JP2008184380A - Ultrasonic cleaning apparatus utilizing resonance - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning apparatus capable of eliminating finer contamination sources through utilizing resonance, which can maximize the efficiency of a cleaning apparatus. <P>SOLUTION: The ultrasonic cleaning apparatus includes: for eliminating foreign materials adhered to the surface of glass, an air supplying part for ejecting air to the surface of the glass through a slot shaped air ejecting opening by receiving air from a blower; an ultrasonic generator for applying oscillation to the ejected air by generating an ultrasonic wave on the air ejected from the air supplying part; an ionizer for preventing static electricity between the glass and the foreign materials from generating when eliminating the foreign materials adhered to the glass by ejecting the air having the oscillation; and an air suction part for sucking the air ejected from the air supplying part and the foreign materials eliminated by the air by a discharging device to discharge through the air suction opening. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an ultrasonic cleaning device for removing foreign substances adhering to the glass surface of a flat panel display using ultrasonic waves, and more specifically, an ultrasonic generator for generating ultrasonic waves at both sides at a constant angle. The ultrasonic wave can be maximized by generating an ultrasonic wave from the ultrasonic wave generators installed on both sides and concentrating the ultrasonic wave at a single point. The bottom surface of the cleaning device is concentrated at one point and spread over the entire bottom surface of the cleaning device, and the entire bottom surface of the cleaning device generates ultrasonic waves to generate ultrasonic waves on the flat panel display glass. The present invention relates to an ultrasonic cleaning apparatus using resonance that can be maximized.

  In general, the manufacturing process of a flat panel display (FPD) is not only particles floating in the FAB, but also contaminants such as organic matter, metal ions and oxides, contamination from equipment, and reactions during the process. Many contaminants, such as contamination by products or products, adhere to the glass surface for flat panel displays, but if these contaminants are not removed, many process steps can be taken because they can cause product failure. The glass surface is kept clean as it passes. However, as the circuit becomes finer and the elements become extremely highly integrated, the very small contamination source of about 0.1 μm, which has not been considered very important in the past, will greatly affect the performance of the product. The importance of cleaning techniques for removal is also increasing day by day.

  As the cleaning technique as described above, an ultrasonic cleaning apparatus that removes contaminants attached to the glass surface by applying ultrasonic waves to the jetted air has been used. Such an ultrasonic cleaning device can be classified into an ultrasonic cleaning device and a megasonic cleaning device according to the frequency of the sound wave used.

  However, the conventional ultrasonic cleaning apparatus using ultrasonic waves is formed by installing the ultrasonic generator vertically in the cleaning apparatus, and the ultrasonic generator is formed by the straightness of the ultrasonic generator. Since the vibration due to the generation of ultrasonic waves is applied only to the portion, a blind spot region in which the contaminant attached to the glass surface is not removed may occur. As a result, the contaminants adhering to the glass surface are not sufficiently removed, and as a result, there is a problem that causes a product defect.

  The present invention has been made to solve the above-mentioned problems, and a pair or many pairs of ultrasonic generators for generating ultrasonic waves are tilted on both sides, and the ultrasonic waves formed on both sides are generated. Ultrasonic waves are generated from the apparatus and concentrated at one point on the lower end of the cleaning apparatus, and the ultrasonic waves are spread over the entire bottom bottom surface of the cleaning apparatus to generate ultrasonic waves in a wide space. The air that has received ultrasonic waves from the cleaning device is jetted onto the glass surface, and the ultrasonic wave is applied to a wide surface of the glass to be sprayed to maximize the efficiency of the cleaning device. The purpose is to provide an ultrasonic cleaning apparatus that utilizes the method.

  In order to achieve the above object, the present invention relates to an ultrasonic cleaning apparatus using resonance for removing foreign substances adhering to a glass surface of a flat panel display using ultrasonic waves, and is attached to the glass surface. An air supply unit that receives air from a blower and ejects air onto the glass surface through a slot-like air injection port in order to remove the extraneous foreign matter; by generating ultrasonic waves in the air injected from the air supply unit , An ultrasonic generator that applies vibration to the jetted air; and prevents static generation between the glass and the foreign matter when the air subjected to the vibration is jetted to remove the foreign matter attached to the glass An air sucker that sucks in air discharged from the air supply unit and foreign matter removed by the air by a discharge device and discharges the air through an air suction port; Part; characterized in that it contains, to provide an ultrasonic cleaning device using resonance.

  The ultrasonic generator is tilted at a certain angle and installed in pairs or multiple pairs on both sides. When ultrasonic waves are generated from the ultrasonic generator, the ultrasonic waves generated on both sides are concentrated on one point at the lower end. The ultrasonic vibration can be applied to the entire ultrasonic cleaning apparatus.

