JP2009108381A - 成膜装置及び成膜方法 - Google Patents
成膜装置及び成膜方法 Download PDFInfo
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- JP2009108381A JP2009108381A JP2007283472A JP2007283472A JP2009108381A JP 2009108381 A JP2009108381 A JP 2009108381A JP 2007283472 A JP2007283472 A JP 2007283472A JP 2007283472 A JP2007283472 A JP 2007283472A JP 2009108381 A JP2009108381 A JP 2009108381A
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- vapor deposition
- film
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- vacuum chamber
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- 238000000034 method Methods 0.000 title claims abstract description 49
- 238000007740 vapor deposition Methods 0.000 claims abstract description 128
- 238000004544 sputter deposition Methods 0.000 claims abstract description 102
- 239000000463 material Substances 0.000 claims abstract description 75
- 238000000151 deposition Methods 0.000 claims abstract description 14
- 238000010438 heat treatment Methods 0.000 claims description 49
- 230000015572 biosynthetic process Effects 0.000 claims description 21
- 239000013077 target material Substances 0.000 claims description 16
- 238000001704 evaporation Methods 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 abstract description 72
- 239000010409 thin film Substances 0.000 abstract description 13
- 230000008021 deposition Effects 0.000 abstract description 9
- 230000006866 deterioration Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 18
- 239000000498 cooling water Substances 0.000 description 15
- 238000005019 vapor deposition process Methods 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000005674 electromagnetic induction Effects 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000000088 plastic resin Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
【解決手段】真空槽3内の第1成膜ステージ8には、スパッタリング装置を構成するスパッタリング装置10が配置され、第2成膜ステージ9には、蒸着装置11が配置されている。カルーセル4を回転させながらスパッタリング装置10を作動させて薄膜を形成するスパッタリング工程を行う。このスパッタリング工程の後に、蒸着装置11を作動させてさらに薄膜を形成する。スパッタリング工程では、蒸着材料が蒸発ないし昇華しないように蒸着装置11を冷却する。
【選択図】図1
Description
3 真空槽
4 カルーセル
7 ワーク
10 スパッタリング装置
11,51 蒸着装置
25,55 シャッタ板
45 蒸着材料
Claims (7)
- 真空槽と、この真空槽内で成膜の対象となるワークを保持して回転するワークホルダと、前記真空槽内に配したターゲット材料を一方の電極として放電を行い、ターゲット材料から飛散した原子をワークに堆積させることにより成膜を行うスパッタリング装置と、前記ターゲット材料と同一の前記真空槽内に設けられ、蒸着材料を所定の加熱温度に加熱する加熱手段を有し、加熱により蒸着材料を蒸発ないし昇華させてワークに付着させることで成膜を行う蒸着装置と、前記スパッタリング装置と前記蒸着装置とを択一的に作動させる制御手段とを備えたことを特徴とする成膜装置。
- 前記蒸着装置は、少なくとも前記スパッタリング装置の作動時に前記真空槽内の熱源と前記蒸着材料との間に配されて、前記熱源からの熱で前記蒸着材料が加熱されることを阻止するシャッタ板を備えたことを特徴とする請求項1記載の成膜装置。
- 前記熱源は、前記スパッタリング装置の作動時に発生するプラズマであり、前記シャッタ板は、少なくとも前記スパッタリング装置の作動時に前記プラズマと前記蒸着材料との間に配されていることを特徴とする請求項2記載の成膜装置。
