JP2008298977A - Heat treatment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat treatment apparatus capable of heat-treating a plurality of objects to be heat-treated as they are housed in a magazine, and performing a plurality of heat-treatment processes concurrently. <P>SOLUTION: A heat-treatment apparatus 30 comprises a roughly rectangular solid-shaped rack 30a, seven units of heating devices 10 housed in the rack 30a in a manner that they can be taken in and out, and a control device 32 for controlling the heat-treatment processes of the heating devices 10 independently. Each of the heating devices 10 has a magazine chamber for housing a magazine in which objects to be heat-treated are housed in a manner that it can be taken in and out, and heat-treating the objects. Above each of the heating devices 10, there disposed is a display panel 33 having pilot lamps 33a and 33b for indicating the operation status of each of the heating devices 10. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a heat treatment apparatus used for heat treatment of a glass substrate, a metal substrate such as a semiconductor lead frame, or a resin substrate, which is a component such as a liquid crystal display panel or a plasma display panel.

  When heat-treating a glass substrate which is a component such as a liquid crystal display panel or a plasma display panel, a heated gas circulation type clean oven has been conventionally used (for example, see Patent Document 1). In this clean oven, a plurality of glass substrates that are to be heated are arranged in a thermostatic chamber in a multi-stage shape, and heat treatment is performed by heating the heated object with a heated gas that circulates in the thermostatic chamber by a blower fan. Do.

  In the case of the above-mentioned heated gas circulation type clean oven, the object to be heated such as a glass substrate can be accommodated in multiple stages, so it is difficult to make the temperature distribution in the thermostat uniform even though the space efficiency is high. is there. Further, since the heated gas is stirred and circulated by the blower fan, there is a high possibility that the cleanliness in the thermostatic chamber will deteriorate. Further, when a lightweight member such as a lead frame is heat-treated, the object to be heated may move from a predetermined position due to the wind pressure of the circulating convection heating gas.

  Therefore, a plurality of shelf heaters composed of far infrared panel heaters having a function of radiating far infrared rays from both sides are arranged in multiple stages in the furnace body, and each space formed between these shelf heaters is heated. A heating furnace as a region has been proposed (for example, see Patent Document 2).

  However, in the case of the multistage heating furnace described in Patent Document 2, a large number of shelf heaters using double-sided heating type far-infrared panel heaters are arranged. Each is excellent in that it can be heated efficiently. However, when actually performing heat treatment using this multi-stage heating furnace, it is necessary to house or take out the heated objects one by one in a large number of spaces formed between the shelf heaters, These operations require a great deal of labor and time.

  In recent years, a method for handling a plurality of substrates such as semiconductor lead frames in a state in which they are accommodated in a magazine has become the mainstream, and therefore, in the heat treatment process, the substrate is placed in or out of the heating area together with the magazine. There is a growing demand for heating devices that can do this. In view of this, a rotary heating furnace has been proposed in which a magazine in which an object to be heated is stored can be stored as it is and heat-treated (see, for example, Patent Document 3).

JP 2001-56141 A JP 2001-317872 A JP-A-11-330105

  The rotary heating furnace described in Patent Document 3 includes a plurality of heating chambers that can directly store a magazine in which an object to be heated is stored, and a magazine transport unit that takes the magazine into and out of the heating chamber through a magazine entrance. Therefore, it is excellent in that the heat treatment can be performed continuously.

  However, if the heat treatment process (heating rate, heating temperature, heating time, cooling rate, etc.) applied to the article to be heated stored in the magazine differs depending on each magazine, it is extremely difficult to perform continuous heat treatment. .

  The problem to be solved by the present invention is to provide a heat treatment apparatus capable of heat-treating an object to be heated stored in a magazine as it is, and capable of performing a plurality of heat treatment steps in parallel. There is.

  The heat treatment apparatus of the present invention includes a plurality of heating apparatuses having a magazine chamber for accommodating and heat-treating a magazine in which an object to be heated is stored, and a control for independently controlling the heat treatment steps of the plurality of heating apparatuses. And a device.

