JP2008242346A - Transfer head of laser transfer device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transfer head of a laser transfer device capable of constantly maintaining distance between a thin film and a transfer object of a transfer material as a micron order (for example, 5-20 μm) in this type of laser transfer device represented by a laser repair device. <P>SOLUTION: The transfer head has: a transfer plate holder in which a transfer plate is held on the lower surface and a transfer window for exposing the transfer plate to the side of the upper surface is opened; a transfer head body which provides position standards in the horizontal direction and the vertical direction; a holder support mechanism which supports the transfer plate holder in a vacant part for storing the transfer holder of the transfer head body to be vertically moved and impossible to be horizontally moved to the transfer head body and a transfer plate floating means for floating the transfer plate with the transfer holder to a transferred surface by jetting pneumatic downward of the transfer plate holder. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a transfer head of a laser transfer device suitable as a laser repair device or the like for repairing a circuit pattern defect in a display device such as a liquid crystal display or a plasma display.

  2. Description of the Related Art Conventionally, in a display device such as a liquid crystal display or a plasma display, a laser repair device using a laser CVD method has been employed in order to repair a circuit pattern defect.

  This laser repair apparatus using the laser CVD method uses a chemical vapor deposition method using a laser, and specifically, irradiates a laser on a substrate placed in a raw material gas. By promoting the chemical / physical reaction of the source gas, a film of the source gas is grown on the repaired portion on the substrate.

  However, in such a laser repair apparatus using the conventional laser CVD method, only a material that can be gasified (W, Cr, Mo) can be used as a repair material, and the source gas on the laser irradiation surface is used. It has been pointed out that the repair speed is slow due to the use of chemical and physical reactions.

  On the other hand, as a laser repair apparatus capable of solving such problems, a laser repair apparatus using a laser transfer method (LMT: Laser Metal Transfer) is known (for example, see Patent Document 1).

  The principle of the laser repair apparatus using this laser transfer method is shown in FIG. In the figure, a is a quartz glass plate, b is a conductive metal thin film as a restoration material, c is a substrate, d is a circuit pattern, e is a lens, f is a laser beam, g is a defective portion on the circuit pattern, b ′ Is a metal thin film that has been skipped. In this example, a combination of the quartz glass plate a and the thin film b is a transfer plate.

In this laser transfer method, first, as shown in FIG. 6A, a quartz glass plate a having a thin film b of a repair material on the objective surface is placed on a substrate c having a defective portion g by a distance L. As shown in FIG. 5B, the laser beam f is narrowed down to a predetermined spot shape and irradiated through the lens e. Then, as shown in FIG. 6C, the thin film portion b ′ irradiated with the laser beam f is skipped, and as shown in FIG. Adhere to. At this time, when the line width of the repaired portion is 2 to 5 μm, the distance L is about 5 to 20 μm.
JP 2000-31013 A

  In the laser repair apparatus using such a conventional laser transfer method, various metals such as Al, Ni, Ta, W, Ti, Au, Ag, Cu, Cr, etc. are used as the metal coating as a repair material. In addition to being able to be selected, the transfer plate can be repaired simply by irradiating it with a laser, and thus there is an advantage that the repair speed is high.

  By the way, in this type of laser repair apparatus, in order to obtain a transfer film having a required line width on the surface of a display device or the like as a repair target, the distance between the transfer target surface and the transfer material film is always on the order of microns. (For example, 5 to 20 μm) is required to be maintained.

  However, since the surface of this type of repair target (such as a substrate of a display device) has micron-order irregularities in the first place, the distance from the surface at any position on the repair target is always in the micron order ( For example, it is difficult to maintain 5 to 20 μm by a normal servo control technique using a servo motor, a linear motor, or the like.

  In addition, this type of repair object (display device, etc.) is susceptible to electrical and magnetic influences, so that it is not possible to adopt a floating control system using static electricity or magnetism.

  The present invention has been made by paying attention to such conventional problems. The object of the present invention is to provide a thin film of a transfer material and an object to be transferred in this type of laser transfer apparatus represented by a laser repair apparatus. An object of the present invention is to provide a transfer head of a laser transfer apparatus capable of always maintaining a distance from an object in the order of microns (for example, 5 to 20 μm).

  Other objects and operational effects of the present invention will be easily understood by those skilled in the art by referring to the following description of the specification.

  The above technical problem can be solved by a transfer head of a laser transfer apparatus having the following configuration.

  That is, the transfer head of this laser transfer apparatus is configured such that a transfer plate formed by depositing a transfer material thin film on the objective surface of a plate-like piece having laser transparency is held so that a fine and almost constant gap is maintained between them. Thus, the transfer material thin film is supported with the transfer material thin film facing the substantially horizontal transfer surface of the transfer object.

  The transfer head of the laser transfer apparatus includes a transfer plate holder in which the transfer plate is held on the lower surface and a transfer window that exposes the transfer plate to the upper surface side, and a space for accommodating the transfer plate holder A transfer head body that provides a position reference in the horizontal direction and the vertical direction, and a transfer plate holder that is accommodated in a space for accommodating the transfer plate holder of the transfer head body is moved up and down relative to the transfer head body. A holder support mechanism that supports the transfer plate so as not to move horizontally, and a transfer plate floating means that floats the transfer plate together with the transfer plate holder with respect to the transfer surface by injecting pressure air below the transfer plate holder. And have.

  Here, as the “pressure”, various kinds of gases can be employed according to the property of the repair object. In the case where the object to be repaired is not subject to oxidation of a circuit pattern or the like, an inert gas (for example, nitrogen gas or the like) can be adopted as the type of pressure. If nitrogen gas is employed as the pressurized air, the repair location can be quickly cooled.

  According to such a configuration, the control for maintaining the distance between the transfer surface of the transfer object and the transfer plate at a fine value is not based on electrical servo control using a servo motor, linear motor, or the like. Therefore, it is assumed that the transfer plate and the surface to be transferred are opposed to each other with a fine distance therebetween, and the two are relatively moved. However, since the transfer plate moves up and down appropriately following the unevenness on the transfer surface, the repair plate that constitutes the transfer surface by touching a large ridge on the transfer surface during horizontal movement of the transfer plate The possibility of damaging the object can be prevented in advance.

  In particular, when this type of laser transfer apparatus is realized as a laser repair apparatus, in order to repair a defect on the circuit pattern, the same defect portion on the circuit pattern is shifted while the transfer plate is shifted in the horizontal direction by a predetermined pitch. However, if there are irregularities on the order of microns on the surface of the object to be repaired, there is a risk that the circuit pattern will be damaged by colliding with this. In other words, when moving in the horizontal direction while maintaining the distance by electrical servo control, there is a high risk that the transfer plate will collide with the repair object due to the roughness of accuracy and delay in response speed. As in the present invention, such ridges are present according to the mating control of maintaining the distance between the repair object and the transfer plate or the transfer plate holder by maintaining the distance between them. However, since the transfer plate also moves up and down following this, the distance between the two can always be maintained at an optimum value without using complicated servo control.

  Also, when realizing the present invention as a laser repair device, in order to reduce the tact time of the repair process, if only by electrical control, while measuring the distance to the repair target each time, The repair object must be carefully approached to the transfer plate, and it takes a relatively long time for each approach. On the other hand, if the opponent's self-levitation control as in the present invention is used, it will open roughly. After the transfer plate is brought close to the surface of the object to be repaired by loop control, it can be left to the floating control by pressure air, so there is no need to perform distance control every time it approaches, and the tact time can be shortened. It becomes possible.

  In the above-mentioned present invention, as a holder support mechanism for supporting the transfer plate holder accommodated in the space for accommodating the transfer plate holder of the transfer head body so that it can move up and down with respect to the transfer head body and cannot move horizontally. Various configurations can be employed.

  As an example of the holder support mechanism, the inner peripheral edge of the transfer plate holder accommodating space is a fixed end, the outer peripheral edge of the transfer plate holder accommodated in the transfer plate holder accommodating space is a free end, The transfer plate holder can be constituted by a plate spring that supports the transfer plate holder so that the transfer plate holder can move up and down.

  According to such a configuration, it is possible to realize functions such as vertical movement and non-horizontal movement simply by fixing the leaf springs to both of them so as to straddle the gap between the transfer plate holder and the transfer head body. Can be manufactured at low cost, and by forming punched holes on the leaf springs as appropriate, the cantilevered leaf springs can be arranged in a well-balanced manner, and the outer periphery of the transfer plate holder can be supported evenly. Thus, the transfer plate holder can be moved up and down without distortion.

  As another example of the holder support mechanism, it is interposed between the inner peripheral surface of the transfer plate holder accommodating space and the outer peripheral surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, The transfer plate holder can be configured by a steel ball guide that supports the transfer plate holder so that the transfer plate holder can move up and down.

