JP2009162965A5 - - Google Patents
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- JP2009162965A5 JP2009162965A5 JP2008000059A JP2008000059A JP2009162965A5 JP 2009162965 A5 JP2009162965 A5 JP 2009162965A5 JP 2008000059 A JP2008000059 A JP 2008000059A JP 2008000059 A JP2008000059 A JP 2008000059A JP 2009162965 A5 JP2009162965 A5 JP 2009162965A5
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- JP
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- Prior art keywords
- layer
- particles
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- substrate
- particle
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002245 particle Substances 0.000 claims 45
- 239000000463 material Substances 0.000 claims 25
- 239000000758 substrate Substances 0.000 claims 15
- 238000005530 etching Methods 0.000 claims 14
- 238000000034 method Methods 0.000 claims 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 6
- 238000001020 plasma etching Methods 0.000 claims 3
- 239000000377 silicon dioxide Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 229920005990 polystyrene resin Polymers 0.000 claims 2
- 230000002265 prevention Effects 0.000 claims 2
- 239000004925 Acrylic resin Substances 0.000 claims 1
- 229920000178 Acrylic resin Polymers 0.000 claims 1
- 239000005011 phenolic resin Substances 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000009719 polyimide resin Substances 0.000 claims 1
- 239000002210 silicon-based material Substances 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008000059A JP4945460B2 (ja) | 2008-01-04 | 2008-01-04 | 反射防止構造の形成方法および反射防止構造 |
| US12/347,187 US8361339B2 (en) | 2008-01-04 | 2008-12-31 | Antireflection structure formation method and antireflection structure |
| US13/723,374 US8840258B2 (en) | 2008-01-04 | 2012-12-21 | Antireflection structure formation method and antireflection structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008000059A JP4945460B2 (ja) | 2008-01-04 | 2008-01-04 | 反射防止構造の形成方法および反射防止構造 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009162965A JP2009162965A (ja) | 2009-07-23 |
| JP2009162965A5 true JP2009162965A5 (enExample) | 2010-12-02 |
| JP4945460B2 JP4945460B2 (ja) | 2012-06-06 |
Family
ID=40844792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008000059A Expired - Fee Related JP4945460B2 (ja) | 2008-01-04 | 2008-01-04 | 反射防止構造の形成方法および反射防止構造 |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US8361339B2 (enExample) |
| JP (1) | JP4945460B2 (enExample) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5215833B2 (ja) | 2008-12-11 | 2013-06-19 | 株式会社日立ハイテクノロジーズ | 微細パターン転写用スタンパ及びその製造方法 |
| CN102325719A (zh) * | 2008-12-30 | 2012-01-18 | 3M创新有限公司 | 纳米结构化制品和制备纳米结构化制品的方法 |
| KR101915868B1 (ko) | 2008-12-30 | 2018-11-06 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 반사방지 용품 및 이의 제조 방법 |
| US8419955B2 (en) * | 2009-01-07 | 2013-04-16 | Panasonic Corporation | Antireflection structure, lens barrel including antireflection structure, method for manufacturing antireflection structure |
| US20110085232A1 (en) * | 2009-10-08 | 2011-04-14 | The Penn State Research Foundation | Multi-spectral filters, mirrors and anti-reflective coatings with subwavelength periodic features for optical devices |
| DE102009060223A1 (de) * | 2009-12-23 | 2011-06-30 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 80539 | Konusförmige Nanostrukturen auf Substratoberflächen, insbesondere optischen Elementen, Verfahren zu deren Erzeugung sowie deren Verwendung |
| EP2528858A1 (en) * | 2010-01-29 | 2012-12-05 | Hewlett Packard Development Company, L.P. | Environment sensitive devices |
| TWI579145B (zh) | 2010-04-13 | 2017-04-21 | 旭化成電子材料股份有限公司 | Self-supporting film, self-supporting structure, self-supporting film manufacturing method and protective film |
| US9085484B2 (en) * | 2010-04-30 | 2015-07-21 | Corning Incorporated | Anti-glare surface treatment method and articles thereof |
| US9017566B2 (en) | 2010-04-30 | 2015-04-28 | Corning Incorporated | Anti-glare surface treatment method and articles thereof |
| JP5854397B2 (ja) * | 2011-09-05 | 2016-02-09 | 国立研究開発法人産業技術総合研究所 | ナノインプリントフィルムを用いた粒子の転写方法 |
| KR101334898B1 (ko) | 2011-11-21 | 2013-12-02 | 한국기계연구원 | 나노 돌기 패턴의 형성 방법 |
| US9108310B2 (en) * | 2012-01-13 | 2015-08-18 | The United States Of America, As Represented By The Secretary Of The Navy | Fueldraulic actuator installation and removal tool |
| SG11201406122WA (en) | 2012-03-26 | 2014-10-30 | 3M Innovative Properties Co | Nanostructured material and method of making the same |
