JP2008211209A - マイクロレンズ保護パターンを有する撮像素子、カメラモジュール、及びその製造方法 - Google Patents
マイクロレンズ保護パターンを有する撮像素子、カメラモジュール、及びその製造方法 Download PDFInfo
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- JP2008211209A JP2008211209A JP2008033612A JP2008033612A JP2008211209A JP 2008211209 A JP2008211209 A JP 2008211209A JP 2008033612 A JP2008033612 A JP 2008033612A JP 2008033612 A JP2008033612 A JP 2008033612A JP 2008211209 A JP2008211209 A JP 2008211209A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 239000004065 semiconductor Substances 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 229920006254 polymer film Polymers 0.000 claims abstract description 23
- 150000004767 nitrides Chemical class 0.000 claims abstract description 11
- 230000001681 protective effect Effects 0.000 claims description 71
- 238000000034 method Methods 0.000 claims description 29
- 238000002834 transmittance Methods 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 9
- 239000011347 resin Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 27
- 239000012535 impurity Substances 0.000 description 15
- 239000000356 contaminant Substances 0.000 description 13
- 238000002955 isolation Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 238000004380 ashing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
- H02G1/00—Methods or apparatus specially adapted for installing, maintaining, repairing or dismantling electric cables or lines
- H02G1/06—Methods or apparatus specially adapted for installing, maintaining, repairing or dismantling electric cables or lines for laying cables, e.g. laying apparatus on vehicle
- H02G1/08—Methods or apparatus specially adapted for installing, maintaining, repairing or dismantling electric cables or lines for laying cables, e.g. laying apparatus on vehicle through tubing or conduit, e.g. rod or draw wire for pushing or pulling
- H02G1/083—Methods or apparatus specially adapted for installing, maintaining, repairing or dismantling electric cables or lines for laying cables, e.g. laying apparatus on vehicle through tubing or conduit, e.g. rod or draw wire for pushing or pulling using lines, e.g. needles, rods or tapes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B7/00—Connections of rods or tubes, e.g. of non-circular section, mutually, including resilient connections
- F16B7/04—Clamping or clipping connections
- F16B7/0406—Clamping or clipping connections for rods or tubes being coaxial
- F16B7/0413—Clamping or clipping connections for rods or tubes being coaxial for tubes using the innerside thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B7/00—Connections of rods or tubes, e.g. of non-circular section, mutually, including resilient connections
- F16B7/10—Telescoping systems
- F16B7/14—Telescoping systems locking in intermediate non-discrete positions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
- H02G1/00—Methods or apparatus specially adapted for installing, maintaining, repairing or dismantling electric cables or lines
- H02G1/06—Methods or apparatus specially adapted for installing, maintaining, repairing or dismantling electric cables or lines for laying cables, e.g. laying apparatus on vehicle
- H02G1/08—Methods or apparatus specially adapted for installing, maintaining, repairing or dismantling electric cables or lines for laying cables, e.g. laying apparatus on vehicle through tubing or conduit, e.g. rod or draw wire for pushing or pulling