  According to such a configuration, since the steel ball guide, which is a kind of ball bearing, is adopted, it is possible to realize smooth movement of the transfer plate holder according to the accuracy of the sphericity of the steel ball. The transfer plate holder can be moved up and down in accordance with the bulge on the transfer surface by following the air pressure between the transfer plate and the transfer surface.

  As another example of the holder support mechanism, it is interposed between the inner peripheral surface of the transfer plate holder accommodating space and the outer peripheral surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, The transfer plate holder can be constituted by a compression spring that elastically presses and supports the transfer plate holder so that the transfer plate holder can move up and down.

  According to such a configuration, the transfer plate holder is evenly pressed from the outer periphery toward the center through the expansion pressure of the compression spring, so that the movement of the transfer plate holder in the horizontal direction is reliably restricted, The transfer plate holder moves up and down in response to pressure between the transfer plate and the transfer surface.

  As another example of the holder support mechanism, it is interposed between the inner peripheral surface of the transfer plate holder accommodating space and the outer peripheral surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, The transfer plate holder can be constituted by a resin bearing that slidably supports the transfer plate holder so that the transfer plate holder can move up and down.

  According to such a configuration, the resin bearing has a relatively simple structure and moves the transfer plate holder up and down relatively smoothly, so that relatively good up-and-down movement can be realized at a low price.

  As still another example of the holder support mechanism, the inner diameter of the inner peripheral surface of the transfer plate holder accommodating space and the outer diameter of the outer peripheral surface of the transfer plate holder accommodated in the transfer plate holder accommodating space are It can be constituted by a coupler structure having substantially the same diameter and fitting and supporting both slidably up and down.

  According to such a configuration, since the movement of the transfer plate holder in the horizontal direction is regulated with high accuracy through the coupler structure, the transfer plate holder is further controlled in the vertical direction while further restricting the movement of the transfer plate holder in the horizontal direction. Can be allowed to move smoothly.

  As still another example of the holder support mechanism, a plurality of pressurized air injection nozzles arranged at an appropriate distance in the circumferential direction on the inner peripheral surface of the transfer plate holder accommodation space, and the transfer plate holder accommodation It can be configured by a combination with an annular groove which is provided on the outer peripheral surface of the transfer plate holder accommodated in the use space and receives the pressure air injected from the plurality of pressure air injection nozzles.

  According to such a configuration, the transfer plate holder receives a force in the center direction without contact from the outer periphery thereof, so that smooth sliding in the vertical direction can be realized while the movement in the horizontal direction is restricted. it can.

  Next, in the above-described invention, there are various transfer plate floating means for floating the transfer plate together with the transfer plate holder with respect to the transfer surface by injecting pressure air below the transfer plate holder. A configuration can be employed.

  That is, as an example of the transfer plate floating mechanism, a pressure air supply means for supplying pressure air from a predetermined pressure source to a pressure air inlet hole of the transfer plate holder, a pressure air inlet hole of the transfer plate holder, and the transfer A holder internal pressure air passage communicating with a plurality of pressure air outlet holes on the lower surface of the plate holder, and a plurality of pressure air injection holes on the transfer plate and aligned with the plurality of pressure air outlet holes on the lower surface of the transfer plate holder. Thus, the pressure air from the pressure source is ejected to the lower side of the transfer plate holder through the pressure air injection hole of the transfer plate via the pressure air passage in the holder. The transfer plate can be configured to float together with the transfer plate holder.

  According to such a configuration, the pressure air is jetted from the transfer plate itself to be levitated onto the lower surface, so that the distance between the transfer plate and the transfer target surface can be reliably maintained at a specified value. At this time, the pressurized air supply means may be a flexible tube connecting the pressurized air source and the pressurized air inlet hole of the transfer plate holder, or on the inner peripheral surface of the transfer plate holder accommodating space. Further, a pressurized air injection nozzle that blows pressurized air into a pressurized air inlet hole located on the outer peripheral surface of the transfer plate holder may be used.

  When a flexible tube is used, the necessary pressure can be reliably blown out from the lower surface of the transfer plate without setting the pressure so high. On the other hand, if it is set as a pressurized air injection nozzle, it will become unnecessary to couple | bond a flexible tube with a transfer plate holder, and there exists an advantage that the vertical movement of a transfer plate holder is not interfered by a flexible tube.

  The transfer plate floating mechanism has a plurality of pressurized air injection holes for injecting pressurized air from a pressurized air source on the lower surface of the inner peripheral edge of the transfer plate holder accommodating space of the transfer head body. The transfer plate is ejected from the pressure air injection hole on the lower surface of the inner peripheral edge of the transfer plate holder accommodating space of the transfer head body to the lower side of the transfer plate holder, whereby the transfer plate is moved against the transfer surface. The transfer plate holder can be floated together.

  According to such a configuration, it is not necessary to supply pressurized air from the transfer head body side to the transfer plate holder side, so the transfer plate holder can freely move up and down without being restrained by the flexible tube. Thus, the smooth vertical movement of the transfer plate holder can be guaranteed.

  At this time, the transfer head body has a plurality of pressurized air injection holes on the inner peripheral edge upper surface of the transfer plate holder accommodating space for injecting the pressurized air from the pressurized air source. You may make it assist the floating effect | action of the said transfer plate holder by injecting pressurized air to the lower surface of the flange part which protrudes in the radial direction outward from the said transfer plate holder outer periphery.

  According to such a configuration, since the substantial weight of the transfer plate is reduced, the transfer plate moves up and down sensitively to a change in atmospheric pressure between the transfer plate and the transfer surface. Ascending / descending response can be improved.

  In addition, by forming an annular ridge that hangs downward along the outer periphery of the transfer plate holder on the lower surface of the transfer plate holder, the outer peripheral surface of the transfer plate held on the lower surface of the transfer plate holder and the A space functioning as a pressure reservoir may appear between the inner peripheral surface of the annular ridge.

  According to such a configuration, it is possible to more smoothly blow the pressure air injected from the plurality of pressure air injection holes between the transfer plate and the transfer surface due to the presence of the pressure air reservoir.

  On the other hand, in the above-described basic invention, the holder support mechanism is configured such that the upper surface opening is closed by the transparent window plate, the lower surface opening is opened, and an annular step portion for piston removal is formed on the inner peripheral edge of the lower surface opening. In the cylinder member, a transfer plate holder that functions as a piston and holds the transfer plate on the lower surface is slidably accommodated up and down, and the transfer plate floating means is inserted into the chamber of the cylinder member. While introducing pressure air, you may make it comprise this pressure air by penetrating the laminated body of the transfer plate holder and transfer transfer plate which function as said piston member up and down, and spraying from the lower surface of a transfer plate.

  According to such a configuration, the lower limit position of the transfer plate holder is regulated by the annular step portion for preventing the piston from coming off, and the other transfer plate holder moves up and down smoothly in the cylinder member as the piston moves up and down. While the movement in the direction is regulated, the vertical movement can be performed smoothly. On the other hand, the pressure air blown from the transfer plate to the lower surface is once accumulated in the chamber and then uniformly from the injection holes on the lower surface of the transfer plate. Since the blowout is performed, the transfer plate moves up and down sensitively according to the atmospheric pressure between the transfer plate and the transfer surface while maintaining the horizontal posture.

  The present invention viewed from another aspect can also be understood as a transfer head control method of a laser transfer apparatus.

  The transfer head control method of this laser transfer apparatus is such that a transfer plate formed by depositing a transfer material thin film on the objective surface of a plate-like piece having laser transparency is held so that a fine, almost constant gap is maintained between them. A transfer head of a laser transfer apparatus for supporting a transfer material thin film facing a substantially horizontal transfer surface of an object to be transferred.

  This transfer head control method includes a transfer plate holder that holds the transfer plate on the lower surface and has a transfer window that exposes the transfer plate to the upper surface side, and a space for accommodating the transfer plate holder. And a transfer head body that provides a position reference in the horizontal direction and the vertical direction, and on the inner peripheral surface of the space for accommodating the transfer plate holder of the transfer head body, obliquely downward to the inside of the space A plurality of nozzles that are used for both suction and jet directed to the circumferential direction are arranged at an appropriate distance in the circumferential direction, and the transfer plate holder accommodated in the space for accommodating the transfer plate holder of the transfer head body An obliquely downward pressure air passage that communicates between the gas inlet / outlet hole disposed on the outer peripheral surface of the transfer plate holder and the gas inlet / outlet hole disposed on the lower surface of the transfer plate holder is formed inside, and The transfer head By operating each of the plurality of body-side nozzles as suction nozzles, the operation of the suction mode for sucking the transfer plate together with the transfer plate holder to the transfer head body, and the plurality of nozzles on the transfer head body side By operating each as an injection nozzle, the pressure air injected from each of these nozzles is introduced into each of the gas inlet / outlet holes on the outer peripheral surface of the transfer plate holder, so that the pressure air is supplied from the lower surface side of the transfer plate. And the operation of a levitation mode for levitation of the transfer plate by jetting, and the transfer from the suction mode to the levitation mode and the switching from the levitation mode to the suction mode are instantaneously performed. It is possible to shift between both modes without dropping the plate.

