JP2009152251A5 - - Google Patents

Download PDF

Info

Publication number
JP2009152251A5
JP2009152251A5 JP2007326584A JP2007326584A JP2009152251A5 JP 2009152251 A5 JP2009152251 A5 JP 2009152251A5 JP 2007326584 A JP2007326584 A JP 2007326584A JP 2007326584 A JP2007326584 A JP 2007326584A JP 2009152251 A5 JP2009152251 A5 JP 2009152251A5
Authority
JP
Japan
Prior art keywords
optical system
projection optical
axis
exposure apparatus
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007326584A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009152251A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007326584A priority Critical patent/JP2009152251A/ja
Priority claimed from JP2007326584A external-priority patent/JP2009152251A/ja
Priority to TW097147414A priority patent/TW200942975A/zh
Priority to KR1020080125683A priority patent/KR20090066218A/ko
Priority to US12/334,675 priority patent/US20090153828A1/en
Publication of JP2009152251A publication Critical patent/JP2009152251A/ja
Publication of JP2009152251A5 publication Critical patent/JP2009152251A5/ja
Pending legal-status Critical Current

Links

JP2007326584A 2007-12-18 2007-12-18 露光装置、露光方法及びデバイス製造方法 Pending JP2009152251A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007326584A JP2009152251A (ja) 2007-12-18 2007-12-18 露光装置、露光方法及びデバイス製造方法
TW097147414A TW200942975A (en) 2007-12-18 2008-12-05 Exposure apparatus, exposure method, and semiconductor device fabrication method
KR1020080125683A KR20090066218A (ko) 2007-12-18 2008-12-11 노광장치, 노광 방법 및 디바이스 제조 방법
US12/334,675 US20090153828A1 (en) 2007-12-18 2008-12-15 Exposure apparatus, exposure method, and device fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007326584A JP2009152251A (ja) 2007-12-18 2007-12-18 露光装置、露光方法及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2009152251A JP2009152251A (ja) 2009-07-09
JP2009152251A5 true JP2009152251A5 (enExample) 2011-02-03

Family

ID=40752758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007326584A Pending JP2009152251A (ja) 2007-12-18 2007-12-18 露光装置、露光方法及びデバイス製造方法

Country Status (4)

