TWI808065B - Apparatus and method for edge processing of a substrate sheet - Google Patents

Apparatus and method for edge processing of a substrate sheet Download PDF

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Publication number
TWI808065B
TWI808065B TW106140693A TW106140693A TWI808065B TW I808065 B TWI808065 B TW I808065B TW 106140693 A TW106140693 A TW 106140693A TW 106140693 A TW106140693 A TW 106140693A TW I808065 B TWI808065 B TW I808065B
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Taiwan
Prior art keywords
edge
tubular member
wall segment
major edge
finishing
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TW106140693A
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Chinese (zh)
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TW201829119A (en
Inventor
詹姆斯威廉 布朗
李偉明
依理亞斯 潘尼德斯
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美商康寧公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06Dust extraction equipment on grinding or polishing machines

Abstract

An apparatus for processing an edge of a substrate sheet. The apparatus includes a finishing member, a shroud, and a tubular member. The finishing member is rotatably maintained within a chamber of the shroud. The shroud includes a wall segment terminating at a major edge that defines a portion of a slot. The slot is configured to receive the edge of the substrate sheet, facilitating interface of the edge with the finishing member. The wall segment further defines a nozzle passageway that terminates at an opening in the major edge. The tubular member projects from the major edge and defines a passage in fluid communication with the nozzle passageway. Cooling agent delivered to the nozzle passageway is injected onto the finishing member via the tubular member even in the presence of vacuum induced cross-flow. In some embodiments, a spatial arrangement of the tubular member is adjustable.

Description

用於基板片材之邊緣處理的設備及方法Apparatus and method for edge treatment of substrate sheets

本申請案主張於2016年11月29日所申請之美國臨時申請序列號62 / 427,293的優先權,其內容經依賴及藉由引用其全部內容之方式而併入本文中(如同下文所完整闡述)。This application claims priority to U.S. Provisional Application Serial No. 62/427,293, filed November 29, 2016, the contents of which are hereby incorporated by reliance and by reference in their entirety (as fully set forth below).

本申請案大體上係涉及用於處理基板片材的邊緣的設備及方法。更具體而言,本申請案係涉及以用於研磨或拋光基板之邊緣(如玻璃片的邊緣)的設備及方法來輸送液體冷卻劑。The present application generally relates to apparatus and methods for processing the edges of substrate sheets. More specifically, the present application relates to the delivery of liquid coolants in apparatus and methods for grinding or polishing the edges of substrates, such as the edges of glass sheets.

處理需高品質表面精整度的玻璃片(如平板顯示器中使用的彼等玻璃片)通常涉及將玻璃片切割成期望形狀,接著研磨及/或拋光經切割之玻璃片的邊緣,以去除任何尖角。例如,研磨或拋光步驟可藉由包括至少一個精整構件(例如,如砂輪、拋光輪等的研磨輪)的精整設備或機器來執行。在眾多此種機器中,精整構件被驅動(例如旋轉),及玻璃片被連續地傳送,以使要被精整的邊緣與受驅動精整構件接觸。在接觸點加工邊緣。一些精整設備利用同時對邊緣的角落進行加工的精整構件(如在其外周邊上具有凹槽的研磨輪或拋光輪)。Processing glass sheets requiring high quality surface finish, such as those used in flat panel displays, typically involves cutting the glass sheet into a desired shape, then grinding and/or polishing the edges of the cut glass sheet to remove any sharp corners. For example, the grinding or polishing step may be performed by a finishing device or machine that includes at least one finishing member (eg, a grinding wheel such as a grinding wheel, buffing wheel, etc.). In many such machines, the finishing member is driven (eg, rotated), and the glass sheet is conveyed continuously so that the edge to be finished contacts the driven finishing member. Edges are machined at the point of contact. Some finishing equipment utilizes a finishing member (such as a grinding or buffing wheel having grooves on its outer periphery) that simultaneously processes the corners of the edge.

由於高處理速度及所涉及的材料,在玻璃片精整構件界面處產生過多的熱量。因此,眾多玻璃邊緣精整機器包括冷卻劑系統,該冷卻劑系統通常被設計成引導冷卻劑流向玻璃片及精整構件之間的接觸點的區域。冷卻劑通常是液體(例如,水),及朝向玻璃片精整構件界面的區域噴射或注射該冷卻劑。Due to the high process speeds and materials involved, excessive heat is generated at the glass sheet finishing member interface. Accordingly, many glass edge finishing machines include coolant systems that are typically designed to direct coolant flow to the area of the contact point between the glass sheet and the finishing member. The coolant is typically a liquid (eg, water) and is sprayed or injected towards the region of the glass sheet finishing member interface.

除了提供精整構件及玻璃片的必要冷卻之外,所輸送的冷卻劑有利地用於沖走在邊緣精整過程中產生的顆粒(例如,玻璃屑)。希望儘可能多地收集載有顆粒的冷卻劑,以防止周圍環境的污染及(在去除顆粒之後)重新使用冷卻劑。如此一來,眾多玻璃邊緣精整機器將精整構件定位在護罩或殼體內。真空源與護罩的內部流體連通,及主動移除載有顆粒的冷卻劑。作為參考點,護罩通常被構造成提供與預期的玻璃片精整構件界面非常接近的壁或其他外殼特徵。因此,冷卻劑供應管通常形成在護罩結構本身內、端接於護罩壁中的出口孔或噴嘴處,及大致指向期望的玻璃片精整構件界面。在正常操作壓力下,冷卻劑以噴流的形式離開護罩孔或噴嘴。儘管使用護罩和真空廣被接受,但使用護罩和真空卻可抑製冷卻劑的最佳輸送。護罩產生的(多個)出口孔有效地固定在相對於精整構件的空間中;儘管相對靠近玻璃片精整構件界面,但出口孔不能提供可選的注射方向。又,真空引起的高速空氣交叉流動可通過施加的阻力來干擾及誤導冷卻劑射流。In addition to providing the necessary cooling of the finishing member and glass sheet, the delivered coolant is advantageously used to flush away particles (eg glass swarf) generated during the edge finishing process. It is desirable to collect as much particle-laden coolant as possible to prevent contamination of the surrounding environment and (after removal of the particles) to reuse the coolant. As such, numerous glass edge finishing machines position the finishing member within a shroud or housing. A vacuum source is in fluid communication with the interior of the shroud and actively removes the particle-laden coolant. As a point of reference, shields are typically configured to provide walls or other housing features in close proximity to the intended glass sheet finishing member interface. Accordingly, coolant supply tubes are typically formed within the shroud structure itself, terminating at outlet holes or nozzles in the shroud wall, and directed generally toward the desired glass sheet finishing member interface. At normal operating pressures, the coolant exits the shield holes or nozzles in a jet. Although widely accepted, the use of shields and vacuum can inhibit optimal delivery of coolant. The exit orifice(s) created by the shroud are effectively fixed in space relative to the finishing member; despite being relatively close to the glass sheet finishing member interface, the exit orifice does not provide alternative injection directions. Also, the high velocity air cross flow caused by the vacuum can disturb and misdirect the coolant jets through the applied drag.

因此,本文揭露了用於精整與輸送的冷卻劑結合的玻璃片的邊緣的替代設備及方法。Accordingly, disclosed herein are alternative apparatus and methods for finishing the edge of a glass sheet in combination with conveyed coolant.

本申請案的一些實施例涉及一種用於處理玻璃片的邊緣的設備。設備包括精整構件、護罩及管狀構件。精整構件經配置成處理玻璃片的邊緣,及可旋轉地保持在護罩的腔室內。護罩包括端接於第一主邊緣的第一壁段及端接於第二主邊緣的第二壁段。主邊緣彼此相對及結合以限定通向腔室的槽的至少一部分。槽經配置成可滑動地接收玻璃片的邊緣,以使邊緣與精整構件接合。第一壁段進一步限定用於輸送流體的噴嘴通道。噴嘴通道端接於第一主邊緣的開口處。最後,管狀構件從第一主邊緣突出並限定與噴嘴通道流體連通的通路。利用此種結構,即使在存在真空引起的交叉流動的情況中,輸送到噴嘴通道的冷卻流體亦經由管狀構件精確地噴射至精整構件上。在一些實施例中,管狀構件端接於與第一主邊緣相對的分配端。在一些實施例中,精整構件與分配端之間的距離小於精整構件與第一主邊緣之間的距離。在其他實施例中,管狀構件相對於第一主邊緣的空間佈置是可調整的。在其他實施例中,一或更多個額外的噴嘴通道經限定在一或兩個壁段中,及一或更多個另外的管狀構件與額外的噴嘴通道中之相應者相關聯。Some embodiments of the present application relate to an apparatus for processing an edge of a glass sheet. The equipment includes finishing components, shields and tubular components. A finishing member is configured to process the edge of the glass sheet and is rotatably retained within the chamber of the shield. The shroud includes a first wall segment terminating at the first major edge and a second wall segment terminating at the second major edge. The major edges are opposed to each other and join to define at least a portion of the slot leading to the chamber. The groove is configured to slidably receive the edge of the glass sheet to engage the edge with the finishing member. The first wall section further defines a nozzle channel for delivering fluid. The nozzle channel terminates at the opening of the first major edge. Finally, a tubular member protrudes from the first major edge and defines a passageway in fluid communication with the nozzle passage. With this structure, even in the presence of vacuum-induced cross flow, the cooling fluid delivered to the nozzle channel is precisely sprayed onto the finishing member via the tubular member. In some embodiments, the tubular member terminates at a dispensing end opposite the first major edge. In some embodiments, the distance between the finishing member and the dispensing end is less than the distance between the finishing member and the first major edge. In other embodiments, the spatial arrangement of the tubular member relative to the first major edge is adjustable. In other embodiments, one or more additional nozzle channels are defined in one or both wall segments, and one or more additional tubular members are associated with respective ones of the additional nozzle channels.

