JP6276982B2 - Spinner cleaning device - Google Patents

Description

  The present invention relates to a spinner cleaning apparatus for drying a surface of a plate-like material after spin-washing the processed plate-like material.

  As a device for cleaning a processed plate-like object, a spinner cleaning device is used that sprays a cleaning liquid from a cleaning nozzle toward the plate-like object while rotating a holding table that holds the plate-like object (for example, a patent) Reference 1). In the spinner cleaning apparatus described in Patent Document 1, after the cleaning liquid is sprayed from the cleaning nozzle and the plate-like object is cleaned while rotating the holding table, the holding table is rotated to change the plate from the air nozzle to the plate-like object. Dry air is blown. Thereby, the cleaning liquid remaining on the surface of the plate-like object is blown off with dry air, and the surface of the plate-like object is dried.

JP 2004-327613 A

  In the spinner cleaning device described in Patent Document 1, dry air is sprayed on the surface of the plate-like material spot by the air nozzle, and the entire surface of the plate-like material is dried by swinging the air nozzle. In this case, since the blowing area of the air nozzle is narrow, there is a problem that it takes a long time to dry the entire surface of the plate-like object. Particularly, in recent years, in order to increase the chip size and improve the productivity, the plate-like material has been increased in diameter, and it is assumed that the drying time increases with the increase in the diameter of the plate-like material.

  This invention is made | formed in view of such a point, and it aims at providing the spinner washing | cleaning apparatus which can shorten the drying time of the plate-shaped object after washing | cleaning.

The spinner cleaning apparatus of the present invention sprays cleaning liquid from the ejection holes to the holding table that holds the plate-like object on the upper surface, the rotating means that rotates the holding table, and the plate-like object held on the holding table. A cleaning nozzle, a cleaning nozzle moving means for moving the cleaning nozzle in the radial direction through the center of the holding table, and spraying dry air from the injection port to the washed plate-like object held by the holding table An air injection means for drying the surface of the plate-like object, wherein the air injection means has an air injection region injected from the injection port onto the surface of the plate-like object on the outer peripheral side of the plate-like object. comprises a linear nozzle said injection port is formed so as to be injected linearly extending in the rotational center, and the linear nozzle moving section for moving the said linear nozzle with respect to the holding table, from, said air ejection Area Position the spray port with respect to the plate-shaped object so as to reach the rotation center of the holding table from the outer peripheral side of the shaped object, and direct dry air with the spray port facing in a direction opposite to the rotation direction of the holding table. The surface of the washed plate is dried by rotating the holding table while spraying.

  According to this configuration, with the holding table rotated, the cleaning liquid is sprayed from the cleaning nozzle to clean the plate-shaped object, and then the dry air is sprayed from the linear nozzle of the air spraying means to form the plate-shaped object. Dried. At this time, linear dry air having a length equal to or longer than the radius of the plate-like object extending from the outer peripheral side of the plate-like object to the rotation center of the holding table is opposed to the rotation direction of the holding table. It is sprayed on the surface of the plate-like object. And the washing | cleaning liquid is blown off from the plate-shaped object surface by the wall of the dry air sprayed linearly, and the plate-shaped object surface is dried. That is, a wiper having a radius equal to or larger than the radius of the plate-like material is formed on the surface of the plate-like material, and the cleaning liquid is scraped off from the surface of the plate-like material by the wiper of this dry air. Thus, by spraying dry air linearly onto the rotating plate-like object, the cleaning liquid can be efficiently removed from the entire surface of the plate-like object, and the drying time of the plate-like object can be shortened. .

  According to the present invention, after the cleaning, the air injection region is linear with a length equal to or longer than the radius of the plate-like material, and the dry air is blown onto the plate-like surface so as to face the rotation direction of the holding table. The drying time of the plate-like material can be shortened.

