JP2009162665A - ガス分析方法及びガス分析装置 - Google Patents

ガス分析方法及びガス分析装置 Download PDF

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Publication number
JP2009162665A
JP2009162665A JP2008001651A JP2008001651A JP2009162665A JP 2009162665 A JP2009162665 A JP 2009162665A JP 2008001651 A JP2008001651 A JP 2008001651A JP 2008001651 A JP2008001651 A JP 2008001651A JP 2009162665 A JP2009162665 A JP 2009162665A
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JP
Japan
Prior art keywords
gas
mass
molecular weight
mass spectrum
read
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008001651A
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English (en)
Japanese (ja)
Other versions
JP2009162665A5 (enExample
Inventor
Tadashi Arii
忠 有井
Takatomo Matsumoto
恭知 松本
Tomoji Otake
智士 大竹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Priority to JP2008001651A priority Critical patent/JP2009162665A/ja
Priority to US12/347,377 priority patent/US7989761B2/en
Priority to DE102009004398A priority patent/DE102009004398A1/de
Publication of JP2009162665A publication Critical patent/JP2009162665A/ja
Publication of JP2009162665A5 publication Critical patent/JP2009162665A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2008001651A 2008-01-08 2008-01-08 ガス分析方法及びガス分析装置 Pending JP2009162665A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008001651A JP2009162665A (ja) 2008-01-08 2008-01-08 ガス分析方法及びガス分析装置
US12/347,377 US7989761B2 (en) 2008-01-08 2008-12-31 Gas analyzing method and gas analyzing apparatus
DE102009004398A DE102009004398A1 (de) 2008-01-08 2009-01-08 Gasanalyse-Verfahren sowie Gasanalyse-Vorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008001651A JP2009162665A (ja) 2008-01-08 2008-01-08 ガス分析方法及びガス分析装置

Publications (2)

Publication Number Publication Date
JP2009162665A true JP2009162665A (ja) 2009-07-23
JP2009162665A5 JP2009162665A5 (enExample) 2011-02-10

Family

ID=40719587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008001651A Pending JP2009162665A (ja) 2008-01-08 2008-01-08 ガス分析方法及びガス分析装置

Country Status (3)

Country Link
US (1) US7989761B2 (enExample)
JP (1) JP2009162665A (enExample)
DE (1) DE102009004398A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011209062A (ja) * 2010-03-29 2011-10-20 Mitsui Eng & Shipbuild Co Ltd マススペクトルデータの二次解析方法およびマススペクトルデータの二次解析システム
JP2014215091A (ja) * 2013-04-23 2014-11-17 ナノフォトン株式会社 ラマンスペクトルデータベースの構築方法
JP2019121581A (ja) * 2018-01-11 2019-07-22 株式会社日立ハイテクサイエンス 質量分析装置及び質量分析方法
JP2020115117A (ja) * 2019-01-18 2020-07-30 日本電子株式会社 マススペクトル処理装置及び方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107064361B (zh) 2014-12-31 2020-03-27 同方威视技术股份有限公司 检测设备和检测方法
CN111446147B (zh) * 2020-03-20 2023-07-04 北京雪迪龙科技股份有限公司 基于飞行时间质谱仪的气体成分测量方法、电子设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6481156A (en) * 1987-09-21 1989-03-27 Shimadzu Corp Mass spectroscope
JPH03285158A (ja) * 1990-03-30 1991-12-16 Shimadzu Corp 質量分析装置におけるデータ検索方法
JP2006038628A (ja) * 2004-07-27 2006-02-09 Shimadzu Corp クロマトグラフ質量分析装置
JP2006322899A (ja) * 2005-05-20 2006-11-30 Hitachi Ltd ガスモニタリング装置
WO2007108211A1 (ja) * 2006-03-17 2007-09-27 Rigaku Corporation ガス分析装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7381944B2 (en) * 2004-04-28 2008-06-03 Sionex Corporation Systems and methods for ion species analysis with enhanced condition control and data interpretation
CA2547389A1 (en) * 2003-11-25 2005-06-09 Sionex Corporation Mobility based apparatus and methods using dispersion characteristics, sample fragmentation, and/or pressure control to improve analysis of a sample
CA2551991A1 (en) * 2004-01-13 2005-07-28 Sionex Corporation Methods and apparatus for enhanced sample identification based on combined analytical techniques
JP4982087B2 (ja) * 2006-02-08 2012-07-25 株式会社日立製作所 質量分析装置及び質量分析方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6481156A (en) * 1987-09-21 1989-03-27 Shimadzu Corp Mass spectroscope
JPH03285158A (ja) * 1990-03-30 1991-12-16 Shimadzu Corp 質量分析装置におけるデータ検索方法
JP2006038628A (ja) * 2004-07-27 2006-02-09 Shimadzu Corp クロマトグラフ質量分析装置
JP2006322899A (ja) * 2005-05-20 2006-11-30 Hitachi Ltd ガスモニタリング装置
WO2007108211A1 (ja) * 2006-03-17 2007-09-27 Rigaku Corporation ガス分析装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011209062A (ja) * 2010-03-29 2011-10-20 Mitsui Eng & Shipbuild Co Ltd マススペクトルデータの二次解析方法およびマススペクトルデータの二次解析システム
JP2014215091A (ja) * 2013-04-23 2014-11-17 ナノフォトン株式会社 ラマンスペクトルデータベースの構築方法
JP2019121581A (ja) * 2018-01-11 2019-07-22 株式会社日立ハイテクサイエンス 質量分析装置及び質量分析方法
JP2020115117A (ja) * 2019-01-18 2020-07-30 日本電子株式会社 マススペクトル処理装置及び方法

Also Published As

Publication number Publication date
US20090173879A1 (en) 2009-07-09
DE102009004398A1 (de) 2009-07-09
US7989761B2 (en) 2011-08-02

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