JP2009127008A - 多孔性ポリマー成形物の製造方法 - Google Patents
多孔性ポリマー成形物の製造方法 Download PDFInfo
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- JP2009127008A JP2009127008A JP2007306249A JP2007306249A JP2009127008A JP 2009127008 A JP2009127008 A JP 2009127008A JP 2007306249 A JP2007306249 A JP 2007306249A JP 2007306249 A JP2007306249 A JP 2007306249A JP 2009127008 A JP2009127008 A JP 2009127008A
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- 229920000642 polymer Polymers 0.000 title claims abstract description 60
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000001312 dry etching Methods 0.000 claims abstract description 14
- 229920000954 Polyglycolide Polymers 0.000 claims description 28
- 238000000465 moulding Methods 0.000 claims description 24
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 16
- 229910052786 argon Inorganic materials 0.000 claims description 8
- 239000004633 polyglycolic acid Substances 0.000 claims description 8
- 238000000992 sputter etching Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 19
- 238000010030 laminating Methods 0.000 abstract description 4
- 238000005530 etching Methods 0.000 description 21
- 238000001878 scanning electron micrograph Methods 0.000 description 12
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- -1 plates Substances 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920000620 organic polymer Polymers 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- ZNLAHAOCFKBYRH-UHFFFAOYSA-N 1,4-dioxane-2,3-dione Chemical compound O=C1OCCOC1=O ZNLAHAOCFKBYRH-UHFFFAOYSA-N 0.000 description 2
- ALRHLSYJTWAHJZ-UHFFFAOYSA-N 3-hydroxypropionic acid Chemical compound OCCC(O)=O ALRHLSYJTWAHJZ-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- OZJPLYNZGCXSJM-UHFFFAOYSA-N 5-valerolactone Chemical compound O=C1CCCCO1 OZJPLYNZGCXSJM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- JBKVHLHDHHXQEQ-UHFFFAOYSA-N epsilon-caprolactam Chemical compound O=C1CCCCCN1 JBKVHLHDHHXQEQ-UHFFFAOYSA-N 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- VDFVNEFVBPFDSB-UHFFFAOYSA-N 1,3-dioxane Chemical compound C1COCOC1 VDFVNEFVBPFDSB-UHFFFAOYSA-N 0.000 description 1
- VPVXHAANQNHFSF-UHFFFAOYSA-N 1,4-dioxan-2-one Chemical compound O=C1COCCO1 VPVXHAANQNHFSF-UHFFFAOYSA-N 0.000 description 1
- ULKFLOVGORAZDI-UHFFFAOYSA-N 3,3-dimethyloxetan-2-one Chemical compound CC1(C)COC1=O ULKFLOVGORAZDI-UHFFFAOYSA-N 0.000 description 1
- FHUDZSGRYLAEKR-UHFFFAOYSA-N 3-hydroxybutanoic acid;4-hydroxybutanoic acid Chemical compound CC(O)CC(O)=O.OCCCC(O)=O FHUDZSGRYLAEKR-UHFFFAOYSA-N 0.000 description 1
- YHTLGFCVBKENTE-UHFFFAOYSA-N 4-methyloxan-2-one Chemical compound CC1CCOC(=O)C1 YHTLGFCVBKENTE-UHFFFAOYSA-N 0.000 description 1
- IWHLYPDWHHPVAA-UHFFFAOYSA-N 6-hydroxyhexanoic acid Chemical compound OCCCCCC(O)=O IWHLYPDWHHPVAA-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- GSCLMSFRWBPUSK-UHFFFAOYSA-N beta-Butyrolactone Chemical compound CC1CC(=O)O1 GSCLMSFRWBPUSK-UHFFFAOYSA-N 0.000 description 1
- VEZXCJBBBCKRPI-UHFFFAOYSA-N beta-propiolactone Chemical compound O=C1CCO1 VEZXCJBBBCKRPI-UHFFFAOYSA-N 0.000 description 1
- 229920002988 biodegradable polymer Polymers 0.000 description 1
- 239000004621 biodegradable polymer Substances 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical class OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229960000380 propiolactone Drugs 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000010887 waste solvent Substances 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/0032—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0034—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/48—Polyesters