本申請案的其他實施例與用於處理玻璃片的邊緣的設備相關。設備包括精整構件、護罩及管狀構件。精整構件經配置用於處理玻璃片的邊緣及可旋轉地保持在護罩的腔室內。護罩包括端接於主邊緣的壁段,該主邊緣限定了向腔室開放的槽的至少一部分。槽經配置成可滑動地接收玻璃片的邊緣,以使邊緣與精整構件接合。壁段進一步限定用於輸送流體的噴嘴通道。噴嘴通道端接於主邊緣的開口處。管狀構件可移除地裝配至壁段並從主邊緣突出。管狀構件限定與噴嘴通道流體連通的通路。在一些實施例中,管狀構件通過螺紋接口或壓裝接口而可移除地組裝至壁段。Other embodiments of the present application relate to apparatus for processing the edges of glass sheets. The equipment includes finishing components, shields and tubular components. A finishing member is configured for processing the edge of the glass sheet and is rotatably retained within the chamber of the shield. The shroud includes a wall segment terminating in a major edge defining at least a portion of a slot open to the chamber. The groove is configured to slidably receive the edge of the glass sheet to engage the edge with the finishing member. The wall segment further defines a nozzle channel for delivering fluid. The nozzle channel terminates at the opening of the main edge. A tubular member is removably fitted to the wall segment and protrudes from the main edge. The tubular member defines a passageway in fluid communication with the nozzle passage. In some embodiments, the tubular member is removably assembled to the wall segment via a threaded or press-fit interface.

本申請案的其他實施例與用於處理玻璃片的邊緣的方法相關。方法包括以下步驟:將玻璃片的邊緣引導通過處理設備的護罩中的槽並進入護罩的腔室中。槽至少部分地由護罩壁段的主邊緣限定。玻璃片的邊緣由設置在腔室內的精整部件處理。在處理步驟期間,冷卻流體流通過從主邊緣突出的管狀構件而經引導至玻璃片的邊緣與精整構件之間的界面上。在此方面,管狀構件限定中央通路,該中央通路與限定在壁段中的噴嘴通道流體連通。管狀構件利用本申請案的方法而始終有利地將冷卻流體引導至界面上。在一些實施例中,本申請案的方法進一步包括以下步驟:調整管狀構件相對於主邊緣(並因此相對於精整構件)的佈置,(例如)以解決精整構件的磨損。Other embodiments of the present application relate to methods for processing the edges of glass sheets. The method includes the steps of directing an edge of the glass sheet through a slot in a shroud of a processing apparatus and into a chamber of the shroud. The slot is at least partially defined by the main edge of the shroud wall segment. The edges of the glass sheet are processed by a finishing unit located in the chamber. During the processing step, a flow of cooling fluid is directed onto the interface between the edge of the glass sheet and the finishing member through a tubular member protruding from the main edge. In this aspect, the tubular member defines a central passage that is in fluid communication with the nozzle passage defined in the wall segment. The tubular member advantageously directs the cooling fluid onto the interface at all times using the method of the application. In some embodiments, the method of the present application further includes the step of adjusting the arrangement of the tubular member relative to the main edge (and thus relative to the finishing member), for example, to account for wear of the finishing member.

額外的特徵及優勢將於下文的[實施方式]中闡述,且對於所屬技術領域中具有通常知識者來說,根據該[實施方式]或藉由實施本文所描述的實施例(包括下文的[實施方式]、申請專利範圍及附圖),該等附加的特徵及優勢部分將為顯而易見。Additional features and advantages will be described in the following [embodiments], and for those skilled in the art, according to the [embodiments] or by implementing the embodiments described herein (including the following [embodiments], patent claims and drawings), these additional features and advantages will be partly obvious.

應當理解的是,前文的一般性描述及下文的[實施方式]兩者皆描述了各種實施例,及意欲提供用於理解所要求保護發明的性質及特徵的概述或框架。附加圖式經包含以提供對各種實施例的進一步理解,及該等附加圖式經結合至本說明書中且構成本說明書的一部分。附加圖式示出了本文所描述的各種實施例,且與說明書一起用於解釋所要求保護發明的原理及操作。It is to be understood that both the foregoing general description and the following [Description of Embodiments] describe various embodiments, and are intended to provide an overview or framework for understanding the nature and character of the invention as it is claimed. The accompanying drawings are included to provide a further understanding of various embodiments, and are incorporated in and constitute a part of this specification. The accompanying drawings illustrate the various embodiments described herein, and together with the description serve to explain the principles and operations of the claimed invention.

現在將詳細參考用於處理基板片材之邊緣(如玻璃片之邊緣)的設備及方法的各種實施例。儘可能地將在整篇附加圖式中使用相同的元件符號來指示相同或相似的部分。Reference will now be made in detail to various embodiments of apparatus and methods for processing the edges of substrate sheets, such as the edges of glass sheets. Wherever possible, the same reference numbers will be used throughout the appended drawings to refer to the same or like parts.

根據本申請案之原理之用於處理玻璃片之邊緣的設備10的一實施例在圖1中示出。儘管本文中所描述的設備10係用於研磨或拋光玻璃片的邊緣,但應當理解的是,設備10(及本申請案之其他實施例設備)亦可用於處理其他類型的材料,如聚合物(例如,Plexi-glassTM )、金屬或其他基板片材。因此,不應以限定方式解釋本申請案的設備10。One embodiment of an apparatus 10 for processing the edges of glass sheets according to the principles of the present application is shown in FIG. 1 . Although apparatus 10 is described herein as being used for grinding or polishing the edges of glass sheets, it should be understood that apparatus 10 (and other embodiment apparatuses of the present application) may also be used to process other types of materials, such as polymer (e.g., Plexi-glass ), metal, or other substrate sheets. Accordingly, the device 10 of the present application should not be interpreted in a limiting manner.

設備10包括精整構件12及護罩14。作為參考點,護罩14的一部分在圖1中經描繪成部分透明,以說明設置在護罩14內的元件(如精整構件12)。一般而言,精整構件12可旋轉地保持在由護罩14限定的腔室16(通常標記)內,及該精整構件12經配置成用於處理(例如,研磨或拋光)玻璃片的邊緣。此外,如下文所詳加描述地,設備10結合了包括一或更多個管狀構件(未示出)的冷卻劑輸送系統,該一或更多個管狀構件用於將冷卻劑輸送至精整構件12的表面上或朝向精整構件12的表面輸送冷卻劑。在此方面,設備10可包括一或更多個入口端18,加壓冷卻劑源(未示出)可與該一或更多個入口端18流體連通。Apparatus 10 includes a finishing member 12 and a shroud 14 . As a point of reference, a portion of shroud 14 is depicted as partially transparent in FIG. 1 to illustrate elements (eg, finishing member 12 ) disposed within shroud 14 . Generally, a finishing member 12 is rotatably retained within a chamber 16 (generally labeled) defined by shield 14 and is configured for processing (eg, grinding or polishing) the edge of a glass sheet. Additionally, as described in more detail below, apparatus 10 incorporates a coolant delivery system that includes one or more tubular members (not shown) for delivering coolant onto or toward the surface of finishing member 12. In this regard, apparatus 10 may include one or more inlet ports 18 to which a source of pressurized coolant (not shown) may be in fluid communication.

精整構件12可採取各種形式,及在一些實施例中,該精整構件12為所屬技術領域中具有通常知識者已知適於加工玻璃片之邊緣之類型的研磨輪(例如,研磨輪及拋光輪等)。作為非限制性實例,精整構件12可為嵌入或具有磨粒或研磨介質的結合輪。在一些實施例中,精整構件12可在其外周形成一或更多個具有期望輪廓的凹槽。可藉由馬達20驅動(例如,旋轉)精整構件12,該馬達20接著被安裝至護罩14 (或相對於護罩14被支撐)。Finishing member 12 may take a variety of forms, and in some embodiments, finishing member 12 is a grinding wheel (eg, grinding wheels, buffing wheels, etc.) of the type known to those of ordinary skill in the art to be suitable for machining the edges of glass sheets. As a non-limiting example, finishing member 12 may be a bonded wheel embedded with or having abrasive grains or abrasive media. In some embodiments, finishing member 12 may form one or more grooves having a desired profile on its periphery. The finishing member 12 may be driven (eg, rotated) by a motor 20 which is then mounted to (or supported relative to) the shroud 14 .

護罩14可採取多種形式,及在一些實施例中可包括蓋30及基部32,該蓋30及該基部32組合以限定腔室16。蓋30可利用此可選配置而(如)通過鉸鏈34樞轉地經安裝至基部32,以提供至腔室16的選擇性入口(例如,圖1相對於基座32來反射關閉位置的蓋30,及當進入腔室16係意欲時,該蓋30可選擇性地樞轉離開基部32)。在一些實施例中,護罩14可由三個或更多個元件限定;在其他實施例中,護罩14可具有均勻或單體結構。無論如何,在一些實施例中,護罩14可進一步包括或提供限定排氣通路38的排氣管道36(通常標記)。排氣通路38與腔室16流體連通。此外,排氣管道36經配置成與真空源(未示出)流體連通,其操作通過排氣通路38來在腔室16內產生負壓或真空。替代地,護罩14可併入用於自腔室16排出流體的其他結構或特徵。Shield 14 may take a variety of forms, and in some embodiments may include a cover 30 and a base 32 that combine to define chamber 16 . With this optional configuration, the lid 30 can be pivotally mounted to the base 32, such as by a hinge 34, to provide selective access to the chamber 16 (e.g., FIG. In some embodiments, shroud 14 may be defined by three or more elements; in other embodiments, shroud 14 may have a uniform or monolithic structure. Regardless, in some embodiments, shroud 14 may further include or provide an exhaust duct 36 (generally labeled) defining an exhaust passage 38 . Exhaust passage 38 is in fluid communication with chamber 16 . Additionally, exhaust conduit 36 is configured in fluid communication with a vacuum source (not shown), which operates through exhaust passage 38 to create a negative pressure or vacuum within chamber 16 . Alternatively, shield 14 may incorporate other structures or features for draining fluid from chamber 16 .

