JP2009161846A5 - - Google Patents
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- Publication number
- JP2009161846A5 JP2009161846A5 JP2008028546A JP2008028546A JP2009161846A5 JP 2009161846 A5 JP2009161846 A5 JP 2009161846A5 JP 2008028546 A JP2008028546 A JP 2008028546A JP 2008028546 A JP2008028546 A JP 2008028546A JP 2009161846 A5 JP2009161846 A5 JP 2009161846A5
- Authority
- JP
- Japan
- Prior art keywords
- porosity
- substrate
- producing
- coating
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000007750 plasma spraying Methods 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008028546A JP2009161846A (ja) | 2007-12-10 | 2008-02-08 | プラズマ処理容器内部材の製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007317841 | 2007-12-10 | ||
| JP2008028546A JP2009161846A (ja) | 2007-12-10 | 2008-02-08 | プラズマ処理容器内部材の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008077896A Division JP2009161848A (ja) | 2007-12-10 | 2008-03-25 | プラズマ処理容器内部材の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009161846A JP2009161846A (ja) | 2009-07-23 |
| JP2009161846A5 true JP2009161846A5 (enrdf_load_stackoverflow) | 2009-11-12 |
Family
ID=40964783
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008028546A Pending JP2009161846A (ja) | 2007-12-10 | 2008-02-08 | プラズマ処理容器内部材の製造方法 |
| JP2008077896A Pending JP2009161848A (ja) | 2007-12-10 | 2008-03-25 | プラズマ処理容器内部材の製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008077896A Pending JP2009161848A (ja) | 2007-12-10 | 2008-03-25 | プラズマ処理容器内部材の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP2009161846A (enrdf_load_stackoverflow) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009176787A (ja) * | 2008-01-22 | 2009-08-06 | Hitachi High-Technologies Corp | エッチング処理装置及びエッチング処理室用部材 |
| US20120183790A1 (en) * | 2010-07-14 | 2012-07-19 | Christopher Petorak | Thermal spray composite coatings for semiconductor applications |
| JP5879069B2 (ja) * | 2011-08-11 | 2016-03-08 | 東京エレクトロン株式会社 | プラズマ処理装置の上部電極の製造方法 |
| JP5496992B2 (ja) * | 2011-12-13 | 2014-05-21 | 中国電力株式会社 | プラズマ溶射装置及びその制御方法 |
| JP6246567B2 (ja) * | 2012-11-22 | 2017-12-13 | 群馬県 | 複層皮膜付き基材およびその製造方法 |
| US10468235B2 (en) | 2013-09-18 | 2019-11-05 | Applied Materials, Inc. | Plasma spray coating enhancement using plasma flame heat treatment |
| US9869013B2 (en) * | 2014-04-25 | 2018-01-16 | Applied Materials, Inc. | Ion assisted deposition top coat of rare-earth oxide |
| US9790581B2 (en) * | 2014-06-25 | 2017-10-17 | Fm Industries, Inc. | Emissivity controlled coatings for semiconductor chamber components |
| JP7169077B2 (ja) | 2018-03-26 | 2022-11-10 | 三菱重工業株式会社 | 遮熱コーティング、タービン部材、ガスタービン及び遮熱コーティングの製造方法 |
| TWI715004B (zh) | 2018-04-03 | 2021-01-01 | 日商京瓷股份有限公司 | 電漿處理裝置用構件及具備其之電漿處理裝置以及電漿處理裝置用構件之製造方法 |
| CN118222969B (zh) * | 2024-05-27 | 2024-07-30 | 北矿新材科技有限公司 | 一种固-固润滑的低氧化高致密结构长润滑寿命银涂层及其制备方法和涂层工件 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS602659A (ja) * | 1983-06-20 | 1985-01-08 | Toyota Motor Corp | 高温用溶射部材 |
| JPH0967662A (ja) * | 1995-08-30 | 1997-03-11 | Toshiba Corp | セラミックス被覆部材 |
| JP3510993B2 (ja) * | 1999-12-10 | 2004-03-29 | トーカロ株式会社 | プラズマ処理容器内部材およびその製造方法 |
-
2008
- 2008-02-08 JP JP2008028546A patent/JP2009161846A/ja active Pending
- 2008-03-25 JP JP2008077896A patent/JP2009161848A/ja active Pending
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