JP6026311B2 - Spinner cleaning device - Google Patents

Description

  The present invention relates to a spinner cleaning apparatus for cleaning a plate-like workpiece.

  A spinner cleaning apparatus for cleaning a circular plate-shaped workpiece includes a spinner table having a holding surface for sucking and holding a central portion of the plate-shaped workpiece, a nozzle for ejecting a cleaning liquid toward the upper surface of the plate-shaped workpiece, and a plate-shaped workpiece. And at least a cleaning brush for cleaning. When cleaning a plate workpiece subjected to processing such as grinding, the spinner cleaning device sucks and holds the central portion of the lower surface of the plate workpiece on the spinner table and rotates the spinner table to rotate the plate workpiece. The plate-like workpiece is cleaned by bringing a cleaning brush into contact with the upper surface of the plate-like workpiece while jetting the cleaning liquid from above to the upper surface of the plate-like workpiece (see, for example, Patent Document 1 below).

  In addition, in order to hold and convey the lower surface of the plate-like workpiece after cleaning, if the outer peripheral portion of the plate-like workpiece is not sucked and held by the holding surface of the spinner table, It is necessary to support the outer periphery of the workpiece from below. Therefore, in order to oppose the pressure of the cleaning liquid applied from above the plate-shaped workpiece and the contact pressure of the cleaning brush, a spinner cleaning device including a support table that supports the outer peripheral portion of the plate-shaped workpiece from below is used (for example, the following Patent Document 2).

JP 2000-260740 A JP 2003-273055 A

  However, when cleaning the plate-like workpiece in the spinner cleaning device, the entire outer peripheral portion of the plate-like workpiece is supported by the support table as described above, and the area not pressed by the brush or the like is also supported. Therefore, there is a problem that the plate-like workpiece is distorted between the portion where the pressure is applied by the cleaning means and the portion where no pressure is applied, and the plate-like workpiece is cracked.

  The present invention has been made in view of the above circumstances, and is designed to support a plate-shaped workpiece in response to the pressing force of the cleaning means applied to the plate-shaped workpiece when the plate-shaped workpiece is cleaned. There is a problem to be solved.

  The present invention relates to a spinner table that sucks and holds a central area on the lower surface of a circular plate-shaped workpiece, cleaning means for cleaning the upper surface of the plate-shaped workpiece sucked and held by the spinner table, and Moving means for reciprocating in the radial direction from the center to the outer periphery, a ring-shaped support table for supporting the outer peripheral area of the plate-like workpiece not in contact with the spinner table from below, and raising and lowering the support table up and down And a rotating means for rotating the spinner table, wherein the support table is formed on the inner peripheral side of the spinner table in a direction perpendicular to the surface direction of the spinner table. An opening for enabling relative advancement and the outer periphery of the spinner table A support area for supporting the workpiece, and an outlet for allowing the fluid to flow out from the upper surface. The fluid flows out from the outlet, and a fluid layer is formed between the upper surface of the support table and the lower surface of the plate-like workpiece. A scrubbing device that rubs and cleans a portion of the plate-like workpiece supported by the spinner table and an upper surface of the portion supported by the fluid-supporting area. A brush and pressing means for bringing the scrubbing brush into contact with the plate-like workpiece or separating the scrubbing brush from the plate-like workpiece, and the spinner cleaning device includes a time when the scrubbing brush passes above the spinner table; A recognition unit for recognizing when passing above the fluid support area of the support table; and the support table When the scrubbing brush recognizes that the scrubbing brush is passing above the fluid support area, a fluid having a predetermined flow rate corresponding to the pressing force pressing the plate-like work by the scrubbing brush is recognized. A control unit that flows out from the outlet, and when the plate-like workpiece is cleaned by the cleaning means, the plate-like workpiece is sucked and held by the spinner table, and the support table is lifted by the elevating means, and the upper surface of the spinner table By positioning the upper surface of the support table at a slightly lower height, and controlling and adjusting the flow rate of the fluid from the outlet in response to the pressing force pressing the plate-like workpiece by the scrubbing brush The supporting force for supporting the plate workpiece can be adjusted.