不論確切結構為何,及如圖1所示地,護罩14的形狀或覆蓋區至少在(如由圖1中所指定之X、Y及Z坐標系所限定之)X-Y平面中可模仿精整構件12的周邊形狀。因此,在一些實施例中,護罩14在X-Y平面中具有與圓形精整構件12相對緊密對應之大致上圓形的形狀。亦可設想到其他形狀。Regardless of the exact configuration, and as shown in FIG. 1 , the shape or footprint of the shroud 14 mimics the perimeter shape of the finishing member 12 at least in the X-Y plane (as defined by the X, Y, and Z coordinate system designated in FIG. 1 ). Thus, in some embodiments, shroud 14 has a generally circular shape in the X-Y plane that corresponds relatively closely to circular finishing member 12 . Other shapes are also contemplated.

如圖2之大幅簡化的橫截面圖所示地,護罩14形成通向腔室16的槽40。為了進一步理解,槽40的整體位置亦在圖1中標示。槽40通常經配置(例如,設計尺寸及形狀)成可滑動地接收玻璃片(未示出)的邊緣,由此允許邊緣進入腔室16及與精整構件12接合。排氣通路38通常亦在圖2中標示。As shown in the greatly simplified cross-sectional view of FIG. 2 , the shroud 14 forms a slot 40 leading to the chamber 16 . For further understanding, the overall position of the slot 40 is also indicated in FIG. 1 . Slot 40 is generally configured (eg, sized and shaped) to slidably receive an edge of a glass sheet (not shown), thereby allowing the edge to enter chamber 16 and engage finishing member 12 . Exhaust passage 38 is also generally indicated in FIG. 2 .

護罩14可用各種方式形成槽40。在一些實施例中,護罩14可被視為包括或限定第一壁段50及第二壁段52,該第一壁段50及該第二壁段52結合以形成槽40的至少一部分的周邊。可用不同形式來提供第一壁段50及第二壁段52;例如,第一壁段50可為蓋30(圖1)的一部分或附接至蓋30,及第二壁段52可為基部32(圖1)的一部分或附接至基部32。在其他實施例中,第一壁段50及第二壁段52可一體地形成為單個均勻結構的部分。無論如何,第一壁段50端接於第一主邊緣60。第二壁段52端接於第二主邊緣62。壁段50及壁段52經佈置成使得第一主邊緣60與第二主邊緣62相對且與該第二主邊緣62間隔開,其中主邊緣60及主邊緣62各自限定了槽40之周邊的至少一部分。在一些實施例中,主邊緣60及主邊緣62中的一者或兩者可包括相對於壁段50及壁段52之其餘部分之在Y-Z平面中的倒角(例如,見圖3)。例如,第一壁段50可被視為限定外部面70及內部面72。第一主邊緣60代表鄰接外部面70及內部面72的過渡邊緣,及與面70及面72兩者形成非直角。相對於槽40的中心平面P而言,可選的倒角配置可描述為相對於中心平面P不垂直及不平行的第一主邊緣60。替代地或額外地,可選的倒角佈置可描述為自外部面70延伸至內部面72之中心平面P突出的第一主邊緣60。第二主邊緣62可具有類似的或相同的倒角配置,該倒角配置係在第二壁段52之相對應的外部面及內部面之間延伸。最後,由於下文清楚解釋的原因,自第一主邊緣60及第二主邊緣62中的一者或兩者突出的一或更多個管狀構件80(通常標記)隨設備10一起被提供。Shroud 14 may form slot 40 in a variety of ways. In some embodiments, shroud 14 may be considered to include or define a first wall segment 50 and a second wall segment 52 that combine to form at least a portion of the perimeter of slot 40 . The first wall segment 50 and the second wall segment 52 may be provided in different forms; for example, the first wall segment 50 may be part of or attached to the cover 30 ( FIG. 1 ), and the second wall segment 52 may be part of or attached to the base 32 ( FIG. 1 ). In other embodiments, the first wall segment 50 and the second wall segment 52 may be integrally formed as part of a single uniform structure. Regardless, the first wall segment 50 terminates at a first major edge 60 . The second wall segment 52 terminates in a second major edge 62 . Wall segments 50 and 52 are arranged such that first major edge 60 is opposite and spaced from second major edge 62 , wherein major edge 60 and major edge 62 each define at least a portion of the perimeter of slot 40 . In some embodiments, one or both of major edge 60 and major edge 62 may include a chamfer in the Y-Z plane relative to the remainder of wall segment 50 and wall segment 52 (see, eg, FIG. 3 ). For example, first wall segment 50 may be considered to define exterior face 70 and interior face 72 . First major edge 60 represents the transition edge adjoining outer face 70 and inner face 72 and forms a non-perpendicular angle with both face 70 and face 72 . With respect to the central plane P of the slot 40 , an alternative chamfer configuration can be described as a first major edge 60 that is non-perpendicular and non-parallel with respect to the central plane P. As shown in FIG. Alternatively or additionally, an optional chamfer arrangement may be described as protruding first main edge 60 extending from the outer face 70 to a central plane P of the inner face 72 . The second major edge 62 may have a similar or identical chamfer configuration extending between the corresponding outer and inner faces of the second wall segment 52 . Finally, one or more tubular members 80 (generally labeled) protruding from one or both of the first major edge 60 and the second major edge 62 are provided with the apparatus 10 for reasons clearly explained below.

在圖3中更詳細地示出了除了護罩14的其餘部分之外,具有一或更多個管狀構件80(通常標記)的護罩壁段50及護罩壁段52。壁段50及壁段52中的一或兩者限定至少一個噴嘴通道。例如,在圖3的非限制性實施例中,第一壁段50分別限定第一噴嘴通道90a、第二噴嘴通道90b及第三噴嘴通道90c,第二壁段52分別限定第一噴嘴通道92a、第二噴嘴通道92b及第三噴嘴通道92c。任何其他數量的噴嘴通道(或多或少)係同樣可接受的(例如,第一壁段50可提供一或更多個噴嘴通道,而第二壁段50可沒有任何噴嘴通道,反之亦然)。換言之,本申請案絕不限於壁段50及壁段52每者中的三個噴嘴通道。不論提供的確切數量為何,(多個)噴嘴通道90a-90c及92a-92c各自經配置成用於傳送或輸送流體(例如,冷卻劑或冷卻液體),及可各自端接於相對應壁段50及壁段52的主邊緣60及主邊緣62中的開口處。例如,及另外參考圖4A(該圖4A另外示出與經移除的管狀構件80隔離的壁段50及壁段52),第一壁段50的第一噴嘴通道90a端接於第一主邊緣60中的第一開口100a處。第一開口100a作為加壓流體自通道90a排出的噴嘴狀孔。第一開口100a的平面或形狀對應於第一主邊緣60的平面或形狀(例如,第一開口100a遵循或模仿第一主邊緣60的可選倒角佈置)。換句話說,第一主邊緣60可為連續的、相對光滑的或平坦的表面,及第一開口100a形成此連續的、相對光滑的平坦表面。然而,將要理解的是,由於第一壁段50之可選的彎曲形狀(即,如上文相關於圖1所述地),護罩14可模仿精整構件12之周邊的曲率;第一壁段50可選地包含此相同曲率),第一主邊緣60亦在X-Y平面中彎曲。The shroud wall segment 50 with one or more tubular members 80 (generally labeled) and the shroud wall segment 52 are shown in more detail in FIG. 3 in addition to the remainder of the shroud 14 . One or both of wall segment 50 and wall segment 52 define at least one nozzle passage. For example, in the non-limiting embodiment of FIG. 3, the first wall segment 50 defines a first nozzle passage 90a, a second nozzle passage 90b, and a third nozzle passage 90c, respectively, and the second wall segment 52 defines a first nozzle passage 92a, a second nozzle passage 92b, and a third nozzle passage 92c, respectively. Any other number of nozzle channels (more or less) is equally acceptable (eg, first wall segment 50 may provide one or more nozzle channels, while second wall segment 50 may not have any nozzle channels, or vice versa). In other words, the present application is in no way limited to three nozzle channels in each of wall segment 50 and wall segment 52 . Regardless of the exact number provided, nozzle channel(s) 90a-90c and 92a-92c are each configured for conveying or conveying a fluid (eg, coolant or cooling liquid), and may each terminate at openings in major edges 60 and 62 of corresponding wall segments 50 and 52. For example, and with additional reference to FIG. 4A (which additionally shows wall segment 50 and wall segment 52 isolated from tubular member 80 removed), first nozzle channel 90a of first wall segment 50 terminates at first opening 100a in first major edge 60. The first opening 100a serves as a nozzle-shaped orifice through which pressurized fluid is expelled from the channel 90a. The plan or shape of the first opening 100a corresponds to the plan or shape of the first major edge 60 (eg, the first opening 100a follows or mimics the optional chamfer arrangement of the first major edge 60). In other words, the first major edge 60 may be a continuous, relatively smooth or planar surface, and the first opening 100a forms this continuous, relatively smooth and planar surface. However, it will be appreciated that due to the optional curved shape of the first wall segment 50 (i.e., as described above with respect to FIG. 1 , the shroud 14 can mimic the curvature of the perimeter of the finishing member 12; the first wall segment 50 optionally includes this same curvature), the first major edge 60 is also curved in the X-Y plane.

