JP2008517465A - 半導体組立てと試験設備用のダイ・レベル追跡遂行機構 - Google Patents

半導体組立てと試験設備用のダイ・レベル追跡遂行機構 Download PDF

Info

Publication number
JP2008517465A
JP2008517465A JP2007536813A JP2007536813A JP2008517465A JP 2008517465 A JP2008517465 A JP 2008517465A JP 2007536813 A JP2007536813 A JP 2007536813A JP 2007536813 A JP2007536813 A JP 2007536813A JP 2008517465 A JP2008517465 A JP 2008517465A
Authority
JP
Japan
Prior art keywords
die
string
source object
strings
units
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007536813A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008517465A5 (enExample
Inventor
コー,ホーン・ローン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2008517465A publication Critical patent/JP2008517465A/ja
Publication of JP2008517465A5 publication Critical patent/JP2008517465A5/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00Administration; Management
    • G06Q10/06Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00Administration; Management
    • G06Q10/08Logistics, e.g. warehousing, loading or distribution; Inventory or stock management
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Economics (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Strategic Management (AREA)
  • Human Resources & Organizations (AREA)
  • Entrepreneurship & Innovation (AREA)
  • General Business, Economics & Management (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Tourism & Hospitality (AREA)
  • Development Economics (AREA)
  • Marketing (AREA)
  • Operations Research (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Educational Administration (AREA)
  • Game Theory and Decision Science (AREA)
  • General Factory Administration (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2007536813A 2004-10-15 2005-10-12 半導体組立てと試験設備用のダイ・レベル追跡遂行機構 Withdrawn JP2008517465A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61880504P 2004-10-15 2004-10-15
PCT/US2005/036548 WO2006044399A1 (en) 2004-10-15 2005-10-12 Die-level traceability mechanism for semiconductor assembly and test facility

Publications (2)

Publication Number Publication Date
JP2008517465A true JP2008517465A (ja) 2008-05-22
JP2008517465A5 JP2008517465A5 (enExample) 2008-11-27

Family

ID=35754092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007536813A Withdrawn JP2008517465A (ja) 2004-10-15 2005-10-12 半導体組立てと試験設備用のダイ・レベル追跡遂行機構

Country Status (7)

Country Link
US (2) US7343214B2 (enExample)
EP (1) EP1810326A1 (enExample)
JP (1) JP2008517465A (enExample)
KR (1) KR20070085369A (enExample)
CN (1) CN101040290A (enExample)
TW (1) TW200629026A (enExample)
WO (1) WO2006044399A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0800227D0 (en) * 2008-01-07 2008-02-13 Metryx Ltd Method of controlling semiconductor device fabrication
TWI442401B (zh) * 2009-12-30 2014-06-21 Macronix Int Co Ltd 共享輸入封裝之三維晶片選取
CN102640253B (zh) 2010-10-04 2014-06-18 晟碟半导体(上海)有限公司 分立组件后向可追溯性和半导体装置前向可追溯性
US9559113B2 (en) 2014-05-01 2017-01-31 Macronix International Co., Ltd. SSL/GSL gate oxide in 3D vertical channel NAND
KR20160018227A (ko) * 2014-08-08 2016-02-17 에스케이하이닉스 주식회사 웨이퍼 처리 시스템 및 이를 이용한 웨이퍼 처리 방법
US10419410B2 (en) * 2016-12-15 2019-09-17 Seagate Technology Llc Automatic generation of unique identifiers for distributed directory management users
KR102653937B1 (ko) 2018-07-17 2024-04-02 삼성전자주식회사 반도체 장치의 테스트 방법및 반도체 장치의 테스트 시스템
US11063000B2 (en) * 2019-01-29 2021-07-13 Infineon Technologies Ag Semiconductor package authentication feature
US11450616B2 (en) 2020-07-29 2022-09-20 Nxp Usa, Inc. Using a backside mask layer for forming a unique die mark identifier pattern

