JP6280809B2 - Grinding equipment - Google Patents

Description

  The present invention relates to a grinding apparatus for grinding a workpiece.

  A grinding apparatus for grinding a workpiece includes a holding table for holding the workpiece, a grinding means having a grinding wheel to which a grinding wheel is fixed in an annular shape, and grinding for supplying a grinding liquid to the workpiece and the grinding wheel. And at least a liquid supply means, and the upper surface of the workpiece is pressed and ground with a grinding wheel while the grinding liquid is supplied to the upper surface of the workpiece by the grinding liquid supply means. In such a grinding apparatus, since grinding is performed while supplying the grinding liquid between the upper surface of the workpiece and the grinding wheel by the grinding liquid supply means, grinding dust generated when the workpiece is ground with the grinding wheel. Can be removed. In addition, the grinding fluid is supplied to the processing area where the upper surface of the workpiece and the grinding surface of the grinding wheel come into contact with each other, so that the heat generated by the grinding is cooled to prevent the occurrence of surface burn and the workpiece to be ground. It is also possible to prevent the surface from being rough and finished.

  As the grinding liquid supply means, there is a type that has a nozzle disposed outside the grinding wheel and supplies the grinding liquid from the nozzle to the grinding wheel and the workpiece (for example, Patent Document 1 below). reference). There is also a type that supplies a grinding fluid to a grinding wheel and a workpiece through a grinding fluid supply path formed inside the grinding wheel (see, for example, Patent Document 2 below).

Japanese Patent Laid-Open No. 07-223152 Japanese Utility Model Publication No. 07-031268

  However, when grinding a workpiece in the grinding apparatus as described above, there is a problem that an air layer is formed around the grinding wheel by the rotation of the grinding wheel, so that the grinding liquid does not easily reach the grinding wheel. In addition, the grinding fluid that collides with the rotating grinding wheel scatters to the surrounding area, so that the grinding fluid is not efficiently supplied to the machining area, and the cutting waste contained in the grinding fluid scatters and adheres to the workpiece. There is also a problem that it ends up.

  The present invention has been made in view of the above-described circumstances, and an object thereof is to enable a grinding liquid to be supplied to a processing region more effectively than in the past.

  The present invention provides a grinding table including a holding table that holds a workpiece and is rotatable in a predetermined direction, and a grinding wheel including a grinding wheel disposed in an annular shape for grinding the workpiece held by the holding table. And a grinding fluid supply means for supplying a grinding fluid to the workpiece and the grinding wheel, wherein the grinding fluid supply means acts on the workpiece by the grinding wheel. A grinding fluid supply port for supplying a grinding fluid from the grinding wheel in the arcuate machining region to the upper surface of the workpiece from the rear side in the rotation direction of the holding table, and the grinding fluid supply port and the arcuate machining region A predetermined interval is provided on the upper surface side of the workpiece between the grinding wheel and the grinding fluid supplied from the grinding fluid supply port to the upper surface of the workpiece is rotated along with the rotation of the holding table. An upper wall portion for forming a grinding fluid supply layer that flows toward the grinding wheel The grinding fluid supply portion is disposed so as to be rotatable about an axis parallel to the chord of the arcuate machining region, and the upper wall portion is supplied with the grinding fluid at a constant pressure. The layer is pressed against the upper surface of the workpiece.

  In the grinding wheel, a plurality of grinding wheels are arranged in an annular shape at a free end of a base with a predetermined distance from each other, and the grinding fluid supply means is forward of the holding table in the rotational direction from the arcuate processing region. A suction portion disposed on the side and having a suction port for sucking the grinding fluid supplied to the upper surface of the workpiece from the grinding fluid supply port and discharged to the outside of the grinding wheel after reaching the arcuate processing region; Prepare.