Country Link
US (1) US20090153828A1 (enExample)
JP (1) JP2009152251A (enExample)
KR (1) KR20090066218A (enExample)
TW (1) TW200942975A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010041746A1 (de) * 2010-09-30 2012-04-05 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage der EUV-Mikrolithographie und Verfahren zur mikrolithographischen Belichtung
DE102012205096B3 (de) * 2012-03-29 2013-08-29 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage mit mindestens einem Manipulator
DE102015209051B4 (de) * 2015-05-18 2018-08-30 Carl Zeiss Smt Gmbh Projektionsobjektiv mit Wellenfrontmanipulator sowie Projektionsbelichtungsverfahren und Projektionsbelichtungsanlage
JP6730850B2 (ja) * 2016-06-01 2020-07-29 キヤノン株式会社 露光条件の決定方法、プログラム、情報処理装置、露光装置、および物品製造方法
JP6477850B2 (ja) * 2017-12-15 2019-03-06 株式会社ニコン 算出装置及び方法、プログラム、並びに露光方法
EP3702839B1 (en) * 2019-02-27 2021-11-10 ASML Netherlands B.V. Method of reducing effects of lens heating and/or cooling in a lithographic process
JP7390804B2 (ja) * 2019-05-17 2023-12-04 キヤノン株式会社 露光装置、露光方法、決定方法および物品製造方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6304317B1 (en) * 1993-07-15 2001-10-16 Nikon Corporation Projection apparatus and method
JP3368091B2 (ja) * 1994-04-22 2003-01-20 キヤノン株式会社 投影露光装置及びデバイスの製造方法
TWI256484B (en) * 2000-02-23 2006-07-01 Asml Netherlands Bv Method of measuring aberration in an optical imaging system
JP4005763B2 (ja) * 2000-06-30 2007-11-14 株式会社東芝 投影光学系の収差補正方法及び半導体装置の製造方法
JP4174660B2 (ja) * 2000-12-28 2008-11-05 株式会社ニコン 露光方法及び装置、プログラム及び情報記録媒体、並びにデバイス製造方法
DE10124474A1 (de) * 2001-05-19 2002-11-21 Zeiss Carl Mikrolithographisches Belichtungsverfahren sowie Projektionsobjektiv zur Durchführung des Verfahrens
EP1413870A4 (en) * 2001-07-05 2006-11-15 Nikon Corp OPTICAL ELEMENT FOR OPTICAL LITHOGRAPHY, AND RELATIVE EVALUATION METHOD
DE10146499B4 (de) * 2001-09-21 2006-11-09 Carl Zeiss Smt Ag Verfahren zur Optimierung der Abbildungseigenschaften von mindestens zwei optischen Elementen sowie Verfahren zur Optimierung der Abbildungseigenschaften von mindestens drei optischen Elementen
JP2004111579A (ja) * 2002-09-17 2004-04-08 Canon Inc 露光方法及び装置
EP1496397A1 (en) * 2003-07-11 2005-01-12 ASML Netherlands B.V. Method and system for feedforward overlay correction of pattern induced distortion and displacement, and lithographic projection apparatus using such a method and system
JP2005051145A (ja) * 2003-07-31 2005-02-24 Nikon Corp 露光方法及び露光装置
JP2005175407A (ja) * 2003-12-15 2005-06-30 Canon Inc 計測方法及び装置、それを利用した露光方法及び装置、並びに、デバイス製造方法
JP4497949B2 (ja) * 2004-02-12 2010-07-07 キヤノン株式会社 露光装置
JP2006165398A (ja) * 2004-12-09 2006-06-22 Toshiba Corp 収差測定方法及び半導体装置の製造方法
JP2006173305A (ja) * 2004-12-15 2006-06-29 Canon Inc 露光装置及び方法、並びに、デバイス製造方法
JP2007157824A (ja) * 2005-12-01 2007-06-21 Nikon Corp 結像光学系の評価方法、結像光学系の調整方法、露光装置、露光方法、およびデバイスの製造方法
US7580113B2 (en) * 2006-06-23 2009-08-25 Asml Netherlands B.V. Method of reducing a wave front aberration, and computer program product
US8134683B2 (en) * 2007-02-09 2012-03-13 Asml Netherlands B.V. Device manufacturing method, computer program and lithographic apparatus

Similar Documents

Publication Publication Date Title
JP2009152251A5 (enExample)
JP2011507241A5 (enExample)
TW200717025A (en) Microlithography projection optical system, microlithographic tool comprising such an optical system, method for microlithographic production of microstructured components using such a microlithographic tool, microstructured component being produced by s
TW200732857A (en) Lithographic apparatus, device manufacturing method and exchangeable optical element
JP2012168543A5 (ja) 投影光学系、露光装置、露光方法、およびデバイス製造方法
JP2014044445A5 (enExample)
JP2012155330A5 (ja) 露光装置、露光方法、およびデバイス製造方法
JP2016001308A5 (ja) 露光装置、およびデバイス製造方法
JP2010528463A5 (enExample)
ATE532105T1 (de) Beleuchtungsmethode
WO2005059617A3 (en) Projection objective having a high aperture and a planar end surface
JP2005530128A5 (enExample)
JP2015132848A5 (ja) 照明光学系、露光装置、照明方法、露光方法、およびデバイス製造方法
EP1586949A3 (en) Exposure apparatus and exposure method using EUV light
JP2010096866A5 (enExample)
ATE529781T1 (de) Beleuchtungssystem mit zoomobjetiv
WO2005096098A3 (en) Projection objective, projection exposure apparatus and reflective reticle for microlithography
JP2007311085A (ja) 擬似太陽光照射装置
JP2005532680A5 (enExample)
JP2005311187A5 (enExample)
WO2012041720A3 (en) Projection exposure apparatus for euv microlithography and method for microlithographic exposure
TW200942975A (en) Exposure apparatus, exposure method, and semiconductor device fabrication method
JP2002244046A5 (enExample)
JP2005243953A5 (enExample)
EP1569033A3 (en) Exposure apparatus and method