  With such a configuration, each of the plurality of magazines storing the objects to be heated is accommodated in the magazine chamber of the heat treatment apparatus, and each heat treatment apparatus is controlled independently by the control apparatus. Heat treatment can be performed on the object to be heated. Accordingly, it is possible to heat-treat the objects to be heated stored in the plurality of magazines as they are, and it is also possible to execute a plurality of heat-treatment processes having different heat-treatment conditions in parallel.

  Here, the heating device accommodates a plurality of heating side walls opposed to each other in a box-shaped external furnace body formed of a heat-insulating wall body, and a magazine in which an object to be heated is stored. A magazine chamber provided between the heating side walls, a heating back wall disposed on the back side of the magazine chamber, the heating side wall and the heating means provided on the heating back wall, and the magazine chamber It is desirable to provide the door body arrange | positioned so that opening and closing is possible in the position away from the said heating side wall of the front side.

  With such a configuration, a magazine in which a plurality of objects to be heated is stored is inserted into the magazine chamber as it is, and the front of the magazine chamber is closed with a door body, and then the heating side wall and the heating are heated by heating means. By heating the back wall for use, the object to be heated accommodated in the magazine can be heat-treated. When the door is opened after the heat treatment, the article to be heated accommodated in the magazine can be taken out of the magazine chamber as it is. The magazine chamber is heated in at least three directions by a plurality of heating side walls and a heating back wall, and is located in a box-shaped external furnace body surrounded by a wall body having heat insulation properties, and has a uniform temperature distribution. Due to its excellent properties, it is possible to perform a uniform heat treatment on the article to be heated in the magazine.

  On the other hand, it is desirable that the control device controls at least the rate of temperature rise, the heating temperature, the heating time, and the heat treatment atmosphere. With such a configuration, various heat treatment conditions required in heat treatment processes for glass substrates, metal substrates such as semiconductor lead frames, and resin substrates such as liquid crystal display panels and plasma display panels are satisfied. Can do.

  According to the present invention, a magazine in which a plurality of articles to be heated can be heat-treated as they are, and a heat treatment apparatus capable of executing a plurality of heat treatment steps in parallel can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a front view showing a heat treatment apparatus according to an embodiment of the present invention, and FIG. 2 is a block diagram showing a configuration of the heat treatment apparatus shown in FIG.

  As shown in FIG. 1, the heat treatment apparatus 30 of this embodiment includes a substantially rectangular parallelepiped rack 30a, seven heating apparatuses 10 housed in the rack 30a so as to be able to be taken in and out, and a heat treatment process of these heating apparatuses 10. And a control device 32 for independently controlling the above. Each heating apparatus 10 has a magazine chamber 13 in which a magazine 23 in which an object to be heated is accommodated is detachably accommodated and heat-treated as shown in FIG. A display panel 33 having pilot lamps 33a and 33b is arranged above each heating device 10. Although the heat processing apparatus 30 of this embodiment is provided with the seven heating apparatuses 10, it is not limited to this, The number can be increased / decreased.

  As shown in FIG. 2, the signal line 32x wired from the control device 32 is connected to the connector 16a of each heating device 10 via the connector 32a. The signal line 32 y wired from the control device 32 is connected to the gas supply device 50, the exhaust device 60 and the vacuum pump 70. The gas supply device 50 and each heating device 10 are connected via pipes x1 to x7, the exhaust device 60 and each heating device 10 are connected via pipes y1 to y7, and the vacuum pump 70 and each heating device 10 are connected to each other. Are connected via pipes z1 to z7. The control device 32 can independently control the temperature increase rate, the heating temperature, the heating time, the heat treatment atmosphere, and the like in the heat treatment step of each heating device 10. Moreover, the heat treatment process according to the to-be-heated material inserted into the heating apparatus 10 can be set for every heating apparatus 10 by changing the program integrated in the control apparatus 32. FIG.

  The display panel 33 above each heating device 10 is for indicating the operating state of each heating device 10. When both the pilot lamps 33a and 33b of the display panel 33 are turned off, the heating apparatus 10 is in a resting state, and when both the pilot lamps 33a are turned on, the housed object to be heated is heat-treated. When the pilot lamp 33b is lit, the heat treatment of the object to be heated is finished, but the object to be heated is accommodated, and when only the pilot lamp 33a is lit, the object to be heated is It is shown that it is in the standby state that can accommodate.