  According to such a configuration, since the common pressure passage is used for both adsorption and floating, a mechanism for supporting the transfer plate holder so as to be movable up and down with respect to the transfer head body is provided. It becomes unnecessary.

  At this time, if an adhesive is used as a means for holding the transfer plate on the transfer plate holder, there is an advantage that a vacuum chuck mechanism is not required and the configuration of the piping system is simplified.

  The present invention viewed from another aspect can also be grasped as a transfer head control method of a laser transfer apparatus. This transfer head control method uses a transfer plate in which a thin film of transfer material is attached to the objective surface of a plate-like piece having laser transparency so that a fine, substantially constant gap is maintained between them. This is for supporting the transfer material thin film facing the substantially horizontal transfer surface of the object.

  This control method includes a transfer head body that provides a position reference in the horizontal direction and the vertical direction, and a transfer plate. The transfer head body side projects to the transfer plate side, and is used for both suction and ejection. And a plurality of through holes having a hole shape that is arranged in alignment with the plurality of nozzles and that conforms to the tip shape of the nozzles are provided on the transfer plate side. By causing each of the plurality of nozzles on the transfer head body side to act as suction nozzles and fitting each of the nozzles into the plurality of through holes on the transfer plate side, the transfer plate is transferred to the transfer head body. By operating each of the plurality of nozzles on the transfer head body side as ejection nozzles, each of these nozzles The operation of the levitation mode in which the transfer plate is levitated by injecting the pressure air from the lower surface side of the transfer plate by introducing the pressure air injected from each of the corresponding through holes on the transfer plate side. It is possible to switch between both modes without dropping the transfer plate by instantaneously switching from the suction mode to the levitation mode and switching from the levitation mode to the suction mode. It is.

  According to such a configuration, the transfer plate holder is not required, and the common pipe line is used for both suction and injection, so that the overall configuration can be simplified and further cost reduction can be achieved.

  In the series of inventions described above, as a means for holding the transfer plate on the transfer plate holder, an adhesive, a vacuum suction means, or a coupling mechanism can be used.

  If an adhesive is used, there is an advantage that separate suction piping and coupling are not required although the labor of peeling is required. On the other hand, if a vacuum chuck mechanism is used, it becomes easy to attach and detach during replacement. On the other hand, if the coupling mechanism is used, the transfer plate can be detached from the transfer plate holder only by exchanging the coupling mechanism.

  According to the present invention, the control for maintaining the distance between the transfer surface of the transfer object and the transfer plate at a fine value is not based on electrical servo control using a servo motor, linear motor, etc. Since it is performed through the pressure air that is sprayed below the transfer plate holder, even if the transfer plate and the transfer surface are opposed to each other with a fine distance therebetween, Since the transfer plate moves up and down appropriately following the unevenness on the transfer surface, the repair object that constitutes the transfer surface by touching a large ridge on the transfer surface during horizontal movement of the transfer plate It is possible to prevent the possibility of damages.

  In particular, when this type of laser transfer apparatus is realized as a laser repair apparatus, in order to repair a defect on the circuit pattern, the same defect portion on the circuit pattern is shifted while the transfer plate is shifted in the horizontal direction by a predetermined pitch. However, if there are irregularities on the order of microns on the surface of the object to be repaired, there is a risk that the circuit pattern will be damaged by colliding with this. In other words, when moving in the horizontal direction while maintaining the distance by electrical servo control, there is a high risk that the transfer plate will collide with the repair object due to the roughness of accuracy and delay in response speed. As in the present invention, such ridges are present according to the mating control of maintaining the distance between the repair object and the transfer plate or the transfer plate holder by maintaining the distance between them. However, since the transfer plate also moves up and down following this, the distance between the two can always be maintained at an optimum value without using complicated servo control.

  Also, when realizing the present invention as a laser repair device, in order to reduce the tact time of the repair process, if only by electrical control, while measuring the distance to the repair target each time, The repair object must be carefully approached to the transfer plate, and it takes a relatively long time for each approach. On the other hand, if the opponent's self-levitation control as in the present invention is used, it will open roughly. After the transfer plate is brought close to the surface of the object to be repaired by loop control, it can be left to the floating control by pressure air, so there is no need to perform distance control every time it approaches, and the tact time can be shortened. It becomes possible.

  Hereinafter, a preferred embodiment of a transfer head of a laser transfer apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 shows a configuration diagram of a first embodiment of a transfer head of a laser transfer apparatus according to the present invention. 1A is a plan view and FIG. 1B is a cross-sectional view.

  As is clear from these drawings, the transfer head 1 of this laser transfer apparatus is provided with a transfer material (for example, a lower surface in the drawing) on a plate-like piece (for example, a quartz glass plate-like piece) having laser permeability. , Al, Ni, Ta, W, Ti, Au, Ag, Cu, Cr, etc.) is transferred to the transfer plate 101 so that a fine, almost constant gap is maintained between them. This is to support a transfer material thin film (not shown) facing the substantially horizontal transfer surface 102a of the object 102.

  The transfer head 1 includes a transfer plate holder 103 having a transfer plate 101 held on the lower surface and a transfer window 103a that exposes the transfer plate 101 to the upper surface side, and a space 104a for accommodating the transfer plate holder. A transfer head body 104 for providing a reference position in the horizontal direction and the vertical direction, and a transfer plate holder 103 accommodated in a space 104a for accommodating the transfer plate holder of the transfer head body 104 with respect to the transfer head body 104. And a holder support mechanism (details will be described later) that can move up and down and cannot move horizontally, and by injecting pressure air 105 below the transfer plate holder 103, the transfer plate 101 is transferred to the transfer surface 102a. Transfer plate floating means (details will be described later) for floating the holder 103 together.

  In this example, the holder support mechanism freely fixes the inner peripheral edge of the transfer plate holder accommodating space 104a and the outer peripheral edge of the transfer plate holder 103 accommodated in the transfer plate holder accommodating space 104a. As an end, the transfer plate holder 103 is configured by a leaf spring that supports the transfer head holder 104 so that the transfer plate holder 103 can move up and down. In the drawing, the plate spring 106 is shown as a simple rectangular plate having a horizontally long rectangular shape. However, as will be readily understood by those skilled in the art, in practice, an appropriate punching hole or cut line is used. Are formed, and the plurality of portions are configured to locally act as leaf springs.

  On the other hand, as the transfer plate floating means, a flexible tube 107 functioning as a pressure supply means for supplying pressure air from a predetermined pressure source (not shown) to the pressure inlet hole 103b of the transfer plate holder 103; A holder internal pressure air passage 103 d that connects the pressure inlet hole 103 b of the transfer plate holder 103 and the plurality of pressure outlet holes 103 c on the lower surface of the transfer plate holder 103, and a plurality of lower surfaces of the transfer plate holder 103 that are on the transfer plate 101. And a plurality of pressurized air injection holes 101a aligned with the compressed air outlet hole 103c, whereby the pressure air from a pressure air source (not shown) passes through the holder internal pressure air passage 103d and is supplied to the transfer plate 101. The transfer plate 101 is floated together with the transfer plate holder 103 with respect to the transfer surface 102a by spraying downward of the transfer plate holder 103 through 101a. It becomes a.

  Further, as means for holding the transfer plate 101 on the transfer plate holder 103, vacuum suction means is adopted. That is, the vacuum chuck suction means includes an in-holder suction passage 103g that connects a plurality of suction holes 103f provided on the lower surface of the transfer plate holder 103 and suction holes 103e provided on the outer peripheral surface of the transfer plate holder 103; The transfer plate 101 is adsorbed by a suction tube 108 connected to a vacuum source (not shown).

  An explanatory diagram showing an example of a more specific piping system in the first embodiment is shown in FIG. In the figure, the same components as those in FIG. 1 are denoted by the same reference numerals and description thereof is omitted. As is apparent from the figure, both the in-holder pressurized air passage 103d communicating with the pressurized air outlet holes 103c and the in-holder suction passage 103g communicating with the suction holes 103f are formed in an annular shape.

  According to the above configuration, the transfer plate holder 103 is supported by the transfer head body 104 via the plate spring 106 and can be freely moved in the vertical direction while being restricted from moving in the horizontal direction. Therefore, when the pressurized air 105 is ejected from the plurality of pressurized air ejection holes 101a, a fine distance L (5 to 20 μm) is maintained between the transfer plate 101 and the transfer surface 102a by the floating action by the pressurized air. Accordingly, if the entire transfer head 1 is brought close to a distance of, for example, about 100 μm by electrical open loop control and then the pressure 105 is ejected from the plurality of pressure air ejection ports 101a, The distance between the plate 101 and the transfer surface 102a is kept at a fine distance L, and there is no possibility that the transfer plate 101 collides with the transfer surface 102a.