The ring-shaped support table provided in the spinner cleaning device according to the present invention includes a support area for supporting the plate-like workpiece on the outer peripheral side of the spinner table, and a fluid support area for supporting the plate-like workpiece by forming a fluid layer. If the scrubbing brush constituting the cleaning means is recognized by the recognition unit to pass above the fluid support area of the support table when the plate-like workpiece is cleaned by the cleaning unit, the control unit supports the fluid. Only the outer periphery area of the plate-shaped workpiece where a predetermined supply amount of fluid flows out from the outlet in the area, a fluid layer is formed between the lower surface of the plate-shaped workpiece and the fluid support area, and the pressing force is applied by the cleaning means Can be supported from below by a fluid layer.
Therefore, the flow rate of the fluid supplied to the fluid support area of the support table can be adjusted while corresponding to the pressing force of the scrubbing brush applied to the plate-like workpiece, so that the support force for supporting the plate-like workpiece from below can be adjusted. It is possible to prevent the workpiece from being distorted and to prevent the plate-like workpiece after cleaning from cracking.

It is a perspective view which shows the structure of a grinding device provided with a spinner cleaning apparatus. It is a perspective view which shows the structure of a spinner washing | cleaning apparatus. It is sectional drawing which shows the state which the washing | cleaning means passes over the spinner table. It is sectional drawing which shows the state which the washing | cleaning means passes above the fluid support area of a support table.

  A grinding apparatus 1 shown in FIG. 1 is an example of a processing apparatus including a spinner cleaning apparatus 10 that cleans a workpiece after grinding. The grinding apparatus 1 has a base 2a extending in the Y-axis direction. A cassette 3a for storing a workpiece before grinding and a workpiece after grinding are provided at the front of the base 2a in the Y-axis direction. Is disposed. On the rear side of the cassette 3a and the cassette 3b, conveying means 4 is provided for carrying out the workpiece before grinding from the cassette 3a and carrying the workpiece after grinding into the cassette 3b. In the movable region of the conveying means 4, a temporary placement table 5 on which a workpiece is temporarily placed and a spinner cleaning device 10 for cleaning the workpiece after grinding are disposed.

  On the upper surface of the base 2a, a holding table 8 that holds a workpiece and can rotate is disposed, and the holding table 8 is movable in the Y-axis direction. In the vicinity of the temporary placing table 5, a first carrying means 6 for carrying the workpiece before grinding from the temporary placing table 5 to the holding table 8 is disposed, and adjacent to the first carrying means 6. A second conveying means 7 for conveying the workpiece after grinding from the holding table 8 to the spinner cleaning device 10 is provided. A column 2b extending in the Z-axis direction is erected on the rear portion of the base 2 in the Y-axis direction, and a grinding means 9 for grinding the workpiece on the side of the column 2b is disposed.

  As shown in FIG. 2 (a), the spinner cleaning apparatus 10 includes a spinner table 11 having a holding surface 11a that has a smaller diameter than the workpiece to be cleaned and has a holding surface 11a that sucks and holds the central portion of the lower surface of the workpiece. Rotating means 12 for rotating the table 11, a ring-shaped support table 13 for supporting the outer peripheral portion of the workpiece that is not sucked and held on the holding surface 11a of the spinner table 11, and the support table 13 is moved up and down. Elevating means 14, cleaning means 15 for cleaning the upper surface of the workpiece sucked and held by the spinner table 11, and moving means 16 for reciprocating the cleaning means 15 in the radial direction from the central portion to the outer peripheral portion of the workpiece. And at least.

  The rotating means 12 includes a rotating shaft 120 having a vertical axis and a motor 121. Then, the motor 121 can rotate the rotation shaft 120 to rotate the spinner table 11 at a predetermined rotation speed.

