JP5194534B2 - 真空処理装置 - Google Patents

真空処理装置 Download PDF

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Publication number
JP5194534B2
JP5194534B2 JP2007108884A JP2007108884A JP5194534B2 JP 5194534 B2 JP5194534 B2 JP 5194534B2 JP 2007108884 A JP2007108884 A JP 2007108884A JP 2007108884 A JP2007108884 A JP 2007108884A JP 5194534 B2 JP5194534 B2 JP 5194534B2
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JP
Japan
Prior art keywords
vacuum
target
vacuum processing
processing apparatus
exhaust
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Expired - Fee Related
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JP2007108884A
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English (en)
Japanese (ja)
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JP2008266699A5 (enExample
JP2008266699A (ja
Inventor
勇夫 村岸
斉 山西
剛 小岩崎
昌裕 山本
光宏 吉永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP2007108884A priority Critical patent/JP5194534B2/ja
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Publication of JP2008266699A5 publication Critical patent/JP2008266699A5/ja
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JP2007108884A 2007-04-18 2007-04-18 真空処理装置 Expired - Fee Related JP5194534B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007108884A JP5194534B2 (ja) 2007-04-18 2007-04-18 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007108884A JP5194534B2 (ja) 2007-04-18 2007-04-18 真空処理装置

Publications (3)

Publication Number Publication Date
JP2008266699A JP2008266699A (ja) 2008-11-06
JP2008266699A5 JP2008266699A5 (enExample) 2009-05-21
JP5194534B2 true JP5194534B2 (ja) 2013-05-08

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ID=40046578

Family Applications (1)

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JP2007108884A Expired - Fee Related JP5194534B2 (ja) 2007-04-18 2007-04-18 真空処理装置

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JP (1) JP5194534B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107076133B (zh) * 2014-06-26 2019-06-18 工程吸气公司 吸气剂泵送系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08277461A (ja) * 1995-04-06 1996-10-22 Ulvac Japan Ltd スパッタリング装置および誘電体膜の成膜方法
IT1297013B1 (it) * 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
JP2001234326A (ja) * 2000-02-25 2001-08-31 Sony Corp 真空加工装置

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JP2008266699A (ja) 2008-11-06

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