- B01D71/481—Polyarylates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C67/00—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00
- B29C67/20—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00 for porous or cellular articles, e.g. of foam plastics, coarse-pored
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/42—Details of membrane preparation apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Laminated Bodies (AREA)
Abstract
【解決手段】
ポリマー成形物2上に、複数の開口が形成された第1のマスク4と、第1のマスク4の平均開口径よりも大きい平均開口径を有する開口が複数形成された第2のマスク6とを積層する工程と、第2のマスク6側からドライエッチングすることによりポリマー成形物2に貫通孔3を形成する工程とを備える多孔性ポリマー成形物1の製造方法
【選択図】図2
Description
目開き(μm)=2.54×104/メッシュ数−線径(μm) (1)
膜厚4μmのポリグリコール酸(以下、「PGA」と表記する)フィルム上に、第1のマスクである300メッシュのSUSメッシュ(太陽金網社製、商品名「アヤ織金網」)、第2のマスクである60メッシュのSUSメッシュ(太陽金網社製、商品名「平織金網」)の順に積層した試料を準備した。上記試料をエッチグ装置(エーコーエンジニアリング社製、商品名「IE−10」)のベルジャー内にセットした。約6mTorrで1時間脱気後、アルゴンガスを注入し、真空度約40mTorrにコントロール(電圧1.5kVで設定の電流値になるようアルゴンガスの注入量を調製)しながら、60メッシュのSUSメッシュ上から、PGAフィルムを15分間エッチングし、多孔化PGAフィルムを作製した。得られた多孔化PGAフィルムをエッチング表面から観察したSEM画像を図4に、エッチング裏面から観察したSEM画像を図5にそれぞれ示す。
第2のマスクとして上記60メッシュのSUSメッシュに代えて40メッシュのサスメッシュ(太陽金網社製、商品名「平織金網」)を用いた以外は、実施例1と同様の操作を行い、PGAフィルムを20分間エッチングし、多孔化PGAフィルムを作製した。得られた多孔化PGAフィルムをエッチング表面から観察したSEM画像を図6に、エッチング裏面から観察したSEM画像を図7にそれぞれ示す。
上記60メッシュのSUSメッシュを用いなかった以外は、実施例1と同様の操作を行い、PGAフィルムを15分間エッチングし、多孔化PGAフィルムを作製した。得られた多孔化PGAフィルムをエッチング表面から観察したSEM画像を図8に、エッチング裏面から観察したSEM画像を図9にそれぞれ示す。
Claims (4)
- ポリマー成形物上に、複数の開口が形成された第1のマスクと、前記第1のマスクの平均開口径よりも大きい平均開口径を有する開口が複数形成された第2のマスクと、をこの順に積層する工程と、
前記第2のマスク側からドライエッチングすることにより前記ポリマー成形物に貫通孔を形成する工程と、
を備える多孔性ポリマー成形物の製造方法。 - 前記ポリマー成形物はポリグリコール酸からなるポリマー成形物である、請求項1記載の製造方法。
- 前記ドライエッチングはアルゴンイオンエッチングである、請求項1又は2記載の製造方法。
- 請求項1〜3のいずれか一項に記載の多孔性ポリマー成形物の製造方法により得ることのできる多孔体。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007306249A JP5395349B2 (ja) | 2007-11-27 | 2007-11-27 | 多孔性ポリマー成形物の製造方法 |
US12/744,025 US20110045235A1 (en) | 2007-11-27 | 2008-10-15 | Method for manufacturing porous polymer molded article |
EP08855358.1A EP2216361A4 (en) | 2007-11-27 | 2008-10-15 | METHOD FOR PRODUCING A POROUS POLYMER MOLDING ARTICLE |
CN200880117181A CN101868494A (zh) | 2007-11-27 | 2008-10-15 | 多孔性聚合物成型物的制造方法 |
PCT/JP2008/068665 WO2009069393A1 (ja) | 2007-11-27 | 2008-10-15 | 多孔性ポリマー成形物の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007306249A JP5395349B2 (ja) | 2007-11-27 | 2007-11-27 | 多孔性ポリマー成形物の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009127008A true JP2009127008A (ja) | 2009-06-11 |
JP5395349B2 JP5395349B2 (ja) | 2014-01-22 |
Family
ID=40678296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007306249A Expired - Fee Related JP5395349B2 (ja) | 2007-11-27 | 2007-11-27 | 多孔性ポリマー成形物の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20110045235A1 (ja) |
EP (1) | EP2216361A4 (ja) |
JP (1) | JP5395349B2 (ja) |
CN (1) | CN101868494A (ja) |
WO (1) | WO2009069393A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011001434A (ja) * | 2009-06-17 | 2011-01-06 | Ube Industries Ltd | ポリイミド多孔質体の製造方法、及びポリイミド多孔質体 |
JP2011063490A (ja) * | 2009-09-18 | 2011-03-31 | Nagase & Co Ltd | 表面に凹凸が形成されたガラス、及び、その製造方法 |
WO2017064883A1 (ja) * | 2015-10-15 | 2017-04-20 | 株式会社クレハ | 構造体、成形体、成形体の製造方法および構造体の製造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5236974B2 (ja) * | 2008-03-26 | 2013-07-17 | 株式会社クレハ | ポリマー成形体の製造方法 |