It is a perspective view of the cutting device concerning this embodiment. It is a perspective view of the spinner washing | cleaning apparatus which concerns on this Embodiment. It is explanatory drawing of the washing | cleaning process by the spinner washing | cleaning apparatus which concerns on this Embodiment. It is explanatory drawing of the drying process by the spinner washing | cleaning apparatus which concerns on this Embodiment. It is explanatory drawing of the injection state of the dry air by the air injection means which concerns on this Embodiment. It is an upper surface schematic diagram of the linear nozzle which concerns on a modification.

  Hereinafter, a cutting apparatus provided with a spinner cleaning apparatus according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a cutting apparatus according to the present embodiment. In addition, in the following description, although the structure provided with a spinner washing | cleaning apparatus in a cutting device is illustrated and demonstrated, it is not limited to this structure. For example, the spinner cleaning device may be provided in another processing device such as a grinding device, or may be formed separately from the processing device.

  As shown in FIG. 1, the cutting device 1 includes a spinner cleaning device 15 that performs cleaning and drying of the plate-like object W cut by the cutting means 14. The plate-like object W is a disk-like semiconductor wafer, and the surface 75 is partitioned into a plurality of regions by unillustrated division lines. Various devices such as an IC and an LSI are formed in each region partitioned by the division lines. A protective tape T is attached to the back surface 76 (see FIG. 3) of the plate-like object W, and the plate-like object W is supported by the annular ring frame F via the protective tape T. The plate-like object W may be a ceramic, glass, or sapphire optical device wafer. The plate-like object W is carried into the cutting apparatus 1 while being accommodated in the cassette C.

  A rectangular opening extending in the X-axis direction is formed on the upper surface of the housing 11 of the cutting apparatus 1, and this opening is covered with a movable plate 21 that can move together with the chuck table 12 and a bellows-shaped waterproof cover 22. Has been. Below the waterproof cover 22, a ball screw type moving mechanism (not shown) that moves the chuck table 12 in the X-axis direction is provided. On the surface of the chuck table 12, an adsorption surface 23 that adsorbs the plate-like object W by a porous ceramic material is formed. The suction surface 23 is connected to a suction source through a flow path in the chuck table 12.

  The chuck table 12 is reciprocated between a delivery position at the center of the apparatus and a machining position facing the cutting means 14. FIG. 1 shows a state in which the chuck table 12 stands by at the delivery position. In the housing 11, one corner portion adjacent to the delivery position is lowered by one step, and the mounting table 25 is provided at a lowered position so as to be lifted and lowered. On the mounting table 25, a cassette C containing the plate-like object W is placed. As the mounting table 25 moves up and down with the cassette C mounted, the drawing position and the pushing position of the plate-like object W are adjusted in the height direction.

  A rear side of the mounting table 25 is provided with a pair of guide rails 26 parallel to the Y-axis direction, and a push-pull mechanism 27 that conveys the plate-like object W between the pair of guide rails 26 and the cassette C. . The pair of guide rails 26 guide the conveyance of the plate-like object W by the push-pull mechanism 27 and position the plate-like object W in the X-axis direction. The push-pull mechanism 27 is configured to pull the unprocessed plate-like object W from the cassette C to the pair of guide rails 26 and to push the processed plate-like object W from the pair of guide rails 26 to the cassette C. . The push-pull mechanism 27 positions the plate-like object W in the Y-axis direction.

  In the vicinity of the pair of guide rails 26, a first transport arm 13 that transports the plate-like object W between the guide rails 26 and the chuck table 12 is provided. The arm portion 31 of the first transfer arm 13 is L-shaped when viewed from above, and the plate-like object W is transferred by turning the arm portion 31. A spinner cleaning device 15 is provided behind the chuck table 12 at the delivery position. In the spinner cleaning device 15, the cleaning water is sprayed toward the rotating holding table 42 to clean the plate-like object W, and then the dry air is blown instead of the cleaning water to dry the plate-like object W. . The details of the spinner cleaning device 15 will be described later.