  Next, FIG. 3 shows a configuration diagram of a second embodiment of the transfer head according to the present invention, and FIG. 4 shows an explanatory diagram of a piping system of the second embodiment.

  The difference of the second embodiment from the first embodiment is that the adhesive 109 is used as a means for holding the transfer plate 101 on the lower surface of the transfer plate holder 103, thereby omitting the suction piping system. It is in the point. 3 and FIG. 4, the same components as those in FIG. 1 and FIG.

  Next, a configuration diagram of a third embodiment of the transfer head according to the present invention is shown in FIG. In the figure, the same components as those in the first and second embodiments are denoted by the same reference numerals and description thereof is omitted.

  A feature of the transfer head 1 according to the third embodiment is that the holder support mechanism has an inner peripheral surface of the transfer plate holder accommodating space 104a and an outer periphery of the transfer plate holder 103 accommodated in the transfer plate holder accommodating space 104a. The steel plate guide 110 includes a steel ball guide 110 that is interposed between the two surfaces so that the transfer plate holder 103 can move up and down with respect to the transfer head body 104. Even in this example, the transfer plate 101 is sucked and held on the lower surface of the transfer plate holder 103 via vacuum suction means.

  According to such a configuration, the transfer plate holder 103 having a square shape in plan view is accommodated in the space 104a for accommodating the square transfer plate holder formed in the transfer head body 104, and the four sides thereof are 6 The steel ball guides 110 are supported so as to be movable up and down.

  Therefore, when the pressurized air 105 is jetted from the lower surface of the transfer plate 101, the transfer plate 101 moves up and down while being guided by the steel ball guide 110 together with the transfer plate holder 103, and the distance between the transfer plate 101 and the transfer surface 102a. L is maintained on the order of microns (for example, 5 to 20 μm).

  Further, the lower limit position of the transfer plate holder 103 is regulated by the outer peripheral flange portion 103 h of the transfer plate holder 103 coming into contact with the step portion 104 b formed in the inner periphery of the transfer plate holder accommodating space 104 a of the transfer head body 104. Will be.

  Next, a configuration diagram of a fourth embodiment of the transfer head according to the present invention is shown in FIG. In the figure, the same components as those of the third embodiment shown in FIG.

  The feature of this fourth embodiment is that the adhesive 109 is used as a means for holding the transfer plate 101 on the lower surface of the transfer plate holder 103, and the pressure air from a predetermined pressure source (not shown) is used. As a pressurized air supply means for supplying to the pressurized air inlet hole 103 b of the transfer plate holder 103, a pressurized air inlet hole 103 b located on the inner peripheral surface of the transfer plate holder accommodating space 104 a and positioned on the outer peripheral surface of the transfer plate holder 103. This is in that a pressurized air injection nozzle 107a for injecting pressurized air is used.

  According to such a configuration, since the transfer head body 104 and the transfer plate holder 103 are not coupled by the flexible tube, the transfer plate holder 103 moves up and down more freely by removing the constraint from the flexible tube. There is an advantage that makes possible.

  FIG. 7 shows a configuration diagram of a fifth embodiment of the transfer head 1 according to the present invention, and FIG. 8 shows an explanatory diagram of a piping system of the fifth embodiment. In the figure, the same components as those in the first to fourth embodiments are denoted by the same reference numerals and description thereof is omitted.

  The fifth embodiment is characterized in that the holder support mechanism is located between the inner peripheral surface of the transfer plate holder accommodating space 104a and the outer peripheral surface of the transfer plate holder 103 accommodated in the transfer plate holder accommodating space 104a. A compression spring 111 is employed that elastically presses and supports the transfer plate holder 103 so that the transfer plate holder 103 can move up and down with respect to the transfer head body 104.

  According to the fifth embodiment, the transfer plate holder 103 having a square shape in plan view is accommodated in the square transfer plate holder accommodating space 104 a formed in the transfer head body 104, and its four sides are 6 It will be supported while being pressed in place via a compression spring. Therefore, the transfer plate holder 103 can move up and down in a state where movement in the horizontal direction is restricted.

  An explanatory view of the piping system of the fifth embodiment is shown in FIG. In the figure, the same components as those in FIG.

  FIG. 9 shows a configuration diagram of a sixth embodiment of the transfer head according to the present invention. The feature of the sixth embodiment is that, as a holder support mechanism, a space between the inner peripheral surface of the transfer plate holder accommodating space 104a and the outer peripheral surface of the transfer plate holder 103 accommodated in the transfer plate holder accommodating space 104a. The resin bearing 112 is slidably supported between the two so that the transfer plate holder 103 can be moved up and down with respect to the transfer head body 104. In the figure, the same components as those of the previous embodiment are denoted by the same reference numerals and description thereof is omitted.

  According to the sixth embodiment, the transfer plate holder 103 is accommodated in the transfer plate holder accommodating space 104 a of the transfer head body 104 and supported by the resin bearing 112 so as to be movable up and down. Therefore, when the pressurized air 105 is ejected from the lower surface of the transfer plate 101, the distance L between the transfer plate 109 and the transfer target surface 102a is maintained on the order of microns.

  FIG. 10 shows a configuration diagram of a seventh embodiment of the transfer head according to the present invention. The feature of this seventh embodiment is that, as a holder support mechanism, the inner diameter of the transfer plate holder accommodating space 104a and the outer diameter of the outer peripheral surface of the transfer plate holder 103 accommodated in the transfer plate holder accommodating space 104a are substantially the same. The same diameter is adopted in that a coupler structure is employed in which both are slidably fitted and supported. That is, the illustrated transfer head body 104 is formed on a ring whose axis is vertical, while the transfer plate holder 103 is formed in a disk shape. Then, by making the outer diameter of the on-disk transfer plate holder 103 and the inner diameter of the on-ring transfer head body 104 substantially the same (leaving a sliding gap), the on-disk transfer plate holder 103 is placed on the ring. The transfer head body 104 can be moved up and down.

  In this example, four pressurized air supply tubes (flexible tubes) 107 are introduced into the gap between the annular transfer head body 104 and the on-disc transfer plate holder 103, and these tubes are introduced. The pressure supplied from 107 is blown into the gap between the transfer plate 101 and the transfer surface 102 from the lower part of the gap, as indicated by reference numeral 105. As a result, the transfer plate 101 floats from the transfer surface 102 a together with the transfer plate holder 103.

  In addition, in this example, four suction tubes 108 are introduced above the transfer plate holder 103, whereby a vacuum chuck function is realized on the lower surface of the transfer plate holder 103, and the transfer plate 101 is transferred. The lower surface of the plate holder 103 is sucked and held via a vacuum chuck function.

  According to such a configuration, since the transfer plate holder 103 moves up and down while maintaining a horizontal posture in the transfer head body 104, the function of allowing the movement in the vertical direction is realized while the movement in the horizontal plane is restricted. Is done.

  FIG. 11 shows a configuration diagram of an eighth embodiment of the transfer head according to the present invention. In the figure, the same components as those in the above-described embodiments are denoted by the same reference numerals and description thereof is omitted.

  The feature of this eighth embodiment is that the holder support mechanism has an inner diameter of the inner peripheral surface of the transfer plate holder accommodating space 104a and an outer peripheral surface of the transfer plate holder 103 accommodated in the transfer plate holder accommodating space 104. In addition to adopting a coupler structure in which the diameter is substantially the same, and the two are slidably fitted and supported in the up and down direction, the upper surface of the inner peripheral edge of the transfer holder accommodating space 104 of the transfer head body 104 is A plurality of pressurized air injection holes 104c for injecting the pressurized air from the source are provided, whereby the lower surface of the flange portion 103i that projects the pressurized air from the pressurized air source (not shown) from the outer periphery of the transfer plate holder 103 outward in the radial direction. This is because the floating action of the transfer plate holder 103 is assisted by spraying on the surface.

  That is, in this example, the transfer plate holder accommodating space 104a has a square shape in plan view, and the transfer plate holder 103 also has a square shape in plan view. The sizes of both 104a and 103 are substantially the same (to leave a sliding gap), so that the transfer plate holder 103 is slidable in the space 104a.

  In the transfer head body 104, a first pressurized air supply tube (or flow path) 107A and a second pressurized air supply tube (or flow path) 107B are provided. The distal end portion of the first tube 107 </ b> A is bent downward and communicates with the lower surface of the airframe 104. Therefore, as indicated by reference numeral 105, the pressurized air supplied from the tube 107A is blown between the transfer plate 101 and the transfer surface 102a from the pressurized air injection port 104d. On the other hand, the tip of the second tube 107B is bent upward, and the pressurized air injected from the injection port 104c is injected to the lower surface of the flange portion 103i of the transfer plate holder 103. Thereby, the floating action of the transfer plate holder 103 is assisted.