US20100181288A1 (en) * | 2009-01-21 | 2010-07-22 | Creatv Microtech, Inc. | Method of fabrication of micro- and nanofilters |
EP3199578B1 (en) * | 2014-09-24 | 2020-11-25 | Nitto Denko Corporation | Polymer film, waterproof sound-permeable membrane, waterproof sound-permeable member, electronic device, electronic device case, waterproof sound-transmission structure, waterproof gas-permeable membrane,waterproof gas-permeable member,waterproof ventilation structure, suction sheet, method for holding workpiece by suction on suction unit, and method for producing ceramic capacitor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0360713A (ja) * | 1989-07-31 | 1991-03-15 | Sumitomo Electric Ind Ltd | 多孔性炭素膜及びその製造方法 |
JPH0412243A (ja) * | 1990-05-02 | 1992-01-16 | Asahi Chem Ind Co Ltd | 直孔性フィルター及びその製造方法 |
JPH07501988A (ja) * | 1991-12-09 | 1995-03-02 | ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー | 微細構造膜およびその製造方法 |
JPH10507111A (ja) * | 1994-10-07 | 1998-07-14 | バクスター、インターナショナル、インコーポレイテッド | 多孔性の微細製作されたポリマー膜構造物 |
JP2008029386A (ja) * | 2006-07-26 | 2008-02-14 | Toppan Printing Co Ltd | 針状体の版型製造方法および針状体の製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60111243A (ja) | 1983-11-21 | 1985-06-17 | Nippon Telegr & Teleph Corp <Ntt> | 有機高分子膜のエツチング方法 |
JPS62267336A (ja) | 1986-05-15 | 1987-11-20 | Tonen Sekiyukagaku Kk | プラスチツクフイルムへの細孔の形成方法 |
JP2763776B2 (ja) * | 1988-05-27 | 1998-06-11 | 日本原子力研究所 | 細孔化コンタクトレンズの製造法 |
JPH0515987A (ja) | 1991-02-13 | 1993-01-26 | Olympus Optical Co Ltd | エキシマレーザー光による孔加工法 |
JPH0586216A (ja) | 1991-09-27 | 1993-04-06 | Tonen Chem Corp | 多孔性プラスチツクフイルムの製造方法 |
EP0535581A1 (en) | 1991-09-30 | 1993-04-07 | Kimberly-Clark Corporation | Process for hydrosonically microaperturing thin sheet materials |
JP2840731B2 (ja) | 1996-05-01 | 1998-12-24 | 工業技術院長 | 高分子成形体の凹凸状表面形成方法 |
JP2001305750A (ja) | 2000-04-18 | 2001-11-02 | Toray Eng Co Ltd | ポリイミドフィルムのエッチング方法 |
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2007
- 2007-11-27 JP JP2007306249A patent/JP5395349B2/ja not_active Expired - Fee Related
-
2008
- 2008-10-15 US US12/744,025 patent/US20110045235A1/en not_active Abandoned
- 2008-10-15 WO PCT/JP2008/068665 patent/WO2009069393A1/ja active Application Filing
- 2008-10-15 EP EP08855358.1A patent/EP2216361A4/en not_active Withdrawn
- 2008-10-15 CN CN200880117181A patent/CN101868494A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0360713A (ja) * | 1989-07-31 | 1991-03-15 | Sumitomo Electric Ind Ltd | 多孔性炭素膜及びその製造方法 |
JPH0412243A (ja) * | 1990-05-02 | 1992-01-16 | Asahi Chem Ind Co Ltd | 直孔性フィルター及びその製造方法 |
JPH07501988A (ja) * | 1991-12-09 | 1995-03-02 | ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー | 微細構造膜およびその製造方法 |
JPH10507111A (ja) * | 1994-10-07 | 1998-07-14 | バクスター、インターナショナル、インコーポレイテッド | 多孔性の微細製作されたポリマー膜構造物 |
JP2008029386A (ja) * | 2006-07-26 | 2008-02-14 | Toppan Printing Co Ltd | 針状体の版型製造方法および針状体の製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011001434A (ja) * | 2009-06-17 | 2011-01-06 | Ube Industries Ltd | ポリイミド多孔質体の製造方法、及びポリイミド多孔質体 |
JP2011063490A (ja) * | 2009-09-18 | 2011-03-31 | Nagase & Co Ltd | 表面に凹凸が形成されたガラス、及び、その製造方法 |
WO2017064883A1 (ja) * | 2015-10-15 | 2017-04-20 | 株式会社クレハ | 構造体、成形体、成形体の製造方法および構造体の製造方法 |
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CN101868494A (zh) | 2010-10-20 |
EP2216361A4 (en) | 2013-10-02 |
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WO2009069393A1 (ja) | 2009-06-04 |
US20110045235A1 (en) | 2011-02-24 |
JP5395349B2 (ja) | 2014-01-22 |
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