記載のガラス板の端面研削装置。   The glass plate end face grinding device according to claim 5, wherein the purge nozzles are respectively disposed on both sides of the glass plate. 少なくとも前記砥石と前記研削液供給部とを収容するハウジングをさらに備え、該ハウジングは、所定の端面に、前記ガラス板の一部を挿通し、該ガラス板の前記端面を前記砥石に接触可能とするための開口部を有している請求項1から7の何れか1項に記載のガラス板の端面研削装置。   The housing further includes at least the grindstone and the grinding fluid supply unit, and the housing is capable of inserting a part of the glass plate into a predetermined end surface and allowing the end surface of the glass plate to contact the grindstone. The end surface grinding apparatus of the glass plate of any one of Claim 1 to 7 which has the opening part for performing. 前記ガラス板を水平姿勢にして加工するように構成されている請求項1から8の何れか1項に記載のガラス板の端面研削装置。   The end face grinding device for a glass plate according to any one of claims 1 to 8, wherein the glass plate is processed so as to be in a horizontal posture. 前記包囲部を有する遮蔽板と前記パージノズルとがユニット化されている請求項5に記載のガラス板の端面研削装置。   The glass plate end face grinding device according to claim 5, wherein the shielding plate having the surrounding portion and the purge nozzle are unitized. 砥石を回転させながらガラス板の端面に接触させることで該端面の研削を行う方法であって、前記砥石と前記ガラス板の前記端面との接触部に研削液を供給すると共に、前記接触部に供給された前記研削液から前記ガラス板の平面を遮蔽するための遮蔽板を配設した状態で前記端面の研削を行うガラス板の端面研削方法において、
前記遮蔽板は、前記接触部を前記ガラス板の平面中央側から包囲する包囲部を有し、該包囲部の一端は、前記接触部よりも前記砥石の回転方向前方側で前記端面と交差して延びていることを特徴とするガラス板の端面研削方法。
A method of grinding the end face by contacting the end face of the glass plate while rotating the grindstone, supplying a grinding liquid to a contact portion between the grindstone and the end face of the glass plate, and supplying the contact portion to the contact portion In the end surface grinding method of the glass plate for grinding the end surface in a state where a shielding plate for shielding the flat surface of the glass plate is disposed from the supplied grinding liquid,
The shielding plate has an enclosing portion that surrounds the contact portion from the plane center side of the glass plate, and one end of the enclosing portion intersects the end surface on the front side in the rotation direction of the grindstone from the contact portion. A method for grinding an end face of a glass plate, characterized by being extended.
前記包囲部を挟んで前記砥石と反対側の位置に、パージ流体を噴射するパージノズルが配設され、前記パージ流体が前記遮蔽板と前記ガラス板との間の間隙に供給されるように構成されている請求項11に記載のガラス板の端面研削方法。   A purge nozzle for injecting a purge fluid is disposed at a position opposite to the grindstone across the surrounding portion, and the purge fluid is configured to be supplied to a gap between the shielding plate and the glass plate. The method for grinding an end face of a glass plate according to claim 11.
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