The grinding fluid supply means provided in the grinding apparatus of the present invention supplies the grinding fluid toward the upper surface of the workpiece on the rear side in the rotation direction of the holding table from the arc-shaped machining area where the grinding wheel acts on the workpiece. A grinding fluid supply port, and a grinding fluid supply unit including a grinding fluid supply port and an upper wall portion having a predetermined interval on the upper surface side of the workpiece between the grinding fluid supply port and the grinding wheel in the arc-shaped machining area. Therefore, during grinding of the workpiece, the grinding fluid supplied to the upper surface of the workpiece flows between the upper wall portion and the upper surface of the workpiece as the holding table rotates, and the arc-shaped machining area A grinding fluid supply layer that flows around the grinding wheel is formed. Thereby, since the layer of air generated around the rotating grinding wheel is blocked by the grinding fluid supply layer, the grinding fluid can sufficiently reach the arcuate processing region.
Further, since the grinding fluid supply means supplies the grinding fluid from the grinding fluid supply port toward the upper surface of the workpiece, the possibility that the grinding fluid collides with the side wall of the grinding wheel and is scattered around is reduced. Therefore, it is possible to suppress the amount of the grinding fluid used compared to the prior art and to effectively supply the grinding fluid to the processing region. Furthermore, it is possible to prevent the grinding liquid containing the grinding scraps from scattering and the grinding scraps from adhering to the workpiece.
Further, since the grinding fluid supply section is disposed so as to be rotatable around an axis parallel to the chord in the arc-shaped machining area, the upper wall portion is ground with a predetermined pressure against the upper surface of the workpiece. Can be used to minimize the cross-sectional area of the space defined by the upper surface and the upper wall of the workpiece, and the flow rate of the grinding fluid supply layer can be optimized according to the rotation speed of the holding table. Can be set. Therefore, it is possible to suppress the amount of the grinding fluid to be used and supply the grinding fluid to the arcuate machining region effectively.

It is a perspective view which shows an example of a grinding device. It is a perspective view which shows the structure of the grinding fluid supply means arrange | positioned between a holding table and the grinding wheel. It is sectional drawing explaining the structure and operation state of a grinding fluid supply means. It is a top view explaining the state which grinds a workpiece, supplying a grinding fluid to a workpiece with a grinding fluid supply means. It is sectional drawing explaining the structure and operation state of the modification of a grinding fluid supply means. It is sectional drawing which shows a structure.

  A grinding device 1 shown in FIG. 1 is an example of a grinding device that grinds a workpiece, and has a device base 2 that extends in the Y-axis direction. On the upper surface 2a of the apparatus base 2, a cassette 4a for accommodating a workpiece before grinding and a cassette 4b for accommodating a workpiece after grinding are disposed. Between the cassette 4a and the cassette 4b, there is disposed a conveying means 5 for carrying out the workpiece before grinding from the cassette 4a and carrying the workpiece after grinding into the cassette 4b. Temporary placing means 6 for temporarily placing the workpiece and cleaning means 7 for washing the workpiece after grinding are disposed in the movable region of the conveying means 5.

  The apparatus base 2 is provided with a holding table 10 that holds a workpiece and can rotate in a predetermined direction. The periphery of the holding table 10 is covered by a cover 11, and the holding table 10 can reciprocate in the Y-axis direction together with the cover 11 with the expansion and contraction of the bellows 9 extending in the Y-axis direction. In the vicinity of the temporary placement means 6, a first transport means 8 a for transporting the workpiece before grinding from the temporary placement means 6 to the holding table 10 is disposed. In addition, a second transport unit 8b is disposed adjacent to the first transport unit 8a to transport the workpiece after grinding from the holding table 10 to the cleaning unit 7.

  A column 3 extending in the Z-axis direction is erected on the rear side of the apparatus base 2 in the Y-axis direction, and a grinding means 20 for grinding the workpiece on the side of the column 3 via the elevating means 30 is provided. It is arranged. The grinding means 20 includes a spindle 21 (shown in FIG. 2) having an axis in the Z-axis direction, a spindle housing 22 that rotatably surrounds the spindle 21, a support portion 27 that supports the spindle housing 22, and the spindle 21. A motor 23 connected to one end of the motor, a grinding wheel 25 mounted at the lower end of the spindle 21 via a mount 24, and a free end (lower part) of the grinding wheel 25 fixed in an annular shape with a predetermined distance from each other. And a plurality of grinding wheels 26. The grinding means 20 can rotate the grinding wheel 25 at a predetermined rotational speed by being driven by the motor 23.

