JP2000274952A - Heat treatment system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hot blast heating type heat treatment system which can improve the temperature distribution property within a heating chamber, and shorten the processing time, and prevent the breakdown of plate-shaped substance to be processed, and reduce cost, and improve clearness, without complicating the operation or the structure. SOLUTION: A heat treatment device 2 generates hot blast to heat plural sheets of plate-shaped substance 3 supported by a rack 15 within a heating chamber 13, and reciprocates the rack 15 between the heating chamber 13 and a cooling chamber 14, and has an opening/closing mechanism for the connection port 12a between the heating chamber 13 and the cooling chamber 14. It is provided with a dustproof filter which passes the hot blast. The plate-shaped substance 3 to be processed supported, in the cooling chamber, by the rack 15 is capable of heat radiation, and besides, it is equipped with a means for compulsively cooling the plate-shaped substance to be processed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hot air heating type heat treatment system for heat treating a glass substrate for a flat panel display or a plate-like workpiece such as an electronic component using the substrate in a clean environment. .

[0002]

2. Description of the Related Art In the case of processing a plate-like workpiece in lot units (for example, 20 glass substrates for a liquid crystal display device) in an atmosphere gas such as nitrogen (N ₂ ), batch processing is required. Conventionally, those plate-like workpieces are
Heat treatment was performed while being supported by a rack fixed in a hot air heating type heat treatment apparatus. Alternatively, a plate-like workpiece to be processed in lots is stored in a cassette, and the cassette is put in and taken out of a hot-air heating type heat treatment apparatus, and heat-treated while being supported by the cassette.

[0003]

When a rack as described above is used, it takes a long time to remove a plurality of plate-like workpieces one by one from the rack by a transfer device having a robot or the like. Therefore, the temperature of the heating chamber has been reduced in order to cope with insufficient heat resistance of the transfer device. Then, it is necessary to raise the temperature of the heating chamber when subsequently processing another lot of plate-like workpieces. However, such a rise and fall of the temperature deteriorates the temperature distribution characteristics in the heating chamber, causes loss of heat storage energy in the furnace, and further increases the processing time. In addition, additional equipment such as a fin cooler for rapidly cooling the heating chamber is required so that the time required for cooling does not become long. Furthermore, HEPA (High Ef) which is usually used as a filter for hot air is used.
When a thermal expansion due to a rapid temperature change occurs in a fission particle filter,
Since dust is generated from the glass fibers constituting the filter medium, the degree of cleanness is reduced.

[0004] When the above-mentioned cassette is used, a transfer device for taking the plate-like workpiece into and out of the cassette and a transfer device for taking the cassette in and out of the heat treatment device are required, and thus there is a problem of an increase in cost and an increase in installation area. When configuring a heat treatment system including a plurality of heat treatment devices,
Since it is necessary to operate both transfer apparatuses while managing the processing status of each heat treatment apparatus, the operation becomes complicated.

[0005] An object of the present invention is to provide a heat treatment system that can solve the above problems.

[0006]

A heat treatment system according to the present invention comprises a heating chamber, a cooling chamber communicating with the heating chamber, a rack supporting a plurality of plate-like workpieces, and a rack supported in the heating chamber. Means for generating hot air for heating the processed plate-like workpiece, a filter for removing dust passing the hot air, a mechanism for reciprocating the rack between the heating chamber and the cooling chamber, and a mechanism for cooling the heating chamber and the cooling chamber. A hot-air heating type heat treatment apparatus having an opening / closing mechanism for a connection port with a chamber, wherein the plate-like workpiece supported by a rack in the cooling chamber is allowed to cool, and the plate-like workpiece is forcibly forced Air cooling means is provided. According to the configuration of the present invention, after the rack is moved from the heating chamber to the cooling chamber, the plate-like workpiece can be taken out of the rack and cooled. Therefore, even when the plate-like workpiece is taken out of the rack, the heating chamber is always maintained at the processing temperature, or the temperature drop from the processing temperature is reduced to shorten the time required for the temperature to rise to the processing temperature. Can be eliminated. Further, the rack need only be reciprocated between the heating chamber and the cooling chamber, and high accuracy is not required for positioning and speed of the reciprocation. Therefore, the mechanism for reciprocating the rack does not require a complicated configuration. Further, since there is no need to cool the heating chamber, a quenching fin cooler and a cooling water utility are not required. Furthermore, since the plate-like workpiece can be taken in and out of the rack at around room temperature, the heat resistance of the transfer device becomes unnecessary.