  Next, the structure, function, etc. of the heating apparatus 10 constituting the heat treatment apparatus 30 will be described with reference to FIGS. 3 is a partially cutaway front view showing the heating device, FIG. 4 is a plan view of the heating device shown in FIG. 3, FIG. 5 is a side view of the heating device shown in FIG. 3, and FIG. 7 is a sectional view taken along line AA in FIG. 3, FIG. 8 is a sectional view taken along line BB in FIG. 3, and FIG. 9 is a sectional view taken along line CC in FIG.

  As shown in FIGS. 3 to 9, in the heating device 10, a box-shaped external furnace body 11 formed of heat insulating wall bodies (back wall 11 a, bottom wall 11 b, side wall 11 c, and top wall 11 d). Two heating side walls 12 are disposed opposite to each other, a magazine chamber 13 is provided therebetween, and a heating back wall 14 is disposed on the back side of the magazine chamber 13. The heating side wall 12 and the heating back wall 14 are provided with plate heaters 12h and 14h and heat shield plates 25 and 31, respectively, which are heat generating means. And the door body 15 is arrange | positioned in the position away from the end surface of the side wall 12 for a heating in the front side of the magazine chamber 13 so that opening and closing is possible.

  The door body 15 is pivotally supported around a plurality of support shafts 15a, and includes an opening / closing lever 15b with a lock mechanism for keeping the door body 15 in a closed state. The back wall 11a, the bottom wall 11b, the side wall 11c, the top wall 11d, and the door body 15 are each formed by a plurality of plate members 11p and 15p arranged in parallel to each other with a gap therebetween. A plate-shaped protective cover 15 d having a large number of through holes 15 c is attached to the front surface of the door body 15 with a gap in parallel with the door body 15.

  The external furnace body 11 has a rectangular parallelepiped shape that is long in the front-rear direction, and a support plate 17 is attached to the lower surface of the bottom wall 11b with a gap therebetween. On the back surface of the external furnace body 11, one air supply pipe 18, two exhaust pipes 19, and two gas flow paths 49 are respectively piped in a state of penetrating the back wall 11 a. A top plate 20 and a bottom plate 21 are attached above and below the heating side wall 12 and the heating back wall 14, and a plurality of spacers 22 are provided in order to provide a gap between the lower surface of the bottom plate 21 and the upper surface of the bottom wall 11 b of the external furnace body 11. Is arranged. As described above, the magazine chamber 13 is surrounded by the two heating side walls 12, the heating back wall 14, the top plate 20, and the bottom plate 21 except for the front surface, and the back wall of the external furnace body 11. 11a, the bottom wall 11b, the side wall 11c, and the top wall 11d are arranged in the external furnace body 11 in a state of being separated.

  As shown in FIGS. 5 and 6, the back wall 11 a has a supply pipe 18, two exhaust pipes 19, and two gas passages 49 projecting from the back wall 11 a at their respective open ends. It is piped with. Below the back wall 11a, a control unit 16 having a connector 16a for supplying power to the plate heaters 12h and 14h, sending and receiving electrical signals, and the like is provided. The air supply pipe 18 and the gas flow path 49 of one heating apparatus 10 are connected to any of the pipes x1 to x7 of the gas supply apparatus 50 shown in FIG. 2, and the exhaust pipe 19 is the pipe y1 of the exhaust apparatus 60 shown in FIG. To y7. Moreover, when heat-treating the inside of the magazine chamber 13 in a vacuum, the air supply pipe 18 is connected to any one of the pipes z1 to z7 of the vacuum pump 70 shown in FIG.

  As shown in FIG. 2, the connector 16a of the heating device 10 is connected to the connector 32a of the signal line 32x wired from the control device 32 for setting various heat treatment steps (heating rate, heating temperature, heating time, heat treatment atmosphere, etc.). In addition, if connected to the gas supply device 50, the exhaust device 60, the vacuum pump 70, and the like, the heat treatment can be automatically performed according to a program input in advance to the control device 32.