Family Cites Families (83)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US103628A (en) * 1870-05-31 Lemuel w
US21265A (en) * 1858-08-24 Improvement in rotary harrows
US225385A (en) * 1880-03-09 Service-pipe box
US4767A (en) * 1846-09-19 Pike-engine
US132060A (en) * 1872-10-08 Improvement in windmills
US6404A (en) * 1849-05-01 shaw and ezra gould
US744A (en) * 1838-05-17 Mode of cutting off steam in steam-engines
US158795A (en) * 1875-01-19 Improvement in clover-harvesters
US95172A (en) * 1869-09-21 Improved shoemakers tool
US5090A (en) * 1847-05-01 Improvement in diffusers for water-wheels
US26949A (en) * 1860-01-24 William lewis
US42780A (en) * 1864-05-17 Improvement in wood-splitting machines
US17708A (en) * 1857-06-30 Coloring yarn ijst the bobbin
US251472A (en) * 1881-12-27 sohmetzer
US106931A (en) * 1870-08-30 Improvement in machine for rounding fellies for wheels
US110270A (en) * 1870-12-20 Improvement in machines for making cigars
US187737A (en) * 1877-02-27 Improvement in mowing-machines
US183884A (en) * 1876-10-31 Improvement in gas-carbureters
US81756A (en) * 1868-09-01 Improved traveling-trunk
US62609A (en) * 1867-03-05 Improved life-pbeservdfg beeth
US38779A (en) * 1863-06-02 Improvement in thrashing-machines
US34785A (en) * 1862-03-25 Improvement in heaters
US76897A (en) * 1868-04-21 Improved composition foe blacking leatheb
US87113A (en) * 1869-02-23 Improvement in reel and swift
US224540A (en) * 1880-02-17 Caleb h
US176872A (en) * 1876-05-02 Improvement in gang-planks
US124437A (en) * 1872-03-12 Improvement in type writing-machines
US36677A (en) * 1862-10-14 Improvement in hoop-skirts
US157762A (en) * 1874-12-15 Improvement in bird-cages
US203591A (en) * 1878-05-14 Improvement in tools for trimming and finishing the edges of dash-boards
US256463A (en) * 1882-04-18 Journal-bearing
US141605A (en) * 1873-08-05 Improvement in packages for fruit
US5129974A (en) * 1990-08-23 1992-07-14 Colorcode Unlimited Corporation Microlabelling system and method of making thin labels
JPH07123101B2 (ja) * 1990-09-14 1995-12-25 株式会社東芝 半導体装置
US5625816A (en) * 1994-04-05 1997-04-29 Advanced Micro Devices, Inc. Method and system for generating product performance history
US6941556B1 (en) * 1995-03-24 2005-09-06 Sun Microsystems, Inc. Method and system for type identification for multiple object interfaces in a distributed object environment
US5726920A (en) * 1995-09-29 1998-03-10 Advanced Micro Devices, Inc. Watchdog system having data differentiating means for use in monitoring of semiconductor wafer testing line
US5751581A (en) * 1995-11-13 1998-05-12 Advanced Micro Devices Material movement server
US5838361A (en) 1996-01-11 1998-11-17 Micron Technology, Inc. Laser marking techniques
DE19640425A1 (de) 1996-09-30 1998-04-02 Siemens Ag Verfahren zur Waferidentifizierung in der Chipfertigung und Vorrichtung zur Durchführung des Verfahrens
US6259960B1 (en) * 1996-11-01 2001-07-10 Joel Ltd. Part-inspecting system
US6100486A (en) 1998-08-13 2000-08-08 Micron Technology, Inc. Method for sorting integrated circuit devices
US6065113A (en) * 1997-03-07 2000-05-16 Texas Instruments Incorporated Circuits, systems, and methods for uniquely identifying a microprocessor at the instruction set level employing one-time programmable register
US5856923A (en) 1997-03-24 1999-01-05 Micron Technology, Inc. Method for continuous, non lot-based integrated circuit manufacturing
JPH1126333A (ja) * 1997-06-27 1999-01-29 Oki Electric Ind Co Ltd 半導体装置及びその情報管理システム
US6446017B1 (en) * 1997-08-21 2002-09-03 Micron Technology, Inc. Method and system for tracking manufacturing data for integrated circuit parts
JP3394895B2 (ja) 1997-09-08 2003-04-07 沖電気工業株式会社 半導体記憶装置およびその製造方法
US6128588A (en) * 1997-10-01 2000-10-03 Sony Corporation Integrated wafer fab time standard (machine tact) database
US6216055B1 (en) * 1997-12-16 2001-04-10 Texas Instruments Incorporated Partial semiconductor wafer processing
