JP4916385B2 - 有機発光素子の製造方法及び蒸着装置 - Google Patents

有機発光素子の製造方法及び蒸着装置 Download PDF

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Publication number
JP4916385B2
JP4916385B2 JP2007153526A JP2007153526A JP4916385B2 JP 4916385 B2 JP4916385 B2 JP 4916385B2 JP 2007153526 A JP2007153526 A JP 2007153526A JP 2007153526 A JP2007153526 A JP 2007153526A JP 4916385 B2 JP4916385 B2 JP 4916385B2
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Japan
Prior art keywords
dopant material
inner lid
vapor deposition
substrate
organic light
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JP2007153526A
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Japanese (ja)
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JP2008305735A (ja
JP2008305735A5 (https=
Inventor
精二 真下
俊明 吉川
直人 福田
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Canon Inc
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Canon Inc
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  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP2007153526A 2007-06-11 2007-06-11 有機発光素子の製造方法及び蒸着装置 Expired - Fee Related JP4916385B2 (ja)

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JP2007153526A JP4916385B2 (ja) 2007-06-11 2007-06-11 有機発光素子の製造方法及び蒸着装置

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JP2007153526A JP4916385B2 (ja) 2007-06-11 2007-06-11 有機発光素子の製造方法及び蒸着装置

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JP2008305735A JP2008305735A (ja) 2008-12-18
JP2008305735A5 JP2008305735A5 (https=) 2010-07-22
JP4916385B2 true JP4916385B2 (ja) 2012-04-11

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JP2007153526A Expired - Fee Related JP4916385B2 (ja) 2007-06-11 2007-06-11 有機発光素子の製造方法及び蒸着装置

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011052301A (ja) * 2009-09-04 2011-03-17 Hitachi Zosen Corp 真空蒸着用蒸着材料の蒸発、昇華方法および真空蒸着用るつぼ装置
KR101172275B1 (ko) * 2009-12-31 2012-08-08 에스엔유 프리시젼 주식회사 기화 장치 및 이의 제어 방법
KR20150136392A (ko) * 2014-05-27 2015-12-07 한국기초과학지원연구원 플라즈마 보조 물리 기상 증착원 및 이를 이용한 증착 장치
JP7241604B2 (ja) * 2019-05-28 2023-03-17 キヤノントッキ株式会社 加熱装置、蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法
JP7202971B2 (ja) * 2019-05-28 2023-01-12 キヤノントッキ株式会社 蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法
JP7241603B2 (ja) * 2019-05-28 2023-03-17 キヤノントッキ株式会社 加熱装置、蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4110966B2 (ja) * 2002-12-26 2008-07-02 富士電機ホールディングス株式会社 蒸着装置および蒸着方法
JP2005063910A (ja) * 2003-08-20 2005-03-10 Canon Inc 有機発光素子及びその製造方法
JP2006059640A (ja) * 2004-08-19 2006-03-02 Tdk Corp 蒸着装置及び蒸着方法

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JP2008305735A (ja) 2008-12-18

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