JP5384896B2 - 照明された試料の光学的捕捉のための方法および装置 - Google Patents
照明された試料の光学的捕捉のための方法および装置 Download PDFInfo
- Publication number
- JP5384896B2 JP5384896B2 JP2008250580A JP2008250580A JP5384896B2 JP 5384896 B2 JP5384896 B2 JP 5384896B2 JP 2008250580 A JP2008250580 A JP 2008250580A JP 2008250580 A JP2008250580 A JP 2008250580A JP 5384896 B2 JP5384896 B2 JP 5384896B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- light
- image
- pattern
- illumination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 30
- 230000003287 optical effect Effects 0.000 title claims description 17
- 238000005286 illumination Methods 0.000 claims description 34
- 238000001514 detection method Methods 0.000 claims description 28
- 210000001747 pupil Anatomy 0.000 claims description 22
- 238000000059 patterning Methods 0.000 claims description 21
- 230000005855 radiation Effects 0.000 claims description 19
- 238000007493 shaping process Methods 0.000 claims description 12
- 230000000737 periodic effect Effects 0.000 claims description 11
- 238000009826 distribution Methods 0.000 claims description 10
- 230000010287 polarization Effects 0.000 claims description 5
- 230000000903 blocking effect Effects 0.000 claims 2
- 230000000873 masking effect Effects 0.000 claims 1
- 238000002310 reflectometry Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004061 bleaching Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
- G02B21/0048—Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
- G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0068—Optical details of the image generation arrangements using polarisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/008—Details of detection or image processing, including general computer control
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Engineering & Computer Science (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007047465.4 | 2007-09-28 | ||
| DE200710047465 DE102007047465A1 (de) | 2007-09-28 | 2007-09-28 | Verfahren und Anordnung zur optischen Erfassung einer beleuchteten Probe |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009086669A JP2009086669A (ja) | 2009-04-23 |
| JP2009086669A5 JP2009086669A5 (enExample) | 2013-01-31 |
| JP5384896B2 true JP5384896B2 (ja) | 2014-01-08 |
Family
ID=39938200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008250580A Expired - Fee Related JP5384896B2 (ja) | 2007-09-28 | 2008-09-29 | 照明された試料の光学的捕捉のための方法および装置 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2042906B1 (enExample) |
| JP (1) | JP5384896B2 (enExample) |
| DE (1) | DE102007047465A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101799860B1 (ko) | 2010-10-14 | 2017-11-23 | 엘지전자 주식회사 | 위상 시프터 패턴이 형성된 공간 필터를 구비하는 마스크리스 노광장치 및 노광방법 |
| DE102011114500B4 (de) * | 2011-09-29 | 2022-05-05 | Fei Company | Mikroskopvorrichtung |
| KR101356706B1 (ko) | 2012-04-13 | 2014-02-05 | (주)가하 | 광량 변조와 스캐닝 시스템 기반의 구조 조명 현미경 |
| DE102012020877A1 (de) * | 2012-10-17 | 2014-04-17 | Carl Zeiss Microscopy Gmbh | Optikanordnung und Lichtmikroskop |
| FR3068780B1 (fr) * | 2017-07-06 | 2021-05-14 | Centre Nat Etd Spatiales | Spectrophotometre hyperspectral large bande |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3826317C1 (enExample) | 1988-08-03 | 1989-07-06 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar, De | |
| JP3816632B2 (ja) | 1997-05-14 | 2006-08-30 | オリンパス株式会社 | 走査型顕微鏡 |
| DE19923822A1 (de) * | 1999-05-19 | 2000-11-23 | Zeiss Carl Jena Gmbh | Scannende Anordnung, vorzugsweise zur Erfassung von Fluoreszenzlicht |
| ATE493683T1 (de) * | 2001-04-07 | 2011-01-15 | Zeiss Carl Microimaging Gmbh | Verfahren und anordnung zur tiefenaufgelösten optischen erfassung einer probe |
| DE10155002A1 (de) | 2001-11-08 | 2003-05-22 | Zeiss Carl Jena Gmbh | Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe |
| US6888148B2 (en) * | 2001-12-10 | 2005-05-03 | Carl Zeiss Jena Gmbh | Arrangement for the optical capture of excited and /or back scattered light beam in a sample |
| JP3731073B2 (ja) * | 2002-09-17 | 2006-01-05 | 独立行政法人理化学研究所 | 顕微鏡装置 |
| DE10254139A1 (de) * | 2002-11-15 | 2004-05-27 | Carl Zeiss Jena Gmbh | Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe |
| US7339148B2 (en) * | 2002-12-16 | 2008-03-04 | Olympus America Inc. | Confocal microscope |
| JP4844137B2 (ja) * | 2006-01-30 | 2011-12-28 | 株式会社ニコン | 顕微鏡装置 |
| JP2007199572A (ja) * | 2006-01-30 | 2007-08-09 | Nikon Corp | 顕微鏡装置 |
-
2007
- 2007-09-28 DE DE200710047465 patent/DE102007047465A1/de not_active Withdrawn
-
2008
- 2008-09-18 EP EP20080016423 patent/EP2042906B1/de not_active Not-in-force
- 2008-09-29 JP JP2008250580A patent/JP5384896B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP2042906B1 (de) | 2014-03-05 |
| EP2042906A1 (de) | 2009-04-01 |
| DE102007047465A1 (de) | 2009-04-02 |
| JP2009086669A (ja) | 2009-04-23 |
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