In the cooling chamber, the plate-like workpiece supported by the rack is allowed to cool, and means for forcibly cooling the plate-like workpiece are provided. Until then, damage due to rapid cooling can be prevented by cooling, and then cooling time can be reduced by forced air cooling.

[0008] The heat treatment system of the present invention includes a plurality of the hot-air heating type heat treatment apparatuses, and includes a single transfer device. The transfer device supports the plate-like workpiece on a rack in the cooling chamber, and also controls the inside of the cooling chamber. It is preferable to have a mechanism for taking out the plate-like workpiece supported by the rack. According to the heat treatment system of the present invention, a complicated operation is not required even when a plurality of heat treatment apparatuses are operated at the same time.

It is preferable that the heating chamber and the cooling chamber are arranged so as to be vertically arranged in parallel. Thereby, the installation area can be reduced as much as possible.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A hot air heating type heat treatment system 1 according to a first embodiment shown in FIGS. 1 to 3 comprises three hot air heating type heat treatment apparatuses 2 arranged in a horizontal direction and a single unit. A transfer device 4 for transferring a plate-like workpiece 3 such as a glass substrate for a liquid crystal display device between another process;
And a cover 6 for covering the heat treatment device 2, the transfer device 4, and the delivery station 5.

Each heat treatment apparatus 2 has a heating chamber 13 defined by an inner space of a furnace body 12 supported by a support base 11.
And a cooling chamber 14 communicating with the heating chamber 13 through a connection port 12 a on a side surface of the furnace body 12, a rack 15 for supporting the plate-shaped workpiece 3, and a rack 15 supported in the heating chamber 13. A hot air heating mechanism 16 for generating hot air for heating the plate-like workpiece 3 to be processed, a dust removal filter 17 for passing the hot air, and a rack 15 for the heating chamber 13 and the cooling chamber 1
And a moving mechanism 18 that linearly reciprocates between the moving mechanism 4 and the moving section 4.

The cooling chamber 14 is constituted by a space on one side of the furnace body 12, whereby the heating chamber 13 and the cooling chamber 14 are arranged in parallel in the lateral direction. In the cooling chamber 14, the plate-like workpiece 3 is allowed to cool. In addition, the plate-like workpiece 3
A cooling fan 14 is provided in the cooling chamber 14 as means for forcibly cooling the air.

The rack 15 supports a plurality of plate-like workpieces 3 at intervals in the vertical direction so that the thickness direction can be taken out one by one. One that supports through a protruding claw can be used.

The cassette 20 carried into the transfer station 5 from another step supports a plurality of plate-like workpieces 3 at a distance vertically so that they can be taken out one by one in the horizontal direction. Can be used.

As shown in FIG. 3, the hot air heating mechanism 16
Generates and circulates hot air for heating the plate-like workpiece 3 in the heating chamber 13. That is, the inner wall 21 is provided inside the heating chamber 13. A hot air passage is formed between both side surfaces and the upper surface of the inner wall 21 and the inner surface of the furnace body 12. The rack 15 can be arranged inside the inner wall 21, and a heater 22 and a hot air circulation fan 23 are attached to the furnace body 12 above the inner wall 21. A HEPA filter is mounted on one side surface of the inner wall 21 as the filter 17, and a plurality of ventilation holes 25 are formed on the other side surface. As shown by an arrow in FIG. 3, the atmosphere such as nitrogen in the heating chamber 13 heated by the heater 22 is circulated by a fan 23, so that the plate-shaped cover supported by the rack 15 via the filter 17. The hot air is blown from the lateral direction to the processing object 3. The hot air flows along the front and back surfaces of each plate-like workpiece 3 and then reaches the heater 22 through the ventilation port 25 and is heated again. When thermal expansion occurs due to a rapid temperature change, the filter 17
A low-cost material that generates dust from glass fibers constituting a filter medium is used.

