JP2008305735A5 - - Google Patents
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- Publication number
- JP2008305735A5 JP2008305735A5 JP2007153526A JP2007153526A JP2008305735A5 JP 2008305735 A5 JP2008305735 A5 JP 2008305735A5 JP 2007153526 A JP2007153526 A JP 2007153526A JP 2007153526 A JP2007153526 A JP 2007153526A JP 2008305735 A5 JP2008305735 A5 JP 2008305735A5
- Authority
- JP
- Japan
- Prior art keywords
- dopant material
- substrate
- manufacturing
- organic light
- inner lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000002019 doping agent Substances 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 14
- 238000007740 vapor deposition Methods 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 150000002894 organic compounds Chemical class 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 4
- 230000005674 electromagnetic induction Effects 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 238000003860 storage Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 150000001339 alkali metal compounds Chemical class 0.000 claims 1
- 150000001341 alkaline earth metal compounds Chemical class 0.000 claims 1
- FJDQFPXHSGXQBY-UHFFFAOYSA-L caesium carbonate Chemical compound [Cs+].[Cs+].[O-]C([O-])=O FJDQFPXHSGXQBY-UHFFFAOYSA-L 0.000 claims 1
- 229910000024 caesium carbonate Inorganic materials 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000000354 decomposition reaction Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007153526A JP4916385B2 (ja) | 2007-06-11 | 2007-06-11 | 有機発光素子の製造方法及び蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007153526A JP4916385B2 (ja) | 2007-06-11 | 2007-06-11 | 有機発光素子の製造方法及び蒸着装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008305735A JP2008305735A (ja) | 2008-12-18 |
| JP2008305735A5 true JP2008305735A5 (https=) | 2010-07-22 |
| JP4916385B2 JP4916385B2 (ja) | 2012-04-11 |
Family
ID=40234262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007153526A Expired - Fee Related JP4916385B2 (ja) | 2007-06-11 | 2007-06-11 | 有機発光素子の製造方法及び蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4916385B2 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011052301A (ja) * | 2009-09-04 | 2011-03-17 | Hitachi Zosen Corp | 真空蒸着用蒸着材料の蒸発、昇華方法および真空蒸着用るつぼ装置 |
| KR101172275B1 (ko) * | 2009-12-31 | 2012-08-08 | 에스엔유 프리시젼 주식회사 | 기화 장치 및 이의 제어 방법 |
| KR20150136392A (ko) * | 2014-05-27 | 2015-12-07 | 한국기초과학지원연구원 | 플라즈마 보조 물리 기상 증착원 및 이를 이용한 증착 장치 |
| JP7241604B2 (ja) * | 2019-05-28 | 2023-03-17 | キヤノントッキ株式会社 | 加熱装置、蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法 |
| JP7202971B2 (ja) * | 2019-05-28 | 2023-01-12 | キヤノントッキ株式会社 | 蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法 |
| JP7241603B2 (ja) * | 2019-05-28 | 2023-03-17 | キヤノントッキ株式会社 | 加熱装置、蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4110966B2 (ja) * | 2002-12-26 | 2008-07-02 | 富士電機ホールディングス株式会社 | 蒸着装置および蒸着方法 |
| JP2005063910A (ja) * | 2003-08-20 | 2005-03-10 | Canon Inc | 有機発光素子及びその製造方法 |
| JP2006059640A (ja) * | 2004-08-19 | 2006-03-02 | Tdk Corp | 蒸着装置及び蒸着方法 |
-
2007
- 2007-06-11 JP JP2007153526A patent/JP4916385B2/ja not_active Expired - Fee Related
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