  FIG. 12 shows a configuration diagram of the ninth embodiment of the present invention. In the ninth embodiment, the present invention is such that a transfer plate formed by depositing a transfer material thin film on the objective surface of a plate-like piece having laser transparency is maintained so that a fine and almost constant gap is maintained between them. Thus, the transfer head control method of the laser transfer apparatus for supporting the transfer material thin film with the transfer material thin film facing the substantially horizontal transfer surface of the transfer object is implemented.

  That is, this control method includes a transfer head body 104 that gives a position reference in the horizontal direction and the vertical direction, and a transfer plate 101. On the transfer head body 104 side, there are provided a plurality of nozzles 113a that project to the transfer plate 101 side and are used for both suction and ejection, and the transfer plate 101 side is aligned with the plurality of nozzles 113a. A plurality of through-holes (pressure air injection holes) 101a that are arranged and have a tip pore shape that matches the tip shape of the nozzle 113a are provided.

  Furthermore, in this method, each of the plurality of nozzles 113a on the transfer head body 104 side acts as a suction nozzle so that each of the nozzles 113a is fitted into the plurality of through holes 101a on the transfer plate 101 side. Accordingly, the operation of the suction mode in which the transfer plate 101 is sucked to the transfer head body 104, and each of the plurality of nozzles 113a on the transfer head body 104 side is caused to act as an ejection nozzle, so that each of the nozzles 113a Blowing up the transfer plate 101 by blowing the pressurized air as shown by reference numeral 105 from the lower surface side of the transfer plate 101 by blowing the jetted pressure air into the corresponding through holes 101a on the transfer plate 101 side. Mode operation.

  In the present invention, the transfer plate 101 is instantaneously switched from the suction mode to the levitation mode and from the levitation mode to the suction mode, so that the transfer plate 101 is not dropped onto the transfer surface 102a. Transition between modes is possible. In the figure, reference numeral 113 denotes a tube used for both suction and injection.

  According to such a configuration, the nozzle 113a, which is used for both suction and injection, performs a holding function, so that it is not necessary to provide a separate transfer plate holder, and the nozzle 113a itself is used for suction and injection. Since they are also used, switching between the suction mode and the levitation mode can be realized only by controlling switching between intake and exhaust from the outside.

  A block diagram of the tenth embodiment of the present invention is shown in FIG. In the tenth embodiment as well, the present invention is applied to a transfer plate formed by depositing a transfer material thin film on the objective surface of a plate-like piece having laser transparency, and a fine, substantially constant gap is maintained between the two. In this way, the method is implemented as a method for controlling the transfer head of the laser transfer apparatus for supporting the transfer material thin film with the transfer material thin film facing the substantially horizontal transfer surface of the transfer object.

  That is, in this control method, the transfer plate 101 is held on the lower surface, the transfer plate holder 103 is opened to expose the transfer plate 101 on the upper surface side, and the space 104a for accommodating the transfer plate holder is provided. And a transfer head body 104 that provides a position reference in the horizontal and vertical directions.

  On the inner peripheral surface of the space 104 for accommodating the transfer plate holder of the transfer head body 104, a nozzle 114a used for both suction and injection directed obliquely downward to the inside of the space is an appropriate distance in the circumferential direction. A plurality are arranged with a gap therebetween.

  Inside the transfer plate holder 103 accommodated in the space 104 a for accommodating the transfer plate holder of the transfer head body 104, the gas inlet / outlet holes 103 k disposed on the outer peripheral surface of the transfer plate holder 103 and the transfer plate holder 103 are provided. An obliquely downward pressurized air passage 103m is formed which communicates with the gas inlet / outlet hole 103l disposed on the lower surface.

  Further, in this control method, each of the plurality of nozzles 114a on the side of the transfer head body 104 acts as a suction nozzle so that the transfer plate 101 is attracted to the transfer head body 104, and the transfer mode operation is performed. By causing each of the plurality of nozzles 114 a on the head machine body 104 side to act as an ejection nozzle, the pressure air ejected from each of the nozzles 114 a is blown into each of the gas inlet / outlet holes 103 k on the outer peripheral surface of the transfer plate holder 103. As a result, as shown by the reference numeral 105 from the lower surface side of the transfer plate 101, the operation is performed in a levitation mode in which the transfer plate 101 is floated by blowing the pressure air.

  Then, by instantaneously switching from the suction mode to the floating mode and switching from the floating mode to the suction mode, it is possible to shift between both modes without dropping the transfer plate 101 onto the transfer surface 102a. .

  According to such a configuration, the transfer plate holder 103 and the transfer head body 104 can be lifted while the transfer plate holder 103 is kept in a completely non-contact state, and a flexible tube is used between the two. As in the case of connection, the vertical movement of the transfer plate holder 103 is not interfered by the tube. In this example, the transfer plate 101 is held on the lower surface of the transfer plate holder 103 by an adhesive.

  FIG. 14 shows a configuration diagram of an eleventh embodiment of a transfer head according to the present invention. In the figure, the same components as those in the above-described embodiments are denoted by the same reference numerals and description thereof is omitted.

  The feature of this eleventh embodiment is that no tube is used. Therefore, in this embodiment, a transfer plate holder is not used. On the outer peripheral edge of the transfer head body 104, a nozzle 115 is disposed so as to jet pressure air facing it. On the other hand, a pressure receiving port 104e is arranged on the outer peripheral surface of the transfer head body 104 facing the nozzle 115. An internal passage 104f is formed between the pressurized air inlet 104e and the pressurized air injection port 101a on the transfer plate 101 side. Therefore, when the nozzle 115 ejects pressurized air, this pressurized air is blown between the transfer plate 101 and the transfer surface 102a from the pressurized air ejection port 101a of the transfer plate 101 through the internal passage 104f in the transfer head body 104. . In this example, the transfer plate 101 is held on the lower surface of the transfer head 104, and a coupler 116 is employed as a coupling means between them. Therefore, the transfer plate 101 can be replaced by loosening the screw and opening the coupler 116.

  According to such a configuration, since the transfer plate holder is eliminated and the nozzle 115 and the transfer plate 101 are connected by the internal passage 104f, a tube for supplying pressurized air is not required at all. Simplification and cost reduction are possible.

  A configuration diagram of a twelfth embodiment of a transfer head according to the present invention is shown in FIG. In the figure, the same components as those of the above-described embodiments are denoted by the same reference numerals and description thereof is omitted.

  The feature of this twelfth embodiment is that features are added to both the holder support mechanism and the transfer plate floating means. That is, in the twelfth embodiment, the holder support mechanism is configured such that the upper surface opening is closed by the transparent window plate 104g, the lower surface opening is opened, and the inner peripheral edge of the lower surface opening is an annular step portion for retaining the piston. A piston member (transfer plate holder) 104k that functions as a piston and holds the transfer plate 101 on the lower surface is slidably accommodated in the cylinder member 104h in which 104i is formed.

  On the other hand, as for the transfer plate floating means, the pressure air is introduced into the chamber 104j of the cylinder member 104h through the tube 107, and the laminate of the transfer plate holder 104k and the transfer plate 101 functioning as the piston member. It is configured by spraying from the lower surface of the transfer plate 101 through an internal passage 101b penetrating vertically.

  According to such a configuration, the transfer plate 101 smoothly moves up and down in the cylinder member 104h together with the piston member (transfer plate holder) 104k, and the pressurized air introduced into the chamber 104j via the tube 107 is converted into the piston member. In order to uniformly press 104k downward, the transfer plate 101 moves up and down smoothly while maintaining a horizontal posture. On the other hand, the lower limit of the transfer plate 101 is regulated by the piston member 104k coming into contact with the annular step 104i. The laser beam irradiation is performed through a transparent window plate 104g. Of course, it goes without saying that the transfer window for exposing the transfer plate 101 is provided in the piston member 104k.

  A configuration diagram of a thirteenth embodiment of a transfer head according to the present invention is shown in FIG. In the figure, the same components as those in the above-described embodiments are denoted by the same reference numerals and description thereof is omitted.

  The thirteenth embodiment is characterized in that a plurality of (four in this example) pressurized air in which the holder support mechanism is disposed at an appropriate distance in the circumferential direction on the inner peripheral surface of the transfer plate holder accommodating space 104a. The injection nozzle 116a and an annular groove 103n provided on the outer peripheral surface of the transfer plate holder 103 accommodated in the transfer plate holder accommodating space 104a and receiving the pressure air ejected from the plurality of pressure air ejection nozzles 116a. There is in point.

