JP2017502514A5 - - Google Patents

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Publication number
JP2017502514A5
JP2017502514A5 JP2016541378A JP2016541378A JP2017502514A5 JP 2017502514 A5 JP2017502514 A5 JP 2017502514A5 JP 2016541378 A JP2016541378 A JP 2016541378A JP 2016541378 A JP2016541378 A JP 2016541378A JP 2017502514 A5 JP2017502514 A5 JP 2017502514A5
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JP
Japan
Prior art keywords
electrostatic chuck
lamps
dielectric disk
metal plate
chuck according
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JP2016541378A
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English (en)
Japanese (ja)
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JP6530755B2 (ja
JP2017502514A (ja
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Priority claimed from US14/560,744 external-priority patent/US9853579B2/en
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Publication of JP2017502514A5 publication Critical patent/JP2017502514A5/ja
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Publication of JP6530755B2 publication Critical patent/JP6530755B2/ja
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JP2016541378A 2013-12-18 2014-12-08 回転可能な被加熱静電チャック Active JP6530755B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361917921P 2013-12-18 2013-12-18
US61/917,921 2013-12-18
US14/560,744 2014-12-04
US14/560,744 US9853579B2 (en) 2013-12-18 2014-12-04 Rotatable heated electrostatic chuck
PCT/US2014/069040 WO2015094750A1 (en) 2013-12-18 2014-12-08 Rotatable heated electrostatic chuck

Publications (3)

Publication Number Publication Date
JP2017502514A JP2017502514A (ja) 2017-01-19
JP2017502514A5 true JP2017502514A5 (enExample) 2018-01-25
JP6530755B2 JP6530755B2 (ja) 2019-06-12

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ID=53369382

Family Applications (1)

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JP2016541378A Active JP6530755B2 (ja) 2013-12-18 2014-12-08 回転可能な被加熱静電チャック

Country Status (8)

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US (1) US9853579B2 (enExample)
EP (1) EP3084819B1 (enExample)
JP (1) JP6530755B2 (enExample)
KR (1) KR102243410B1 (enExample)
CN (2) CN109585252B (enExample)
SG (1) SG11201604062WA (enExample)
TW (1) TWI649833B (enExample)
WO (1) WO2015094750A1 (enExample)

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