JP2008288598A5 - - Google Patents

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Publication number
JP2008288598A5
JP2008288598A5 JP2008132074A JP2008132074A JP2008288598A5 JP 2008288598 A5 JP2008288598 A5 JP 2008288598A5 JP 2008132074 A JP2008132074 A JP 2008132074A JP 2008132074 A JP2008132074 A JP 2008132074A JP 2008288598 A5 JP2008288598 A5 JP 2008288598A5
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JP
Japan
Prior art keywords
lamps
amount
substrate
temperature
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008132074A
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English (en)
Japanese (ja)
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JP2008288598A (ja
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Publication date
Priority claimed from US11/751,027 external-priority patent/US20080090309A1/en
Application filed filed Critical
Publication of JP2008288598A publication Critical patent/JP2008288598A/ja
Publication of JP2008288598A5 publication Critical patent/JP2008288598A5/ja
Pending legal-status Critical Current

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JP2008132074A 2007-05-20 2008-05-20 制御されたアニーリング方法 Pending JP2008288598A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/751,027 US20080090309A1 (en) 2003-10-27 2007-05-20 Controlled annealing method

Publications (2)

Publication Number Publication Date
JP2008288598A JP2008288598A (ja) 2008-11-27
JP2008288598A5 true JP2008288598A5 (enExample) 2011-07-07

Family

ID=39493369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008132074A Pending JP2008288598A (ja) 2007-05-20 2008-05-20 制御されたアニーリング方法

Country Status (6)

Country Link
US (1) US20080090309A1 (enExample)
EP (1) EP1995766A3 (enExample)
JP (1) JP2008288598A (enExample)
KR (1) KR100976649B1 (enExample)
CN (1) CN101431005B (enExample)
TW (1) TWI455208B (enExample)

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