- 前記シャッタ板は、熱源と蒸着材料と間に配された遮蔽位置と、ワークに対する前記蒸着装置による蒸着を許容する許容位置との間で移動自在とされ、前記スパッタリング装置の作動時には遮蔽位置とされ、前記蒸着装置の作動時には許容位置とされることを特徴とする請求項2または3記載の成膜装置。
- 前記シャッタ板を冷却するシャッタ冷却手段を備えることを特徴とする請求項2ないし4のいずれか1項に記載の成膜装置。
- 真空槽内に配したターゲット材料を一方の電極として放電を行って、ターゲット材料から飛散した原子をワークに堆積させることにより成膜を行うスパッタリング装置と、このスパッタリング装置と同一の真空槽内に配され、蒸着材料を加熱することにより蒸着材料を蒸発ないし昇華させてワークに付着させることで成膜を行う蒸着装置とを用い、スパッタリング装置による成膜を行うスパッタリング工程と、蒸着装置による成膜を行う蒸着工程とからなる成膜工程とを択一的に順番に行うことを特徴とする成膜方法。
- 前記スパッタリング工程中に、前記蒸着材料に対して、温度上昇を防止するために遮熱または冷却を行うことを特徴とする請求項6記載の成膜方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007283472A JP5384002B2 (ja) | 2007-10-31 | 2007-10-31 | 成膜装置及び成膜方法 |
PCT/JP2008/069726 WO2009057678A1 (ja) | 2007-10-31 | 2008-10-30 | 成膜装置及び成膜方法 |
KR1020107008526A KR20100071077A (ko) | 2007-10-31 | 2008-10-30 | 성막 장치 및 성막 방법 |
CN2008801141508A CN101842511B (zh) | 2007-10-31 | 2008-10-30 | 成膜设备以及成膜方法 |
HK10111011.0A HK1144447A1 (en) | 2007-10-31 | 2010-11-26 | Film forming apparatus and film forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007283472A JP5384002B2 (ja) | 2007-10-31 | 2007-10-31 | 成膜装置及び成膜方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009108381A true JP2009108381A (ja) | 2009-05-21 |
JP5384002B2 JP5384002B2 (ja) | 2014-01-08 |
Family
ID=40591063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007283472A Expired - Fee Related JP5384002B2 (ja) | 2007-10-31 | 2007-10-31 | 成膜装置及び成膜方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5384002B2 (ja) |
KR (1) | KR20100071077A (ja) |
CN (1) | CN101842511B (ja) |
HK (1) | HK1144447A1 (ja) |
WO (1) | WO2009057678A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019044216A (ja) * | 2017-08-31 | 2019-03-22 | 株式会社Screenホールディングス | 成膜装置および成膜方法 |
JP2020056054A (ja) * | 2018-09-28 | 2020-04-09 | キヤノントッキ株式会社 | 成膜装置、成膜方法、および電子デバイスの製造方法 |
CN114574812A (zh) * | 2020-11-30 | 2022-06-03 | 佳能特机株式会社 | 蒸镀装置、成膜装置、成膜方法及电子器件的制造方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102851641B (zh) * | 2011-06-30 | 2015-04-22 | 比亚迪股份有限公司 | 一种真空镀膜装置及金属高温真空镀膜方法 |
CN103374703B (zh) * | 2012-04-26 | 2016-11-16 | 北京物华天宝镀膜科技有限公司 | 单管直流溅射镀膜设备及其使用方法 |
JP2014070241A (ja) * | 2012-09-28 | 2014-04-21 | Hitachi High-Technologies Corp | 蒸着装置および蒸着方法 |
US9275835B2 (en) * | 2012-11-29 | 2016-03-01 | Gregory DeLarge | Plasma generating device with moving carousel and method of use |
GB201312075D0 (en) * | 2013-07-05 | 2013-08-21 | Univ Ulster | Method and system for the scale up of plasma induced surface functionality |
CN110724927A (zh) * | 2019-10-21 | 2020-01-24 | 上海华虹宏力半导体制造有限公司 | 一种解决pvd成膜首枚效应的方法 |
CN114774849B (zh) * | 2022-03-17 | 2023-12-08 | 西安超纳精密光学有限公司 | 一种精确控制曲率的小口径大曲率局部离子溅射镀膜系统及方法 |
