JP2009139654A5 - - Google Patents

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Publication number
JP2009139654A5
JP2009139654A5 JP2007316184A JP2007316184A JP2009139654A5 JP 2009139654 A5 JP2009139654 A5 JP 2009139654A5 JP 2007316184 A JP2007316184 A JP 2007316184A JP 2007316184 A JP2007316184 A JP 2007316184A JP 2009139654 A5 JP2009139654 A5 JP 2009139654A5
Authority
JP
Japan
Prior art keywords
movable body
vibration
slider
vibration damping
damping mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007316184A
Other languages
English (en)
Japanese (ja)
Other versions
JP5052315B2 (ja
JP2009139654A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007316184A priority Critical patent/JP5052315B2/ja
Priority claimed from JP2007316184A external-priority patent/JP5052315B2/ja
Priority to US12/325,372 priority patent/US7903328B2/en
Priority to EP08020974A priority patent/EP2068187A1/en
Publication of JP2009139654A publication Critical patent/JP2009139654A/ja
Publication of JP2009139654A5 publication Critical patent/JP2009139654A5/ja
Application granted granted Critical
Publication of JP5052315B2 publication Critical patent/JP5052315B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007316184A 2007-12-06 2007-12-06 顕微鏡システム Expired - Fee Related JP5052315B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007316184A JP5052315B2 (ja) 2007-12-06 2007-12-06 顕微鏡システム
US12/325,372 US7903328B2 (en) 2007-12-06 2008-12-01 Microscope system having vibration dampening mechanism
EP08020974A EP2068187A1 (en) 2007-12-06 2008-12-03 Vibration damping system for a microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007316184A JP5052315B2 (ja) 2007-12-06 2007-12-06 顕微鏡システム

Publications (3)

Publication Number Publication Date
JP2009139654A JP2009139654A (ja) 2009-06-25
JP2009139654A5 true JP2009139654A5 (enExample) 2010-12-16
JP5052315B2 JP5052315B2 (ja) 2012-10-17

Family

ID=40428056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007316184A Expired - Fee Related JP5052315B2 (ja) 2007-12-06 2007-12-06 顕微鏡システム

Country Status (3)

Country Link
US (1) US7903328B2 (enExample)
EP (1) EP2068187A1 (enExample)
JP (1) JP5052315B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5191292B2 (ja) * 2008-07-08 2013-05-08 オリンパス株式会社 培養装置
JP5540995B2 (ja) * 2010-08-24 2014-07-02 株式会社ニコン カメラの絞り制御装置およびカメラ
JP5721042B2 (ja) * 2010-10-20 2015-05-20 株式会社ニコン 顕微鏡システム
DE102010060841B3 (de) * 2010-11-26 2012-06-06 Leica Microsystems Cms Gmbh Einrichtung zum Fokussieren eines Mikroskopobjektivs auf eine Probe
KR101882824B1 (ko) 2014-01-31 2018-07-27 에이에스엠엘 네델란즈 비.브이. 스테이지 위치설정 시스템 및 리소그래피 장치
WO2021060083A1 (ja) * 2019-09-24 2021-04-01 東京エレクトロン株式会社 原料供給装置及び原料供給方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2163798C2 (de) 1971-12-22 1982-11-11 Messerschmitt-Bölkow-Blohm GmbH, 8000 München Resonanzabsorber für periodische und aperiodische Schwingungen
DE2933726A1 (de) 1979-08-21 1981-03-26 Fa. Carl Freudenberg, 69469 Weinheim Schwingungsdaempfer
JPH03250165A (ja) 1990-02-27 1991-11-07 Shimizu Corp ハイブリッド動吸振器
US5286013A (en) * 1990-11-13 1994-02-15 General Electric Company Vibration damper assembly
JPH06316372A (ja) * 1993-05-07 1994-11-15 Murata Mach Ltd 紡糸巻取機及び紡糸巻取機に使用される動吸振器
KR20000068830A (ko) * 1997-08-27 2000-11-25 마에다 츠구요시 대물렌즈 액츄에이터
JPH11102858A (ja) * 1997-09-29 1999-04-13 Canon Inc ステージ位置決め制御装置および能動的除振装置
JPH11191231A (ja) * 1997-12-26 1999-07-13 Nhk Spring Co Ltd 対物レンズアクチュエータ
US6392795B2 (en) 1998-08-28 2002-05-21 Olympus Optical Co., Ltd. Microscope with a dynamic damper
JP3911372B2 (ja) * 1998-08-28 2007-05-09 オリンパス株式会社 動吸振器付き顕微鏡
JP2001221733A (ja) * 2000-02-04 2001-08-17 Olympus Optical Co Ltd 微動機構
JP4522530B2 (ja) * 2000-03-31 2010-08-11 三菱電機株式会社 回転体の動吸振装置及び同装置を用いたエレベータ
US6567212B1 (en) 2000-08-16 2003-05-20 Leica Microsystems Heidelberg Gmbh Vibration damping device for microscopes and microscope with a vibration damping device
JP2002124206A (ja) * 2000-10-12 2002-04-26 Jeol Ltd 顕微分析装置
DE10115837A1 (de) * 2001-03-31 2002-11-14 Leica Microsystems Stativ, insbesondere für ein Operationsmikroskop
JP4444178B2 (ja) * 2005-07-07 2010-03-31 Ｔｄｋ株式会社 光ヘッド装置及びそれを用いた光記録再生装置
KR101428817B1 (ko) 2005-07-14 2014-08-08 칼 짜이스 에스엠테 게엠베하 광학 요소 진동 감쇄 장치, 대물렌즈, 투사 노출 기계 및 이들을 사용하는 방법
US8164737B2 (en) * 2007-10-23 2012-04-24 Asml Netherlands B.V. Lithographic apparatus having an active damping subassembly

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