  As shown in FIG. 2A, the support table 13 includes an opening 130 on the inner peripheral side. The opening 130 is formed larger than the outer diameter of the spinner table 11. The elevating means 14 includes a piston 140 and a cylinder 141. As the piston 140 moves in the vertical direction inside the cylinder 141, as shown in FIGS. 2 (a) and 2 (b), By raising and lowering the support table 13, the spinner table 11 can be relatively advanced and retracted in a direction perpendicular to the surface direction of the spinner table 11 in the opening 130.

  The support table 13 includes a support area 131 that supports the workpiece on the outer peripheral side of the spinner table 11 and a fluid support area 133 that supports the workpiece by forming a fluid layer. A plurality of brushes 132 are disposed in the support area 131 of the support table 13, and the workpieces can be supported from below by the plurality of brushes 132 coming into contact with the lower surface of the workpiece. Note that the support area 131 may not be provided with a brush, and a planar plate-like member may support the lower surface of the workpiece.

  The fluid support area 133 of the support table 13 has a plurality of outlets 134 through which fluid flows out from the upper surface. As shown in FIG. 3, a fluid supply source 32 to the outlet 134 is connected to the fluid support area 133 via a throttle valve 33 that adjusts the flow rate of the fluid.

  As shown in FIG. 2, the moving means 16 includes a rotating shaft 160 that can rotate around a vertical axis, and an arm portion 161 connected to the rotating shaft 160. When the rotating shaft 160 is rotated, the arm portion 161 is turned, and the cleaning means 15 can be reciprocated in the radial direction between the central portion and the outer peripheral portion of the workpiece sucked and held by the spinner table 11.

  As shown in FIGS. 2 and 3, the cleaning means 15 includes a scrubbing brush 150 that rubs and cleans the upper surface of the workpiece, and makes the scrubbing brush 150 contact the workpiece or separates the scrubbing brush 150 from the workpiece. And a supply nozzle 152 for supplying a cleaning liquid to the upper surface of the workpiece, and a cleaning liquid supply source 153 connected to the supply nozzle 152. The configuration of the scrubbing brush 150 is not particularly limited.

  A recognition unit 30 that can recognize the position of the cleaning unit 15 based on a change in the pressing force applied to the workpiece is connected to the cleaning unit 15. This recognition unit 30 is used when the cleaning means 15 passes above the spinner table 11 and when the scrubbing brush 150 passes above the fluid support area 133 of the support table 13 according to, for example, the rotation angle of the rotary shaft 160. Can be recognized respectively.

  A control unit 31 is connected to the recognition unit 30. The control unit 31 includes at least a CPU and a memory, and is connected to the throttle valve 33. And the control part 31 can control the throttle valve 33 so that the flow volume of the fluid which flows out out of the outflow port 134 based on the information recognized by the recognition part 30 may be adjusted.

  Below, the operation | movement which wash | cleans the workpiece after grinding with the spinner washing | cleaning apparatus 10 is demonstrated. A circular plate-like workpiece W shown in FIG. 1 is an example of a workpiece, and a surface to which grinding scraps and the like are attached is an upper surface Wa to be cleaned, and is on the side opposite to the upper surface Wa. The surface is a lower surface Wb placed on the spinner table 11 and the support table 13. Further, the plate-like workpiece W has a central portion supported by the spinner table 11 as a central area W1, and an outer peripheral portion supported by the support table 13 as an outer peripheral area W2. Such a plate-like workpiece W is ground to a predetermined thickness by the grinding means 9 and then transported from the holding table 8 to the spinner cleaning device 10 by the second transport means 7. Next, the lower surface Wb in the central area W1 of the plate-like workpiece W is sucked and held on the holding surface 11a (see FIG. 2) of the spinner table 11.

  After the plate-like workpiece W is sucked and held on the spinner table 11, as shown in FIG. 3, the motor 121 rotates the rotating shaft 120 to rotate the spinner table 11 in the arrow A direction, for example. Next, the support means 13 is raised by operating the elevating means 14, and the support table 13 is moved to a height slightly lower than the holding surface 11 a of the spinner table 11. As a result, the plurality of brushes 132 in the support area 131 come into contact with the lower surface Wb of the plate-like workpiece W, and the outer peripheral area W2 of the plate-like workpiece W located above the support area 131 is supported from below.