KR19990065486A (ko) * 1998-01-14 1999-08-05 윤종용 반도체 제조설비 관리시스템의 공정조건 관리방법
US6049624A (en) * 1998-02-20 2000-04-11 Micron Technology, Inc. Non-lot based method for assembling integrated circuit devices
US6268641B1 (en) 1998-03-30 2001-07-31 Kabushiki Kaisha Toshiba Semiconductor wafer having identification indication and method of manufacturing the same
WO2000014790A1 (en) * 1998-09-03 2000-03-16 Hitachi, Ltd. Inspection system and method for producing electronic device by using the same
JP4951811B2 (ja) 1999-03-24 2012-06-13 富士通セミコンダクター株式会社 半導体装置の製造方法
US6337122B1 (en) 2000-01-11 2002-01-08 Micron Technology, Inc. Stereolithographically marked semiconductors devices and methods
JP3555859B2 (ja) 2000-03-27 2004-08-18 広島日本電気株式会社 半導体生産システム及び半導体装置の生産方法
US6792563B1 (en) * 2000-04-28 2004-09-14 Intel Corporation Method and apparatus for bus activity tracking
US6673692B2 (en) 2000-06-28 2004-01-06 Micron Technology, Inc. Method and apparatus for marking microelectronic dies and microelectronic devices
JP3578057B2 (ja) 2000-07-06 2004-10-20 株式会社日立製作所 Id管理システム
US6568593B2 (en) * 2000-07-14 2003-05-27 Trumpf Gmbh + Co. System and method for identification of tools and parts of tools for a fabricating machine
US6351684B1 (en) * 2000-09-19 2002-02-26 Advanced Micro Devices, Inc. Mask identification database server
JP2002184872A (ja) 2000-12-15 2002-06-28 Hitachi Ltd 認識番号を有する半導体装置、その製造方法及び電子装置
JP2002190509A (ja) 2000-12-22 2002-07-05 Mitsubishi Electric Corp 検査解析方法及び半導体装置
US7031791B1 (en) * 2001-02-27 2006-04-18 Cypress Semiconductor Corp. Method and system for a reject management protocol within a back-end integrated circuit manufacturing process
TW594590B (en) * 2001-03-16 2004-06-21 Taiwan Semiconductor Mfg Split lot ID encoding system and method
US7100826B1 (en) * 2001-03-26 2006-09-05 Advanced Micro Devices, Inc. Barcode marking of wafer products for inventory control
US6792365B2 (en) * 2001-08-10 2004-09-14 Micron Technology, Inc. Sequential unique marking
US6555400B2 (en) * 2001-08-22 2003-04-29 Micron Technology, Inc. Method for substrate mapping
JP2003115424A (ja) 2001-10-03 2003-04-18 Nec Corp 半導体装置およびその識別方法、並びに半導体装置の製造装置
EP1391853A1 (fr) 2001-11-30 2004-02-25 STMicroelectronics S.A. Diversification d'un identifiant unique d'un circuit intégré
US6616034B2 (en) * 2001-12-10 2003-09-09 Fortrend Taiwan Scientific Corporation Radio frequency identification device
US7035877B2 (en) 2001-12-28 2006-04-25 Kimberly-Clark Worldwide, Inc. Quality management and intelligent manufacturing with labels and smart tags in event-based product manufacturing
US20030141605A1 (en) 2002-01-25 2003-07-31 Silicon Integrated Systems Corp. Method of forming identifying mark on semiconductor wafer
JP4256115B2 (ja) 2002-05-28 2009-04-22 富士通マイクロエレクトロニクス株式会社 マーク認識方法及び半導体装置の製造方法
US6952623B2 (en) 2002-07-02 2005-10-04 Texas Instruments, Inc. Permanent chip ID using FeRAM
US20040034785A1 (en) 2002-08-15 2004-02-19 Horng-Ming Tai Hardware and firmware encryption mechanism using unique chip die identification
US6974761B2 (en) 2002-09-27 2005-12-13 Oki Electric Industry Co. Method of forming a semiconductor laser chip having a marker
US6839601B1 (en) 2002-11-26 2005-01-04 Advanced Micro Devices, Inc. Fabrication architecture including enterprise resource planning integration
US6812477B2 (en) 2002-12-04 2004-11-02 Texas Instruments Incorporated Integrated circuit identification
US7015795B2 (en) 2002-12-30 2006-03-21 Potomac Photonics, Inc. Self-identifying integrated circuits and method for fabrication thereof
US6959229B2 (en) 2003-03-07 2005-10-25 Sdi Industries, Inc. RFID control system
US20040251472A1 (en) 2003-06-11 2004-12-16 Broadcom Corporation Memory cell for modification of revision identifier in an integrated circuit chip
US7415317B2 (en) 2004-02-25 2008-08-19 Micron Technology, Inc. Method and system for correlating and combining production and non-production data for analysis