CN115011944B (zh) * | 2022-08-10 | 2022-10-18 | 怡通科技有限公司 | 蒸发磁控溅射多用镀膜机 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61276964A (ja) * | 1985-05-31 | 1986-12-06 | Hoya Corp | 回転式成膜装置 |
JPH04280962A (ja) * | 1991-02-26 | 1992-10-06 | Kawatetsu Mining Co Ltd | ヘテロ接合薄膜の形成方法及び形成装置 |
JP2005307237A (ja) * | 2004-04-19 | 2005-11-04 | Ulvac Japan Ltd | 薄膜顔料製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4171365B2 (ja) * | 2003-07-16 | 2008-10-22 | トッキ株式会社 | 蒸着装置 |
JP4602054B2 (ja) * | 2004-11-25 | 2010-12-22 | 東京エレクトロン株式会社 | 蒸着装置 |
JP2006177704A (ja) * | 2004-12-21 | 2006-07-06 | Konica Minolta Medical & Graphic Inc | 放射線画像変換パネルの製造装置及び放射線画像変換パネルの製造方法 |
JP2007038379A (ja) * | 2005-08-05 | 2007-02-15 | Mitsubishi Materials Corp | 難削材の重切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆超硬合金製切削工具 |
CN1793416A (zh) * | 2005-12-12 | 2006-06-28 | 深圳国家863计划材料表面工程技术研究开发中心 | 金属薄膜复合制备装置及工艺 |
-
2007
- 2007-10-31 JP JP2007283472A patent/JP5384002B2/ja not_active Expired - Fee Related
-
2008
- 2008-10-30 CN CN2008801141508A patent/CN101842511B/zh not_active Expired - Fee Related
- 2008-10-30 WO PCT/JP2008/069726 patent/WO2009057678A1/ja active Application Filing
- 2008-10-30 KR KR1020107008526A patent/KR20100071077A/ko not_active Application Discontinuation
-
2010
- 2010-11-26 HK HK10111011.0A patent/HK1144447A1/xx not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61276964A (ja) * | 1985-05-31 | 1986-12-06 | Hoya Corp | 回転式成膜装置 |
JPH04280962A (ja) * | 1991-02-26 | 1992-10-06 | Kawatetsu Mining Co Ltd | ヘテロ接合薄膜の形成方法及び形成装置 |
JP2005307237A (ja) * | 2004-04-19 | 2005-11-04 | Ulvac Japan Ltd | 薄膜顔料製造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019044216A (ja) * | 2017-08-31 | 2019-03-22 | 株式会社Screenホールディングス | 成膜装置および成膜方法 |
JP2020056054A (ja) * | 2018-09-28 | 2020-04-09 | キヤノントッキ株式会社 | 成膜装置、成膜方法、および電子デバイスの製造方法 |
JP7193291B2 (ja) | 2018-09-28 | 2022-12-20 | キヤノントッキ株式会社 | 成膜装置、成膜方法、および電子デバイスの製造方法 |
CN114574812A (zh) * | 2020-11-30 | 2022-06-03 | 佳能特机株式会社 | 蒸镀装置、成膜装置、成膜方法及电子器件的制造方法 |
JP2022086588A (ja) * | 2020-11-30 | 2022-06-09 | キヤノントッキ株式会社 | 蒸着装置、成膜装置、成膜方法及び電子デバイスの製造方法 |
JP7354086B2 (ja) | 2020-11-30 | 2023-10-02 | キヤノントッキ株式会社 | 蒸着装置、成膜装置、成膜方法及び電子デバイスの製造方法 |
CN114574812B (zh) * | 2020-11-30 | 2023-12-19 | 佳能特机株式会社 | 蒸镀装置、成膜装置、成膜方法及电子器件的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20100071077A (ko) | 2010-06-28 |
CN101842511B (zh) | 2012-08-22 |
HK1144447A1 (en) | 2011-02-18 |
CN101842511A (zh) | 2010-09-22 |
JP5384002B2 (ja) | 2014-01-08 |
WO2009057678A1 (ja) | 2009-05-07 |
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