DE102009004398A1 - Gasanalyse-Verfahren sowie Gasanalyse-Vorrichtung - Google Patents

Gasanalyse-Verfahren sowie Gasanalyse-Vorrichtung Download PDF

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Publication number
DE102009004398A1
DE102009004398A1 DE102009004398A DE102009004398A DE102009004398A1 DE 102009004398 A1 DE102009004398 A1 DE 102009004398A1 DE 102009004398 A DE102009004398 A DE 102009004398A DE 102009004398 A DE102009004398 A DE 102009004398A DE 102009004398 A1 DE102009004398 A1 DE 102009004398A1
Authority
DE
Germany
Prior art keywords
gas
mass
analysis
ion
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102009004398A
Other languages
German (de)
English (en)
Inventor
Tadashi Akishima-shi Arii
Kyoji Akishima-shi Matsumoto
Satoshi Akishima-shi Otake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Publication of DE102009004398A1 publication Critical patent/DE102009004398A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/64Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE102009004398A 2008-01-08 2009-01-08 Gasanalyse-Verfahren sowie Gasanalyse-Vorrichtung Withdrawn DE102009004398A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-001651 2008-01-08
JP2008001651A JP2009162665A (ja) 2008-01-08 2008-01-08 ガス分析方法及びガス分析装置

Publications (1)

Publication Number Publication Date
DE102009004398A1 true DE102009004398A1 (de) 2009-07-09

Family

ID=40719587

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009004398A Withdrawn DE102009004398A1 (de) 2008-01-08 2009-01-08 Gasanalyse-Verfahren sowie Gasanalyse-Vorrichtung

Country Status (3)

Country Link
US (1) US7989761B2 (enExample)
JP (1) JP2009162665A (enExample)
DE (1) DE102009004398A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011209062A (ja) * 2010-03-29 2011-10-20 Mitsui Eng & Shipbuild Co Ltd マススペクトルデータの二次解析方法およびマススペクトルデータの二次解析システム
JP6178964B2 (ja) * 2013-04-23 2017-08-16 ナノフォトン株式会社 ラマンスペクトルデータベースの構築方法
CN107064361B (zh) 2014-12-31 2020-03-27 同方威视技术股份有限公司 检测设备和检测方法
JP6505268B1 (ja) * 2018-01-11 2019-04-24 株式会社日立ハイテクサイエンス 質量分析装置及び質量分析方法
JP6943897B2 (ja) * 2019-01-18 2021-10-06 日本電子株式会社 マススペクトル処理装置及び方法
CN111446147B (zh) * 2020-03-20 2023-07-04 北京雪迪龙科技股份有限公司 基于飞行时间质谱仪的气体成分测量方法、电子设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007108211A1 (ja) 2006-03-17 2007-09-27 Rigaku Corporation ガス分析装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2569601B2 (ja) * 1987-09-21 1997-01-08 株式会社島津製作所 質量分析装置
JPH03285158A (ja) * 1990-03-30 1991-12-16 Shimadzu Corp 質量分析装置におけるデータ検索方法
US7381944B2 (en) * 2004-04-28 2008-06-03 Sionex Corporation Systems and methods for ion species analysis with enhanced condition control and data interpretation
CA2547389A1 (en) * 2003-11-25 2005-06-09 Sionex Corporation Mobility based apparatus and methods using dispersion characteristics, sample fragmentation, and/or pressure control to improve analysis of a sample
CA2551991A1 (en) * 2004-01-13 2005-07-28 Sionex Corporation Methods and apparatus for enhanced sample identification based on combined analytical techniques
JP4337678B2 (ja) * 2004-07-27 2009-09-30 株式会社島津製作所 クロマトグラフ質量分析装置
JP2006322899A (ja) * 2005-05-20 2006-11-30 Hitachi Ltd ガスモニタリング装置
JP4982087B2 (ja) * 2006-02-08 2012-07-25 株式会社日立製作所 質量分析装置及び質量分析方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007108211A1 (ja) 2006-03-17 2007-09-27 Rigaku Corporation ガス分析装置

Also Published As

Publication number Publication date
US20090173879A1 (en) 2009-07-09
US7989761B2 (en) 2011-08-02
JP2009162665A (ja) 2009-07-23

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Legal Events

Date Code Title Description
OR8 Request for search as to paragraph 43 lit. 1 sentence 1 patent law
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20130801