JP2008521218A5 - - Google Patents

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Publication number
JP2008521218A5
JP2008521218A5 JP2007541414A JP2007541414A JP2008521218A5 JP 2008521218 A5 JP2008521218 A5 JP 2008521218A5 JP 2007541414 A JP2007541414 A JP 2007541414A JP 2007541414 A JP2007541414 A JP 2007541414A JP 2008521218 A5 JP2008521218 A5 JP 2008521218A5
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plasma processing
substrate
chamber
processing region
transmission device
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JP2007541414A
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JP2008521218A (ja
JP5419354B2 (ja
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Priority claimed from US10/990,185 external-priority patent/US20060105114A1/en
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JP2007541414A 2004-11-16 2005-11-15 低温ポリシリコンｔｆｔのための多層高品質ゲート誘電体 Expired - Fee Related JP5419354B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/990,185 US20060105114A1 (en) 2004-11-16 2004-11-16 Multi-layer high quality gate dielectric for low-temperature poly-silicon TFTs
US10/990,185 2004-11-16
PCT/US2005/041231 WO2006073568A2 (en) 2004-11-16 2005-11-15 MULTI-LAYER HIGH QUALITY GATE DIELECTRIC FOR LOW-TEMPERATURE POLY-SILICON TFTs

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012152419A Division JP2012248855A (ja) 2004-11-16 2012-07-06 低温ポリシリコンｔｆｔのための多層高品質ゲート誘電体

Publications (3)

Publication Number Publication Date
JP2008521218A JP2008521218A (ja) 2008-06-19
JP2008521218A5 true JP2008521218A5 (enExample) 2009-01-15
JP5419354B2 JP5419354B2 (ja) 2014-02-19

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JP2007541414A Expired - Fee Related JP5419354B2 (ja) 2004-11-16 2005-11-15 低温ポリシリコンｔｆｔのための多層高品質ゲート誘電体
JP2012152419A Withdrawn JP2012248855A (ja) 2004-11-16 2012-07-06 低温ポリシリコンｔｆｔのための多層高品質ゲート誘電体

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JP2012152419A Withdrawn JP2012248855A (ja) 2004-11-16 2012-07-06 低温ポリシリコンｔｆｔのための多層高品質ゲート誘電体

Country Status (6)

Country Link
US (1) US20060105114A1 (enExample)
JP (2) JP5419354B2 (enExample)
KR (1) KR100932815B1 (enExample)
CN (1) CN101310036B (enExample)
TW (1) TWI301646B (enExample)
WO (1) WO2006073568A2 (enExample)

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