  As shown in FIGS. 7 and 8, the supply pipe 18 passes through the back wall 11 a and is connected to the back surface of the heating back wall 14, and the two exhaust pipes 19 communicate with the inside of the external furnace body 11. . Each of the two gas flow paths 49 penetrates the back wall 11a and is inserted into the external furnace body 11, and is piped to form a U-shape in the gap between the inner surface of the external furnace body 11 and the outer surface of the heating side wall 12. The tip is fixed to the back wall 11a and closed by a closing member 49s. Each of the two gas flow paths 49 is provided with a large number of blowing holes 49 a for blowing cooling gas toward the heating side wall 12.

  Further, as shown in FIGS. 7 and 8, an air supply pipe 18, which is a gas supply means for supplying gas to the magazine chamber 13, is connected to the back side of the heating back wall 14 and supplied to the magazine chamber 13. A plurality of exhaust pipes 19 serving as a discharge path for the gas is piped through the back wall 11 a of the external furnace body 11. The heating back wall 14 includes an inner wall 14a, an intermediate wall 14b, and an outer wall 14c arranged in parallel to each other. A first gas diffusion chamber 27 is formed between the outer wall 14c and the intermediate wall 14b, and a second gas diffusion chamber 28 is formed between the intermediate wall 14b and the inner wall 14a.

  On the other hand, a pair of left and right rails 24b is provided on the upper surface of the bottom plate 21 in the magazine chamber 13, and a support member 24a for mounting the magazine 23 is slidably attached to these rails 24b. The support member 24a has a frame shape in which a portion on which the magazine 23 is placed becomes a penetrating region 24c. By operating a finger in an oval gripping hole 24d opened at the tip, It can be slid along the rail 24b. A stopper 21a protrudes from a central portion of the bottom plate 21 in the magazine chamber 13, and a columnar stopper 21b is erected at a portion near the heating side wall 12 near the heating back wall 14.

  When a finger is put on the gripping hole 24d of the support member 24a and pulled out, the abutting portion 24e provided in a drooping manner at the rear edge of the support member 24a contacts the stopper 21a and is locked so that it cannot be pulled out further. When pushed in, the rear edge contacts the stopper 21b and is locked in that position. Therefore, if the support member 24a is pulled out with the door 15 opened, the magazine 23 is placed on the upper surface thereof, and then pushed in until the support member 24a comes into contact with the stopper 21b, the magazine 23 is placed in a predetermined position in the magazine chamber 13. Is housed.

  Next, the structure, function, etc. of the heating back wall 14 constituting the heating apparatus 10 will be described with reference to FIGS. 10 is a perspective view showing the heating back wall, FIG. 11 is a front view of the heating back wall shown in FIG. 10, FIG. 12 is a sectional view taken along the line DD in FIG. 11, and FIG. FIG. 14 is a sectional view taken along line FF in FIG.

  As shown in FIGS. 10 to 14, the heating back wall 14 includes an inner wall 14 a, an intermediate wall 14 b and an outer wall 14 c arranged in parallel with each other, a plate heater 14 h and a heat shield plate 31 attached to the back side of the outer wall 14 c. And. As shown in FIG. 11, a total of 112 gas supply holes 14y having an inner diameter of about 2 mm are provided in the inner wall 14a, with 16 in the vertical direction and 7 in the horizontal direction at intervals of about 10 mm. As shown in FIG. 13, the intermediate wall 14b has a total of 28 through-holes 14x having an inner diameter of about 4 mm, with eight holes in the vertical direction and four in the horizontal direction at intervals of about 20 mm. Furthermore, as shown in FIG. 14, one gas introduction port 14d which is a through hole having an inner diameter of about 15 to 20 mm is opened at the center of the outer wall 14c, and an air supply pipe 18 is connected to the gas introduction port 14d. .

  As shown in FIGS. 12 and 13, the through hole 14x is not formed in the central portion of the intermediate wall 14b facing the gas inlet 14d of the outer wall 14c. This is to prevent the gas that has exited from the gas inlet 14 d from flowing directly into the second gas diffusion chamber 28 without diffusing in the first gas diffusion chamber 27. In the present embodiment, the sum of the opening areas of the plurality of through holes 14x in the intermediate wall 14b and the sum of the opening areas of the plurality of gas supply holes 14y in the inner wall 14a are set to be substantially equal. However, the inner diameter and the number of the through holes 14x, the gas supply holes 14y, and the gas introduction ports 14d are not limited to these.

