JP2009077209A - 弾性表面波共振子 - Google Patents
弾性表面波共振子 Download PDFInfo
- Publication number
- JP2009077209A JP2009077209A JP2007244895A JP2007244895A JP2009077209A JP 2009077209 A JP2009077209 A JP 2009077209A JP 2007244895 A JP2007244895 A JP 2007244895A JP 2007244895 A JP2007244895 A JP 2007244895A JP 2009077209 A JP2009077209 A JP 2009077209A
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- acoustic wave
- additional film
- wave
- wave resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 128
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 49
- 239000010453 quartz Substances 0.000 claims abstract description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052782 aluminium Inorganic materials 0.000 claims description 19
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 19
- 239000013078 crystal Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 239000010937 tungsten Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 12
- 238000006073 displacement reaction Methods 0.000 description 10
- 230000001902 propagating effect Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000002829 reductive effect Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000000644 propagated effect Effects 0.000 description 5
- 230000002238 attenuated effect Effects 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
Images
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007244895A JP2009077209A (ja) | 2007-09-21 | 2007-09-21 | 弾性表面波共振子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007244895A JP2009077209A (ja) | 2007-09-21 | 2007-09-21 | 弾性表面波共振子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009077209A true JP2009077209A (ja) | 2009-04-09 |
| JP2009077209A5 JP2009077209A5 (enExample) | 2010-10-14 |
Family
ID=40611755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007244895A Withdrawn JP2009077209A (ja) | 2007-09-21 | 2007-09-21 | 弾性表面波共振子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009077209A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011087282A (ja) * | 2009-09-15 | 2011-04-28 | Murata Mfg Co Ltd | 弾性境界波フィルタ及びそれを備える分波器 |
| JPWO2016088543A1 (ja) * | 2014-12-01 | 2017-07-27 | 株式会社村田製作所 | 弾性波共振子、弾性波フィルタ、デュプレクサ及び弾性波装置 |
| CN111200415A (zh) * | 2018-11-16 | 2020-05-26 | 日本电波工业株式会社 | 声表面波器件 |
-
2007
- 2007-09-21 JP JP2007244895A patent/JP2009077209A/ja not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011087282A (ja) * | 2009-09-15 | 2011-04-28 | Murata Mfg Co Ltd | 弾性境界波フィルタ及びそれを備える分波器 |
| JPWO2016088543A1 (ja) * | 2014-12-01 | 2017-07-27 | 株式会社村田製作所 | 弾性波共振子、弾性波フィルタ、デュプレクサ及び弾性波装置 |
| CN111200415A (zh) * | 2018-11-16 | 2020-05-26 | 日本电波工业株式会社 | 声表面波器件 |
| CN111200415B (zh) * | 2018-11-16 | 2024-05-10 | Ndk声表滤波器股份有限公司 | 声表面波器件 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Effective date: 20100830 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100830 |
|
| A761 | Written withdrawal of application |
Effective date: 20120228 Free format text: JAPANESE INTERMEDIATE CODE: A761 |