JP2008509450A - 光ファイバと一体型平面導波路との間の光結合効率を改善するためのシステム及びテーパ導波路並びにその製造方法 - Google Patents
光ファイバと一体型平面導波路との間の光結合効率を改善するためのシステム及びテーパ導波路並びにその製造方法 Download PDFInfo
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- JP2008509450A JP2008509450A JP2007525886A JP2007525886A JP2008509450A JP 2008509450 A JP2008509450 A JP 2008509450A JP 2007525886 A JP2007525886 A JP 2007525886A JP 2007525886 A JP2007525886 A JP 2007525886A JP 2008509450 A JP2008509450 A JP 2008509450A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
【選択図】図2、3
Description
Claims (20)
- 導波路光学モード変換器であって、
平面基板構造上に形成されたコアと、
コアに垂直方向のテーパを付けるためにコアの上面に形成され、それぞれ所定の高さ及び所定の長さを有する所定の複数の段とを有する導波路光学モード変換器。 - コアが、水平方向にテーパが付けられた、請求項1に記載の導波路光学モード変換器。
- 垂直方向及び水平方向のテーパが、コアの同じ端で狭くなる、請求項2に記載の導波路光学モード変換器。
- コア全体の上に形成された誘電性クラッド層を更に有する、請求項1に記載の導波路光学モード変換器。
- 平面基板構造が、半導体基板の上に形成された誘電体層を含む、請求項1に記載の導波路光学モード変換器。
- コアが結晶シリコンである、請求項1に記載の導波路光学モード変換器。
- コアの上及び下に形成された誘電体層を更に有し、誘電体層がそれぞれ、コアの屈折率より低い屈折率を備える、請求項1に記載の導波路光学モード変換器。
- 光学システムであって、
平面導波路と、
平面導波路と光ファイバとの間で光を結合するために平面導波路の端に形成されたテーパ導波路拡張部であって、導波路拡張部に垂直方向のテーパを付けるために上面に形成され、それぞれ所定の高さ及び所定の長さを備える所定の複数の段を備えるテーパ導波路拡張部とを有する光学システム。 - テーパ導波路拡張部が、水平方向にテーパが付けられた、請求項8に記載の光学システム。
- テーパ導波路拡張部が、結晶シリコンコアを含む、請求項8に記載の光学システム。
- テーパ導波路拡張部が、コアの上に形成された誘電性クラッド層を含む、請求項10の光学システム。
- テーパ導波路拡張部が、2つの誘電体層の間にコア層を含み、誘電体層がそれぞれ、コアの屈折率より低い屈折率を備える、請求項8に記載の光学システム。
- 光ファイバを更に有する、請求項8に記載の光学システム。
- 光ファイバと平面導波路との間の光学モード変換器として使用可能なテーパ平面導波路を製造する方法であって、
テーパ導波路のためのコア材料層を設ける段階と、
コア層に垂直方向のテーパを付けるために、所定の高さ及び所定の長さをそれぞれ備える所定の複数の段をコアの上面に形成する段階とを有する方法。 - コア層に水平テーパを形成する段階を更に有する、請求項14に記載の方法。
- 設ける段階が、
基板と、基板上に形成された誘電体層と、誘電体層上に形成されたコア材料層とを含む出発材料を提供する段階を含む、請求項14に記載の方法。 - 形成する段階が、
(a)コア層上にテーパ導波路の幅広端の位置を画定する段階と、
(b)画定された幅広端の位置から延在し、1つ以上の段を画定するコア層の所定領域の上に保護層を付着させる段階と、
(c)コア層の残りの保護されていない領域を所定の深さにエッチングして1つの段の高さを画定する段階と、
(d)毎回、新しい段の長さを画定するために、画定された幅広端位置から所定領域を更に延ばして、段階(b)〜(c)を所定の回数繰返し、それにより、所定の複数の段を形成する段階とを含む、請求項14に記載の方法。 - エッチングする段階が、シリコンドライエッチングを使用して行われる、請求項14に記載の方法。
- テーパ導波路の幅広端を研磨する段階を更に有する、請求項14に記載の方法。
- テーパ導波路の幅広端に反射防止コーティングを付着させる段階を更に含む、請求項14に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US60384304P | 2004-08-23 | 2004-08-23 | |
PCT/US2005/029815 WO2006023862A1 (en) | 2004-08-23 | 2005-08-22 | System and tapered waveguide for improving light coupling efficiency between optical fibers and integrated planar waveguides and method of manufacturing same |
Publications (1)
Publication Number | Publication Date |
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JP2008509450A true JP2008509450A (ja) | 2008-03-27 |
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Application Number | Title | Priority Date | Filing Date |
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JP2007525886A Pending JP2008509450A (ja) | 2004-08-23 | 2005-08-22 | 光ファイバと一体型平面導波路との間の光結合効率を改善するためのシステム及びテーパ導波路並びにその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8254737B2 (ja) |
EP (1) | EP1782113A1 (ja) |
JP (1) | JP2008509450A (ja) |
KR (1) | KR100886069B1 (ja) |
CN (1) | CN1922519B (ja) |
WO (1) | WO2006023862A1 (ja) |
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CN112394446A (zh) * | 2019-08-13 | 2021-02-23 | 中国科学院苏州纳米技术与纳米仿生研究所 | 端面耦合器及其制作方法、端面耦合方法 |
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Publication number | Publication date |
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CN1922519B (zh) | 2010-12-01 |
KR100886069B1 (ko) | 2009-02-26 |
US20070274654A1 (en) | 2007-11-29 |
US8254737B2 (en) | 2012-08-28 |
CN1922519A (zh) | 2007-02-28 |
EP1782113A1 (en) | 2007-05-09 |
KR20070036189A (ko) | 2007-04-02 |
WO2006023862A1 (en) | 2006-03-02 |
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