The moving mechanism 18 is linearly reciprocated in a horizontal direction by a support table 41 disposed below the heating chamber 13 and the cooling chamber 14 and a driving mechanism 43 supported by the support table 41. And a slider 42. The drive mechanism 43 is constituted by, for example, a pneumatic cylinder.
The moving direction of the slider 42 is determined by the heating chamber 13 and the cooling chamber 1.
4 in the parallel direction. The slider 42 includes a first portion 42a located above the bottom wall of the furnace body 12, a second portion 42b located below, and first and second portions 42.
a and a third portion 42c connecting the first and second portions 42b. The rack 15 is supported by the first portion 42a. The rack 15 is moved to the first position by the reciprocating movement of the slider 42.
Together with the portion 42a, it can be positioned at a position arranged in the cooling chamber 14 as shown by a solid line in FIG. 1 and a position arranged in the heating chamber 13 as shown by a two-dot chain line.

A heat retaining shutter 51 is provided as a mechanism for opening and closing the connection port 12a. The heat retaining shutter 51 can be driven by a driving device (not shown) between a position where the connection port 12a is closed as shown by a solid line in FIG. 1 and a position where the connection port 12a is opened as shown by a two-dot chain line. It has been. When the rack 15 is placed in the heating chamber 13, the heat retaining shutter 51 closes the connection port 12 a together with the first portion 42 a of the slider 42.

The transfer device 4 supports the plate-like workpiece 3 on the rack 15 in the cooling chamber 14 and the cassette 20 in the transfer station 5, and also controls the rack 15 in the cooling chamber 14.
Robot 61 as a mechanism for taking out the plate-like workpiece 3 supported by the cassette 20 of the transfer station 5
An elevating mechanism 62 for elevating and lowering the robot 61 between a solid line position and a two-dot chain line position in FIG. 1, and a traveling for driving the robot 61 and the elevating mechanism 62 in the lateral direction along the parallel direction of the heat treatment apparatus 2. And a mechanism 63. The robot 61 includes a support fork 61 a for the plate-like workpiece 3,
The fork 61a has a telescopic arm 61b, and the plate-like workpiece 3 is put in and out of the rack 15 and the cassette 20. The elevating mechanism 62 moves the robot 61 up and down.
The traveling mechanism 63 includes the robot 61 and the elevating mechanism 62.
Is positioned at a position facing the rack 15 and the cassette 20.

The cover 6 is provided with an opening / closing door 6a having an opening facing each delivery station 5. The plate-like workpiece 3 is covered by the cover 6 while being supported by the cassette 20.
It is carried into the delivery station 5 from outside, and is carried out of the cover 6 from the delivery station 5 while being supported by the cassette 20. The cover 6 is provided with an internal air cleaning device 71.

When heat treatment is performed by the above-described configuration, the connection port 12a of each furnace body 12 is closed by a heat retaining shutter 51, the inside of the heating chamber 13 is maintained at a processing temperature (for example, 230 ° C.) by a hot air heating mechanism 16, and 15 for cooling room 1
4 Next, the plate-like workpiece 3 is taken out of the cassette 20 of the delivery station 5 by the transport device 4 and then supported on the rack 15. Next, the connection port 12a
Is opened and the rack 15 is moved into the heating chamber 13 by the moving mechanism 18, the connection port 12a is closed again. Thereafter, the plate-like workpiece 3 is heated by the hot-air heating mechanism 16. When the heat treatment is completed, the connection port 12a is opened, and the rack 15 is moved into the cooling chamber 14 by the moving mechanism 18.
Next, the connection port 12a is closed again. And the cooling chamber 14
, The plate-like workpiece 3 is allowed to cool to, for example, 200 ° C., and then is forcedly cooled by the blower fan unit 31. The cooling air for forced air cooling is blown from the lateral direction along the parallel direction of the heat treatment devices 2 onto the plate-like workpiece 3 supported by the rack 15 in the cooling chamber 14. Thereafter, the plate-like workpiece 3 is transferred to the rack 1 by the transport device 4.
5 and then supported by the cassette 20 of the transfer station 5.