  The elevating means 30 includes a ball screw 31 extending in the Z-axis direction, a motor 32 connected to one end of the ball screw 31, a pair of guide rails 33 extending in parallel with the ball screw 31, and one surface supporting the spindle housing 22. And an elevating plate 34 connected to the portion 27. A pair of guide rails 33 are in sliding contact with the other surface of the lifting plate 34. A ball screw 31 is screwed into a nut formed at the center of the lifting plate 34. When the ball screw 31 is rotated by being driven by the motor 32, the lifting plate 34 can be moved up and down in the Z-axis direction along the pair of guide rails 33, and the grinding means 20 can be moved up and down in the Z-axis direction.

  The grinding apparatus 1 includes a grinding fluid supply means 40 that supplies a grinding fluid to a workpiece held by the retaining table 10 and the grinding wheel 26 of the grinding means 20 between the retaining table 10 and the grinding wheel 26. . As shown in FIG. 2, the grinding fluid supply means 40 is disposed facing the workpiece held on the holding table 10, and a grinding fluid supply unit 41 that supplies the grinding fluid toward the upper surface of the workpiece. And a support member 42 that supports the grinding fluid supply unit 41.

  As shown in FIG. 3, the grinding fluid supply unit 41 is a grinding fluid supply port that supplies grinding fluid toward the upper surface of the workpiece W in the arc-shaped machining region 100 where the grinding wheel 26 acts on the workpiece. 43 and an upper wall portion 44 that forms a space 440 having a predetermined interval on the upper surface Wa side of the workpiece W between the grinding fluid supply port 43 and the grinding wheel 26 in the arc-shaped processing region 100. Yes. The upper wall portion 44 is the lower surface of the grinding fluid supply unit 41. The arcuate machining region 100 refers to a region of the grinding wheel rotation locus 200 shown in FIG. 4 where the grinding wheel 26 presses the upper surface Wa of the workpiece W and exerts a grinding action in an arc shape. Although not clearly shown in FIG. 3, the holding surface 10 a that holds the workpiece W in the holding table 10 is a conical surface with a gentle gradient with the center as the apex (for example, a difference in height between the apex and the cross-sectional bottom with a diameter of 200 mm). And the axis of the spindle 21 is relative to the rotation axis of the holding table 10 so that the holding surface 10a and the grinding surface 260 of the grinding wheel 26 are parallel to each other in the arcuate processing region 100. Therefore, the grinding wheel 26 comes into contact with the upper surface Wa of the workpiece W and is ground in the arc-shaped machining region 100 shown in FIG. In other words, half of the grinding wheel 26 positioned above the workpiece W acts on the upper surface Wa of the workpiece W to perform grinding.

  For example, as shown in FIG. 4, the grinding fluid supply port 43 is composed of a plurality of ejection holes 430, and is formed along the arcuate processing region 100. A grinding fluid supply source (not shown) is connected to the grinding fluid supply port 43. The upper wall portion 44 shown in FIG. 3 applies the grinding fluid supplied from the grinding fluid supply port 43 to the upper surface Wa of the workpiece W to the grinding wheel 26 located in the arcuate processing region 100 as the holding table 10 rotates. Can flow toward. That is, the grinding fluid supply layer 50 that flows around the arc-shaped machining region 100 can be formed by the grinding fluid flowing along the space defined by the upper wall portion 44 and the upper surface Wa of the workpiece W. . The grinding fluid supply layer 50 has a function of blocking an air layer generated by the rotation of the grinding wheel 26.

  As shown in FIG. 3, the grinding fluid supply unit 41 is pivotally supported by a rotating shaft 45 provided at the upper end of the support member 42. As shown in FIG. 4, the rotating shaft 45 is an axis extending in parallel with the chord 101 of the arcuate machining region 100, and the grinding fluid supply unit 41 is disposed so as to be rotatable around the rotating shaft 45. Yes. Then, the grinding fluid supply unit 41 can be rotated around the rotation shaft 45, and the grinding fluid supply layer 50 flowing on the upper surface Wa of the workpiece W can be pressed by the upper wall portion 44 with a constant pressure. The upper wall portion 44 may be configured to press the grinding fluid supply layer 50 by its own weight, or may be configured to press the grinding fluid supply layer 50 by pressing the upper wall portion 44.

  Although not shown, the grinding fluid supply means 40 is provided with an elevating mechanism, and the elevating mechanism moves the grinding fluid supply portion 41 in the vertical direction so that the height of the upper wall portion 44 depends on the thickness of the workpiece. You may make it adjust.

