JP2009053630A - 表示装置及び当該表示装置を具備する電子機器 - Google Patents
表示装置及び当該表示装置を具備する電子機器 Download PDFInfo
- Publication number
- JP2009053630A JP2009053630A JP2007222787A JP2007222787A JP2009053630A JP 2009053630 A JP2009053630 A JP 2009053630A JP 2007222787 A JP2007222787 A JP 2007222787A JP 2007222787 A JP2007222787 A JP 2007222787A JP 2009053630 A JP2009053630 A JP 2009053630A
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- Prior art keywords
- semiconductor film
- substrate
- single crystal
- display device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000007789 gas Substances 0.000 claims description 41
- 239000001257 hydrogen Substances 0.000 claims description 32
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Images
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
- H01L27/1266—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1229—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with different crystal properties within a device or between different devices
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- Crystallography & Structural Chemistry (AREA)
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
【解決手段】単結晶半導体層が着接された絶縁表面を有するベース基板を短冊状に分断し、表示装置の駆動回路に用いることを特徴とする。また本発明においては、絶縁表面を有するベース基板に複数の単結晶半導体層を着接し、当該基板を短冊状に分断することにより、表示装置の駆動回路に用いることを特徴とする。これにより、表示装置のサイズに応じた駆動回路を表示装置に用いることができ、額縁領域の幅を低減し、且つトランジスタ特性のばらつきの影響を受けることのない駆動回路を設けた表示装置を提供することができる。
【選択図】図1
Description
本実施の形態では、単結晶半導体基板が着接された異種基板(以下、「ベース基板」という)を短冊状に分断して用いる表示装置の駆動回路及びその作製方法について説明する。
(実施の形態2)
101 絶縁膜
102 欠陥層
103 半導体膜
104 ベース基板
105 絶縁膜
106 半導体膜
107 ベース基板
111 薄膜トランジスタ
114 絶縁膜
201 半導体膜
300 駆動回路
301 スティックドライバー
302 基板
303 走査線側駆動回路
304 信号線側駆動回路
305 対向基板
401 基板
402 画素部
403 対向基板
404 走査線側駆動回路
405 信号線側駆動回路
406 シール材
407 FPC
408 FPC
409 表示素子層
410 端子
411 導電性部材
412 ベース基板
413 端子
414 端子
415 接着材
416 ベース基板
500 単結晶半導体基板
501 絶縁膜
502 欠陥層
503 凸部
504 マスク
505 コレット
506 半導体膜
507 ベース基板
508 半導体膜
509 半導体膜
510 半導体膜
511 薄膜トランジスタ
514 絶縁膜
560 単結晶半導体基板
561 単結晶半導体基板
562 ベース基板
563 半導体膜
564 半導体膜
591 領域
601 ベース基板
602 絶縁膜
603 半導体膜
604 半導体膜
606 ゲート絶縁膜
607 電極
608 不純物領域
609 不純物領域
610 サイドウォール
611 高濃度不純物領域
612 低濃度不純物領域
613 チャネル形成領域
614 高濃度不純物領域
615 低濃度不純物領域
616 チャネル形成領域
617 トランジスタ
618 トランジスタ
619 絶縁膜
620 絶縁膜
621 導電膜
622 導電膜
103a 半導体膜
103b 半導体膜
103c 半導体膜
103d 半導体膜
1600 素子基板
1601 トランジスタ
1602 トランジスタ
1603 スイッチング用トランジスタ
1604 駆動用トランジスタ
1605 発光素子
1606 画素電極
1607 電界発光層
1608 対向電極
1610 素子基板
1610 基板
1611 トランジスタ
1612 トランジスタ
1613 トランジスタ
1614 対向基板
1615 液晶セル
1616 画素電極
1617 対向電極
1618 液晶
1630 スティックドライバー
1650 スティックドライバー
1900 基板
1901 対向基板
1902 走査線側ドライバーIC
1903 走査線
1904 信号線側ドライバーIC
1905 信号線
1906 FPC(Flexible Printed Circuit)
1921 額縁領域
1950 基板
1951 対向基板
1952 走査線側スティックドライバー
1953 走査線
1954 信号線側スティックドライバー
1955 信号線
1956 FPC(Flexible Printed Circuit)
2001 トランジスタ
2002 トランジスタ
