JP2009001902A5 - - Google Patents

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Publication number
JP2009001902A5
JP2009001902A5 JP2008153424A JP2008153424A JP2009001902A5 JP 2009001902 A5 JP2009001902 A5 JP 2009001902A5 JP 2008153424 A JP2008153424 A JP 2008153424A JP 2008153424 A JP2008153424 A JP 2008153424A JP 2009001902 A5 JP2009001902 A5 JP 2009001902A5
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Japan
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target
coil
workpiece
deposited
chamber
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JP2008153424A
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English (en)
Japanese (ja)
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JP5346178B2 (ja
JP2009001902A (ja
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Publication of JP2009001902A5 publication Critical patent/JP2009001902A5/ja
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Publication of JP5346178B2 publication Critical patent/JP5346178B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2008153424A 1996-05-09 2008-06-11 プラズマの発生及びスパッタのためのコイル Expired - Lifetime JP5346178B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US64718496A 1996-05-09 1996-05-09
US64409696A 1996-05-10 1996-05-10
US68033596A 1996-07-10 1996-07-10
US08/644096 1996-07-10
US08/680335 1996-07-10
US08/647184 1996-07-10

Related Parent Applications (1)

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JP15566597A Division JP4553992B2 (ja) 1996-05-09 1997-05-09 プラズマの発生及びスパッタのためのコイル

Related Child Applications (1)

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JP2013024199A Division JP5751520B2 (ja) 1996-05-09 2013-02-12 プラズマの発生及びスパッタのためのコイル

Publications (3)

Publication Number Publication Date
JP2009001902A JP2009001902A (ja) 2009-01-08
JP2009001902A5 true JP2009001902A5 (enExample) 2010-06-17
JP5346178B2 JP5346178B2 (ja) 2013-11-20

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Family Applications (4)

Application Number Title Priority Date Filing Date
JP15566597A Expired - Lifetime JP4553992B2 (ja) 1996-05-09 1997-05-09 プラズマの発生及びスパッタのためのコイル
JP2008153424A Expired - Lifetime JP5346178B2 (ja) 1996-05-09 2008-06-11 プラズマの発生及びスパッタのためのコイル
JP2013024199A Expired - Lifetime JP5751520B2 (ja) 1996-05-09 2013-02-12 プラズマの発生及びスパッタのためのコイル
JP2013165082A Expired - Lifetime JP5751522B2 (ja) 1996-05-09 2013-08-08 プラズマの発生及びスパッタのためのコイル

Family Applications Before (1)

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JP15566597A Expired - Lifetime JP4553992B2 (ja) 1996-05-09 1997-05-09 プラズマの発生及びスパッタのためのコイル

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2013024199A Expired - Lifetime JP5751520B2 (ja) 1996-05-09 2013-02-12 プラズマの発生及びスパッタのためのコイル
JP2013165082A Expired - Lifetime JP5751522B2 (ja) 1996-05-09 2013-08-08 プラズマの発生及びスパッタのためのコイル

Country Status (5)

Country Link
US (3) US6368469B1 (enExample)
EP (1) EP0807954A1 (enExample)
JP (4) JP4553992B2 (enExample)
KR (1) KR100547404B1 (enExample)
SG (1) SG74011A1 (enExample)

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