  In the heating back wall 14, the gas supplied from the outside passes through the gas supply pipe 18, passes through the gas inlet 14 d, is introduced into the first gas diffusion chamber 27, and is a plate heater attached to the rear surface of the outer wall 14 c. Indirect heating in 14h. For this reason, impurities are not mixed into the gas from the plate heater 14h. The gas heated in the first gas diffusion chamber 27 is diffused in the first gas diffusion chamber 27, and then passes through the plurality of through holes 14 x of the intermediate wall 14 b into the second gas diffusion chamber 28. After flowing in and diffusing again in the second gas diffusion chamber 28, the gas is discharged from a plurality of gas supply holes 14y opened in the inner wall 14a. For this reason, the heated gas can be blown out uniformly over a wide range in the magazine chamber 13.

  Further, since the plate heater 14h, which is a heat generating means, is attached to the back surface of the outer wall 14c constituting the first gas diffusion chamber 27, the electrical wiring for supplying power to the plate heater 14h is simple and maintenance is easy. . Further, since the plate heater 14h is also provided around the gas inlet 14d on the back surface of the outer wall 14c, the periphery of the gas inlet 14d where the gas immediately after being introduced into the first gas diffusion chamber 27 exists is concentrated. It is possible to heat and the heating efficiency is also good.

  Further, an intermediate wall 14b having a plurality of through holes 14x is provided between the gas inlet 14d of the outer wall 14c and the plurality of gas supply holes 14y of the inner wall 14a. Accordingly, in the first gas diffusion chamber 27, the gas flowing from the gas inlet 14d toward the gas supply hole 14y of the inner wall 14a is dispersed in a plurality of regions by passing through the plurality of through holes 14x of the intermediate wall 14b. The gas can be heated uniformly. The intermediate wall 14b may be omitted and only one gas diffusion chamber may be provided, or two or more intermediate walls may be provided.

  When heat treatment is performed using the heating device 10, as described above, the door 15 is opened, the holding member 24 a is pulled out, and the magazine 23 containing the article to be heated is placed on the support member 24 a as it is. If the support member 24 a is pushed in, the magazine 23 is accommodated in a predetermined position in the magazine chamber 13. After that, if the door 15 is closed and the plate heaters 12h and 14h are energized, the heating side wall 12 and the heating back wall 14 generate heat, and the heated object accommodated in the magazine 23 in the magazine chamber 13 is heated. be able to. The magazine chamber 13 is disposed in a heat-resistant box-shaped external furnace body 11 and is heated from three directions by the two heating side walls 12 and the heating back wall 14, so that the temperature distribution is excellent in uniformity. ing.

  At this time, if gas is supplied from the outside to the supply pipe 18 piped to the heating back wall 14, the gas flowing from the supply pipe 18 into the first gas diffusion chamber 27 through the gas inlet 14d as described above is After being diffused while being heated inside, the gas passes through the plurality of through holes 14x of the intermediate wall 14b, flows into the second gas diffusion chamber 28, diffuses while being heated again therein, and then has a high temperature of a predetermined temperature. It becomes gas and flows into the magazine chamber 13 from the plurality of gas supply holes 14y of the inner wall 14a.

  The hot gas flowing into the magazine chamber 13 flows from the back side to the front side in the magazine chamber 13 and then passes through the gap between the front surface of the magazine chamber 13 and the door body 15 shown in FIG. 13 to the outside. Then, after flowing through the gap between the external furnace body 11 and the magazine chamber 13 (top plate 20, bottom plate 21 and heating side wall 12) and reaching the back side of the heating back wall 14, the two exhaust pipes 19 And is discharged to the outside of the heating device 10. In this case, exhaust can be forcibly performed by connecting the exhaust device 60 (see FIG. 2) to the exhaust pipe 19.

  In this way, the hot gas uniformly heated by passing through the first gas diffusion chamber 27 and the second gas diffusion chamber 28 in the heating back wall 14 heated by the plate heater 14 h is supplied into the magazine chamber 13. Therefore, the uniformity of the temperature distribution in the magazine chamber 13 can be maintained. Further, by providing the plate heater 14h as a heating means on the back surface of the heating back wall 14, the gas is heated in the entire heating back wall 14 which is the plate heater 14h, so that the gas can be heated uniformly. it can.