2003 配線
2004 配線
2005 配線
2006 配線
2007 配線
2008 半導体膜
2010 半導体膜
2030 半導体膜
2031 半導体膜
2400 画素部
2410 走査線駆動回路
2420 信号線駆動回路
2421 シフトレジスタ
2422 ラッチ
2423 ラッチ
2424 DA変換回路
3001 トランジスタ
3002 トランジスタ
3003 トランジスタ
3004 トランジスタ
3005 半導体膜
3006 半導体膜
3007 配線
3008 配線
3009 配線
3010 配線
3011 配線
3012 配線
3030 半導体膜
3031 半導体膜
5001 筐体
5002 表示部
5003 スピーカー部
5201 本体
5202 筐体
5203 表示部
5204 キーボード
5205 マウス
5401 本体
5402 筐体
5403 表示部
5404 部
5405 操作キー
5406 スピーカー部
Claims (10)
- ベース基板と、
前記ベース基板上に、単結晶半導体基板を劈開させることで得られる半導体膜を複数回にわたって着接し接合することで得られる半導体膜を用いて作製された複数の薄膜トランジスタを有する駆動回路を有し、
前記駆動回路を有する前記ベース基板が、画素部を有する基板上に実装されていることを特徴とする表示装置。 - 請求項1において、前記単結晶半導体基板を劈開することで得られる前記半導体膜は、水素又は希ガス、或いは水素イオン又は希ガスイオンを注入して得られる欠陥層を熱処理し、得られるものであることを特徴とする表示装置。
- 請求項1または2において、前記単結晶半導体基板は、シリコンまたはゲルマニウムの単結晶半導体基板、若しくはガリウムヒ素またはインジウムリンの単結晶半導体基板であることを特徴とする表示装置。
- 請求項1乃至請求項3のいずれか一において、前記単結晶半導体基板を劈開することで得られる前記半導体膜は、前記ベース基板上に前記駆動回路の長手方向にわたって着接されて接合されることを特徴とする表示装置。
- ベース基板と、
前記ベース基板上に、複数の第1の凸部を有する第1の単結晶半導体基板を前記複数の第1の凸部において劈開させることで得られる複数の第1の半導体膜、及び複数の第2の凸部を有する第2の単結晶半導体基板を前記複数の第2の凸部において劈開させることで得られる前記複数の第1の半導体膜とは異なる結晶面方位を有する複数の第2の半導体膜、を複数回にわたって着接し接合することで得られる半導体膜を用いて作製される薄膜トランジスタを有する駆動回路を有し、
前記駆動回路を有する前記ベース基板が、画素部を有する基板上に実装されていることを特徴とする表示装置。 - 請求項5において、前記第1の単結晶半導体基板及び前記第2の単結晶半導体基板を劈開することで得られる前記半導体膜は、水素又は希ガス、或いは水素イオン又は希ガスイオンを注入して得られる欠陥層を熱処理し、得られるものであることを特徴とする表示装置。
- 請求項5または6において、前記第1の単結晶半導体基板及び前記第2の単結晶半導体基板は、シリコンまたはゲルマニウムの単結晶半導体基板、若しくはガリウムヒ素またはインジウムリンの単結晶半導体基板であることを特徴とする表示装置。
- 請求項5乃至請求項7のいずれか一において、前記第1の単結晶半導体基板及び前記第2の単結晶半導体基板を劈開することで得られる前記半導体膜は、前記ベース基板上に前記駆動回路の長手方向にわたって着接されて接合されることを特徴とする表示装置。
- 請求項1乃至請求項8のいずれか一において、前記ベース基板は、多結晶半導体基板または金属基板であることを特徴とする表示装置。
- 請求項1乃至請求項9に記載の表示装置を具備することを特徴とする電子機器。
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JP2007222787A JP5205012B2 (ja) | 2007-08-29 | 2007-08-29 | 表示装置及び当該表示装置を具備する電子機器 |
US12/230,332 US20090057675A1 (en) | 2007-08-29 | 2008-08-27 | Display device and electronic appliance including the display device |
US13/649,738 US8730419B2 (en) | 2007-08-29 | 2012-10-11 | Display device and electronic appliance including the display device |
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US9324449B2 (en) | 2012-03-28 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, signal processing unit having the driver circuit, method for manufacturing the signal processing unit, and display device |
US9812217B2 (en) | 2012-03-28 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, signal processing unit having the driver circuit, method for manufacturing the signal processing unit, and display device |
Also Published As
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US20130045554A1 (en) | 2013-02-21 |
JP5205012B2 (ja) | 2013-06-05 |
US20090057675A1 (en) | 2009-03-05 |
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