  A grinding fluid supply means 40a shown in FIG. 5 is a modification of the grinding fluid supply means 40 described above. The grinding fluid supply means 40a is configured so that the grinding fluid supplied from the grinding fluid supply port 43 to the upper surface Wa of the workpiece W from the grinding wheel 26 located in the arc-shaped processing region 100 toward the front side in the rotation direction of the holding table 10 is supplied. After reaching the arcuate processing region 100, there is provided a suction portion 46 for sucking the grinding liquid discharged to the outside from between the adjacent grinding wheels 26. The suction unit 46 includes a suction port 460 that faces the workpiece held by the holding table 10, and a suction path 461 that has one end communicating with the suction port 460 and the other end connected to the suction source 48 via the valve 47. And. Since the grinding liquid supply means 40a has the same configuration as that of the grinding liquid supply means 40 except that the suction portion 46 is provided, the same components as those of the grinding liquid supply means 40 have the same reference numerals. A description thereof will be omitted.

  Next, an operation example of the grinding apparatus 1 shown in FIG. 1 will be described. The material to be processed W shown in FIG. 2 is not particularly limited, and the surface to be ground by the grinding wheel 26 is the upper surface Wa. A plurality of workpieces W before grinding are accommodated in the cassette 4a.

  First, the conveying means 5 takes out the workpiece W before grinding from the cassette 4 a and conveys it to the temporary placing means 6. After the workpiece W is aligned by the temporary placement means 6, the first transport means 8 a transports the work W to the holding table 10. Thereafter, the workpiece W is sucked and held on the holding table 10, and the cover 11 is moved in the Y-axis direction along with the expansion and contraction of the bellows 9, and the holding table 10 is moved below the grinding means 20 as shown in FIG. Let

  Then, while rotating the holding table 10 in the direction of the arrow B by a rotating means (not shown), the grinding wheel 25 is moved to the holding table 10 by the lifting / lowering means 30 shown in FIG. 1 while rotating the grinding wheel 25 in the direction of the arrow A, for example. The workpiece is lowered toward the held workpiece W. Thus, the grinding wheel 26 that descends while rotating grinds while pressing the upper surface Wa of the workpiece W as shown in FIG.

  During grinding of the workpiece W, the grinding fluid supply means 40 supplies the grinding fluid to the grinding wheel 26 and the upper surface Wa of the workpiece W. Specifically, the grinding fluid supply source is activated, and the grinding fluid is supplied from the grinding fluid supply port 43 toward the upper surface Wa of the workpiece W on the rear side in the rotation direction of the holding table 10. As shown in FIG. 4, the grinding fluid supply port 43 is located on the rear side (upstream side) in the rotation direction of the holding table 10 with respect to the arcuate processing region 100, and the grinding fluid is ejected from the ejection holes 430 at this position. To do. The grinding liquid ejected from the ejection holes 430 and supplied to the upper surface Wa of the workpiece W is ground in the space 440 between the upper wall portion 44 and the upper surface Wa of the workpiece W shown in FIG. A predetermined distance between the liquid supply port 43 and the grinding wheel 26 in the arc-shaped processing region 100 flows forward (downstream) in the rotation direction of the holding table 10. That is, the grinding fluid supplied from the grinding fluid supply port 43 to the upper surface Wa of the workpiece W flows with the grinding table 26 in the arcuate machining region 100 as the holding table 10 rotates. Form. Since the grinding fluid supply layer 50 blocks the air layer generated around the rotating grinding wheel 26, the grinding fluid is not prevented from reaching the arcuate processing region 100.

  The upper wall 44 increases the flow rate of the grinding fluid flowing toward the arcuate machining region 100 by pressing the grinding fluid supply layer 50 to reduce its cross-sectional area. Specifically, the grinding fluid supply unit 41 is rotated around the rotation shaft 45 and the upper wall 44 is moved in a direction approaching the upper surface Wa of the workpiece W held on the holding table 10. The grinding fluid supply layer 50 flowing on the upper surface Wa of the workpiece W is pressed by the wall 44 with a constant pressure, and the cross-sectional area of the space 440 defined by the upper surface Wa of the workpiece W and the upper wall 44 is reduced. By doing so, the flow rate of the grinding fluid flowing through the space 440 can be increased, and the grinding fluid can be efficiently supplied to the arc-shaped machining region 100. Note that the flow rate of the grinding fluid supplied to the arcuate processing region 100 is automatically set according to the rotation speed of the holding table. The grinding fluid supply unit 41 does not press the grinding fluid supply layer 50 excessively, and the grinding fluid supply unit 41 rotates according to the flow rate of the grinding fluid flowing between the upper wall portion 44 and the upper surface Wa of the workpiece W. By setting the pressure to rotate around the axis of the shaft 45 and push it up, the fastest flow velocity is set according to the flow rate.