  Furthermore, since the heated gas supplied from the heating back wall 14 circulates in the magazine chamber 13 and is discharged from the exhaust pipe 19 provided in the external furnace body 11, the cleanliness stability is also excellent. Thus, the heated object in the magazine 23 is not soiled. In addition, although nitrogen is suitable as a gas supplied to the magazine chamber 13, it is not limited to this.

  In the heating device 10, the exhaust pipe 19, which is an exhaust path, is provided on the back wall 11 a of the external furnace body 11, so that the gas flowing out of the magazine chamber 13 through the gap between the front surface of the magazine chamber 13 and the door body 15 After passing through the gap between the external furnace body 11 and the magazine chamber 13 (the top plate 20, the bottom plate 21 and the heating side wall 12), it flows into the back side of the heating back wall 14 and is then discharged from the exhaust pipe 19. Therefore, the gas supplied from the heating back wall 14 to the magazine chamber 13 flows inside and outside the magazine chamber 13 and then is exhausted from the exhaust pipe 19, so that a uniform temperature distribution can be obtained.

  A wall body (back wall 11a, bottom wall 11b, side wall 11c, top wall 11d) and door body 15 forming the external furnace body 11 of the heating device 10 and a plurality of plate members 11p arranged in parallel with each other with a gap therebetween. Since it is formed by 15p, it exhibits excellent heat insulation and is effective in maintaining a uniform temperature distribution in the magazine chamber 13 disposed in the external furnace body 11.

  When the heat treatment is completed, the power supply to the plate heater 14 h of the heating back wall 14 is stopped, and the inside of the magazine chamber 13 can be cooled by supplying gas to the magazine chamber 13 through the air supply pipe 18. Therefore, the object to be heated in the magazine 23 can be rapidly cooled or the cooling time can be arbitrarily set as required. For this reason, the efficiency of the work process can be achieved by diversifying the cooling process or shortening the cooling time. When the object to be heated falls to a predetermined temperature, the object to be heated can be taken out together with the magazine 23 from the magazine chamber 13 by opening the door 15 and pulling out the support member 24a.

  The heating device 10 includes a support member 24a that can be inserted into and removed from the magazine chamber 13 in a state where the magazine 23 is placed as a member used when the magazine 23 is taken into and out of the magazine chamber 13. For this reason, it is easy to put in and out the magazine chamber 13 containing the heated article into the magazine chamber 13, and the workability is excellent.

  In addition, since the storage area of the magazine 23 in the magazine chamber 13 can be changed by changing the position of the stopper 21b and the interval between the rails 24b, the type and size of the object to be heated or the heat treatment conditions are changed. The accommodation area of the magazine 23 can be changed to cope with it, and versatility is also excellent.

  In the heating device 10, after the power supply to the plate heaters 12 h and 14 h is stopped, the object to be heated can be cooled together with the magazine 23 by supplying a cooling gas from the air supply pipe 18 to the magazine chamber 13. As another cooling means, a gas flow path 49 having a large number of blowing holes 49a is provided. Therefore, if the cooling gas introduced through the gas flow path 49 is blown out from the blowout hole 49a into the external furnace body 11, the article to be heated in the magazine chamber 13 can be cooled more rapidly.

  As other cooling means, a tubular body (not shown) through which a cooling fluid can flow is piped in the external furnace body 11 in the same manner as the gas flow path 49, and the cooling medium supplied from the outside is placed in the tubular body. It can also be made to pass. In this way, since it is possible to cool the object to be heated in the magazine chamber 13 without bringing the cooling gas into contact with the object to be heated, adverse effects due to the cooling gas or the like can be avoided.

  Further, if a vacuum pump 70 for discharging the gas in the external furnace body 11 is connected to the air supply pipe 18, a gas harmful to the object to be heated generated during the heat treatment can be discharged to the outside. In this case, since the inside of the external furnace body 11 can be evacuated and the object to be heated in the magazine chamber 13 can be heat-treated in a vacuum atmosphere, heat treatment that is not adversely affected by gas can be performed.