  That is, in this example, the transfer plate holder accommodating space 104a has a square shape in plan view, and correspondingly, the transfer plate holder 103 has a square shape in plan view. A nozzle 116a for injecting pressurized air is disposed on the inner peripheral surface of the space 104a facing each of the four sides of the transfer plate holder 103, and this nozzle 116a is connected to a pressurized air source (not shown) via the tube 116. Connected. On the other hand, a rectangular annular groove 103n is formed along each of the four outer sides of the transfer plate holder 103, so that the transfer plate holder 103 is ejected from the four sides through the nozzles 116a. The air is controlled so as to maintain a horizontal posture at the center position of the space 104a.

  On the other hand, the upper portion of the transfer plate holder 103 has a slightly larger diameter to form a flange portion, and the lower surface of the flange portion 103h abuts on the retaining step portion 104b on the transfer head body 104 side, and the lower limit is regulated. . In addition, pressurized air is supplied to the upper limit of the transfer plate head 103 via the four pressurized air supply tubes 107, and the supplied pressurized air is jetted to the lower surface of the transfer plate 101 via the internal passage 117. The

  According to such a configuration, the transfer plate holder 103 is maintained in a state where the transfer plate holder 103 is maintained in a horizontal position at the center of the space 104a by the pressure air blown from the four sides thereof, and the raising and lowering movement is performed via the internal passage. Since it is performed via the pressure air sent to the lower surface of the transfer plate, the transfer plate 101 is smoothly moved up and down without being restricted by the tube from the side.

  FIG. 17 shows a configuration diagram of a fourteenth embodiment of a transfer head according to the present invention. In the motion diagram, the same components as those in the above-described embodiments are denoted by the same reference numerals and description thereof is omitted.

  The feature of this embodiment is that the transfer plate 101 held on the lower surface of the transfer plate holder 103 is formed on the lower surface of the transfer plate holder 103 by forming an annular ridge 121 that hangs downward along the outer periphery of the transfer plate holder. This is in the point that a space 123 that functions as a pressurized air reservoir appears between the outer peripheral surface of the annular protrusion 121 and the inner peripheral surface of the annular ridge 121.

  In addition, in this example, by providing the vacuum pipe line 118 and the pressure air pipe line 120, the transfer plate 101 is adsorbed and the transfer plate is floated. The support mechanism for the transfer plate holder 103 is configured by providing 122 and allowing the vertical portion of the conduit to slide up and down slightly.

  According to such a configuration, a pressure reservoir is formed due to the presence of the void 123, so that the pressure between the transfer plate 101 and the transfer surface 102a increases due to the pressure reservoir surrounding the outer periphery, and the transfer plate 101 It is possible to efficiently realize the floating action. In addition, since the transfer plate holder 103 is maintained in a horizontal posture at four positions in plan view via the pipe lines 118 and 120, a separate mechanism for maintaining the horizontal posture is not required, the configuration is simplified, and the cost is reduced. There are advantages that are possible.

  Finally, FIG. 18 shows a more specific external perspective view of the main part (laser transfer unit 100) of the wiring pattern repair apparatus to which the present invention is applied. A wiring pattern repair device (also referred to as a “laser repair device”) includes a stage (not shown) for mounting a liquid crystal display device or plasma display device to be repaired with the circuit pattern surface facing upward. An XY positioning mechanism (not shown) that is positioned above the stage and can be positioned at an arbitrary XY coordinate in a horizontal plane, and a laser transfer unit 100 that is supported by being suspended by the XY positioning mechanism. It is configured.

  The laser transfer unit 100 includes a unit machine frame (not shown) that is suspended and supported on a stage by the above-described XY positioning mechanism, a three-dimensional positioning mechanism 2 that is attached to the unit machine frame, and a three-dimensional positioning mechanism 2. And the laser irradiation optical system 3 attached to the unit machine frame so as to be movable up and down.

  The three-dimensional positioning mechanism 2 includes an X-direction drive unit 21, a Y-direction drive unit 22 that supports the X-direction drive unit 21, and a Z-direction drive unit 23 that supports the Y-direction drive unit 22. The transfer head 1 that supports the holder is attached to the X-direction drive unit 21.

  The laser irradiation optical system 3 introduces a laser beam 4 coming from an upper laser source (not shown) from an incident port 37, shapes the beam cross section, and forms an elongated rectangular beam corresponding to the line width of a circuit pattern to be repaired. A beam shaping mechanism 34 that forms a cross section, a laser irradiation optical path C2 that guides the laser beam shaped by the beam shaping mechanism 34 vertically downward to the beam separator 31, and imaging light separated by the beam separator 31 An imaging optical path C3 that guides to the electronic camera 37 side in the horizontal direction and a laser beam that arrives via the laser irradiation optical path C2 are guided vertically downward to the objective lens 32, and the imaging light that comes from the objective lens 32 And a shared optical path C1 for guiding the beam to the beam separator 31 vertically upward. Reference numeral 35 denotes an LED illuminator for illuminating the field of view of the camera.

  In other words, the laser irradiation optical system 3 is a coaxial incident optical system having a vertical laser irradiation optical path C2, a horizontal photographing optical path C3, and a vertical shared optical path C1 that combines and integrates these optical paths. It is composed.

  The laser beam emitted vertically downward from the objective lens 32 is condensed at a predetermined distance on the emission optical path by the condensing action of the objective lens 32 to generate a condensing point. The thin film transfer process by laser irradiation is performed at a laser condensing point generated at a predetermined distance on the outgoing optical path.

  On the other hand, the electronic camera 37 is always focused so as to focus on the object located at the laser focusing point. In addition, the electronic camera 37 has a built-in function for determining and outputting to the outside whether or not the camera is in focus based on the video signal. The entire laser irradiation optical system 3 is vertically movable by an arbitrary distance along the Z-direction guide rail 38 by the action of a ball screw mechanism (not shown) and a drive motor.

  Accordingly, if the focus determination output of the electronic camera 37 is monitored while raising or lowering the entire laser irradiation optical system 3, it can be determined whether or not the condensing point matches the laser irradiation object. Further, if the focus determination output of the electronic camera 37 is monitored while measuring the descent distance from a certain reference height, the laser irradiation target is measured from the reference height based on the descent distance measurement value until the focus is achieved. You can know the descent distance to the object. As will be described later, in this embodiment, the height direction positioning control of the transfer plate is realized by utilizing the action of the laser irradiation optical system 3 described above.

  In FIG. 18, reference numeral 36 denotes a rotary disk that supports a plurality of objective lenses on the circumference, and 33 denotes a rotary encoder that is used for controlling the rotation angle of the rotary disk 32, which enables automatic replacement of the objective lenses. Yes.

  FIG. 19 is an external perspective view of the transfer head, FIG. 20 is an exploded perspective view thereof, FIG. 21 is an external perspective view in an upside down state, and FIG. 22 is a plan view thereof.

  As is clear from these drawings, the transfer head 1 is mainly composed of a transfer head body 11. The transfer head body 11 has an attachment portion 11 a for attachment to the X-direction drive portion 21 and a support portion 11 b for supporting the transfer plate holder 13.

  A space 11c is formed in the center of the support portion 11b, and the holder 13 is accommodated in the space 11c. In order to support the holder 13 in the space 11c, the leaf spring 12 is used in this example. The leaf spring 12 has a substantially square shape, and an opening 12a is formed at the center thereof, and punching holes 12b and 12c and screw holes 12d and 12e are formed on the outer periphery of the opening 12a. Those skilled in the art will readily understand that these spring holes 12b and 12c provide local springiness.

  The plate spring 12 and the holder 13 are coupled through a screw hole 12e on the plate spring 12 side and a screw hole 13b on the holder 13 side. Further, the plate spring 12 and the support portion 11b are coupled through the plate spring 12 side screw hole 12d and the screw hole 12d on the support portion 11b side.

  Accordingly, the holder 13 is configured to be restricted from moving in the horizontal direction in the space 11 c and to be allowed to move in the vertical direction within the elastic range of the leaf spring 12.

  Two locations on the outer peripheral surface of the holder 13 are provided with pressurized air inlet holes (not shown), and a plurality of pressurized air outlet holes are arranged in an annular manner on the lower surface thereof so as to be aligned with the pressurized air injection holes on the transfer plate. ing. An annular internal passage is formed between the inlet hole and the outlet hole. The connectors 15e and 15f are fixed to the pressurized air inlet on the holder 13 side.

  Two connectors 15c and 15d are fixed to the inner peripheral surface of the space 11c provided in the support portion 11b, and two connectors 15a and 15b are fixed to the outer peripheral surface of the support portion 11b. Here, the connector 15a communicates with the connector 15c, and the connector 15b communicates with the connector 15d. The connector 15e and the connector 15c are connected via a flexible tube 16a, and the connector 15f and the connector 15d are similarly connected via a flexible tube 16b. Since the connector 15a and the connector 15b are each formed with a plug for connecting a tube, it is possible to supply pressurized air from the support portion 11b to the inside of the holder 13 by inserting a flexible tube therein. .