第一壁段50的第二噴嘴通道90b及第三噴嘴通道90c可與上述的第一噴嘴通道90a基本上相同,及第二噴嘴通道90b端接於第一主邊緣60中的第二開口100b處及第三噴嘴通道90c端接於第一主邊緣60中的第三開口100c處。第一壁段50的噴嘴通道90a-90c彼此間隔開。如圖4B所示地(該圖4B以其他方式示出了在一些實施例中管狀構件80(圖3)被移除之設備10的一部分),開口100a-100c可由於X-Y平面中的第一主邊緣60的可選曲線形狀而在X-Y平面中沿著第一主邊緣60的曲率彼此徑向偏移,使得各個開口100a至100c的中心線CL1至CL3(因此為由開口100a-100c中之每者所實施的噴射方向)通常在精整構件12的中心處相交。The second nozzle channel 90b and the third nozzle channel 90c of the first wall segment 50 may be substantially identical to the first nozzle channel 90a described above, with the second nozzle channel 90b terminating at the second opening 100b in the first major edge 60 and the third nozzle channel 90c terminating at the third opening 100c in the first major edge 60. The nozzle channels 90a-90c of the first wall section 50 are spaced apart from each other. As shown in FIG. 4B (which otherwise illustrates a portion of device 10 with tubular member 80 ( FIG. 3 ) removed in some embodiments), openings 100 a - 100 c may be radially offset from one another in the X-Y plane along the curvature of first major edge 60 due to the optional curvilinear shape of first major edge 60 in the X-Y plane, such that the centerlines CL1 - CL3 of each opening 100 a - 100 c (thus being defined by one of openings 100 a - 100 c ). The spraying directions implemented by each) generally intersect at the center of the finishing member 12 .

繼續參考圖3及圖4A,第二壁段52的噴嘴通道92a至92c可與上述的第一壁段50的噴嘴通道90a-90c相似或相同。因此,第一噴嘴通道92a可端接於第二主邊緣62中的第一開口102a中、第二噴嘴通道92b可端接於第二主邊緣62中的第二開口102b中,及第三噴嘴通道92c可端接於第二主邊緣62中的第三開口102c中。壁段50及壁段52可在最終組裝時佈置,以便大體上將第一壁段開口100a至100c中的相應者與第二壁段開口102a至102c中的相應者在Z方向上對齊(例如,第一壁段50中的第一開口100a與第二壁段52中的第一開口102a在Z方向上對齊等)。在其他實施例中,第一壁段50及第二壁段52的噴嘴通道90a-90c及92a-92c及/或開口100a-100c及102a-102c可在形狀及/或位置上彼此不同。With continued reference to FIGS. 3 and 4A , the nozzle channels 92 a - 92 c of the second wall segment 52 may be similar or identical to the nozzle channels 90 a - 90 c of the first wall segment 50 described above. Thus, the first nozzle channel 92a can terminate in the first opening 102a in the second major edge 62, the second nozzle channel 92b can terminate in the second opening 102b in the second major edge 62, and the third nozzle channel 92c can terminate in the third opening 102c in the second major edge 62. Wall segments 50 and 52 may be arranged in final assembly so as to substantially align corresponding ones of first wall segment openings 100a-100c with corresponding ones of second wall segment openings 102a-102c in the Z direction (e.g., first opening 100a in first wall segment 50 aligns in Z direction with first opening 102a in second wall segment 52, etc.). In other embodiments, the nozzle channels 90a-90c and 92a-92c and/or the openings 100a-100c and 102a-102c of the first wall segment 50 and the second wall segment 52 may differ from each other in shape and/or location.

具體參考圖3,如下文所詳加描述地,每個管狀構件80作為相對應噴嘴通道的延伸。管狀構件80可具有結構堅固的構造,其中管狀構件80中之每者的材料及尺寸經選擇為在預期的操作條件下保持選定的或期望的空間定向(例如,管狀構件80經形成並組裝至護罩14 (圖1),以便在受到與真空引起的橫向流動相關的阻力時不會明顯地偏轉)。例如,管狀構件80可由塑料、金屬(例如,黃銅)及硬化橡膠等形成。Referring specifically to Figure 3, each tubular member 80 acts as an extension of the corresponding nozzle passage, as described in more detail below. Tubular members 80 may have a structurally strong construction, wherein the materials and dimensions of each of tubular members 80 are selected to maintain a selected or desired spatial orientation under anticipated operating conditions (e.g., tubular members 80 are formed and assembled to shroud 14 ( FIG. 1 ) so as not to deflect appreciably when subjected to resistance associated with vacuum-induced lateral flow). For example, the tubular member 80 may be formed of plastic, metal (eg, brass), vulcanized rubber, and the like.

在一些實施例中,為與護罩14(圖1)相關聯的每個噴嘴通道開口提供管狀構件。因此,例如,第一管狀構件110a、第二管狀構件110b及第三管狀構件110c分別可與第一壁段50的對應噴嘴通道開口90a-90c相關聯,及第一管狀構件112a、第二管狀構件112b及第三管狀構件112c可分別與第二壁段52的對應噴嘴通道開口92a-92c相關聯。在其他實施例中,管狀構件可經設置成少於全部的可用噴嘴通道開口。在其他實施例中,本申請案的設備可僅包括單個管狀構件80。儘管已示出及描述了壁段50及壁段52每者中的三個噴嘴通道及三個管狀構件,但本申請案的實施例可利用任何其他數目(無論是更大還是更小)。In some embodiments, a tubular member is provided for each nozzle passage opening associated with shroud 14 ( FIG. 1 ). Thus, for example, first tubular member 110a, second tubular member 110b, and third tubular member 110c may be associated with corresponding nozzle passage openings 90a-90c of first wall segment 50, respectively, and first tubular member 112a, second tubular member 112b, and third tubular member 112c may be associated with corresponding nozzle passage openings 92a-92c of second wall segment 52, respectively. In other embodiments, the tubular member may be configured to accommodate less than all of the available nozzle channel openings. In other embodiments, the device of the present application may only include a single tubular member 80 . Although three nozzle channels and three tubular members in each of wall segments 50 and 52 have been shown and described, embodiments of the present application may utilize any other number, whether larger or smaller.

在一些實施例中,管狀構件110a-110c及112a-112c可為類似,使得關於如圖5中所示之第一管狀構件110a的下文解釋可同樣適用於其餘的管狀構件110b、110c及112a-112c。作為參考點,圖5示出了第一壁段50的外部面70及內部面72,及示出了第一噴嘴通道90a可在外部面70及內部面72之間的第一壁段50的厚度中形成。在一些非限制性實施例中,第一噴嘴通道90a的中心縱向軸線CA可與外部面70及內部面72平行。在第一壁段50(或第二壁段52(圖2))提供兩個或更多個噴嘴通道(例如,噴嘴通道90a-90c及92a-92c(圖3))的實施例中,可為部分或全部的噴嘴通道提供相對於對應的壁段的外部面及內部面之相應的中心縱向軸之此可選的平行佈置。In some embodiments, the tubular members 110a-110c and 112a-112c may be similar such that the following explanations regarding the first tubular member 110a as shown in FIG. 5 may equally apply to the remaining tubular members 110b, 110c and 112a-112c. As a point of reference, FIG. 5 shows the outer face 70 and the inner face 72 of the first wall segment 50 and shows that the first nozzle channel 90a may be formed in the thickness of the first wall segment 50 between the outer face 70 and the inner face 72 . In some non-limiting embodiments, the central longitudinal axis CA of the first nozzle passage 90a may be parallel to the outer face 70 and the inner face 72 . In embodiments where first wall segment 50 (or second wall segment 52 (FIG. 2)) provides two or more nozzle channels (e.g., nozzle channels 90a-90c and 92a-92c (FIG. 3)), some or all of the nozzle channels may be provided with this optional parallel arrangement of their respective central longitudinal axes relative to the outer and inner faces of the corresponding wall segment.

管狀構件110a為限定中央通路120a的管狀主體,該中央通路120a通向相對的入口端122a及分配端124a。管狀構件110a與第一壁段50相關聯,使得管狀構件110a自第一主邊緣60突出,及中央通路120a經由入口端122a與第一噴嘴通道90a流體連通。例如,入口端122a可通過開口100a(通常標記)(例如,管狀構件110a的外徑接近開口100a的直徑)插入至第一噴嘴通道90a中。替代地,入口端122a可組裝在第一主邊緣60的面上,其中中央通路120a與開口100a對齊。對於所屬技術領域中具有通常知識者而言將顯而易見的是,可用各種方式將管狀構件110a組裝或安裝至第一壁段50,該等各種方式包括但不限於螺紋接口、壓裝、黏合劑結合及焊接等。在相關的實施例中,本申請案的(多個)管狀構件(如管狀構件110a)可經組裝或經改裝至現有的玻璃邊緣處理設備。可以可選地提供墊圈或其他密封元件(未示出),以更好地促進第一壁段50及管狀構件110a之間的界面處的流體密封。在其他實施例中,管狀構件110a為第一壁段50的整體形成元件。無論如何,管狀構件110a以自分配端124a離開之經輸送至噴嘴通道90的加壓流體而有效地使噴嘴通道90a延伸超出第一主邊緣60中的開口100a。儘管管狀構件110a被示出為大體上線性或直線,但在其他實施例中,可提供彎曲或曲線形狀的幾何形狀;該管狀構件110a的非限制性實例經展示為圖6的管狀構件80'。Tubular member 110a is a tubular body defining a central passageway 120a that leads to opposing inlet end 122a and dispensing end 124a. Tubular member 110a is associated with first wall segment 50 such that tubular member 110a protrudes from first major edge 60 and central passage 120a is in fluid communication with first nozzle passage 90a via inlet end 122a. For example, the inlet end 122a can be inserted into the first nozzle passage 90a through the opening 100a (generally labeled) (eg, the outer diameter of the tubular member 110a approximates the diameter of the opening 100a). Alternatively, inlet end 122a may be assembled on the face of first major edge 60 with central passage 120a aligned with opening 100a. It will be apparent to those of ordinary skill in the art that the tubular member 110a may be assembled or mounted to the first wall segment 50 in various ways including, but not limited to, threaded joints, press fitting, adhesive bonding, welding, and the like. In a related embodiment, the tubular member(s) of the present application, such as tubular member 110a, may be assembled or retrofitted to existing glass edge processing equipment. A gasket or other sealing element (not shown) may optionally be provided to better facilitate a fluid seal at the interface between the first wall segment 50 and the tubular member 110a. In other embodiments, the tubular member 110a is an integrally formed element of the first wall segment 50 . Regardless, tubular member 110a effectively extends nozzle passage 90a beyond opening 100a in first major edge 60 with pressurized fluid delivered to nozzle passage 90 exiting dispensing end 124a. Although the tubular member 110a is shown as being generally linear or straight, in other embodiments curved or curvilinear shaped geometries may be provided; a non-limiting example of such a tubular member 110a is shown as the tubular member 80' of FIG.

