JP2008242346A - レーザ転写装置の転写ヘッド - Google Patents

レーザ転写装置の転写ヘッド Download PDF

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Publication number
JP2008242346A
JP2008242346A JP2007086426A JP2007086426A JP2008242346A JP 2008242346 A JP2008242346 A JP 2008242346A JP 2007086426 A JP2007086426 A JP 2007086426A JP 2007086426 A JP2007086426 A JP 2007086426A JP 2008242346 A JP2008242346 A JP 2008242346A
Authority
JP
Japan
Prior art keywords
transfer
transfer plate
plate holder
holder
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007086426A
Other languages
English (en)
Japanese (ja)
Inventor
Yoshifumi Takezawa
佳史 竹澤
Yoshio Komai
良男 駒井
Isateru Inoue
勇輝 井上
Takehiko Wada
竹彦 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP2007086426A priority Critical patent/JP2008242346A/ja
Priority to TW097110703A priority patent/TW200903405A/zh
Priority to KR1020080027857A priority patent/KR20080088430A/ko
Priority to CNA2008100884609A priority patent/CN101276072A/zh
Publication of JP2008242346A publication Critical patent/JP2008242346A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Laser Beam Processing (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2007086426A 2007-03-29 2007-03-29 レーザ転写装置の転写ヘッド Pending JP2008242346A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007086426A JP2008242346A (ja) 2007-03-29 2007-03-29 レーザ転写装置の転写ヘッド
TW097110703A TW200903405A (en) 2007-03-29 2008-03-26 Transferring head of laser transferring device
KR1020080027857A KR20080088430A (ko) 2007-03-29 2008-03-26 레이저 전사 장치의 전사 헤드
CNA2008100884609A CN101276072A (zh) 2007-03-29 2008-03-31 激光转印装置的转印头

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007086426A JP2008242346A (ja) 2007-03-29 2007-03-29 レーザ転写装置の転写ヘッド

Publications (1)

Publication Number Publication Date
JP2008242346A true JP2008242346A (ja) 2008-10-09

Family

ID=39913738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007086426A Pending JP2008242346A (ja) 2007-03-29 2007-03-29 レーザ転写装置の転写ヘッド

Country Status (4)

Country Link
JP (1) JP2008242346A (ko)
KR (1) KR20080088430A (ko)
CN (1) CN101276072A (ko)
TW (1) TW200903405A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101811223A (zh) * 2010-04-14 2010-08-25 宁波江丰电子材料有限公司 靶材组件焊接方法
EP3221747B1 (en) 2014-11-17 2024-01-03 ASML Netherlands B.V. Mask assembly
CN111230308B (zh) * 2020-02-14 2021-07-13 西京学院 一种3d打印模型激光抛光系统及其使用方法

Also Published As

Publication number Publication date
CN101276072A (zh) 2008-10-01
KR20080088430A (ko) 2008-10-02
TW200903405A (en) 2009-01-16

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