JP2009023804A5

JP2009023804A5 -

Info

Publication number: JP2009023804A5
Application number: JP2007189793A
Authority: JP
Filing date: 2007-07-20
Publication date: 2010-08-05
Anticipated expiration: 2027-07-20

Claims

A levitating means for levitating the substrate;
Holding means for holding the substrate in a state of being levitated by the levitating means;
Drive means for moving the holding means in the transport direction;
Control means for controlling the holding means and the driving means,
The control means releases the holding of the substrate by the holding means in the vicinity of the stroke end in the transport direction of the driving means, returns the holding means to the direction away from the stroke end, and again the holding means at the returned position. A substrate transfer apparatus that holds the substrate and drives the driving means again.

The substrate transfer apparatus according to claim 1, wherein a plurality of the holding means are arranged in the transfer direction.

When the control unit returns the holding means in the direction away from the stroke end and causes the holding means to hold the substrate again at the returned position, the controller holds the substrate by a part of the holding means arranged in plural. The board | substrate conveyance apparatus of Claim 2 made to do.

4. The substrate transfer apparatus according to claim 1, wherein the control unit stops the floating of the substrate by the floating unit and releases the holding of the substrate by the holding unit. 5.

A fixing means that is brought into contact with or separated from the substrate surface in a state of being levitated by the levitating means;
5. The substrate transfer apparatus according to claim 1, wherein when the control unit releases the holding of the substrate by the holding unit, the substrate is brought into contact with the fixing unit. 6.

The substrate transport apparatus according to claim 5, wherein the fixing unit includes an adsorption unit that adsorbs the substrate.

The holding means is provided at one end in the width direction of the levitation means to hold the substrate;
The substrate transport apparatus according to claim 1, wherein the substrate is moved in the transport direction by the driving unit.

The substrate transport apparatus according to claim 1, wherein the holding unit is provided at both ends of the floating unit in the width direction.

The substrate transfer apparatus according to claim 8, wherein the holding unit holds both ends of the substrate and moves the substrate in the transfer direction by the driving unit.

The said holding | maintenance means is provided in the approximate width center of the said floating means, hold | maintains the approximate center of the board | substrate in a conveyance direction, and moves the said board | substrate to a conveyance direction by the said drive means. Substrate transfer device.

A surfacing process for surfacing the substrate;
A first movement step of holding the substrate in a floated state and moving the substrate in a conveyance direction;
In the vicinity of the stroke end in the conveying direction, the holding of the substrate is released, the holding position is changed in a direction away from the stroke end, and the holding position changing step of holding the substrate again,
A substrate transfer method comprising: a second moving step of moving the substrate whose holding position has been changed again in the transfer direction.