JP2009134026A5 - - Google Patents
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- Publication number
- JP2009134026A5 JP2009134026A5 JP2007309553A JP2007309553A JP2009134026A5 JP 2009134026 A5 JP2009134026 A5 JP 2009134026A5 JP 2007309553 A JP2007309553 A JP 2007309553A JP 2007309553 A JP2007309553 A JP 2007309553A JP 2009134026 A5 JP2009134026 A5 JP 2009134026A5
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- bonding film
- optical device
- atom
- elastic portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000003287 optical effect Effects 0.000 claims 26
- 125000004429 atom Chemical group 0.000 claims 7
- 239000000463 material Substances 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 7
- 239000002184 metal Substances 0.000 claims 5
- 125000004430 oxygen atom Chemical group O* 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims 2
- 125000000217 alkyl group Chemical group 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- 239000000470 constituent Substances 0.000 claims 1
- 230000008030 elimination Effects 0.000 claims 1
- 238000003379 elimination reaction Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 125000005843 halogen group Chemical group 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims 1
- 125000004437 phosphorous atom Chemical group 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 238000006116 polymerization reaction Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
- 125000004434 sulfur atom Chemical group 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007309553A JP5076843B2 (ja) | 2007-11-29 | 2007-11-29 | 光学デバイス、波長可変フィルタモジュール、および光スペクトラムアナライザ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007309553A JP5076843B2 (ja) | 2007-11-29 | 2007-11-29 | 光学デバイス、波長可変フィルタモジュール、および光スペクトラムアナライザ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009134026A JP2009134026A (ja) | 2009-06-18 |
JP2009134026A5 true JP2009134026A5 (enrdf_load_stackoverflow) | 2011-01-20 |
JP5076843B2 JP5076843B2 (ja) | 2012-11-21 |
Family
ID=40865954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007309553A Expired - Fee Related JP5076843B2 (ja) | 2007-11-29 | 2007-11-29 | 光学デバイス、波長可変フィルタモジュール、および光スペクトラムアナライザ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5076843B2 (enrdf_load_stackoverflow) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011079826A1 (en) | 2010-01-04 | 2011-07-07 | Shanghai Lexvu Opto Microelectronics Technology Co., Ltd | A tri wavelength diffraction modulator and a method for modulation |
JP5445303B2 (ja) * | 2010-04-19 | 2014-03-19 | セイコーエプソン株式会社 | 光フィルター素子、光フィルターモジュール、および分析機器 |
JP5617357B2 (ja) * | 2010-06-07 | 2014-11-05 | 大日本印刷株式会社 | センサデバイス及びその製造方法 |
JP5640549B2 (ja) | 2010-08-19 | 2014-12-17 | セイコーエプソン株式会社 | 光フィルター、光フィルターの製造方法および光機器 |
JP5516358B2 (ja) * | 2010-11-18 | 2014-06-11 | 株式会社デンソー | ファブリペロー干渉計の製造方法 |
JP2025035965A (ja) * | 2023-09-01 | 2025-03-14 | 浜松ホトニクス株式会社 | ファブリペロー干渉フィルタ |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4185409B2 (ja) * | 2002-06-27 | 2008-11-26 | 松下電器産業株式会社 | 光導波路の製造方法 |
JP3714338B2 (ja) * | 2003-04-23 | 2005-11-09 | ウシオ電機株式会社 | 接合方法 |
JP4742503B2 (ja) * | 2004-02-27 | 2011-08-10 | セイコーエプソン株式会社 | 成膜方法 |
JP4603489B2 (ja) * | 2005-01-28 | 2010-12-22 | セイコーエプソン株式会社 | 波長可変フィルタ |
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2007
- 2007-11-29 JP JP2007309553A patent/JP5076843B2/ja not_active Expired - Fee Related