JP2008218953A - 圧電振動体、電子機器、圧電振動体の製造方法 - Google Patents
圧電振動体、電子機器、圧電振動体の製造方法 Download PDFInfo
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- JP2008218953A JP2008218953A JP2007058188A JP2007058188A JP2008218953A JP 2008218953 A JP2008218953 A JP 2008218953A JP 2007058188 A JP2007058188 A JP 2007058188A JP 2007058188 A JP2007058188 A JP 2007058188A JP 2008218953 A JP2008218953 A JP 2008218953A
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- piezoelectric element
- reinforcing member
- piezoelectric
- reinforcing plate
- metal
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Images
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007058188A JP2008218953A (ja) | 2007-03-08 | 2007-03-08 | 圧電振動体、電子機器、圧電振動体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007058188A JP2008218953A (ja) | 2007-03-08 | 2007-03-08 | 圧電振動体、電子機器、圧電振動体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008218953A true JP2008218953A (ja) | 2008-09-18 |
| JP2008218953A5 JP2008218953A5 (enExample) | 2010-04-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007058188A Withdrawn JP2008218953A (ja) | 2007-03-08 | 2007-03-08 | 圧電振動体、電子機器、圧電振動体の製造方法 |
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| Country | Link |
|---|---|
| JP (1) | JP2008218953A (enExample) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010095559A (ja) | 2008-10-14 | 2010-04-30 | Hitachi Chem Co Ltd | 絶縁体インクとそれを用いた印刷配線基板 |
| CN102738382A (zh) * | 2011-03-29 | 2012-10-17 | 株式会社尼康 | 具有通过常温真空接合而接合的振动部的振动执行机构 |
| JP2013121190A (ja) * | 2011-12-06 | 2013-06-17 | Seiko Epson Corp | アクチュエーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置およびプリンター |
| JP2015106677A (ja) * | 2013-12-02 | 2015-06-08 | 三菱電機株式会社 | 半導体素子の基板への接合方法 |
| JP2017093194A (ja) * | 2015-11-13 | 2017-05-25 | セイコーエプソン株式会社 | 圧電アクチュエーター、積層アクチュエーター、圧電モーター、ロボット、ハンド及び送液ポンプ |
| JP2017152533A (ja) * | 2016-02-24 | 2017-08-31 | 日本特殊陶業株式会社 | 圧電アクチュエータの製造方法 |
| JP2024508247A (ja) * | 2021-02-15 | 2024-02-26 | ティーディーケイ・エレクトロニクス・アクチェンゲゼルシャフト | 装置及び装置の製造方法 |
-
2007
- 2007-03-08 JP JP2007058188A patent/JP2008218953A/ja not_active Withdrawn
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010095559A (ja) | 2008-10-14 | 2010-04-30 | Hitachi Chem Co Ltd | 絶縁体インクとそれを用いた印刷配線基板 |
| CN102738382A (zh) * | 2011-03-29 | 2012-10-17 | 株式会社尼康 | 具有通过常温真空接合而接合的振动部的振动执行机构 |
| JP2012210024A (ja) * | 2011-03-29 | 2012-10-25 | Nikon Corp | 振動体、振動アクチュエータ、レンズ鏡筒、カメラ及び振動体の接合方法 |
| JP2013121190A (ja) * | 2011-12-06 | 2013-06-17 | Seiko Epson Corp | アクチュエーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置およびプリンター |
| US9391257B2 (en) | 2011-12-06 | 2016-07-12 | Seiko Epson Corporation | Actuator, robot hand, robot, electronic component carrying device, electronic component inspection device, and printer |
| JP2015106677A (ja) * | 2013-12-02 | 2015-06-08 | 三菱電機株式会社 | 半導体素子の基板への接合方法 |
| JP2017093194A (ja) * | 2015-11-13 | 2017-05-25 | セイコーエプソン株式会社 | 圧電アクチュエーター、積層アクチュエーター、圧電モーター、ロボット、ハンド及び送液ポンプ |
| US10497854B2 (en) | 2015-11-13 | 2019-12-03 | Seiko Epson Corporation | Piezoelectric actuator, stacked actuator, piezoelectric motor, robot, hand, and liquid transport pump |
| JP2017152533A (ja) * | 2016-02-24 | 2017-08-31 | 日本特殊陶業株式会社 | 圧電アクチュエータの製造方法 |
| JP2024508247A (ja) * | 2021-02-15 | 2024-02-26 | ティーディーケイ・エレクトロニクス・アクチェンゲゼルシャフト | 装置及び装置の製造方法 |
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