  A support base 32 that supports the cutting means 14 is provided on the housing 11. The cutting means 14 is configured by attaching a cutting blade 36 to the tip of a spindle supported by a support base 32. The cutting blade 36 is formed into a disk shape by, for example, hardening diamond abrasive grains with a resin bond (binder). The cutting means 14 is connected to a moving mechanism (not shown) that moves the cutting blade 36 in the Y-axis direction and the Z-axis direction. In the cutting means 14, the cleaning liquid is sprayed from a plurality of spray nozzles, and the cutting blade 36 rotated at high speed is moved relative to the chuck table 12 to cut the plate-like object W.

  A second transfer arm 16 that transfers the plate-like object W between the chuck table 12 and the spinner cleaning device 15 is provided on the side surface 33 of the support base 32. The arm portion 37 of the second transfer arm 16 extends obliquely forward, and the plate-like object W is transferred by moving the arm portion 37 back and forth (Y-axis direction). In addition, the support base 32 is provided with a cantilever support portion 35 that supports the imaging unit 17 so as to cross over the moving path of the chuck table 12. The imaging unit 17 protrudes from the lower surface of the cantilever support unit 35, and the plate-like object W is imaged by the imaging unit 17. An image captured by the imaging unit 17 is used for alignment between the cutting unit 14 and the chuck table 12.

  In the cutting apparatus 1 configured as described above, the plate-like object W is conveyed from the cassette C to the chuck table 12, and the plate-like object W is cut by relative movement of the chuck table 12 and the cutting means 14. The plate-like object W after cutting is conveyed to the spinner cleaning device 15, spin-washed with a cleaning liquid in the spinner cleaning device 15, and then dried with dry air. At this time, the spinner cleaning device 15 according to the present embodiment blows dry air linearly to efficiently dry the surface 75 of the plate-like object W. The dried plate-like object W is taken out from the spinner cleaning device 15 and conveyed toward the cassette C.

  Hereinafter, the spinner cleaning apparatus according to the present embodiment will be described with reference to FIG. FIG. 2 is a perspective view of the spinner cleaning apparatus according to the present embodiment. Note that the spinner cleaning apparatus in this embodiment is not limited to the configuration shown in FIG. The spinner cleaning device may be configured in any way as long as it has a configuration capable of drying the surface of the plate-like material in the linear air jet region after the plate-like material is spin-cleaned.

  The spinner cleaning device 15 spin-cleans the surface 75 (see FIG. 1) of the plate-like object W with the cleaning liquid, and then blows dry air linearly on the surface 75 of the plate-like object W to set the drying time of the plate-like object W. It is shortened. The casing 41 of the spinner cleaning device 15 is formed in a bottomed cylindrical shape having a cylindrical peripheral wall portion 51. The casing 41 accommodates a holding table 42 that rotates while holding the plate-like object W on the upper surface. Around the holding table 42, cleaning liquid spraying means 43 for spraying and cleaning the surface 75 of the plate-like object W, and air spraying means 44 for spraying and drying dry air on the surface 75 of the plate-like object W; Is provided.

  The holding table 42 is formed in a disk shape having a larger diameter than the plate-like object W, and an adsorption surface 52 is formed of a porous material such as porous ceramics at the center of the upper surface. The suction surface 52 is connected to a suction source (not shown) through a pipe line in the holding table 42, and the plate-like object W is sucked and held via the protective tape T (see FIG. 1) by the negative pressure generated on the suction surface 52. . A rotating means 54 such as a motor is connected to the center of the lower surface of the holding table 42 via a rotating shaft 53 (see FIG. 3). The holding table 42 is rotated at a high speed in the casing 41 by driving of the rotating means 54.

  Around the holding table 42, four frame clamps 55 for holding the annular frame F (see FIG. 1) are provided. The frame clamp 55 is configured by supporting a pendulum-shaped clamp portion 57 on a support plate 56 extending in four directions from the holding table 42. The frame clamp 55 clamps the annular frame F between the claw portion on the inner side of the clamp portion 57 and the support plate 56 by causing the weight portion on the outer side of the clamp portion 57 to spring up by centrifugal force when the holding table 42 rotates. . In this manner, the plate-like object W is sucked to the suction surface 52 of the holding table 42 via the protective tape T and is held by the frame clamp 55 via the annular frame F.

