JP2008258611A - インクジェット印刷によるワイヤ層、封止層及び遮蔽層の形成方法 - Google Patents
インクジェット印刷によるワイヤ層、封止層及び遮蔽層の形成方法 Download PDFInfo
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Abstract
【解決手段】パッケージ310の表面に基板(チップ)320を固着させる。パッケージ310や基板320の表面に封止材を印刷し、形成された封止層350越しに導電素材を印刷し、形成されたワイヤ層360越しに封止材を印刷し、形成される封止層370を含め何層かを随時又は一括して硬化させることで、半導体デバイス300を製造する。パッケージ側接続パッド340と基板側接続パッド330の間はワイヤ層360で接続する。パッケージ310及び基板320の表面とワイヤ層360の間を、パッケージ310及び基板320の表面に沿って延びる所定厚の封止層350で電気的に絶縁する。ワイヤ層360に形成される層化ワイヤのパターンはワイヤボンディングよりも柔軟に設定できる。
【選択図】図3D
Description
Claims (5)
- 半導体デバイスのパッケージにチップを接続する方法であって、
チップ及びパッケージの少なくとも一部表面にかけて所定厚の層を形成するよう、封止材を印刷するステップと、
チップとパッケージの間で所定パターンを形成するよう導電素材を封止材越しに印刷することにより、チップ及びパッケージの表面から封止材厚分隔たった位置を通る導電層を形成するステップと、
導電層越しに新たに封止材を印刷するステップと、
少なくとも後者の封止材を硬化させるステップと、
を有する方法。 - 請求項1記載の方法であって、その表面が絶縁性であるチップ及びパッケージの表面越しに、且つ上記導電素材印刷ステップにて形成される導電素材パターンとは異なるパターンが形成されるよう、上記封止材印刷に先立ち導電素材を印刷するステップを有する方法。
- 請求項1記載の方法であって、チップ表面及びパッケージ表面に接続パッドを印刷するステップを有する方法。
- 請求項1記載の方法であって、封止材がチップ表面及びパッケージ表面双方にかかるよう上記封止材印刷ステップを実行する方法。
- 請求項3記載の方法であって、上記接続パッド印刷ステップが、半導体デバイスを予熱するステップと、導体滴で懸濁している揮発性媒体を半導体デバイス表面に印刷するステップと、その揮発性媒体を半導体デバイスとの接触により瞬時蒸発させて接続パッドを形成するステップと、を含む方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US11/694,886 US8097497B2 (en) | 2007-03-30 | 2007-03-30 | Inkjet printed wirebonds, encapsulant and shielding |
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JP2008258611A true JP2008258611A (ja) | 2008-10-23 |
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JP2008082480A Pending JP2008258611A (ja) | 2007-03-30 | 2008-03-27 | インクジェット印刷によるワイヤ層、封止層及び遮蔽層の形成方法 |
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US (1) | US8097497B2 (ja) |
EP (1) | EP1976008A3 (ja) |
JP (1) | JP2008258611A (ja) |
KR (1) | KR20080089215A (ja) |
CN (1) | CN101276765B (ja) |
TW (1) | TWI511177B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016213464A (ja) * | 2015-05-08 | 2016-12-15 | 華邦電子股▲ふん▼有限公司 | 積層パッケージ素子およびその製造方法 |
KR102642318B1 (ko) * | 2022-08-30 | 2024-03-04 | 엔트리움 주식회사 | 전자 장치의 제조 방법 |
KR20240030393A (ko) * | 2022-08-30 | 2024-03-07 | 엔트리움 주식회사 | 전자 장치의 제조 방법 |
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US20100156768A1 (en) * | 2008-12-22 | 2010-06-24 | Fletcher Ii James Douglas | Display media, method of forming display media, and printer for printing on display media |
US9496171B2 (en) * | 2014-09-26 | 2016-11-15 | Texas Instruments Incorporated | Printed interconnects for semiconductor packages |
US9666530B1 (en) * | 2015-12-28 | 2017-05-30 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device |
US10504806B2 (en) | 2016-05-06 | 2019-12-10 | Stmicroelectronics S.R.L. | Semiconductor package with electrical test pads |
US10930581B2 (en) | 2016-05-19 | 2021-02-23 | Stmicroelectronics S.R.L. | Semiconductor package with wettable flank |
CN112136212B (zh) * | 2019-04-24 | 2022-07-29 | 深圳市汇顶科技股份有限公司 | 芯片互联装置、集成桥结构的基板及其制备方法 |
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Also Published As
Publication number | Publication date |
---|---|
TWI511177B (zh) | 2015-12-01 |
US8097497B2 (en) | 2012-01-17 |
CN101276765A (zh) | 2008-10-01 |
US20080242004A1 (en) | 2008-10-02 |
EP1976008A2 (en) | 2008-10-01 |
EP1976008A3 (en) | 2012-10-17 |
KR20080089215A (ko) | 2008-10-06 |
CN101276765B (zh) | 2013-08-21 |
TW200903572A (en) | 2009-01-16 |
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