  Next, the scrubbing brush 150 is lowered in the vertical direction by the pressing means 151 and brought into contact with the upper surface Wa in the central area W1 of the plate-like workpiece W. The scrubbing brush 150 moves the plate-like workpiece 15 while moving the cleaning means 15 in the radial direction from the central area W1 to the outer peripheral area W2 of the plate-like workpiece W as indicated by a two-dot chain line by the moving means 16 shown in FIG. The portion of W supported by the spinner table 11 and the upper surface Wa of the portion supported by the fluid support area 133 are rubbed and cleaned. During the cleaning of the plate-like workpiece W, the cleaning solution supply source 153 is operated to supply the cleaning solution from the supply nozzle 152 toward the upper surface Wa of the plate-like workpiece W.

  At this time, the recognition unit 30 recognizes that the scrubbing brush 150 is passing above the spinner table 11 and sends the recognized information to the control unit 31. Note that when the scrubbing brush 150 passes over the spinner table 11, it is not necessary to support the outer peripheral area W <b> 2 of the plate-like workpiece W with the fluid support area 133. Control to close.

  As shown in FIG. 4, when the scrubbing brush 150 has moved from the central area W1 of the plate-like workpiece W to the outer peripheral area W2, the scrubbing brush 150 is further moved in the radial direction on the outer peripheral area W2 as indicated by a two-dot chain line. However, the upper surface Wa of the plate-like workpiece W is rubbed and cleaned by the scrubbing brush 150.

  At this time, the recognition unit 30 recognizes that the scrubbing brush 150 passes above the support table 13 in order to prevent the outer peripheral area W2 of the plate-like workpiece W from sinking due to the pressing force applied from the scrubbing brush 150. The information recognized together is sent to the control unit 31. Next, the control unit 31 opens the throttle valve 33 based on the information recognized by the recognition unit 30. Then, when the fluid is supplied toward the fluid support area 133 of the support table 13 while the flow rate of the fluid is adjusted by the throttle valve 33, the fluid layer 20 is formed, and the outer peripheral area W2 is supported by the fluid layer 20 from below. Is done. As the fluid, for example, a liquid such as water can be used, and a gas such as air can be used.

  As shown in the partially enlarged view shown in FIG. 4, when the fluid flows out from the plurality of outlets 134 and accumulates, the fluid layer 20 is formed between the lower surface Wb of the plate-like workpiece W and the fluid support area 133. The fluid layer 20 can support the outer peripheral area W2 of the plate-like workpiece W pressed from above from below. Although the thickness of the fluid layer 20 is not specifically limited, For example, it is 0.5 mm.

  In this way, only the portion pressed by the scrubbing brush 150 in the outer peripheral area W2 of the plate-like workpiece W is supported from below by the fluid layer 20 in the fluid support area 133, thereby cleaning the plate-like workpiece W. It is possible to prevent distortion from occurring between a portion that has been cleaned and a portion that has not been cleaned.

  Thereafter, when the scrubbing brush 150 returns to above the spinner table 11, the recognition unit 30 recognizes this and sends the recognized information to the control unit 31. Then, since it is not necessary to support the outer peripheral area W2 of the plate-like workpiece W in the fluid support area 133, the control unit 31 performs control so as to close the throttle valve 33, for example, and stops outflow of fluid from the outflow port 134. Or reduce the outflow of fluid.

  After the scrubbing brush 150 repeatedly moves back and forth between the upper part of the spinner table 11 and the upper part of the fluid support area 133 to complete the cleaning of the upper surface Wa of the plate-like workpiece W, the support table 13 is lowered. The lower surface of the plate-like workpiece W is held by the conveying means 4 shown in FIG. 1, and the washed plate-like workpiece W is carried from the spinner cleaning device 10 to the cassette 3b.