According to the above configuration, the rack 15 is connected to the heating chamber 1.
After being moved from 3 to the cooling chamber 14, the plate-like workpiece 3 can be taken out of the rack 15 and cooled. Therefore, even when removing the plate-like workpiece 3 from the rack 15,
The heating chamber 13 can always be maintained at the processing temperature, or the temperature drop from the processing temperature can be reduced to shorten the time required to raise the temperature to the processing temperature. As a result, the temperature distribution characteristics in the heating chamber 13 can be improved, the processing time can be shortened, the cost can be reduced, and a sharp change in temperature can be eliminated to improve the cleanliness when the HEPA filter 17 is used. In addition, since it is not necessary to cool the heating chamber 13, a quenching fin cooler or a cooling water utility is not required, and the plate-like workpiece 3 can be taken in and out of the rack 15 near room temperature. Is unnecessary, and the cost can be reduced. The rack 15 is moved between the heating chamber 13 and the cooling chamber 14 by a moving mechanism 18.
, It is only necessary to reciprocate, and high accuracy is not required for the positioning and speed of the reciprocation. Therefore, the moving mechanism 18 does not require a complicated configuration, and does not require a complicated operation even when a plurality of heat treatment apparatuses 2 are operated at the same time. Further, the plate-like workpiece 3 supported by the rack 15 in the cooling chamber 14 is allowed to cool to about 200 ° C. to prevent breakage, and thereafter, the cooling time can be reduced by forcibly air cooling.

FIG. 4 shows the upper limit temperature, the lower limit temperature, the control temperature in the heating chamber 13, and the time change of the number of particles having a particle diameter of 0.3 μm or more in the heating chamber 13 of the plate-like workpiece 3 heat-treated by the above-described configuration. Is shown. FIG. 5 shows an upper limit temperature, a lower limit temperature, a control temperature in the heating chamber, and a particle diameter of 0.3 μm in the heating chamber of the plate-like workpiece heat-treated by the conventional heat treatment system having no cooling chamber and a rack fixed in the heating chamber. The time change of the number of particles described above is shown. Thus, it can be confirmed that the processing time can be reduced and the cleanliness can be improved.

(Second Embodiment) A hot air heating type heat treatment system 101 according to a second embodiment of the present invention shown in FIGS.
Three hot air heating type heat treatment apparatuses 102 arranged in parallel in the horizontal direction
, A single transfer device 104 and the heat treatment device 102
And a cover 106 that covers the transport device 104.

Each heat treatment apparatus 102 includes a heating chamber 113 formed by an inner space of a furnace body 112 supported by a support table 111, and a connection port 112a on the bottom surface of the furnace body 112.
, A cooling chamber 114 communicating with the heating chamber 113, a rack 115 supporting the plate-like processing object 103 such as a glass substrate for a liquid crystal display device, and a plate-like coating supported by the rack 115 in the heating chamber 113. A hot air heating mechanism 116 for generating hot air for heating the processing object 103, a dust removal filter 117 for passing the hot air, and the rack 11
A moving mechanism 118 for linearly reciprocating the rack 5 between the heating chamber 113 and the cooling chamber 114; and a rotating mechanism 119 for rotating the rack 115 about a vertical axis.

The cooling chamber 114 is constituted by a space below the furnace body 112, whereby the heating chamber 113 and the cooling chamber 1 are formed.
14 are arranged so as to be vertically arranged in parallel. In the cooling chamber 114, the plate-like workpiece 103 can be cooled. Further, as means for forcibly cooling the plate-shaped workpiece 103, a blower fan unit 131a and an exhaust fan unit 131b are provided so as to sandwich the cooling chamber 114 therebetween.

The rack 115 supports a plurality of plate-like workpieces 103 in a horizontal direction so as to be able to be taken out one by one so that the thickness direction is the vertical direction and the rack 115 is vertically spaced.
For example, it is possible to use one that is supported via a claw protruding from a support.

The rotation mechanism 119 has a turntable 119a for supporting the rack 115, a support stand 119b for the turntable 119a, and an actuator 119c for driving the turntable 119a to rotate about a vertical axis. The rotation of the turntable 119a may be continuous rotation or intermittent rotation. The support base 119b is sized to close the connection port 112a.