  As shown in FIGS. 1 and 2, if the heat treatment device 30 is formed using a plurality of heating devices 10, a control device 32, and the like, a plurality of magazines 23 in which articles to be heated are stored are respectively attached to the plurality of heat treatment devices 10. It can accommodate in the magazine chamber 13, and can heat-process to the to-be-heated object in each heating apparatus 10, controlling each heat processing process of each heating apparatus 10 by the control apparatus 32 each independently. For this reason, it is possible to heat-treat the objects to be heated stored in the plurality of magazines 23 as they are. Moreover, even if the heat treatment conditions differ depending on the type of the object to be heated, by using the heat treatment apparatus 30, a plurality of heat treatment steps can be performed in parallel.

  Therefore, the heat treatment apparatus 30 satisfies various heat treatment conditions required in a heat treatment process of a glass substrate, a metal substrate such as a semiconductor lead frame, or a resin substrate, which are components such as a liquid crystal display panel or a plasma display panel. it can.

  The heat treatment apparatus of the present invention can be widely used in heat treatment processes for glass substrates, which are constituent members of liquid crystal display panels, plasma display panels, and the like, metal substrates such as semiconductor lead frames, and resin substrates.

It is a front view which shows the heat processing apparatus which is embodiment of this invention. It is a block diagram which shows the structure of the heat processing apparatus shown in FIG. It is a partially cutaway front view of the heating apparatus which comprises the heat processing apparatus shown in FIG. It is a top view of the heating apparatus shown in FIG. It is a side view of the heating apparatus shown in FIG. It is a rear view of the heating apparatus shown in FIG. It is the sectional view on the AA line in FIG. FIG. 4 is a sectional view taken along line BB in FIG. 3. It is CC sectional view taken on the line in FIG. It is a perspective view of the heating back wall which comprises the heating apparatus shown in FIG. It is a front view of the back wall for a heating shown in FIG. It is the DD sectional view taken on the line in FIG. It is the EE sectional view taken on the line in FIG. It is the FF sectional view taken on the line in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Heating device 11 External furnace body 11a Back wall 11b Bottom wall 11c Side wall 11d Top wall 11p, 15p Plate material 12 Heating side wall 12h, 14h Plate heater 13 Magazine chamber 14 Heating back wall 14a Inner wall 14b Intermediate wall 14c Outer wall 14d Gas inlet 14x, 15c Through hole 14y Gas supply hole 15 Door 15a Support shaft 15b Open / close lever 15d Protection cover 16 Control unit 16a, 32a Connector 17 Support plate 18 Air supply pipe 19 Exhaust pipe 20 Top plate 21 Bottom plate 21a, 21b Stopper 22 Spacer 23 Magazine 24a support member 24b rail 24c penetrating region 24d gripping hole 24e contact portion 25, 31 heat shield plate 27 first gas diffusion chamber 28 second gas diffusion chamber 30 heat treatment device 30a rack 32 control device 32x, 32y signal line 33 display panel 33a , 3 3b Pilot lamp 49 Gas flow path 49a Blowout hole 49s Closing member 50 Gas supply device 60 Exhaust device 70 Vacuum pump x1 to x7, y1 to y7, z1 to z7 Piping

Claims (3)

  A plurality of heating devices having a magazine chamber for accommodating and heat-treating a magazine in which articles to be heated are stored in and out, and a control device for independently controlling the heat treatment processes of the plurality of heating devices. A heat treatment apparatus characterized by   The heating apparatus includes a plurality of heating side walls disposed opposite to each other in a box-shaped external furnace formed of a wall body having heat insulation properties, and the heating side walls for accommodating a magazine in which an object to be heated is stored. A magazine chamber provided between the heating chamber, a heating back wall disposed on the back side of the magazine chamber, a heating side wall and heating means provided on the heating back wall, and a front side of the magazine chamber The heat treatment apparatus according to claim 1, further comprising: a door body that can be opened and closed at a position away from the heating side wall.   The heat treatment apparatus according to claim 1 or 2, wherein the control device controls at least a heating rate, a heating temperature, a heating time, and a heat treatment atmosphere.

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