  The cleaning liquid ejecting means 43 ejects the cleaning liquid from the spray hole 63 of the cleaning nozzle 62 onto the plate-like object W on the holding table 42 while turning the horizontal pipe 61 provided with the cleaning nozzle 62 at the tip thereof above the holding table 42. ing. The cleaning nozzle 62 is supported by a cleaning nozzle moving means 64 erected in the casing 41 via a horizontal pipe 61 extending substantially horizontally above the holding table 42. The horizontal pipe 61 has a length that reaches the center of the holding table 42 from the cleaning nozzle moving means 64, and allows the cleaning nozzle 62 to move from the center of the holding table 42 to the outer periphery.

  The cleaning nozzle 62 is moved in the radial direction passing through the rotation center of the holding table 42 by the cleaning nozzle moving means 64, so that the cleaning liquid is sprayed over the entire area of the rotating plate-like object W. The cleaning liquid is supplied to the cleaning nozzle 62 from a supply source (not shown) through a passage in the cleaning nozzle moving unit 64. Details of the cleaning process by the cleaning nozzle 62 will be described later.

  The air injection means 44 positions the linear nozzle 66 formed with a large number of injection ports 67 in a horizontal row above the holding table 42, and supplies dry air from the large number of injection ports 67 to the plate-like object W on the holding table 42. Spraying. The linear nozzle 66 extends substantially horizontally above the holding table 42, and is supported by a linear nozzle moving unit 68 erected in the casing 41. The linear nozzle 66 has a length that reaches the center of the holding table 42 from the linear nozzle moving portion 68, and positions a large number of injection ports 67 of the linear nozzle 66 from the center of the holding table 42 to the outer periphery. .

  The large number of injection ports 67 are arranged on the outer peripheral surface of the linear nozzle 66 at intervals where dry air injected from the adjacent injection ports 67 continues. The large number of spray ports 67 are sprayed in a linear shape in which an air spray region 71 (see FIG. 5) sprayed from the spray ports 67 to the surface 75 of the plate-like object W is at least longer than the radius of the plate-like object W. It is formed so that. In addition, a large number of injection ports 67 are directed obliquely downward on the outer peripheral surface of the linear nozzle 66 so as to inject dry air in a direction opposite to the rotation direction of the holding table 42 (opposite direction in top view). (See FIG. 5).

  By positioning the linear nozzle 66 in the radial direction passing through the center of rotation of the holding table 42 by the linear nozzle moving unit 68, dry air is sprayed over the entire area of the rotating plate-like object W. At this time, a wall of dry air is formed on the surface 75 of the plate-like object W, and the cleaning liquid is scraped off from the surface 75 of the plate-like object W by the wall of the dry air, so that the surface 75 of the plate-like object W becomes short in a short time. Dried. The linear nozzle 66 is supplied with dry air from a supply source (not shown) through a passage in the linear nozzle moving unit 68. Details of the drying process by the linear nozzle 66 will be described later.

  Hereinafter, the cleaning process by the spinner cleaning apparatus will be described with reference to FIGS. FIG. 3 is an explanatory diagram of a cleaning process by the spinner cleaning apparatus according to the present embodiment. FIG. 4 is an explanatory diagram of a drying process by the spinner cleaning apparatus according to the present embodiment. FIG. 5 is an explanatory diagram of a dry air injection state by the air injection means according to the present embodiment. 5A is a schematic top view, and FIG. 5B is a schematic cross-sectional view taken along line AA in FIG. 5A.