  You may adjust the height position of the upper wall part 44 according to the thickness of the workpiece W with the raising / lowering mechanism which is not shown in figure. However, if the position of the upper wall portion 44 is fixed in a state where the space between the upper wall portion 44 and the upper surface Wa of the workpiece W is too narrow, a necessary amount of grinding fluid cannot be supplied. The grinding fluid supply unit 41 is rotated according to the amount of grinding fluid, and is adjusted to the minimum interval according to the amount of grinding fluid. The height position of the upper wall portion 44 is adjusted before the workpiece W is ground.

  Further, as shown in FIG. 4, the peripheral side of the rotating holding table 10 has a higher peripheral speed than the central side, and the arc-shaped machining region 100 on the outer peripheral side of the workpiece W is ground as shown in FIG. Since the work amount that the grindstone 26 grinds the workpiece W increases, it is desirable that the grinding fluid supply means 40 increase the amount of the grinding fluid in proportion to the work amount of the grinding wheel 26. For example, the diameter of the ejection hole 430 arranged on the outer peripheral side of the holding table 10 shown in FIG. 4 is made larger than the diameter of the ejection hole 430 arranged on the center side of the holding table 10, thereby rotating together with the holding table 10. A large amount of grinding fluid is supplied to the outer peripheral side of the workpiece W to be processed. In this way, a large amount of grinding liquid can be efficiently supplied to the entire arcuate processing region 100. In the example of FIG. 4, the diameter of the ejection hole 430 increases as it approaches the outer peripheral side of the holding table 10, and the interval between the adjacent ejection holes 430 is on the outer peripheral side of the holding table 10. It gets smaller as it gets closer. Although not shown, the grinding fluid supply port 43 constituted by the plurality of ejection holes 430 may be formed in an arcuate slit shape along the arcuate processing region 100. In that case, the slit width of the portion of the grinding liquid supply port 43 formed in the slit shape that faces the outer peripheral side of the holding table 10 is formed wider than the slit width of the portion that faces the center side of the holding table 10. By doing so, a large amount of grinding liquid can be efficiently supplied to the entire arcuate processing region 100.

  When the grinding fluid is supplied to the grinding wheel 26 and the upper surface Wa of the workpiece W by the grinding fluid supply means 40a shown in FIG. 5, in addition to the operation of the grinding fluid supply means 40 described above, between the grinding wheels 26. The grinding fluid that has flowed to the outside can be sucked. Specifically, as shown in FIG. 5, the grinding liquid supplied to the upper surface Wa of the workpiece W becomes a grinding liquid supply layer 50 and flows toward the front side in the rotation direction of the holding table 10 to form an arc shape. After reaching the machining area 100, when the grinding wheel 26 is discharged to the outside of the arc-shaped machining area 100, the suction force from the suction source 48 acts on the suction port 460, and the grinding liquid is sucked from the suction port 460. Discard outside the device.

  When the workpiece W reaches a desired thickness by grinding the workpiece W while supplying the grinding liquid to the arc-shaped machining area 100 as described above, the lifting means 30 shown in FIG. 20 is raised to finish grinding. After the grinding, the holding table 10 is moved to the movable range of the second conveying means 8b. The second conveyance means 8b conveys the workpiece W after grinding from the holding table 10 to the cleaning means 7, and after cleaning in the cleaning means 7, the workpiece W after cleaning by the conveyance means 5 is accommodated in the cassette 4b. .