回到圖3,從相應的主邊緣60及主邊緣62所延伸的管狀構件110a-110c及112a-112c中之每者的尺寸、幾何形狀及空間佈置不需為相同的,及可根據設備10(圖1)的操作參數來選擇。例如,圖7的簡化頂視截面圖示出了自第一壁段50的第一主邊緣60相對於精整構件12突出的管狀構件110a-110c的非限制性實例。如圖所示,第一管狀構件110a及第三管狀構件110c的長度及角定向與第二管狀構件110b的長度及角定向不同。由管狀構件110a-110c所建立之各個流動路徑Q1-Q3的近似相交利用此一種可能的佈置而位在精整構件12的周邊處,導致在精整構件12及進行精整操作的玻璃片(未示出)的邊緣之間的預期接觸點處的集中冷卻。藉由比較及交叉參考圖4B(回想圖4B係示出了移除了管狀構件之設備10的一部分),在沒有管狀構件110a-110c的情況下,離開開口100a-100c中之每者的冷卻劑流將在不連續的位置處與精整構件12的周邊接合,導致精整構件12及玻璃片之間的預期接觸點的冷卻效果較差。由一或更多個管狀構件110a-110c的尺寸、形狀及/或(相對於第一主邊緣60)空間佈置所產生的流動路徑Q1-Q3不同於相應的開口100a-110c的中心線CL1-CL3。3, the size, geometry and spatial arrangement of each of the tubular members 110a-110c and 112a-112c extending from the respective major edge 60 and major edge 62 need not be the same, and may be selected according to the operating parameters of the apparatus 10 (FIG. 1). For example, the simplified top cross-sectional view of FIG. 7 shows a non-limiting example of tubular members 110 a - 110 c protruding from first major edge 60 of first wall segment 50 relative to finishing member 12 . As shown, the length and angular orientation of the first tubular member 110a and the third tubular member 110c are different from the length and angular orientation of the second tubular member 110b. The approximate intersection of the respective flow paths Q1-Q3 established by the tubular members 110a-110c is located at the periphery of the finishing member 12 with this one possible arrangement, resulting in concentrated cooling at the intended point of contact between the finishing member 12 and the edge of the glass sheet (not shown) undergoing the finishing operation. By comparison and cross-reference to FIG. 4B (recall that FIG. 4B shows a portion of apparatus 10 with tubular members removed), without tubular members 110a-110c, coolant flow exiting each of openings 100a-100c would engage the perimeter of finishing member 12 at discrete locations, resulting in less effective cooling of the intended contact points between finishing member 12 and the glass sheet. The flow paths Q1-Q3 created by the size, shape and/or spatial arrangement (relative to first major edge 60) of one or more tubular members 110a-110c differ from the centerlines CL1-CL3 of the corresponding openings 100a-110c.

由圖4B及圖7的比較所證明之額外的益處為與相應的開口100a-100c相比,每個管狀構件110a-110c的分配端124a-124c在物理上更接近精整構件12。因此,所輸送或注入之冷卻劑的流不太可能中斷。例如,圖8A示出了相對於第一管狀構件110a(圖7)被移除之精整構件12的第一噴嘴通道90a。第一間隙G1經定義為開口100a及精整構件12之間的直線距離。經設置至第一噴嘴通道90a的加壓流體流(冷卻劑) Q1由箭頭表示且最初作為聚焦噴射或射流離開開口100a,及指向精整構件12及玻璃片(未示出)之間的預期接觸點。在典型的玻璃片邊緣精整(例如研磨或拋光)的條件下,精整構件12高速旋轉、夾帶空氣並在精整構件周圍產生高速氣流。此外,如上所述,在腔室16 (通常標記)中建立相對於腔室16外部之環境壓力的負壓(例如,真空),以去除載有顆粒的流體。因此,真空引起的高速空氣交叉流動典型呈現可通過施加的阻力來干擾及誤導流體射流Q1。流體流Q1因此在到達精整構件12時被破壞及較少集中。在圖8A中示意性地示出此種可能效果。相對地,圖8B示出與圖8A相似的配置,但包括管狀構件110a。在分配端124a及精整構件12之間建立第二間隙G2。第二間隙G2的距離小於第一間隙G1(圖8A)。提供給第一噴嘴通道90a的加壓流體流Q1再次由箭頭表示,及作為聚焦噴射或射流緊密接近精整構件12(因此緊密接近精整構件12及玻璃片(未示出)之間的期望接觸點)來離開分配端124a。管狀構件110a自上述交叉流動阻力屏蔽流體流Q1。藉由儘可能靠近精整構件12來噴射流體流Q1,加壓流體流Q的速度被保持並因此更容易地破壞精整構件12周圍產生的空氣屏障。因此,與圖8A的情況相比下,流體流Q1更集中於到達精整構件12。An additional benefit demonstrated by a comparison of FIGS. 4B and 7 is that the dispensing end 124a-124c of each tubular member 110a-110c is physically closer to the finishing member 12 than the corresponding opening 100a-100c. Therefore, the flow of the delivered or injected coolant is less likely to be interrupted. For example, FIG. 8A shows first nozzle channel 90a of finishing member 12 removed relative to first tubular member 110a (FIG. 7). The first gap G1 is defined as the linear distance between the opening 100 a and the finishing member 12 . The pressurized fluid flow (coolant) Q1 provided to the first nozzle passage 90a is indicated by the arrow and initially exits the opening 100a as a focused spray or jet and is directed towards the intended point of contact between the finishing member 12 and the glass sheet (not shown). Under typical glass sheet edge finishing conditions such as grinding or polishing, the finishing member 12 rotates at high speed, entraining air and creating a high velocity air flow around the finishing member. Additionally, as described above, a negative pressure (eg, vacuum) is established in chamber 16 (generally labeled) relative to the ambient pressure outside chamber 16 to remove particle laden fluid. Thus, vacuum-induced high-velocity air cross-flow typically appears to disturb and misdirect fluid jet Q1 through the applied drag. The fluid flow Q1 is thus disrupted and less concentrated upon reaching the finishing member 12 . Such a possible effect is schematically shown in Figure 8A. In contrast, Figure 8B shows a configuration similar to that of Figure 8A, but including a tubular member 110a. A second gap G2 is established between the dispensing end 124a and the finishing member 12 . The distance of the second gap G2 is smaller than that of the first gap G1 ( FIG. 8A ). The pressurized fluid flow Q1 provided to the first nozzle passage 90a is again indicated by the arrow and exits the dispensing end 124a as a focused spray or jet in close proximity to the finishing member 12 (and thus in close proximity to the desired point of contact between the finishing member 12 and the glass sheet (not shown)). Tubular member 110a shields fluid flow Q1 from the aforementioned cross-flow resistance. By injecting the fluid stream Q1 as close as possible to the finishing member 12, the velocity of the pressurized fluid stream Q is maintained and thus breaks the air barrier created around the finishing member 12 more easily. Accordingly, fluid flow Q1 is more focused on reaching finishing member 12 than in the case of FIG. 8A .

回到圖3,管狀構件110a-110c及112a-112c的尺寸、形狀或其他物理特性可彼此不同,及可基於相應分配端(例如,為圖3中的第一管狀構件110a所標記的分配端124a)之相對於精整構件12(圖1)的期望空間位置來個別選擇該等管狀構件的尺寸、形狀或其他物理特性,以用於特定的最終用途應用。在一些實施例中,管狀構件110a-110c及112a-112c中的一者、多於一者或全部可拆卸地組裝至對應的壁段50及壁段52。當期望的操作條件改變時,利用此種結構可替換管狀構件110a-110c及112a-112c中的一些或全部。例如,管狀構件110a-110c及112a-112c中的每者的有益長度可根據精整構件12的直徑或尺寸(例如,隨著時間的流逝,精整構件12經歷磨損及可減少外徑,及不同的精整操作意味使用不同配置或尺寸的精整構件等)、用於特定精整應用的精整構件12的旋轉速度,及基板相對於精整裝置10(圖1)行進的速度等而變化。3, the size, shape or other physical characteristics of the tubular members 110a-110c and 112a-112c can differ from each other and can be individually selected for a particular end-use application based on the desired spatial position of the respective dispensing end (e.g., dispensing end 124a labeled for first tubular member 110a in FIG. 3) relative to the finishing member 12 (FIG. 1). In some embodiments, one, more than one, or all of tubular members 110a - 110c and 112a - 112c are removably assembled to corresponding wall segments 50 and 52 . Utilizing this arrangement some or all of the tubular members 110a-110c and 112a-112c may be replaced as desired operating conditions change. For example, the beneficial length of each of tubular members 110a-110c and 112a-112c may vary depending on the diameter or size of finishing member 12 (e.g., finishing member 12 experiences wear and may reduce outer diameter over time, and different finishing operations mean using different configurations or sizes of finishing members, etc.), the rotational speed of finishing member 12 for a particular finishing application, the speed at which a substrate travels relative to finishing apparatus 10 ( FIG. 1 ), and the like.

