JP2008266699A5 - - Google Patents

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Publication number
JP2008266699A5
JP2008266699A5 JP2007108884A JP2007108884A JP2008266699A5 JP 2008266699 A5 JP2008266699 A5 JP 2008266699A5 JP 2007108884 A JP2007108884 A JP 2007108884A JP 2007108884 A JP2007108884 A JP 2007108884A JP 2008266699 A5 JP2008266699 A5 JP 2008266699A5
Authority
JP
Japan
Prior art keywords
target holder
vacuum
mounting table
facing
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007108884A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008266699A (ja
JP5194534B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007108884A priority Critical patent/JP5194534B2/ja
Priority claimed from JP2007108884A external-priority patent/JP5194534B2/ja
Publication of JP2008266699A publication Critical patent/JP2008266699A/ja
Publication of JP2008266699A5 publication Critical patent/JP2008266699A5/ja
Application granted granted Critical
Publication of JP5194534B2 publication Critical patent/JP5194534B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007108884A 2007-04-18 2007-04-18 真空処理装置 Expired - Fee Related JP5194534B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007108884A JP5194534B2 (ja) 2007-04-18 2007-04-18 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007108884A JP5194534B2 (ja) 2007-04-18 2007-04-18 真空処理装置

Publications (3)

Publication Number Publication Date
JP2008266699A JP2008266699A (ja) 2008-11-06
JP2008266699A5 true JP2008266699A5 (enExample) 2009-05-21
JP5194534B2 JP5194534B2 (ja) 2013-05-08

Family

ID=40046578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007108884A Expired - Fee Related JP5194534B2 (ja) 2007-04-18 2007-04-18 真空処理装置

Country Status (1)

Country Link
JP (1) JP5194534B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107076133B (zh) * 2014-06-26 2019-06-18 工程吸气公司 吸气剂泵送系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08277461A (ja) * 1995-04-06 1996-10-22 Ulvac Japan Ltd スパッタリング装置および誘電体膜の成膜方法
IT1297013B1 (it) * 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
JP2001234326A (ja) * 2000-02-25 2001-08-31 Sony Corp 真空加工装置

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