JP2009086669A5 - - Google Patents

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Publication number
JP2009086669A5
JP2009086669A5 JP2008250580A JP2008250580A JP2009086669A5 JP 2009086669 A5 JP2009086669 A5 JP 2009086669A5 JP 2008250580 A JP2008250580 A JP 2008250580A JP 2008250580 A JP2008250580 A JP 2008250580A JP 2009086669 A5 JP2009086669 A5 JP 2009086669A5
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JP
Japan
Prior art keywords
sample
light
image
pattern
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008250580A
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English (en)
Japanese (ja)
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JP2009086669A (ja
JP5384896B2 (ja
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Publication date
Priority claimed from DE200710047465 external-priority patent/DE102007047465A1/de
Application filed filed Critical
Publication of JP2009086669A publication Critical patent/JP2009086669A/ja
Publication of JP2009086669A5 publication Critical patent/JP2009086669A5/ja
Application granted granted Critical
Publication of JP5384896B2 publication Critical patent/JP5384896B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008250580A 2007-09-28 2008-09-29 照明された試料の光学的捕捉のための方法および装置 Expired - Fee Related JP5384896B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007047465.4 2007-09-28
DE200710047465 DE102007047465A1 (de) 2007-09-28 2007-09-28 Verfahren und Anordnung zur optischen Erfassung einer beleuchteten Probe

Publications (3)

Publication Number Publication Date
JP2009086669A JP2009086669A (ja) 2009-04-23
JP2009086669A5 true JP2009086669A5 (enExample) 2013-01-31
JP5384896B2 JP5384896B2 (ja) 2014-01-08

Family

ID=39938200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008250580A Expired - Fee Related JP5384896B2 (ja) 2007-09-28 2008-09-29 照明された試料の光学的捕捉のための方法および装置

Country Status (3)

Country Link
EP (1) EP2042906B1 (enExample)
JP (1) JP5384896B2 (enExample)
DE (1) DE102007047465A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101799860B1 (ko) 2010-10-14 2017-11-23 엘지전자 주식회사 위상 시프터 패턴이 형성된 공간 필터를 구비하는 마스크리스 노광장치 및 노광방법
DE102011114500B4 (de) * 2011-09-29 2022-05-05 Fei Company Mikroskopvorrichtung
KR101356706B1 (ko) 2012-04-13 2014-02-05 (주)가하 광량 변조와 스캐닝 시스템 기반의 구조 조명 현미경
DE102012020877A1 (de) * 2012-10-17 2014-04-17 Carl Zeiss Microscopy Gmbh Optikanordnung und Lichtmikroskop
FR3068780B1 (fr) * 2017-07-06 2021-05-14 Centre Nat Etd Spatiales Spectrophotometre hyperspectral large bande

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3826317C1 (enExample) 1988-08-03 1989-07-06 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar, De
JP3816632B2 (ja) 1997-05-14 2006-08-30 オリンパス株式会社 走査型顕微鏡
DE19923822A1 (de) * 1999-05-19 2000-11-23 Zeiss Carl Jena Gmbh Scannende Anordnung, vorzugsweise zur Erfassung von Fluoreszenzlicht
ATE493683T1 (de) * 2001-04-07 2011-01-15 Zeiss Carl Microimaging Gmbh Verfahren und anordnung zur tiefenaufgelösten optischen erfassung einer probe
DE10155002A1 (de) 2001-11-08 2003-05-22 Zeiss Carl Jena Gmbh Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
US6888148B2 (en) * 2001-12-10 2005-05-03 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and /or back scattered light beam in a sample
JP3731073B2 (ja) * 2002-09-17 2006-01-05 独立行政法人理化学研究所 顕微鏡装置
DE10254139A1 (de) * 2002-11-15 2004-05-27 Carl Zeiss Jena Gmbh Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
US7339148B2 (en) * 2002-12-16 2008-03-04 Olympus America Inc. Confocal microscope
JP4844137B2 (ja) * 2006-01-30 2011-12-28 株式会社ニコン 顕微鏡装置
JP2007199572A (ja) * 2006-01-30 2007-08-09 Nikon Corp 顕微鏡装置

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