在其他實施例中,本申請案的設備可經配置成自動調整或改變(多個)管狀構件的空間定向。例如,圖9A以簡化形式示出了根據本申請案之原理的精整設備200的另一實施例的部分。設備200可與上述設備10(圖1)高度相似,及該設備200包括護罩202、精整構件(未示出,但與上述精整構件12(圖1)相似)、至少一個管狀構件204、致動器206及控制器208。一般而言,管狀構件204自護罩202的一段伸出及經配置成由致動器206空間地操縱。控制器208電連接至致動器206及經配置(例如,經程式化)以選定方式提示致動器206的操作。In other embodiments, the apparatus of the present application may be configured to automatically adjust or change the spatial orientation of the tubular member(s). For example, FIG. 9A shows, in simplified form, portions of another embodiment of a finishing apparatus 200 in accordance with the principles of the present application. Apparatus 200 may be highly similar to apparatus 10 (FIG. 1) described above, and includes a shroud 202, a finishing member (not shown, but similar to finishing member 12 (FIG. 1) described above), at least one tubular member 204, an actuator 206, and a controller 208. In general, tubular member 204 protrudes from a section of shroud 202 and is configured to be spatially manipulated by actuator 206 . Controller 208 is electrically connected to actuator 206 and is configured (eg, programmed) to prompt operation of actuator 206 in a selected manner.

護罩202可具有上文關於護罩14(圖1)所描述的任何形式或特徵,及包括端接於主邊緣222的壁段220,該主邊緣222限定槽224(通常標記)的至少一部分,可通過該槽224來可滑動地接收玻璃片(未示出)。噴嘴通道226經限定在壁段220中。Shield 202 may have any of the forms or features described above with respect to shield 14 ( FIG. 1 ), and includes a wall segment 220 terminating in a major edge 222 that defines at least a portion of a slot 224 (generally labeled) through which a glass sheet (not shown) may be slidably received. Nozzle channels 226 are defined in wall segment 220 .

管狀構件204經由主邊緣222中的開口而經連接至噴嘴通道226及與噴嘴通道226流體連通,及限定了通向分配端232的中央通路230。如圖9A的實施例所示,分配端232相對於主邊緣222(及因此相對於精整構件(未示出))的空間位置或佈置係可調整的。在一些實施例中,管狀構件204經配置成(例如)經由圖9A所涉及的伸縮式結構而在長度上可擴展及縮回。亦可設想到其他的可擴展及縮回的結構,如藉由波紋管狀構件及鉸接機構等。在其他實施例中,管狀構件204及壁段220之間的連接形式可經配置成允許管狀構件204相對於主邊緣222的選擇性擴展/縮回(例如,管狀構件204可滑動地安裝至壁段220)。無論如何,管狀構件204可經鉸接以使分配端232相對於主邊緣222沿圖9A中的箭頭「L」所示的方向擴展或縮回。圖9B示出延伸佈置(即,與圖9A的佈置相比,分配端232已遠離主邊緣222移動)的管狀構件204的一實例。Tubular member 204 is connected to and in fluid communication with nozzle passage 226 via an opening in main edge 222 , and defines a central passage 230 that leads to dispensing end 232 . As shown in the embodiment of FIG. 9A , the spatial position or arrangement of the dispensing end 232 relative to the main edge 222 (and thus relative to the finishing member (not shown)) is adjustable. In some embodiments, tubular member 204 is configured to be expandable and retractable in length, such as via the telescoping configuration referred to in FIG. 9A. Other expandable and retractable structures are also conceivable, such as by means of bellows-like members, hinge mechanisms, and the like. In other embodiments, the form of connection between tubular member 204 and wall segment 220 may be configured to allow selective expansion/retraction of tubular member 204 relative to major edge 222 (eg, tubular member 204 is slidably mounted to wall segment 220 ). Regardless, tubular member 204 may be hinged to expand or retract dispensing end 232 relative to major edge 222 in the direction indicated by arrow "L" in FIG. 9A. FIG. 9B shows an example of tubular member 204 in an extended arrangement (ie, dispensing end 232 has been moved away from main edge 222 as compared to the arrangement of FIG. 9A ).

另外或作為提供擴展及縮回的替代方式,管狀構件204及/或管狀構件204與壁段220之間的連接形式可經配置成允許分配端232相對於主邊緣222的橫向偏轉或鉸接。例如,可在管狀構件204及壁段220之間建立鉸接或樞轉連接(例如,球接頭)。替代地或額外地,管狀構件204可包括多個可彼此樞轉連接的元件或段及多個可撓的元件或段等等。無論如何,管狀構件204可經鉸接以使分配端232沿任何相對於主邊緣222的(如圖9A中的箭頭「T」所通常指示的)橫向方向偏轉。圖9C示出了橫向鉸接佈置(與圖9B的佈置相比)的管狀構件204的一實例。Additionally or as an alternative to providing expansion and retraction, tubular member 204 and/or the form of connection between tubular member 204 and wall segment 220 may be configured to allow lateral deflection or articulation of dispensing end 232 relative to main edge 222 . For example, a hinged or pivotal connection (eg, a ball joint) may be established between tubular member 204 and wall segment 220 . Alternatively or additionally, the tubular member 204 may comprise a plurality of elements or segments pivotally connected to one another, a plurality of flexible elements or segments, and the like. Regardless, tubular member 204 may be hinged to deflect dispensing end 232 in any lateral direction relative to major edge 222 (as generally indicated by arrow "T" in FIG. 9A ). Figure 9C shows an example of a tubular member 204 in a transversely hinged arrangement (compared to the arrangement of Figure 9B).

回到圖9A,致動器206可採取適於相對於主邊緣222調整管狀構件204的各種形式,及將根據管狀構件204的具體設計而變化。例如,致動器206可為或包括伺服馬達,該伺服馬達以使伺服馬達的操作相對於另一元件來移動管狀構件204的至少一個元件的方式而經機械地連接至管狀構件204的一或更多個元件。其他致動器形式係可同樣接受的(例如,基於液壓的致動器及基於氣動的致動器等)。在設備200包括複數個管狀構件204的情況下,可為每個管狀構件204設置單一個致動器206。Returning to FIG. 9A , the actuator 206 may take various forms suitable for adjusting the tubular member 204 relative to the major edge 222 and will vary depending on the particular design of the tubular member 204 . For example, actuator 206 may be or include a servomotor mechanically connected to one or more elements of tubular member 204 in such a manner that operation of the servomotor moves at least one element of tubular member 204 relative to another element. Other actuator forms are equally acceptable (eg, hydraulic-based actuators and pneumatic-based actuators, etc.). Where the apparatus 200 includes a plurality of tubular members 204 , a single actuator 206 may be provided for each tubular member 204 .

控制器208可為或包括電腦或電腦類型的裝置(例如,可程式化邏輯控制器)。控制器208可包括處理器及通信耦合至該處理器的記憶體。電腦可讀取指令集可儲存在記憶體中,及當由處理器執行該電腦可讀取指令集時,該電腦可讀取指令集至少向致動器206提供指令,從而修改分配端232相對於主邊緣222的空間位置。可選地程式化控制器208 (例如,硬體、軟體及電路元件等),以用預定方式促使致動器206的操作。例如,控制器208可經程式化成以基於精整構件的特定格式(例如,尺寸及凹槽的數量等)及基於精整構件之預期的或感測到的磨損等,來促使致動器206以預定方式擴展或縮回管狀構件204。在一些實施例中,控制器208可利用一或更多個演算法及/或查找表來經程式化,該一或更多個演算法及/或查找表將分配端232相對於主邊緣222之預定空間位置相關於精整構件的操作時間(例如,當首次安裝新的精整部件時,(多個)演算法及/或(多個)查找表辨識分配端232的第一空間位置;在其中使用精整構件來精整基板邊緣的第一時間段後,(多個)演算法及/或(多個)查找表來辨識分配端232的第二空間位置,該第二空間位置通常遠離主邊緣222(與第一空間位置相比);在接下來之其中進一步使用精整構件來精整基板邊緣的第二時間段後,(多個)演算法及/或(多個)查找表辨識分配端232的第三空間位置,該第三空間位置通常遠離主邊緣222(與第二空間位置相比)及等等)。在其他實施例中,控制器208可包括使用者輸入裝置或由使用者輸入設備組成,使用者可在使用者輸入裝置上選擇管狀構件204的期望空間佈置。控制器208可藉由有線連接或無線連接來電連接至致動器206。在一些實施例中,控制器208可為經操作以控制設備200及/或設備200被安裝在其上的精整系統的其他操作的控制器。Controller 208 may be or include a computer or computer-type device (eg, a programmable logic controller). Controller 208 may include a processor and memory communicatively coupled to the processor. A set of computer readable instructions may be stored in memory and, when executed by the processor, provide instructions to at least actuator 206 to modify the spatial position of dispensing end 232 relative to primary edge 222. Controller 208 (eg, hardware, software, circuit elements, etc.) may optionally be programmed to cause operation of actuator 206 in a predetermined manner. For example, the controller 208 may be programmed to cause the actuator 206 to expand or retract the tubular member 204 in a predetermined manner based on the particular format of the finishing member (e.g., size and number of grooves, etc.) and based on expected or sensed wear of the finishing member, etc. In some embodiments, the controller 208 may be programmed with one or more algorithms and/or lookup tables that relate predetermined spatial positions of the dispensing end 232 relative to the primary edge 222 to the time of operation of the finishing member (e.g., when a new finishing component is first installed, the algorithm(s) and/or lookup table(s) identify a first spatial position of the dispensing end 232; after a first period of time in which the finishing member is used to finish the substrate edge, The algorithm(s) and/or lookup table(s) to identify a second spatial location of the dispensing end 232 that is generally farther from the main edge 222 (as compared to the first spatial location); following a second period of time in which the finishing member is further used to finish the edge of the substrate, the algorithm(s) and/or lookup table(s) to identify a third spatial location of the dispensing end 232 that is generally farther from the main edge 222 (as compared to the second spatial location and so on). In other embodiments, the controller 208 may include or consist of a user input device on which a user may select a desired spatial arrangement of the tubular member 204 . The controller 208 may be electrically connected to the actuator 206 via a wired connection or a wireless connection. In some embodiments, controller 208 may be a controller operable to control other operations of apparatus 200 and/or a finishing system on which apparatus 200 is installed.