  As shown in FIG. 3, in the step of cleaning the plate-like object W, when the plate-like object W is placed on the holding table 42, the plate-like object W is held by the suction surface 52 via the protective tape T. . Next, the cleaning nozzle 62 is moved from the retracted position outside the holding table 42 to above the plate-like object W by the cleaning nozzle moving means 64, and the rotating means 54 is driven to rotate the holding table 42 at a high speed. As a result, the frame clamp 55 around the holding table 42 operates by receiving centrifugal force, and the annular frame F is held by the frame clamp 55. At this time, the linear nozzle 66 is positioned at the retracted position outside the holding table 42.

  Then, while the cleaning nozzle 62 is moved by the cleaning nozzle moving means 64, the cleaning liquid is sprayed from the spray hole 63 of the cleaning nozzle 62 onto the surface 75 of the plate-like object W. In this case, since the cleaning nozzle 62 is reciprocated in the radial direction passing through the center of rotation of the plate-like object W, and the holding table 42 is rotated at a high speed, the cleaning liquid is spread over the entire surface 75 of the plate-like object W on the holding table 42. Is sprayed. In this way, the surface 75 of the processed plate-like object W is spin-cleaned with the cleaning liquid.

  As shown in FIG. 4, when the cleaning process for the plate-like object W is completed, a drying process for the plate-like object W is subsequently performed. In the drying process of the plate-like object W, the cleaning nozzle 62 is moved from above the plate-like object W to the retracted position by the cleaning nozzle moving means 64 while the holding table 42 continues to rotate. Further, the linear nozzle moving unit 68 moves the linear nozzle 66 instead of the cleaning nozzle 62 from the retracted position to above the plate-like object W. Then, the linear nozzle 66 is positioned in the radial direction passing through the rotation center of the holding table 42, and a large number of ejection ports 67 of the linear nozzle 66 are directed to the plate-like object W on the holding table 42.

  Then, as shown in FIGS. 5A and 5B, dry air is sprayed onto the surface 75 of the plate-like object W from a large number of injection ports 67 of the linear nozzle 66, and a line extending from the outer peripheral side of the plate-like object W to the center of rotation. A shaped air injection region 71 is formed on the surface 75 of the plate-like object W. A dry air wall is formed in the air jet region 71 by the dry air jetted from many jet ports 67. In this case, the dry air is blown obliquely with respect to the surface 75 of the plate-like object W so as to face the rotation direction of the holding table 42 in the top view, not directly below. For this reason, the cleaning liquid is blown off from the surface 75 of the plate-like object W by the wall of the dry air blown obliquely with respect to the surface 75 of the plate-like object W.

  That is, a wiper is formed on the surface 75 of the plate-like object W by a dry air wall, and the cleaning liquid is scraped off from the surface 75 of the plate-like object W by the wiper of the dry air by rotating the holding table 42. In this case, since the dry air wiper extends at least from the outer peripheral side of the plate-like object W to the center of rotation, the cleaning liquid is removed from the entire surface 75 of the plate-like object W by rotating the holding table 42. The Thus, since dry air is injected from the many injection ports 67 of the linear nozzle 66 so that the air injection area is equal to or larger than the radius of the plate-like object W, the surface 75 of the plate-like object W after cleaning is formed. Dry efficiently.