The grinding apparatus 1 according to the present invention includes a grinding fluid supply unit 40 that supplies a grinding fluid toward the upper surface Wa of the workpiece W on the rear side in the rotation direction of the holding table 10. During grinding of the workpiece W, By supplying the grinding fluid from the grinding fluid supply port 43 formed along the arc-shaped machining region 100 toward the upper surface Wa of the workpiece W, the grinding fluid is rotated along with the rotation of the holding table 10, so that the upper wall portion 44. And the upper surface Wa of the workpiece W and flows toward the arc-shaped machining region 100, the grinding fluid supply layer 50 can be formed around the grinding wheel 26. That is, the upper surface Wa of the workpiece W is used as a part of the grinding fluid outlet path for guiding the grinding fluid to the grinding wheel 26, and the grinding defined by the upper wall portion 44 and the upper surface Wa of the workpiece W is performed. The liquid lead-out path is used as a means for blocking an air layer formed around the grinding wheel 26. Thereby, since the grinding fluid supply layer 50 blocks the air layer generated around the rotating grinding wheel 26, the grinding fluid can sufficiently reach the processing region P.
Further, the grinding fluid supply means 40 grinds the side wall of the grinding wheel 26 in order to supply the grinding fluid from the grinding fluid supply port 43 disposed above the workpiece W toward the upper surface Wa of the workpiece W. The risk of liquid collision and scattering is also reduced. This eliminates the need to supply an excessively large amount of grinding fluid to the workpiece W as in the prior art.
Furthermore, since the grinding fluid supply unit 41 is disposed so as to be rotatable around the axis of the rotary shaft 45 extending in parallel with the chord 101 of the arc-shaped processing region 100, the upper wall portion 44 is processed with a predetermined pressure. By pressing the grinding fluid supply layer 50 against the upper surface Wa of W, the sectional area of the space defined by the upper surface Wa of the workpiece W and the upper wall portion 44 can be adjusted. The flow rate of the grinding fluid supply layer 50 can be set to an optimum speed according to the rotation speed. Therefore, it is possible to efficiently supply the grinding liquid to the arc-shaped processing region 100 while suppressing the amount of the grinding liquid used.

1: Grinding device 2: Device base 2a: Upper surface 3: Columns 4a, 4b: Cassette 5: Conveying means 6: Temporary placing means 7: Cleaning means 8a: First conveying means 8b: Second conveying means 9: Bellows 10 : Holding table 11: Cover 20: Grinding means 21: Spindle 22: Spindle housing 23: Motor 24: Mount 25: Grinding wheel 26: Grinding wheel 27: Supporting part 30: Lifting means 31: Ball screw 32: Motor 33: Guide rail 34 : Elevating plates 40, 40a: Grinding liquid supply means 41: Grinding liquid supply part 42: Support member 43: Grinding liquid supply port 430: Ejection hole 44: Upper wall part 45: Rotating shaft 46: Suction part 460: Suction port 461: Suction path 47: Valve 48: Suction source 50: Grinding fluid supply layer 100: Arc-shaped machining area 101: String 200: Rotating locus

Claims (2)

A holding table capable of holding a workpiece and rotating in a predetermined direction; a grinding means having a grinding wheel including a grinding wheel disposed in an annular shape for grinding the workpiece held by the holding table; A grinding fluid supply means for supplying a grinding fluid to a workpiece and the grinding wheel,
The grinding fluid supply means supplies the grinding fluid from the grinding wheel in the arc-shaped machining area where the grinding wheel acts on the workpiece toward the upper surface of the workpiece from the rear side in the rotation direction of the holding table. A grinding fluid supply port;
There is a predetermined interval on the upper surface side of the workpiece between the grinding fluid supply port and the grinding wheel in the arc-shaped processing region, and the grinding fluid supplied from the grinding fluid supply port to the workpiece upper surface is An upper wall portion that forms a grinding fluid supply layer that flows toward the grinding wheel in the arcuate processing region as the holding table rotates,
The grinding fluid supply unit is disposed so as to be rotatable about an axis parallel to the chord of the arcuate machining region, and the upper wall portion makes the grinding fluid supply layer with respect to the upper surface of the workpiece with a constant pressure. Grinding device to press. In the grinding wheel, a plurality of grinding wheels are arranged in an annular shape with a predetermined distance from each other at a free end of a base,
The grinding fluid supply means is disposed on the front side in the rotation direction of the holding table from the arcuate processing region, and is supplied to the upper surface of the workpiece from the grinding fluid supply port and then reaches the arcuate processing region. The grinding apparatus according to claim 1, further comprising a suction part having a suction port for sucking the grinding liquid discharged to the outside of the grinding wheel.

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