  A transfer window 13a is opened at the center of the holder 13, and the transfer plate 14 held on the lower surface side is exposed from the transfer window 13a. In this example, the transfer plate 14 is fixed to the lower surface of the holder 13 with an adhesive. On the back surface of the transfer plate 14, a plurality of ejection ports 14 a are arranged at appropriate intervals along the circumference. When pressurized air is supplied from the connectors 15a and 15b, the supplied pressurized air is ejected from the ejection port 14a on the back surface side of the transfer plate 14 toward the transfer object. As a result, the transfer plate 14 floats together with the holder 13.

When performing repair work with the wiring pattern repair device having the above configuration, first,
An XY positioning mechanism (not shown) is operated to position the objective lens 32 included in the laser transfer unit 100 directly above the repair location. For this positioning, open-loop positioning control based on the XY coordinates of the repair location and the XY coordinates of the optical axis of the objective lens 32, the position of the repair location obtained by image processing of the video of the electronic camera 37, and the electronic camera Servo loop positioning control that is performed while measuring the distance from the reference point in the field of view is also used.

  If the optical axis of the objective lens 32 is positioned right above the repair location, then the three-dimensional positioning mechanism 2 is operated to not block the optical axis from the overlapping position that blocks the optical axis of the objective lens 32. After the transfer head 1 is retracted to the retracted position, the entire laser irradiation optical system 3k is lowered, and the focus determination output of the electronic camera 37 is monitored, and a predetermined reference height is determined from the lowered distance up to the point of focus. Then, the distance (A) to the repair object upper surface is acquired.

  Next, the three-dimensional positioning mechanism is actuated again to return the transfer head 1 from the retracted position where the optical axis of the objective lens 32 is not blocked to the overlapping position where the optical axis of the objective lens 32 is blocked. Thus, while the entire laser irradiation optical system 3 is lowered, the focus determination output of the electronic camera 37 is monitored, and the distance from the predetermined reference height to the upper surface of the repair target object from the lowered distance up to the point of focus. (B) is acquired.

  Next, after calculating the distance (X) {(A)-(B)} between the transfer plate and the repair object based on the distance (A) and the distance (B), the transfer from the repair object surface is performed. The height to the plate 101 (H1: about 5 mm) is set as the first target height, and the transfer head body 104 is lowered by open loop control by the descent distance (X-H1) up to that point. If the transfer head body 104 is lowered by the open distance control by the descending distance (X-H1), then the height (H2: about 100 μm) from the repair target surface to the transfer plate 101 is set to the second. As the target height, the transfer head body 104 is lowered by the open loop control by the descent distance (X-H1-H2).

  At this time, since the second target height (H2) is set within a height region where the self-lifting action by the pressurized air injection starts to operate, the transfer head body 104 reaches the second target height (H2). In the middle of descending, the transfer plate holder 103 rises by itself relative to the transfer head body 104. Therefore, even if there is some error in the open loop control for approaching the first and second target heights, or even if the surface height fluctuates due to the repair object side, the transfer head 1 is lowered. In this process, it is possible to reliably avoid the possibility that the transfer plate 101 collides with the repair target object and damages the surface, and the distance between the transfer plate 101 and the repair target is determined by the self-levitation action by the pressurized air injection. By appropriately setting the pressure or flow rate of the pressurized air, the optimum range (for example, 5 to 20 μm) is maintained.

  Then, when a laser beam is driven by driving a laser source (not shown), a thin film of a transfer material corresponding to the irradiation spot (for example, on the line) is transferred to the repair target portion, and if necessary, close to it. When the transfer head 1 is shifted in the horizontal direction by a predetermined pitch while maintaining the distance, the above one-shot irradiation is repeated a plurality of times.

  Then, a plurality of thin films of the transfer material are laminated at the repair target portion, and a necessary lamination thickness is obtained. During this horizontal shift, pressure air such as nitrogen gas is injected, so that the transfer portion is cooled and the gap is maintained at the same time. It is possible to prevent a situation in which a collision occurs and this is destroyed.

  As described above, according to the transfer head 1 of the present invention, the distance between the transfer plate 101 and the transfer object can be held at a predetermined fine distance by jetting pressurized air, so that the drive in the Z direction is performed. As for the electrical control via the section 23, it is only necessary to roughly control until the transfer plate approaches the transfer object to some extent, and thereafter, the floating action by the gas jetting acts to make the transfer plate safe. Therefore, even when there are many defective portions on the display device or the like to be repaired, the transfer head 1 is moved to these portions sequentially at a high speed. The lowering process can be repeated at high speed, and the tact time of this type of work can be greatly reduced.

  According to the present invention, in this type of laser transfer apparatus represented by a laser repair apparatus, it is possible to always maintain the distance between the transfer material thin film and the transfer object on the order of microns (for example, 5 to 20 μm). There are advantages.

It is a block diagram of 1st Embodiment. It is explanatory drawing of the piping system of 1st Embodiment. It is a block diagram of 2nd Embodiment. It is explanatory drawing of the piping system of 2nd Embodiment. It is a block diagram of 3rd Embodiment. It is a block diagram of 4th Embodiment. It is a block diagram of 5th Embodiment. It is explanatory drawing of the piping system of 5th Embodiment. It is a block diagram of 6th Embodiment. It is a block diagram of 7th Embodiment. It is a block diagram of 8th Embodiment. It is a block diagram of 9th Embodiment. It is a block diagram of 10th Embodiment. It is a block diagram of 11th Embodiment. It is a block diagram of 12th Embodiment. It is a block diagram of 13th Embodiment. It is a block diagram of 14th Embodiment. 1 is an external perspective view of a wiring pattern repair device to which the present invention is applied. It is an external perspective view of a transfer head. It is a disassembled perspective view of a transfer head. It is an external perspective view of the transfer head in an upside down state. It is a top view of a transfer head. It is explanatory drawing of the laser transfer method used as the premise of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Transfer head 2 Three-dimensional positioning mechanism 3 Laser irradiation optical system 4 Laser beam 11 Transfer head machine body 11a Mounting part 11b Support part 11c Space 12 Leaf spring 12a Opening 12b Punching hole 12c Punching hole 12d Screw hole 12e Screw hole 13 Transfer plate holder 13a transfer window 13b screw hole 14 transfer plate 14a injection port 15a connector 15b connector 15c connector 15d connector 15e connector 15f connector 16a flexible tube 16b flexible tube 21 X-direction drive unit 22 Y-direction drive unit 23 Z-direction drive unit 31 Beam separator 32 Objective lens 33 Rotary encoder 34 Beam shaping mechanism 35 LED illuminator 36 Rotating disk 37 Electronic camera 38 Z direction guide rail 39 Entrance 100 Laser transfer unit 101 Transfer plate 1 01a Pressure air injection hole 102 Transfer object 102a Transfer surface 103 Transfer plate holder 103a Transfer window 103b Pressure air inlet hole 103c Pressure air outlet hole 103d Holder internal pressure air passage 103e Suction hole 103f Suction hole 103g Internal passage 103h Outer flange portion 103i Flange portion 103k Hole 103l Combined hole 103m Pressure passage 104 Transfer head body 104a Transfer plate holder accommodating space 104b Step 104c Pressure injection port 104d Pressure air injection port 104e Pressure air reception port 104f Internal passage 104g Transparent window plate 104h Cylinder member 104i Annular step portion 104j Chamber 104k Piston member 105 Pressure air 106 Leaf spring 107 Flexible tube 107a Pressure air injection nozzle 107A First pressure air supply tube 107B Second pressure air supply tube 10 Suction tube 109 Adhesive 110 Steel ball guide 111 Compression spring 112 Resin bearing 113 Tube 113a Nozzle 114a Nozzle 115 Nozzle 116 Coupler 116a Compressed air injection nozzle 117 Tube 118 Vacuum line 120 Compressed air line 121 Annular ridge 122 Sealing part 123 Cavity C1 Common Optical path C2 Optical path for laser irradiation C3 Optical path for photographing

Claims (20)