回到圖1,本申請案的方法包括以下步驟:操作設備10來處理基板的邊緣(例如,玻璃片的邊緣)。在一些實施例中,及額外參考圖10,邊緣處理設備10中的一或更多者可經設置成邊緣處理系統300的部分,該邊緣處理系統300進一步包括所屬技術領域中已知類型的傳送裝置302。傳送裝置302操作以朝向邊緣處理設備10傳送玻璃片304(或其他基板)。當沿圖10中的箭頭所示的方向連續傳送玻璃片304時,玻璃片304的邊緣306經由槽40(通常標記)進入護罩14。在一些實施例中,系統300可包括一或更多個額外的處理設備,該一或更多個額外的處理設備係用於處理玻璃片304的相對邊緣308及用於設備10下游的額外邊緣處理等等。無論如何,參考圖11,在進入護罩14時,邊緣306與正以其他方式驅動(例如,旋轉)的精整構件12接觸,以獲得所需的處理(例如,研磨或拋光)。同時,冷卻劑流Q1 (由箭頭表示)經輸送至噴嘴通道90a。冷卻劑流Q1被迫通過管狀構件110a的中心通路120a,接著經由分配端124a而經引導或注入至精整構件12及邊緣306之間的界面310上。亦可將冷卻劑自經設置的其他管狀構件(未示出)注入至界面310上。本申請案的方法進一步可選地包括以下步驟:週期性地如上所述地調整管狀構件110a相對於主邊緣60(及因此相對於精整構件12)的空間佈置。在一些實施例中,根據精整構件12的磨損來自動執行管狀構件110a的調整。Returning to FIG. 1 , the method of the present application includes the steps of operating apparatus 10 to process the edge of a substrate (eg, the edge of a glass sheet). In some embodiments, and with additional reference to FIG. 10 , one or more of the edge processing devices 10 may be arranged as part of an edge processing system 300 further comprising a delivery device 302 of a type known in the art. Conveyor 302 operates to convey glass sheet 304 (or other substrate) toward edge processing apparatus 10 . Edge 306 of glass sheet 304 enters shroud 14 via slot 40 (generally labeled) as glass sheet 304 is continuously conveyed in the direction indicated by the arrow in FIG. 10 . In some embodiments, the system 300 may include one or more additional processing devices for processing the opposite edge 308 of the glass sheet 304 and for additional edge processing downstream of the apparatus 10, among others. Regardless, referring to FIG. 11 , upon entering the shroud 14 , the edge 306 contacts the finishing member 12 which is otherwise being driven (eg, rotated) to obtain the desired treatment (eg, grinding or polishing). Simultaneously, the coolant flow Q1 (indicated by the arrow) is delivered to the nozzle channel 90a. Coolant flow Q1 is forced through central passage 120a of tubular member 110a and then directed or injected via dispensing end 124a onto interface 310 between finishing member 12 and edge 306 . Coolant may also be injected onto the interface 310 from other provided tubular members (not shown). The method of the present application further optionally includes the step of periodically adjusting the spatial arrangement of the tubular member 110a relative to the main edge 60 (and thus relative to the finishing member 12 ) as described above. In some embodiments, the adjustment of tubular member 110a is performed automatically based on the wear of finishing member 12 .

在不背離所要求保護發明之範疇的情況下,可對本文所描述的實施例進行各種修改和變化。因此,本說明書係意欲包含本文中所描述之各種實施例的修改及變化(只要此類修改及變化落入附加申請專利範圍及其等同物的範疇內即可)。Various modifications and changes may be made to the embodiments described herein without departing from the scope of the claimed invention. Accordingly, this specification is intended to cover modifications and variations of the various embodiments described herein (provided such modifications and variations come within the scope of the appended claims and their equivalents).

10‧‧‧設備12‧‧‧精整構件14‧‧‧護罩16‧‧‧腔室18‧‧‧入口端20‧‧‧馬達30‧‧‧蓋32‧‧‧基部34‧‧‧鉸鏈36‧‧‧排氣管道38‧‧‧排氣通路40‧‧‧槽50‧‧‧第一壁段52‧‧‧第二壁段60‧‧‧第一主邊緣62‧‧‧第二主邊緣70‧‧‧外部面72‧‧‧內部面80‧‧‧管狀構件80’‧‧‧管狀構件90a‧‧‧第一噴嘴通道90b‧‧‧第二噴嘴通道90c‧‧‧第三噴嘴通道92a‧‧‧第一噴嘴通道92b‧‧‧第二噴嘴通道92c‧‧‧第三噴嘴通道100a‧‧‧第一開口100b‧‧‧第二開口100c‧‧‧第三開口102a‧‧‧第一開口102b‧‧‧第二開口102c‧‧‧第三開口110a‧‧‧第一管狀構件110b‧‧‧第二管狀構件110c‧‧‧第三管狀構件120a‧‧‧中央通路122a‧‧‧入口端124a‧‧‧分配端124b‧‧‧分配端124c‧‧‧分配端200‧‧‧設備202‧‧‧護罩204‧‧‧管狀構件206‧‧‧致動器208‧‧‧控制器220‧‧‧壁段222‧‧‧主邊緣224‧‧‧槽226‧‧‧噴嘴通道230‧‧‧中央通路232‧‧‧分配端300‧‧‧邊緣處理系統302‧‧‧傳送裝置304‧‧‧玻璃片306‧‧‧邊緣308‧‧‧邊緣310‧‧‧界面10‧‧‧equipment 12‧‧‧finishing member 14‧‧‧shroud 16‧‧‧chamber 18‧‧‧inlet port 20‧‧‧motor 30‧‧‧cover 32‧‧‧base 34‧‧‧hinge 36‧‧‧exhaust duct 38‧‧‧exhaust passageway 40‧‧‧groove 50‧‧‧first wall section 52‧‧‧second wall section 60‧‧‧first main edge 62‧second main edge 70‧‧external face 7 2‧‧‧inner surface 80‧‧‧tubular member 80'‧‧‧tubular member 90a‧‧‧first nozzle passage 90b‧‧‧second nozzle passage 90c‧‧‧third nozzle passage 92a‧‧‧first nozzle passage 92b‧‧‧second nozzle passage 92c‧‧‧third nozzle passage 100a‧‧‧first opening 100b‧‧‧second opening 100c‧‧‧third opening 102a‧‧‧first opening 102b‧‧‧second opening 1 02c‧‧‧third opening 110a‧‧‧first tubular member 110b‧‧‧second tubular member 110c‧‧‧third tubular member 120a‧‧‧central passage 122a‧‧‧inlet end 124a‧‧‧dispensing end 124b‧‧‧dispensing end 124c‧‧‧dispensing end 200‧‧‧equipment 202‧‧‧shroud 204‧‧‧tubular member 206‧‧‧actuator 208‧ ‧‧controller 220‧‧‧wall section 222‧‧main edge 224‧‧‧groove 226‧‧‧nozzle channel 230‧‧‧central channel 232‧‧‧dispensing end 300‧‧‧edge processing system 302‧‧‧transfer device 304‧‧‧glass sheet 306‧‧‧edge 308‧‧‧edge 310‧‧‧interface

圖1為根據本申請案之原理的邊緣處理設備的透視圖;Figure 1 is a perspective view of an edge processing device according to the principles of the present application;

圖2為圖1設備的一部分的簡化橫截面圖;Figure 2 is a simplified cross-sectional view of a portion of the apparatus of Figure 1;

圖3為圖1設備的部分的放大透視圖,該等部分包括護罩壁段及管狀構件;Figure 3 is an enlarged perspective view of portions of the apparatus of Figure 1, the portions including shroud wall sections and tubular members;

圖4A為圖3的護罩壁段的放大透視圖;Figure 4A is an enlarged perspective view of the shield wall section of Figure 3;

圖4B為圖3的管狀構件被移除之圖1設備的一部分的俯視平面圖;Figure 4B is a top plan view of a portion of the apparatus of Figure 1 with the tubular member of Figure 3 removed;

圖5為圖3的壁段和管狀構件之放大的簡化橫截面圖;Figure 5 is an enlarged simplified cross-sectional view of the wall section and tubular member of Figure 3;

圖6為根據本申請案之原理的替代管狀構件之放大的簡化橫截面圖,該替代管狀構件係經組裝至圖5的壁段;6 is an enlarged simplified cross-sectional view of an alternative tubular member assembled to the wall segment of FIG. 5 in accordance with the principles of the present application;

