JP2009136120A5 - - Google Patents
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- Publication number
- JP2009136120A5 JP2009136120A5 JP2007311796A JP2007311796A JP2009136120A5 JP 2009136120 A5 JP2009136120 A5 JP 2009136120A5 JP 2007311796 A JP2007311796 A JP 2007311796A JP 2007311796 A JP2007311796 A JP 2007311796A JP 2009136120 A5 JP2009136120 A5 JP 2009136120A5
- Authority
- JP
- Japan
- Prior art keywords
- bonding film
- movable plate
- actuator according
- atom
- elastic member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 125000004429 atom Chemical group 0.000 claims 7
- 239000002184 metal Substances 0.000 claims 5
- 125000004430 oxygen atom Chemical group O* 0.000 claims 4
- 238000005452 bending Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims 2
- 125000000217 alkyl group Chemical group 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 125000005843 halogen group Chemical group 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims 1
- 238000001579 optical reflectometry Methods 0.000 claims 1
- 125000004437 phosphorous atom Chemical group 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 238000006116 polymerization reaction Methods 0.000 claims 1
- 125000004434 sulfur atom Chemical group 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007311796A JP2009136120A (ja) | 2007-11-30 | 2007-11-30 | アクチュエータおよび画像形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007311796A JP2009136120A (ja) | 2007-11-30 | 2007-11-30 | アクチュエータおよび画像形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009136120A JP2009136120A (ja) | 2009-06-18 |
| JP2009136120A5 true JP2009136120A5 (enrdf_load_stackoverflow) | 2011-01-13 |
Family
ID=40867463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007311796A Withdrawn JP2009136120A (ja) | 2007-11-30 | 2007-11-30 | アクチュエータおよび画像形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009136120A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5323155B2 (ja) * | 2011-09-08 | 2013-10-23 | 富士フイルム株式会社 | ミラー駆動装置及びその駆動方法並びに製造方法 |
| CN105712290B (zh) * | 2014-12-04 | 2017-09-29 | 无锡华润上华半导体有限公司 | Mems静电驱动器的制作方法 |
| IT201700046127A1 (it) * | 2017-04-28 | 2018-10-28 | St Microelectronics Srl | Struttura oscillante ad azionamento piezoelettrico con migliorata compattezza e sistema elettronico includente la struttura oscillante |
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2007
- 2007-11-30 JP JP2007311796A patent/JP2009136120A/ja not_active Withdrawn