Also Published As

Publication number Publication date
TW200629026A (en) 2006-08-16
US20080071413A1 (en) 2008-03-20
US20060085089A1 (en) 2006-04-20
CN101040290A (zh) 2007-09-19
US7343214B2 (en) 2008-03-11
WO2006044399A1 (en) 2006-04-27
KR20070085369A (ko) 2007-08-27
EP1810326A1 (en) 2007-07-25

Similar Documents

Publication Publication Date Title
US20080071413A1 (en) Die-level traceability mechanism for semiconductor assembly and test facility
US11853389B2 (en) Methods and apparatus for sorting data
US8881246B2 (en) System and method for providing secured integrated engineering analysis
EP1732016B1 (en) Information processing apparatus, information processing method, and information processing program
US6756796B2 (en) Method of search and identify reference die
US5448488A (en) Computer-controlled individual chip management system for processing wafers
JP2003324043A (ja) レシピ配布管理データベースを備えた半導体ウェハ製造実行システム
EP3432165A1 (en) Database search system and method
US8015040B2 (en) Methods, systems, and computer program products for product randomization and analysis in a manufacturing environment
US8825190B2 (en) Priority calculation device, program, priority calculation system, and priority calculation method
US7035705B2 (en) System and method for process contamination prevention for semiconductor manufacturing
US6929962B1 (en) System and method for wafer acceptance test configuration
TW542989B (en) System and method to reduce bond program errors of integrated circuit bonders
JP2008517465A5 (enExample)
US20040158344A1 (en) Mask management device in semiconductor wafer production process
US6694210B1 (en) Process recipe modification in an integrated circuit fabrication apparatus
CN111724143A (zh) 基于rpa的流程元素定位方法及装置、计算设备、存储介质
US6909934B1 (en) Efficient method of dynamic formulation of chamber selections for multiple chamber tools
US20030220706A1 (en) Wafer map host system
CN101751402B (zh) 地图信息管理方法及系统
US7433750B2 (en) Data tracking method and system applied in semiconductor manufacturing
JP2005071371A (ja) コンピュータ支援設計ツールにおける設計要素を解析するシステムおよび方法
US6789235B1 (en) Bond program verification system
JP7055911B1 (ja) 工事情報表示装置、工事情報表示方法及び工事情報表示プログラム
US20160070250A1 (en) Production management apparatus, production management method and recording medium

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081010

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20081010

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20100426