  In the present invention, a pair or many pairs of ultrasonic generators that generate ultrasonic waves are installed to be tilted on both sides, and ultrasonic waves are generated from the ultrasonic generators formed on the both sides to be concentrated at one lower end of the cleaning device. By spreading the ultrasonic wave over the entire bottom surface of the cleaning device, it is possible to generate an ultrasonic wave throughout the cleaning device, thereby applying an ultrasonic wave to the glass as well as the air jetted from the cleaning device. Thus, there is an effect that it is possible to maximize the removal efficiency of the foreign matter adhering to the glass surface.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings in order to specifically describe the present invention.
1 is a perspective view of an ultrasonic cleaning apparatus using resonance according to the present invention, FIG. 2 is a cross-sectional view of an ultrasonic cleaning apparatus using resonance according to the present invention, and FIG. 3 is an ultrasonic cleaning apparatus using resonance according to the present invention. FIG.

  As shown in FIG. 1, FIG. 2 and FIG. 3, the ultrasonic cleaning apparatus using the resonance of the present invention is provided with an air supply unit 100 at the upper end, and an air blower is used to remove foreign substances adhering to the glass surface. The foreign matter is removed by injecting air onto the glass surface through the slot-like air injection port 110 formed at the lower end of the cleaning device, and the air injected from the air supply unit 100 is Are vibrated by the ultrasonic waves generated from a pair or many pairs of ultrasonic generators 200 installed at an inclination of a predetermined angle on both sides of the glass, and sprayed onto the glass surface.

  Also, by providing an ionizer 300 at the lower end of the ultrasonic generator 200, when the air subjected to the vibration is jetted to remove the foreign matter adhering to the glass, the glass and the glass are electrically neutralized. Prevent static electricity between foreign objects. Air injected from the air supply unit 100 and foreign matter removed from the glass surface by the air are discharged through an air suction unit 400 provided at the upper end of the glass. The air suction part 400 sucks the jetted air and removed foreign matter into the cleaning device through the air suction port 410 formed at the lower end, and discharges the air through the air discharge ports 420 and 430 to the outside. The discharged air and the foreign matter are discharged by a discharge device connected to the outside.

  The ultrasonic generator 200 is installed with a pair or multiple pairs inclined at both sides. When an ultrasonic wave is generated from the ultrasonic generator 200 installed on both sides, the ultrasonic wave is applied to a lower end of the cleaning device. The concentrated ultrasonic waves spread over the entire bottom surface of the lower end of the cleaning device, and generate ultrasonic waves throughout the cleaning device. Thereby, the glass washing | cleaning effect can be maximized by applying the vibration by an ultrasonic wave to the air injected from the said air supply part 100, and the glass surface.

  The preferred embodiments according to the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and the invention belongs to the field to which the present invention belongs without departing from the scope of the present invention claimed in the claims. Anyone with ordinary knowledge will be able to make various changes.

  The present invention can be applied to an ultrasonic cleaning apparatus for removing foreign substances attached to the glass surface of a flat panel display using ultrasonic waves.

1 is a perspective view of an ultrasonic cleaning apparatus using resonance according to the present invention. It is sectional drawing of the ultrasonic cleaning apparatus using the resonance by this invention. 1 is a bottom view of an ultrasonic cleaning device using resonance according to the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Air supply part 110 Air injection port 200 Ultrasonic generator 300 Ionizer 400 Air suction part 410 Air suction port 420, 430 Air discharge port

Claims (2)

In the ultrasonic cleaning device using the resonance for removing the foreign matter adhered to the glass surface of the flat panel display using the ultrasonic wave,
An air supply unit that receives air from a blower and injects air onto the glass surface through a slot-like air injection port in order to remove foreign matter adhered to the glass surface;
An ultrasonic generator that applies vibration to the ejected air by generating ultrasonic waves in the air ejected from the air supply unit;
An ionizer that prevents generation of static electricity between the glass and the foreign material when the air subjected to the vibration is ejected to remove the foreign material adhered to the glass; and the air and the air ejected from the air supply unit An ultrasonic cleaning device using resonance, comprising: an air suction portion that sucks the removed foreign matter with a discharge device and discharges the foreign matter through an air suction port.   The ultrasonic generator is installed in one or many pairs on both sides with a certain angle of inclination. When ultrasonic waves are generated from the ultrasonic generator, the ultrasonic waves generated on both sides are concentrated on one point at the lower end. The ultrasonic cleaning apparatus using resonance according to claim 1, wherein an ultrasonic vibration is applied to the entire ultrasonic cleaning apparatus.

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