JP2008270491A5 - - Google Patents

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Publication number
JP2008270491A5
JP2008270491A5 JP2007110833A JP2007110833A JP2008270491A5 JP 2008270491 A5 JP2008270491 A5 JP 2008270491A5 JP 2007110833 A JP2007110833 A JP 2007110833A JP 2007110833 A JP2007110833 A JP 2007110833A JP 2008270491 A5 JP2008270491 A5 JP 2008270491A5
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JP
Japan
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length
holding
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holding portion
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Application number
JP2007110833A
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English (en)
Japanese (ja)
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JP5013941B2 (ja
JP2008270491A (ja
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Application filed filed Critical
Priority claimed from JP2007110833A external-priority patent/JP5013941B2/ja
Priority to JP2007110833A priority Critical patent/JP5013941B2/ja
Priority to US12/060,395 priority patent/US7952686B2/en
Priority to EP08153901.7A priority patent/EP1983371B1/en
Priority to KR1020080032517A priority patent/KR101013943B1/ko
Priority to TW097113959A priority patent/TWI405045B/zh
Publication of JP2008270491A publication Critical patent/JP2008270491A/ja
Publication of JP2008270491A5 publication Critical patent/JP2008270491A5/ja
Publication of JP5013941B2 publication Critical patent/JP5013941B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007110833A 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法 Expired - Fee Related JP5013941B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007110833A JP5013941B2 (ja) 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法
US12/060,395 US7952686B2 (en) 2007-04-19 2008-04-01 Stage apparatus, exposure apparatus, and device manufacturing method
EP08153901.7A EP1983371B1 (en) 2007-04-19 2008-04-01 Stage apparatus, exposure apparatus, and device manufacturing method
KR1020080032517A KR101013943B1 (ko) 2007-04-19 2008-04-08 스테이지 장치, 노광장치 및 디바이스 제조방법
TW097113959A TWI405045B (zh) 2007-04-19 2008-04-17 載台設備，曝光設備及裝置製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007110833A JP5013941B2 (ja) 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2008270491A JP2008270491A (ja) 2008-11-06
JP2008270491A5 true JP2008270491A5 (https=) 2012-01-05
JP5013941B2 JP5013941B2 (ja) 2012-08-29

Family

ID=39591965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007110833A Expired - Fee Related JP5013941B2 (ja) 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法

Country Status (5)

Country Link
US (1) US7952686B2 (https=)
EP (1) EP1983371B1 (https=)
JP (1) JP5013941B2 (https=)
KR (1) KR101013943B1 (https=)
TW (1) TWI405045B (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5406510B2 (ja) 2008-11-18 2014-02-05 キヤノン株式会社 走査露光装置およびデバイス製造方法
NL2006190A (en) 2010-03-11 2011-09-13 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
JP2014134771A (ja) * 2012-12-12 2014-07-24 Dainippon Printing Co Ltd 光学フィルム、画像表示装置、露光用部材、露光マスクの保持部材
JP6251559B2 (ja) * 2013-02-28 2017-12-20 株式会社ニューフレアテクノロジー 試料支持装置
JP6681982B2 (ja) * 2015-11-23 2020-04-15 エーエスエムエル ネザーランズ ビー．ブイ． 位置決めデバイス、リソグラフィ装置、及びデバイス製造方法
CN113811818B (zh) * 2019-05-08 2024-08-16 Asml控股股份有限公司 带有形状记忆合金和磁耦合机构的掩模版笼式致动器
KR20250008062A (ko) * 2022-05-12 2025-01-14 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치용 가동 스테이지
WO2025242380A1 (en) * 2024-05-20 2025-11-27 Asml Netherlands B.V. Split chuck

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3745167B2 (ja) * 1998-07-29 2006-02-15 キヤノン株式会社 ステージ装置、露光装置およびデバイス製造方法ならびにステージ駆動方法
JP2001201846A (ja) * 2000-01-21 2001-07-27 Nikon Corp 枠部材、マスクと露光装置
JP2003324053A (ja) * 2002-04-30 2003-11-14 Nikon Corp ステージ装置および露光装置
JP4447872B2 (ja) * 2003-09-17 2010-04-07 キヤノン株式会社 ステージ装置、該ステージ装置を用いた露光装置および該露光装置を用いたデバイス製造方法
JPWO2005074015A1 (ja) * 2004-01-29 2007-09-13 株式会社ニコン 板部材の支持方法、板部材支持装置、ステージ装置、露光装置、及びデバイスの製造方法
JP4411100B2 (ja) 2004-02-18 2010-02-10 キヤノン株式会社 露光装置
JP4307288B2 (ja) * 2004-02-25 2009-08-05 キヤノン株式会社 位置決め装置
JP4298547B2 (ja) 2004-03-01 2009-07-22 キヤノン株式会社 位置決め装置およびそれを用いた露光装置
JP4411158B2 (ja) * 2004-07-29 2010-02-10 キヤノン株式会社 露光装置
JP2006261156A (ja) 2005-03-15 2006-09-28 Canon Inc 原版保持装置およびそれを用いた露光装置

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