A transfer plate made by depositing a thin film of transfer material on the objective surface of a plate-shaped piece having laser transparency, and a substantially horizontal gap between the two is maintained so that a substantially constant gap is maintained between them. A transfer head of a laser transfer device for supporting a transfer material thin film on a surface thereof,
A transfer plate holder in which the transfer plate is held on the lower surface, and a transfer window for exposing the transfer plate to the upper surface side is opened;
A transfer head body having a space for accommodating the transfer plate holder and providing a position reference in a horizontal direction and a vertical direction;
A holder support mechanism for supporting a transfer plate holder accommodated in a space for accommodating a transfer plate holder of the transfer head machine body so as to be movable up and down and not horizontally movable with respect to the transfer head machine body;
A transfer plate floating means for floating the transfer plate together with the transfer plate holder with respect to the transfer surface by injecting pressure air below the transfer plate holder;
A transfer head of a laser transfer apparatus characterized by the above. The holder support mechanism is
The transfer plate with respect to the transfer head body with the inner peripheral edge of the transfer plate holder accommodating space as a fixed end and the outer peripheral edge of the transfer plate holder accommodated in the transfer plate holder accommodating space as a free end. It is configured by a leaf spring that supports the holder so that the holder can move up and down.
The transfer head of the laser transfer apparatus according to claim 1. The holder support mechanism is
The transfer plate holder is interposed between an inner peripheral surface of the transfer plate holder accommodating space and an outer peripheral surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, with respect to the transfer head body. It is composed of a steel ball guide that supports between the two so that it can move up and down,
The transfer head of the laser transfer apparatus according to claim 1. The holder support mechanism is
The transfer plate holder is interposed between an inner peripheral surface of the transfer plate holder accommodating space and an outer peripheral surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, with respect to the transfer head body. It is composed of a compression spring that elastically presses and supports the two so that it can move up and down,
The transfer head of the laser transfer apparatus according to claim 1. The holder support mechanism is
The transfer plate holder is interposed between an inner peripheral surface of the transfer plate holder accommodating space and an outer peripheral surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, with respect to the transfer head body. Composed of resin bearings that slidably support the two so that they can move up and down,
The transfer head of the laser transfer apparatus according to claim 1. The holder support mechanism is
The inner diameter of the inner peripheral surface of the transfer plate holder accommodating space and the outer diameter of the outer peripheral surface of the transfer plate holder accommodated in the transfer plate holder accommodating space are substantially the same diameter, and both can be slid up and down. Constructed by a coupler structure that supports fitting.
The transfer head of the laser transfer apparatus according to claim 1. The holder support mechanism is
A plurality of pressurized air injection nozzles disposed on the inner peripheral surface of the transfer plate holder housing space at an appropriate distance in the circumferential direction;
An annular groove that is provided on the outer peripheral surface of the transfer plate holder housed in the transfer plate holder housing space and receives the pressure air injected from the plurality of pressure air injection nozzles,
The transfer head of the laser transfer apparatus according to claim 1. The transfer plate floating means
A pressure supply means for supplying pressure air from a predetermined pressure source to the pressure inlet hole of the transfer plate holder;
A pressure air passage in the holder that connects the pressure air inlet hole of the transfer plate holder and a plurality of pressure air outlet holes on the lower surface of the transfer plate holder;
A plurality of pressurized air injection holes which are on the transfer plate and align with the plurality of pressurized air outlet holes on the lower surface of the transfer plate holder;
Thereby, the pressure air from the pressure air source is jetted to the lower side of the transfer plate holder via the pressure air injection hole of the transfer plate through the holder internal pressure air passage, thereby the surface to be transferred. Floating the transfer plate together with the transfer plate holder;
The transfer head of the laser transfer apparatus according to claim 1. The pressure supply means is
A flexible tube connecting the pressure source and the pressure inlet hole of the transfer plate holder;
The transfer head of the laser transfer apparatus according to claim 6. The pressure supply means is
A pressure air injection nozzle that is in an inner peripheral surface of the transfer plate holder accommodating space and introduces pressure air to a pressure air inlet hole located on the outer peripheral surface of the transfer plate holder in a non-contact manner;
The transfer head of the laser transfer apparatus according to claim 6. The transfer plate floating means
On the lower surface of the inner peripheral edge of the space for accommodating the transfer plate holder of the transfer head body, and having a plurality of pressurized air injection holes for injecting pressurized air from a pressurized air source,
Accordingly, the transfer plate is ejected from the pressure air injection hole on the lower surface of the inner peripheral edge of the transfer plate holder accommodating space of the transfer head body to the lower side of the transfer plate holder, thereby the transfer plate to the transfer surface. Levitate together with the transfer plate holder,
The transfer head of the laser transfer apparatus according to claim 1. A plurality of pressurized air injection holes for injecting pressurized air from a pressurized air source on the inner peripheral surface of the transfer plate holder accommodating space of the transfer head body;
Thereby, by assisting the floating action of the transfer plate holder by injecting the pressure air from the pressure source to the lower surface of the flange portion protruding radially outward from the outer periphery of the transfer plate holder,
The transfer head of the laser transfer apparatus according to claim 11. On the lower surface of the transfer plate holder is formed an annular ridge that hangs downward along the outer periphery of the transfer plate holder,
Thereby, a space that functions as a pressure reservoir appears between the outer peripheral surface of the transfer plate held on the lower surface of the transfer plate holder and the inner peripheral surface of the annular protrusion,
The transfer head of the laser transfer apparatus according to claim 11. The holder support mechanism is
The upper surface opening is closed with a transparent window plate, the lower surface opening is opened, and the inner peripheral edge of the lower surface opening is provided with an annular step for piston removal. The transfer plate holder that holds the transfer plate is slidably accommodated up and down, and the transfer plate floating means includes:
The pressure member is configured to introduce pressure air into the chamber of the cylinder member and to inject the pressure air from the lower surface of the transfer plate through the laminate of the transfer plate holder and the transfer plate functioning as the piston member. ing,
The transfer head of the laser transfer apparatus according to claim 1. A transfer plate made by depositing a thin film of transfer material on the objective surface of a plate-shaped piece having laser transparency, and a substantially horizontal gap between the two is maintained so that a substantially constant gap is maintained between them. A transfer head of a laser transfer device for supporting a transfer material thin film on a surface thereof,
A transfer plate holder in which the transfer plate is held on the lower surface, and a transfer window for exposing the transfer plate to the upper surface side is opened;
A transfer head body having a space for accommodating the transfer plate holder, and providing a position reference in the horizontal direction and the vertical direction;
On the inner peripheral surface of the space for accommodating the transfer plate holder of the transfer head body, a nozzle that is used for suction and jet directed obliquely downward to the inside of the space has an appropriate distance in the circumferential direction. A plurality are arranged apart,
Inside the transfer plate holder accommodated in the space for accommodating the transfer plate holder of the transfer head body, there are a gas inlet / outlet hole arranged on the outer peripheral surface of the transfer plate holder and a gas arranged on the lower surface of the transfer plate holder. An obliquely downward pressure air passage communicating with the entrance / exit hole is formed, and each of the plurality of nozzles on the transfer head body side acts as a suction nozzle, whereby the transfer plate is moved together with the transfer plate holder. , An operation in an adsorption mode for adsorbing to the transfer head body,
By causing each of the plurality of nozzles on the transfer head body side to act as ejection nozzles, by introducing the pressure air ejected from each of the nozzles into each of the gas inlet / outlet holes on the outer peripheral surface of the transfer plate holder , By injecting pressure air from the lower surface side of the transfer plate, the operation of the levitation mode to float the transfer plate,
By switching from the suction mode to the levitation mode and switching from the levitation mode to the suction mode instantaneously, it is possible to move between both modes without dropping the transfer plate.
A transfer head control method for a laser transfer apparatus. As a means for holding the transfer plate on the transfer plate holder, an adhesive is employed,
The method of controlling a transfer head of a laser transfer apparatus according to claim 15. A transfer plate made by depositing a thin film of transfer material on the objective surface of a plate-shaped piece having laser transparency, and a substantially horizontal gap between the two is maintained so that a substantially constant gap is maintained between them. A transfer head of a laser transfer device for supporting a transfer material thin film on a surface thereof,
A transfer head body that provides a position reference in the horizontal and vertical directions;
A transfer plate, and
The transfer head body side is provided with a plurality of nozzles that project to the transfer plate side and are used for both suction and jetting,
The transfer plate side is provided with a plurality of through holes having a hole shape that is aligned with the plurality of nozzles and conforms to the tip shape of the nozzles, and further includes a plurality of nozzles on the transfer head body side. By operating each as a suction nozzle, each of these nozzles is fitted into a plurality of through-holes on the transfer plate side so that the transfer plate is attracted to the transfer head body,
By causing each of the plurality of nozzles on the transfer head body side to act as ejection nozzles, by introducing the pressure air ejected from each of the nozzles into the corresponding through holes on the transfer plate side, By injecting pressure air from the lower surface side of the transfer plate, the operation of the levitation mode to float the transfer plate,
By switching from the suction mode to the levitation mode and switching from the levitation mode to the suction mode instantaneously, it is possible to move between both modes without dropping the transfer plate.
A transfer head control method for a laser transfer apparatus. As a means for holding the transfer plate on the transfer plate holder, an adhesive is employed,
The transfer head of the laser transfer apparatus according to any one of claims 1 to 14, As means for holding the transfer plate on the transfer plate holder, vacuum suction means is adopted,
The transfer head of the laser transfer apparatus according to any one of claims 1 to 14, As a means for holding the transfer plate on the transfer plate holder, a coupling mechanism is employed,
The transfer head of the laser transfer apparatus according to any one of claims 1 to 14,

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