The hot air heating mechanism 116 includes a heating chamber 113.
Inside, hot air for heating the plate-like workpiece 103 is generated and circulated. That is, as shown in FIG.
3 is provided with an inner wall 121. A hot air passage is formed between the front and rear surfaces and the upper surface of the inner wall 121 and the inner surface of the furnace body 112. The rack 115 can be arranged inside the inner wall 121, and the furnace body 11 is provided behind the inner wall 121.
2, a heater 122 and a hot air circulation fan 123 are attached. The filter 117 is provided on the rear surface of the inner wall 121.
A HEPA filter is attached, and a plurality of ventilation holes 125 are formed on the front surface. As shown by an arrow in FIG. 6, the atmosphere such as nitrogen in the heating chamber 113 heated by the heater 122 is circulated by the fan 123, so that the rack 115 passes through the filter 117.
The hot air is blown from the lateral direction onto the plate-like workpiece 103 supported by the substrate. The hot air is applied to each plate-like workpiece 10.
3, and then heated again by the heater 122 through the ventilation port 125. When thermal expansion occurs due to a rapid temperature change, the filter 117
A low-cost material that generates dust from glass fibers constituting a filter medium is used.

As shown in FIG. 6, the moving mechanism 118
Is a support table 141 disposed in the cooling chamber 114,
A slider 142 linearly reciprocated vertically in a vertical direction by a drive mechanism 143 supported by the support table 141.
And The drive mechanism 143 is constituted by, for example, a pneumatic cylinder. The moving direction of the slider 142 matches the parallel direction of the heating chamber 113 and the cooling chamber 114.
The rack 115 is supported by the slider 142 via a rotation mechanism 119. Due to the reciprocating movement of the slider 142, the rack 115 is moved together with the rotating mechanism 119 into a position arranged in the cooling chamber 114 as shown by a solid line in FIG. 6 and a position arranged in the heating chamber 113 as shown by a two-dot chain line. Is positioned.

A heat retaining shutter 151 is provided as a mechanism for opening and closing the connection port 112a. The heat retaining shutter 151 can be driven by a driving device (not shown) between a position where the connection port 112a is closed as shown by a solid line in FIG. 6 and a position where the connection port 112a is opened as shown by a two-dot chain line. It has been.

The transfer device 104 is provided with a plate-like workpiece 10.
3 is supported on a rack 115 in the cooling chamber 114,
As a mechanism for taking out the plate-like workpiece 103 supported by the rack 115 in the cooling chamber 114, a robot 161 is used.
And an elevating mechanism 162 for elevating and lowering the robot 161 between a solid line position and a two-dot chain line position in FIG. 6, and a traveling for driving the robot 161 and the elevating mechanism 162 in the lateral direction along the parallel direction of the heat treatment apparatus 102. And a mechanism 163. The robot 161 has a support fork 161a for the plate-like workpiece 103 and a telescopic arm 161b of the fork 161a.
Puts 03 in and out. The lifting mechanism 162 moves the robot 161 up and down. The traveling mechanism 163 positions the robot 161 and the elevating mechanism 162 at a position facing the rack 115.

As shown in FIG. 6, a cassette 120 to be conveyed from another process is arranged on the side of the cover 106.
A plurality of plate-like workpieces 103 are set by the cassette 120.
Are supported at intervals vertically so that they can be taken out one by one in the horizontal direction. The transport device 104 connects the robot 161 and the elevating mechanism 162 by the traveling mechanism 163 to the cassette 120.
, The plate-like workpiece 103 is supported by the cassette 120, and the cassette 12
The plate-like workpiece 103 supported by the reference numeral 0 can be taken out.

The cassette 106 is attached to the cover 106.
An openable and closable opening is provided opposite to. An internal air purifier 171 is attached to the cover 106.

When heat treatment is performed by the above-described configuration, the connection port 112a of each furnace body 112 is closed by a heat retaining shutter 151, the inside of the heating chamber 113 is maintained at a processing temperature (for example, 230 ° C.) by a hot air heating mechanism 116, and 115
Is disposed in the cooling chamber 114. Next, the plate-like workpiece 10
3 is taken out of the cassette 120 by the transport device 104 and then supported on the rack 115. Next, connection port 11
2a is opened, and the rack 115 is moved into the heating chamber 113 by the moving mechanism 118. Then, the connection port 112a is closed by the support stand 119b of the rotation mechanism 119. Thereafter, the plate-like workpiece 103 is heated by the hot-air heating mechanism 116. During this heating, as shown in FIG.
Is rotated around a vertical axis by a rotation mechanism 119.
When the heat treatment is completed, the rotation of the rack 115 is stopped,
The rack 115 is moved into the cooling chamber 114 by the moving mechanism 118, and the connection port 112 a is again moved to the heat insulating shutter 151.
To close. In the cooling chamber 114, the plate-like workpiece 103 is allowed to cool to, for example, 200 ° C., and then forcibly air-cooled by a blower fan unit 131a and an exhaust fan unit 131b. The cooling air for forced air cooling is blown from the lateral direction along the parallel direction of the heat treatment apparatuses 102 onto the plate-like workpiece 103 supported by the rack 115 in the cooling chamber 114. Thereafter, the plate-like workpiece 1
03 is taken out of the rack 115 by the transport device 104 and then supported by the cassette 120.