  As described above, according to the present embodiment, after the cleaning liquid is sprayed from the cleaning nozzle 62 and the plate-like object W is cleaned in a state where the holding table 42 is rotated, the linear nozzle of the air injection means 44 is used. Dry air is sprayed from 66 and the plate-like object W is dried. At this time, linear dry air having a length equal to or longer than the radius of the plate-like object W extending from the outer peripheral side of the plate-like object W to the center of rotation of the holding table 42 from a large number of ejection ports 67 of the linear nozzle 66 is obtained. The surface of the plate-like object W is sprayed so as to face the rotation direction of the holding table 42. And the washing | cleaning liquid is blown off from the surface 75 of the plate-shaped object W by the wall of the dry air sprayed linearly, and the surface 75 of a plate-shaped object is dried. That is, a wiper having a radius equal to or larger than that of the plate-like object W is formed on the surface 75 of the plate-like object W by the dry air, and the cleaning liquid is scraped off from the surface 75 of the plate-like object W by the wiper of this dry air. Thus, by spraying dry air linearly onto the rotating plate W, the cleaning liquid is efficiently removed from the entire surface 75 of the plate W and the drying time of the plate W is reduced. Shortened.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the present embodiment described above, the linear nozzle 66 is configured to be linear, but the present invention is not limited to this configuration. For example, as shown in FIG. 6, the tip side of the linear nozzle 66 may be bent. In this case, the bent portion 73 of the linear nozzle 66 is slightly bent in the dry air injection direction. When dry air is sprayed from the linear nozzle 66, a bent wall of dry air is formed near the center of the plate-like object W along the linear nozzle 66. Due to the bent wall of the dry air near the center of the plate-like object W, the cleaning liquid near the center of the plate-like object W is prevented from going around the tip of the linear nozzle 66. Therefore, the cleaning liquid near the center of the plate-like object W can be effectively removed.

  Moreover, in this Embodiment mentioned above, although many injection ports 67 were formed in the linear nozzle 66 by the space | interval which the dry air injected from the adjacent injection port 67 continues, it is not limited to this structure. It is not necessary for the dry air ejected from the numerous ejection ports 67 to be completely continuous, and gaps may be partially formed. That is, the air injection region may not be formed in a complete linear shape, and may be formed in a linear shape in which a part is broken. Even with such a configuration, the surface 75 of the plate-like object W can be efficiently dried.

  Moreover, in this Embodiment mentioned above, although it was set as the structure by which many injection openings 67 are formed in the linear nozzle 66, it is not limited to this structure. The ejection port 67 may be ejected so as to be ejected in a linear shape having a length equal to or longer than the radius of the plate-like object W. For example, the ejection port 67 may be formed in the linear nozzle 66 in a slit shape.

  In the above-described embodiment, dry air is jetted onto the surface 75 of the plate-like object W in a state where the linear nozzle 66 is positioned in the radial direction passing through the rotation center of the holding table 42. The configuration is not limited to this. The linear nozzle 66 may be configured to be swung above the plate-like object W.

  As described above, the present invention has an effect of shortening the drying time of a plate-like object after cleaning, and is particularly useful for a spinner cleaning device provided in a processing device such as a cutting device. .

DESCRIPTION OF SYMBOLS 15 Spinner washing | cleaning apparatus 42 Holding table 44 Air injection means 52 Adsorption surface 54 Rotation means 62 Cleaning nozzle 63 Injection hole 64 Cleaning nozzle moving means 66 Linear nozzle 67 Injection port 68 Linear nozzle moving part 71 Air injection area 72 Wiper 73 Bending part 75 Surface of plate-like object 76 Back surface of plate-like object W Plate-like object

Claims (1)

A holding table for holding the plate-like object on the upper surface, a rotating means for rotating the holding table, a cleaning nozzle for injecting a cleaning liquid from the injection holes to the plate-like object held on the holding table, and the cleaning nozzle A cleaning nozzle moving means that moves in the radial direction through the center of the holding table, and a plate-like object that has been washed and held on the holding table is sprayed from the injection port to dry the surface of the plate-like object. A spinner cleaning device comprising air injection means,
The air injection means has a linear shape in which the injection port is formed so that an air injection region injected from the injection port onto the surface of the plate-like object is injected in a linear shape from the outer peripheral side of the plate-like object to the rotation center. A nozzle, and a linear nozzle moving unit that moves the linear nozzle relative to the holding table,
The injection port is positioned with respect to the plate-like object so that the air injection region reaches the rotation center of the holding table from the outer peripheral side of the plate-like object, and the injection port in a direction opposite to the rotation direction of the holding table. A spinner cleaning device that rotates the holding table while spraying dry air toward the surface to dry the surface of the plate-shaped object after cleaning.

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