JP2008311214A - 電子顕微鏡用試料ホルダ及び電子顕微鏡 - Google Patents
電子顕微鏡用試料ホルダ及び電子顕微鏡 Download PDFInfo
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Abstract
【解決手段】 電子顕微鏡用試料ホルダ20においては、走査型電子顕微鏡の試料台に本体部21が取り付けられた状態で、グリッド28によって支持された試料Sを透過し且つ絞り部材31を通過した電子線が2次電子発生面32に照射され、それにより、2次電子発生面32から2次電子が発生させられる。このとき、試料Sによる散乱電子が絞り部材31によって遮断されるため、高分解能で試料Sを観察することができる。また、本体部21が試料台によって傾斜及び回転させられるため、試料Sの略全域を観察することができる。
【選択図】 図2
Description
(1)絞り部材31
(2)2次電子発生面32
(3)視野移動
(4)あらゆる汎用の走査型電子顕微鏡で使用することができる形状
(5)観察例
Claims (5)
- 走査型電子顕微鏡の試料台に取り付けられる本体部と、
前記本体部において試料を支持する支持部と、
前記本体部において前記試料を透過した電子線を絞る絞り部と、
前記本体部において前記絞り部を通過した電子線が照射されることで2次電子を発生する2次電子発生部と、を備え、
前記本体部は、前記試料台によって傾斜及び回転させられることを特徴とする電子顕微鏡用試料ホルダ。 - 少なくとも前記支持部の周囲には、前記試料による散乱電子を減衰させる電子減衰部が設けられていることを特徴とする請求項1記載の電子顕微鏡用試料ホルダ。
- 少なくとも前記支持部の周囲には、前記試料を汚染するガスを吸収するガス吸収部が設けられていることを特徴とする請求項1又は2記載の電子顕微鏡用試料ホルダ。
- 少なくとも前記本体部における前記支持部の周囲部分は、カーボンからなることを特徴とする請求項1〜3のいずれか一項記載の電子顕微鏡用試料ホルダ。
- 請求項1〜4のいずれか一項記載の電子顕微鏡用試料ホルダを具備することを特徴とする電子顕微鏡。
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JP2008046652A JP5182864B2 (ja) | 2007-05-11 | 2008-02-27 | 電子顕微鏡用試料ホルダ及び電子顕微鏡 |
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JP2007127060 | 2007-05-11 | ||
JP2007127060 | 2007-05-11 | ||
JP2008046652A JP5182864B2 (ja) | 2007-05-11 | 2008-02-27 | 電子顕微鏡用試料ホルダ及び電子顕微鏡 |
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JP2008311214A true JP2008311214A (ja) | 2008-12-25 |
JP5182864B2 JP5182864B2 (ja) | 2013-04-17 |
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JP2008046652A Expired - Fee Related JP5182864B2 (ja) | 2007-05-11 | 2008-02-27 | 電子顕微鏡用試料ホルダ及び電子顕微鏡 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150162164A1 (en) * | 2010-08-02 | 2015-06-11 | Protochips, Inc. | Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices |
US9837746B2 (en) | 2012-11-16 | 2017-12-05 | Protochips, Inc. | Method for forming an electrical connection to a sample support in an electron microscope holder |
US9997330B2 (en) | 2014-06-03 | 2018-06-12 | Protochips, Inc. | Method for optimizing fluid flow across a sample within an electron microscope sample holder |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101540721B1 (ko) * | 2014-01-08 | 2015-07-31 | 구정회 | 주사전자 현미경의 영상 구현장치 |
Citations (8)
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JPS5019397Y1 (ja) * | 1970-08-06 | 1975-06-12 | ||
JPS5083091A (ja) * | 1973-11-22 | 1975-07-04 | ||
JPS5121551U (ja) * | 1974-05-25 | 1976-02-17 | ||
JPS52130277A (en) * | 1976-04-26 | 1977-11-01 | Hitachi Ltd | Transparent type scanning electronic microscope |
JPS6020439A (ja) * | 1983-07-15 | 1985-02-01 | Jeol Ltd | 荷電粒子線装置における試料回転装置 |
JPH05251027A (ja) * | 1991-12-25 | 1993-09-28 | Hitachi Ltd | X線分析器を備えた電子顕微鏡 |
JPH08273573A (ja) * | 1995-04-04 | 1996-10-18 | Jeol Ltd | 走査電子顕微鏡 |
JP2004253369A (ja) * | 2003-01-31 | 2004-09-09 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
-
2008
- 2008-02-27 JP JP2008046652A patent/JP5182864B2/ja not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5019397Y1 (ja) * | 1970-08-06 | 1975-06-12 | ||
JPS5083091A (ja) * | 1973-11-22 | 1975-07-04 | ||
JPS5121551U (ja) * | 1974-05-25 | 1976-02-17 | ||
JPS52130277A (en) * | 1976-04-26 | 1977-11-01 | Hitachi Ltd | Transparent type scanning electronic microscope |
JPS6020439A (ja) * | 1983-07-15 | 1985-02-01 | Jeol Ltd | 荷電粒子線装置における試料回転装置 |
JPH05251027A (ja) * | 1991-12-25 | 1993-09-28 | Hitachi Ltd | X線分析器を備えた電子顕微鏡 |
JPH08273573A (ja) * | 1995-04-04 | 1996-10-18 | Jeol Ltd | 走査電子顕微鏡 |
JP2004253369A (ja) * | 2003-01-31 | 2004-09-09 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150162164A1 (en) * | 2010-08-02 | 2015-06-11 | Protochips, Inc. | Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices |
US9324539B2 (en) * | 2010-08-02 | 2016-04-26 | Protochips, Inc. | Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices |
US20160126056A1 (en) * | 2010-08-02 | 2016-05-05 | Protochips, Inc. | Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices |
US10043633B2 (en) * | 2010-08-02 | 2018-08-07 | Protochips, Inc. | Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices |
US9837746B2 (en) | 2012-11-16 | 2017-12-05 | Protochips, Inc. | Method for forming an electrical connection to a sample support in an electron microscope holder |
US10256563B2 (en) | 2012-11-16 | 2019-04-09 | Protochips, Inc. | Method for forming an electrical connection to a sample support in an electron microscope holder |
US9997330B2 (en) | 2014-06-03 | 2018-06-12 | Protochips, Inc. | Method for optimizing fluid flow across a sample within an electron microscope sample holder |
US10373800B2 (en) | 2014-06-03 | 2019-08-06 | Protochips, Inc. | Method for optimizing fluid flow across a sample within an electron microscope sample holder |
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