According to the above configuration, the same functions and effects as those of the first embodiment can be obtained. Further, the heating chamber 113
And the cooling chamber 114 are vertically arranged in parallel.
The area required for installation of 114 is approximately １ ／ of the case where both chambers are arranged side by side, and the installation area of system 101 can be made as small as possible. Also, the rack 11 in the heating chamber 113
5 is rotated about the vertical axis to rotate the plate-like workpiece 103 about the vertical axis, and to prevent the temperature difference between the upstream and downstream sides of the hot air from occurring in the plate-like workpiece 103. Thus, the heating temperature of the plate-like workpiece 103 can be averaged.

The present invention is not limited to the above embodiment. For example, the number of hot air heating type heat treatment apparatuses is not limited. The cooling chamber may not be covered by the cover.

[0037]

According to the present invention, the temperature distribution characteristics in the heating chamber can be improved, the processing time can be shortened, the plate-like workpiece can be prevented from being damaged, and the cost can be reduced without complicating the operation and structure. It is possible to provide a hot-air heating type heat treatment system capable of reducing cleanliness, improving the cleanliness when the HEPA filter is employed, minimizing the installation area, and averaging the heating temperature of the plate-like workpiece.

[Brief description of the drawings]

FIG. 1 is a side sectional view of a heat treatment system according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional plan view of the heat treatment system according to the first embodiment of the present invention.

FIG. 3 is a front sectional view of the heat treatment apparatus according to the first embodiment of the present invention.

FIG. 4 is a diagram showing a change over time of the upper limit temperature, the lower limit temperature, the control temperature of the heating chamber, and the number of particles in the heating chamber of the plate-like workpiece by the heat treatment system of the first embodiment of the present invention.

FIG. 5 is a diagram showing a change over time of the upper limit temperature, the lower limit temperature, the control temperature of the heating chamber, and the number of particles in the heating chamber of the plate-like workpiece by the conventional heat treatment system

FIG. 6 is a side sectional view of a heat treatment system according to a second embodiment of the present invention.

FIG. 7 is a plan sectional view of a heat treatment system according to a second embodiment of the present invention.

FIG. 8 is a front sectional view of a heat treatment apparatus according to a second embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1, 101 Heat treatment system 2, 102 Heat treatment device 3, 103 Plate-shaped workpiece 4, 104 Transporter 12a, 112a Connection port 13, 113 Heating chamber 14, 114 Cooling chamber 15, 115 Rack 16, 116 Hot air heating mechanism 17, 117 Filter 18, 118 Moving mechanism 31, 131a Blower fan unit 51, 151 Heat retaining shutter 119 Rotating mechanism 131b Exhaust fan unit

Claims (3)

[Claims] A heating chamber; a cooling chamber communicating with the heating chamber;
A rack supporting a plurality of plate-like workpieces, a unit for generating hot air for heating the plate-like workpiece supported by the rack in the heating chamber, a dust removal filter for passing the hot air, and the rack A hot-air heating type heat treatment apparatus having a mechanism for reciprocating the heating chamber and the cooling chamber, and a mechanism for opening and closing a connection port between the heating chamber and the cooling chamber, and a plate supported by a rack in the cooling chamber. A heat treatment system in which a plate-like workpiece is allowed to cool, and further includes means for forcibly cooling the plate-like workpiece. 2. A plurality of the hot air heating type heat treatment apparatuses, a single transfer apparatus, and the transfer apparatus supports the plate-like workpiece on a rack in a cooling chamber and is supported by the rack in the cooling chamber. The heat treatment system according to claim 1, further comprising a mechanism for removing the plate-like workpiece. 3. The heat treatment system according to claim 1, wherein the heating chamber and the cooling chamber are arranged so as to be vertically arranged in parallel.