圖7為圖1設備之一部分的簡化俯視平面圖;Figure 7 is a simplified top plan view of a portion of the apparatus of Figure 1;

圖8A及圖8B為圖1設備的一部分之放大的簡化橫截面圖,及示出沒有管狀構件及有管狀構件情況下之冷卻劑輸送的流動模式;8A and 8B are enlarged simplified cross-sectional views of a portion of the apparatus of FIG. 1 and illustrate flow patterns for coolant delivery without and with tubular members;

圖9A為根據本申請案之原理的另一邊緣處理設備的一部分之放大的簡化橫截面圖,其中部分以方塊形式示出;9A is an enlarged simplified cross-sectional view, partially shown in block form, of a portion of another edge processing apparatus in accordance with the principles of the present application;

圖9B為圖9A設備之放大的簡化橫截面圖,及圖9B示出了不同於圖9A之佈置的設備的管狀構件元件的替代佈置;Fig. 9B is an enlarged simplified cross-sectional view of the apparatus of Fig. 9A, and Fig. 9B shows an alternative arrangement of tubular member elements of the apparatus different from the arrangement of Fig. 9A;

圖9C為圖9A設備之放大的簡化橫截面圖,及圖9C示出了不同於圖9A之佈置及圖9B之佈置的管狀構件元件的另一替代佈置;Fig. 9C is an enlarged simplified cross-sectional view of the apparatus of Fig. 9A, and Fig. 9C shows another alternative arrangement of tubular member elements different from the arrangement of Fig. 9A and the arrangement of Fig. 9B;

圖10為包括處理玻璃片中之圖1設備的玻璃邊緣處理系統的一部分的簡化俯視平面圖;及10 is a simplified top plan view of a portion of a glass edge processing system including the apparatus of FIG. 1 in processing glass sheets; and

圖11為包括正在由設備所處理之玻璃片的邊緣之圖10系統的一部分之放大的簡化橫截面圖。11 is an enlarged simplified cross-sectional view of a portion of the system of FIG. 10 including the edge of a glass sheet being processed by the apparatus.

國內寄存資訊 (請依寄存機構、日期、號碼順序註記) 無Domestic deposit information (please note in order of depositor, date, and number) None

國外寄存資訊 (請依寄存國家、機構、日期、號碼順序註記) 無Overseas storage information (please note in order of storage country, institution, date, number) None

50‧‧‧第一壁段 50‧‧‧first wall section

52‧‧‧第二壁段 52‧‧‧Second wall section

60‧‧‧第一主邊緣 60‧‧‧First main edge

62‧‧‧第二主邊緣 62‧‧‧Second main edge

80‧‧‧管狀構件 80‧‧‧tubular member

90a‧‧‧第一噴嘴通道 90a‧‧‧The first nozzle channel

90b‧‧‧第二噴嘴通道 90b‧‧‧Second Nozzle Channel

90c‧‧‧第三噴嘴通道 90c‧‧‧The third nozzle channel

92a‧‧‧第一噴嘴通道 92a‧‧‧The first nozzle channel

92b‧‧‧第二噴嘴通道 92b‧‧‧The second nozzle channel

92c‧‧‧第三噴嘴通道 92c‧‧‧The third nozzle channel

110a‧‧‧第一管狀構件 110a‧‧‧first tubular member

110b‧‧‧第二管狀構件 110b‧‧‧second tubular member

110c‧‧‧第三管狀構件 110c‧‧‧The third tubular member

124a‧‧‧分配端 124a‧‧‧distribution terminal

Claims (8)

一種用於處理一基板片材的一邊緣的設備,該設備包括:一精整構件,該精整構件用於處理該基板片材的該邊緣;一護罩,該護罩限定一腔室,該精整構件可旋轉地保持在該腔室中,該護罩包括:一第一壁段,該第一壁段端接於該第一壁段的一第一主邊緣,一第二壁段,該第二壁段端接於與該第一壁段的該第一主邊緣相對的該第二壁段的一第二主邊緣,其中該第一主邊緣及該第二主邊緣組合以限定通向該腔室的一槽的至少一部分,及該第一主邊緣及該第二主邊緣經配置成可滑動地接收該基板片材的該邊緣以與該精整構件接合,及進一步其中該第一壁段限定用於輸送流體的一第一噴嘴通道,該第一噴嘴通道端接於該第一主邊緣中的一第一開口;及進一步其中該第一壁段進一步限定相對的外部面及內部面,及該第一主邊緣在該外部面及該內部面之間延伸及鄰接該外部面及該內部面;及一第一管狀構件,該第一管狀構件從該第一主邊緣 突出及限定與該第一噴嘴通道流體連通的一通路,該第一管狀構件經配置成將來自該第一噴嘴通道的一冷卻劑的一流引導至該精整構件上,其中該第一管狀構件相對於該第一主邊緣的一佈置是可調整的。 An apparatus for processing an edge of a substrate sheet, the apparatus comprising: a finishing member for processing the edge of the substrate sheet; a shield defining a chamber in which the finishing member is rotatably retained, the shield comprising: a first wall segment terminating at a first major edge of the first wall segment, a second wall segment terminating at a second major edge of the second wall segment opposite the first major edge of the first wall segment edge, wherein the first major edge and the second major edge combine to define at least a portion of a slot leading to the chamber, and the first major edge and the second major edge are configured to slidably receive the edge of the substrate sheet for engagement with the finishing member, and further wherein the first wall segment defines a first nozzle channel for delivering fluid, the first nozzle channel terminating in a first opening in the first major edge; extending between and adjacent to the outer face and the inner face; and a first tubular member extending from the first major edge Projecting and defining a passageway in fluid communication with the first nozzle passage, the first tubular member configured to direct a flow of coolant from the first nozzle passage onto the finishing member, wherein an arrangement of the first tubular member relative to the first major edge is adjustable. 如請求項1所述之設備,其中該第一管狀構件端接於與該第一主邊緣相對的一分配端處,及該分配端與該精整構件之間的一距離小於該第一主邊緣與該精整構件之間的一距離。 The apparatus of claim 1, wherein the first tubular member terminates at a dispensing end opposite the first major edge, and a distance between the dispensing end and the finishing member is less than a distance between the first major edge and the finishing member. 如請求項1所述之設備,其中用於輸送流體的一第二噴嘴通道經限定在該第一壁段中,該第二噴嘴通道與該第一噴嘴通道間隔開並端接於該第一主邊緣中的一第二開口,該設備進一步包括從該第一主邊緣突出及限定與該第二開口流體連通的一通路的一第二管狀構件。 The apparatus of claim 1, wherein a second nozzle passage for delivering fluid is defined in the first wall segment, the second nozzle passage being spaced apart from the first nozzle passage and terminating in a second opening in the first major edge, the apparatus further comprising a second tubular member protruding from the first major edge and defining a passageway in fluid communication with the second opening. 如請求項1所述之設備,其中用於輸送流體的一第二噴嘴通道被限定在該第二壁段中,該第二噴嘴通道端接於該第二主邊緣中的一第二開口處,該設備進一步包括一第二管狀構件,該第二管狀構件自該第二主邊緣突出及限定與該第二開口流體連通的一通道。 The apparatus of claim 1, wherein a second nozzle channel for delivering fluid is defined in the second wall segment, the second nozzle channel terminating at a second opening in the second major edge, the apparatus further comprising a second tubular member protruding from the second major edge and defining a channel in fluid communication with the second opening. 一種處理一基板片材的一邊緣的方法,該方法 包括以下步驟:將該基板片材的該邊緣引導通過一處理設備的一護罩中的一槽及進入該護罩的一腔室中,該槽至少部分地由該護罩的一壁段的一主邊緣限定,該主邊緣在相對的外部面及內部面之間延伸並鄰接該相對的外部面及內部面;用佈置在該腔室內的一精整構件處理該基板片材的該邊緣;在該處理步驟期間,通過從該主邊緣突出的一管狀構件將一冷卻劑流引導至該基板片材的該邊緣及該精整構件之間的一界面上,該管狀構件限定與一噴嘴通道流體連通之在該壁段中定義的一中央通路,及調整該管狀構件相對於該主邊緣的一佈置。 A method of processing an edge of a substrate sheet, the method comprising the steps of: directing the edge of the substrate sheet through a slot in a shield of a processing apparatus and into a chamber of the shield, the slot being at least partially defined by a major edge of a wall section of the shield extending between and adjoining opposing outer and inner faces; treating the edge of the substrate sheet with a finishing member disposed within the chamber; Leading to an interface between the edge of the substrate sheet and the finishing member, the tubular member defining a central passageway defined in the wall segment in fluid communication with a nozzle passage, and adjusting an arrangement of the tubular member relative to the major edge. 如請求項5所述之方法,其中該調整步驟包括以下步驟:改變該管狀構件的一分配端與該主邊緣之間的一距離。 The method of claim 5, wherein the step of adjusting comprises the step of: changing a distance between a dispensing end of the tubular member and the main edge. 如請求項5所述之方法,其中該調整步驟包括以下步驟:改變該管狀構件的一中心軸相對於該主邊緣的一角關係。 The method as recited in claim 5, wherein the adjusting step includes the step of changing an angular relationship of a central axis of the tubular member with respect to the main edge. 如請求項5所述的方法,其中該調整步驟包括以下步驟:監測該精整構件的磨損;及 基於該精整構件的磨損來改變該管狀構件相對於該主邊緣的一空間佈置。The method of claim 5, wherein the step of adjusting comprises the steps of: monitoring wear of the finishing member; and A spatial arrangement of the tubular member relative to the major edge is altered based on wear of the finishing member.
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