As described above, the ring-shaped support table 13 provided in the spinner cleaning device 10 forms the plate-like work W by forming the support area 131 that supports the plate-like work W on the outer peripheral side of the spinner table 11 and the fluid layer. The scrubbing brush 150 passes above the fluid support area 133 of the support table 13 by the recognition unit 30 when the plate-like workpiece W is cleaned by the scrubbing brush 150. When recognized, the control unit 31 causes a predetermined flow rate of fluid to flow out from the outlet 134 in the fluid support area 133 to form the fluid layer 20 between the lower surface Wb of the plate-like workpiece W and the fluid support area 133 and scrubbing. Only the outer peripheral area W2 where the pressing force is applied by the brush 150 It can be supported from below by the fluid layer 20.
Therefore, since the flow rate of the fluid supplied to the fluid support area 133 of the support table 13 can be controlled and adjusted by the control unit 31 while corresponding to the pressing force of the scrubbing brush 150 applied to the plate workpiece W, the plate workpiece W is moved downward. Therefore, the plate-like workpiece W is not distorted and the plate-like workpiece W is not cracked.

1: Grinding device 2a: Base 2b: Columns 3a, 3b: Cassette 4: Transport means 5: Temporary table 6: First transport means 7: Second transport means 8: Holding table 9: Grinding means 10: Spinner Cleaning device 11: Spinner table 11a: Holding surface 12: Rotating means 120: Rotating shaft 121: Motor 13: Support table 130: Opening part 131: Support area 132: Brush 133: Fluid support area 134: Outlet 14: Lifting means 140 : Piston 141: Cylinder 15: Cleaning means 150: Scrubbing brush 151: Pressing means 152: Supply nozzle 153: Cleaning liquid supply source 16: Moving means 160: Rotating shaft 161: Arm part 20: Fluid layer 30: Recognition part 31: Control part 32: Fluid supply source 33: Throttle valve W: Plate work Wa: Upper surface Wb: Lower surface W : Central area W2: the outer area

Claims (1)

A spinner table that sucks and holds the central area on the lower surface of the circular plate-shaped workpiece, a cleaning means that cleans the upper surface of the plate-shaped workpiece sucked and held by the spinner table, and the cleaning means from the center to the outer periphery of the plate-shaped workpiece Moving means for reciprocating in the radial direction, a ring-shaped support table for supporting the outer peripheral area of the plate-like workpiece not in contact with the spinner table from below, elevating means for raising and lowering the support table up and down, In a spinner cleaning apparatus comprising at least a rotating means for rotating a spinner table,
The support table is formed on the inner peripheral side thereof, and has an opening for allowing the spinner table to relatively advance and retreat in a direction perpendicular to the surface direction of the spinner table, and a plate on the outer peripheral side of the spinner table. A support area for supporting the workpiece, and an outlet for allowing the fluid to flow out from the upper surface. The fluid flows out from the outlet, and a fluid layer is formed between the upper surface of the support table and the lower surface of the plate-like workpiece. And a fluid support area for supporting the plate-like workpiece,
The cleaning means includes: a scrubbing brush for cleaning by rubbing the upper surface of a portion of the plate-like workpiece supported by the spinner table and a portion of the plate-like workpiece supported by the fluid support area; Pressing means for separating the scrubbing brush from the workpiece,
The spinner cleaning device includes a recognition unit that recognizes when the scrubbing brush passes above the spinner table and when the scrubbing brush passes above the fluid support area of the support table;
A fluid having a predetermined flow rate corresponding to the pressing force pressing the plate-like workpiece by the scrubbing brush when the recognition unit recognizes that the scrubbing brush is passing above the fluid support area of the support table And a control unit for causing the gas to flow out from the outlet.
When the plate-like workpiece is cleaned by the cleaning means, the plate-like workpiece is sucked and held by the spinner table, and the support table is lifted by the elevating means, and the upper surface of the support table is slightly lower than the upper surface of the spinner table. A spinner capable of adjusting the supporting force for supporting the plate-shaped workpiece by controlling and adjusting the flow rate of the fluid from the outlet in accordance with the pressing force pressing the plate-shaped workpiece with the scrubbing brush. Cleaning device.

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