| JP2013218272A (ja) * | 2012-04-04 | 2013-10-24 | Nalux Co Ltd | 耐光性プラスチックシート及びその製造方法 |
| WO2013151038A1 (ja) * | 2012-04-04 | 2013-10-10 | ナルックス株式会社 | 耐光性プラスチックシート及びその製造方法 |
| WO2013154077A1 (ja) * | 2012-04-09 | 2013-10-17 | 旭硝子株式会社 | 微細パターンを表面に有する物品およびその製造方法、ならびに光学物品、その製造方法および複製モールドの製造方法 |
| EP2855384B1 (en) * | 2012-05-29 | 2020-12-09 | Corning Incorporated | Method for texturing a glass surface |
| US9487869B2 (en) * | 2012-06-01 | 2016-11-08 | Carnegie Mellon University | Pattern transfer with self-assembled nanoparticle assemblies |
| TWI564585B (zh) * | 2012-12-06 | 2017-01-01 | 大同股份有限公司 | 抗反射基板結構及其製作方法 |
| WO2014092132A1 (ja) | 2012-12-13 | 2014-06-19 | 王子ホールディングス株式会社 | 光学素子作製用金型及びその製造方法、光学素子 |
| JP2015138179A (ja) * | 2014-01-23 | 2015-07-30 | 王子ホールディングス株式会社 | 微細構造体および微細構造体の製造方法 |
| DE102014105939B4 (de) * | 2014-04-28 | 2019-08-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung einer Entspiegelungsschicht auf einer Silikonoberfläche und optisches Element |
| EP3274312B1 (en) * | 2015-03-24 | 2024-10-02 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Fabrication of nanostructures in and on organic and inorganic substrates using mediating layers |
| CN106384745B (zh) * | 2016-11-16 | 2019-01-08 | 京东方科技集团股份有限公司 | 显示基板的制备方法 |
| CN107561611B (zh) * | 2017-08-04 | 2020-04-28 | 东莞市中图半导体科技有限公司 | 一种蓝宝石基板的表面图案化加工方法 |
| KR101962034B1 (ko) * | 2017-10-25 | 2019-03-25 | 한국기초과학지원연구원 | 무반사 나노패턴을 포함하는 광대역 대물렌즈 및 이의 제조방법 |
| CN108037549A (zh) * | 2017-12-11 | 2018-05-15 | 中国科学院长春光学精密机械与物理研究所 | 一种接触屏及其制备方法 |
| FR3084205A1 (fr) | 2018-07-20 | 2020-01-24 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif electronique comprenant une structure antireflet |
| EP3647287B1 (en) * | 2018-10-30 | 2024-04-17 | SCHOTT Pharma AG & Co. KGaA | Container precursor having a wall of glass which is superimposed by a plurality of particles |
| JP7354287B2 (ja) * | 2019-04-26 | 2023-10-02 | 華為技術有限公司 | 反射防止膜、光学素子、カメラモジュール、及び端末 |
| KR102191074B1 (ko) * | 2019-05-03 | 2020-12-15 | 공주대학교 산학협력단 | 콜로이드 입자를 이용한 표면 나노 돌기 구조 제조방법 |
| CN115373219A (zh) * | 2022-08-29 | 2022-11-22 | 歌尔光学科技有限公司 | 塑料晶圆的处理方法、塑料晶圆、光栅片及光波导器件 |
| CN116356577A (zh) * | 2023-04-07 | 2023-06-30 | 长春理工大学 | 一种自清洁碳纤维及其制备方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08211202A (ja) * | 1995-02-07 | 1996-08-20 | Hitachi Ltd | 撥水撥油性超微粒子を有する光透過板およびその製造方法 |
| JPWO2004031815A1 (ja) * | 2002-10-07 | 2006-03-23 | ナルックス株式会社 | 反射防止用回折格子 |
| WO2004061980A1 (de) | 2002-12-30 | 2004-07-22 | Osram Opto Semiconductors Gmbh | Verfahren zum aufrauhen einer oberfläche eines körpers und optoelektronisches bauelement |
| JP4050631B2 (ja) * | 2003-02-21 | 2008-02-20 | 株式会社ルネサステクノロジ | 電子デバイスの製造方法 |
| JP4505670B2 (ja) * | 2003-08-29 | 2010-07-21 | 株式会社ニコン | 透過型光学素子の製造方法 |
| JP4068578B2 (ja) * | 2004-02-18 | 2008-03-26 | 株式会社東芝 | 微細凸凹パターンの形成方法 |
| WO2005092588A1 (ja) * | 2004-03-25 | 2005-10-06 | Sanyo Electric Co., Ltd. | 微細凹凸構造を有する曲面金型の製造方法及びこの金型を用いた光学素子の製造方法 |
| JP2005331868A (ja) | 2004-05-21 | 2005-12-02 | Canon Inc | 反射防止構造を有する光学素子およびその製造方法 |
| WO2006025277A1 (ja) * | 2004-08-31 | 2006-03-09 | Meijo University | 半導体発光素子製造方法および半導体発光素子 |
| WO2006046502A1 (ja) * | 2004-10-27 | 2006-05-04 | Nikon Corporation | 光学素子の製造方法、光学素子、ニッポウディスク、コンフォーカル光学系、及び3次元測定装置 |
| JP4253302B2 (ja) * | 2005-01-06 | 2009-04-08 | 株式会社東芝 | 有機エレクトロルミネッセンス素子およびその製造方法 |
| JP2007087974A (ja) * | 2005-09-16 | 2007-04-05 | Fujifilm Corp | 多孔薄膜堆積基板、その製造方法及びスイッチング素子 |
| US7385231B2 (en) * | 2005-08-31 | 2008-06-10 | Fujifilmcorporation | Porous thin-film-deposition substrate, electron emitting element, methods of producing them, and switching element and display element |
| US7695999B2 (en) * | 2005-09-06 | 2010-04-13 | Canon Kabushiki Kaisha | Production method of semiconductor device |
| EP1989593A2 (en) * | 2006-02-13 | 2008-11-12 | Dow Corning Corporation | Antireflective coating material |
| US7713768B2 (en) * | 2006-06-14 | 2010-05-11 | Kanagawa Academy Of Science And Technology | Anti-reflective film and production method thereof, and stamper for producing anti-reflective film and production method thereof |
-
2008
- 2008-01-04 JP JP2008000059A patent/JP4945460B2/ja not_active Expired - Fee Related
- 2008-12-31 US US12/347,187 patent/US8361339B2/en not_active Expired - Fee Related
-
2012
- 2012-12-21 US US13/723,374 patent/US8840258B2/en not_active Expired - Fee Related
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