- H02G1/081—Methods or apparatus specially adapted for installing, maintaining, repairing or dismantling electric cables or lines for laying cables, e.g. laying apparatus on vehicle through tubing or conduit, e.g. rod or draw wire for pushing or pulling using pulling means at cable ends, e.g. pulling eyes or anchors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/57—Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/10—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming different wavelengths into image signals
- H04N25/11—Arrangement of colour filter arrays [CFA]; Filter mosaics
- H04N25/13—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements
- H04N25/134—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements based on three different wavelength filter elements
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
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- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mechanical Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Studio Devices (AREA)
Abstract
【解決手段】撮像素子は半導体基板に設けられた複数のフォトダイオードを備える。前記フォトダイオード上に平らな上部表面を有する絶縁膜が配置される。前記絶縁膜上に設けられて前記フォトダイオードの上部にそれぞれ配置した複数のマイクロレンズを提供する。前記マイクロレンズは保護パターンにより覆われている。前記保護パターンはオキサイド系感光性ポリマー膜またはナイトライド系感光性ポリマー膜とすることができる。前記保護パターンは平らな上部表面を有する。
【選択図】図4
Description
12、52 活性領域
13、53 素子分離膜
15、55 P型不純物領域
16、56 N型不純物領域
17、57 フォトダイオード
19、59 下部絶縁膜
21、61 相互配線
23、62 ボンドパッド
25W、62W パッド窓
25、65 上部絶縁膜
27、67 カラーフィルタ
29、71 マイクロレンズ
36 センサケース
37 投光窓
38 レンズホルダ
39 レンズ
40 ケース
43 印刷回路基板
44 内部配線
45 外部端子
46 ボンドフィンガー
47 ボンディングワイヤ
73 保護膜
73W 開口部
73’ 保護パターン
75 撮像素子
Claims (23)
- 半導体基板に設けられた複数のフォトダイオードと、
前記フォトダイオード上に配置されて平らな上部表面を有する絶縁膜と、
前記絶縁膜上に設けられて前記フォトダイオードの上部にそれぞれ配置された複数のマイクロレンズと、
前記マイクロレンズを覆う保護パターンと、
を含むことを特徴とする撮像素子。 - 前記保護パターンは、平らな上部表面を有することを特徴とする請求項1に記載の撮像素子。
- 前記保護パターンは、オキサイド系感光性ポリマー膜またはナイトライド系感光性ポリマー膜であることを特徴とする請求項1に記載の撮像素子。
- 前記保護パターンは、80〜99.9%の光透過率を有することを特徴とする請求項3に記載の撮像素子。
- 前記絶縁膜内に設けられた複数のカラーフィルタをさらに含み、前記カラーフィルタは前記フォトダイオードと前記マイクロレンズとの間に配置されていることを特徴とする請求項1に記載の撮像素子。
- 前記絶縁膜内に配置された相互配線をさらに含み、前記相互配線は前記フォトダイオードを塞がないように配置され、前記相互配線は前記フォトダイオードに電気的に接続されていることを特徴とする請求項1に記載の撮像素子。
- 前記絶縁膜は樹脂膜を備えることを特徴とする請求項1に記載の撮像素子。
- 投光窓を有するケースと、
前記ケースに装着されて複数の外部端子を備える印刷回路基板と、
前記印刷回路基板に装着された半導体基板と、
前記半導体基板に設けられた複数のフォトダイオードと、
前記フォトダイオードを有する前記半導体基板を覆う下部絶縁膜と、
前記下部絶縁膜上に配置されて平らな上部表面を有する上部絶縁膜と、
前記上部絶縁膜上に設けられて前記フォトダイオードの上部にそれぞれ配置された複数のマイクロレンズと、
前記マイクロレンズを覆う保護パターンと、
を含み、
前記保護パターンは前記ケース内に配置され、前記投光窓は前記保護パターン上に整列されていることを特徴とするカメラモジュール。 - 前記保護パターンは、平らな上部表面を有することを特徴とする請求項8に記載のカメラモジュール。
- 前記保護パターンは、オキサイド系感光性ポリマー膜またはナイトライド系感光性ポリマー膜であることを特徴とする請求項8に記載のカメラモジュール。
- 前記保護パターンは、80〜99.9%の光透過率を有することを特徴とする請求項10に記載のカメラモジュール。
- 前記上部絶縁膜内に設けられた複数のカラーフィルタをさらに含み、前記カラーフィルタは前記フォトダイオードと前記マイクロレンズとの間に配置されていることを特徴とする請求項8に記載のカメラモジュール。
- 前記印刷回路基板は、
ボンドフィンガーと、
前記ボンドフィンガー及び前記外部端子に接触された内部配線と、
をさらに含むことを特徴とする請求項8に記載のカメラモジュール。 - 前記下部絶縁膜上に配置されて前記フォトダイオードを塞がない相互配線と、
前記下部絶縁膜上に配置されて前記相互配線と離隔されたボンドパッドと、
をさらに含み、
前記相互配線は前記フォトダイオードに電気的に接続され、前記ボンドパッドは前記ボンドフィンガーに電気的に接続されていることを特徴とする請求項13に記載のカメラモジュール。 - 半導体基板に複数のフォトダイオードを形成する段階と、
前記フォトダイオード上に平らな上部表面を有する絶縁膜を形成する段階と、
前記絶縁膜上に複数のマイクロレンズを形成し、前記マイクロレンズのそれぞれは前記フォトダイオードの上部に整列される段階と、
前記マイクロレンズを覆う保護パターンを形成する段階と、
を含むことを特徴とする撮像素子の製造方法。 - 前記保護パターンを形成する段階は、
前記マイクロレンズを有する前記半導体基板上に保護膜を形成する段階と、
露光工程及び現像工程を用いて前記保護膜をパターニングする段階と、
を含むことを特徴とする請求項15に記載の撮像素子の製造方法。 - 前記保護膜は、オキサイド系感光性ポリマー膜またはナイトライド系感光性ポリマー膜で形成することを特徴とする請求項16に記載の撮像素子の製造方法。
- 前記保護膜は、80〜99.9%の光透過率を有する物質膜で形成することを特徴とする請求項17に記載の撮像素子の製造方法。
- 前記保護パターンは、平らな上部表面を有するように形成することを特徴とする請求項15に記載の撮像素子の製造方法。
- 前記絶縁膜を形成する段階は、
前記フォトダイオードを有する前記半導体基板上に下部絶縁膜を形成する段階と、
前記下部絶縁膜上に上部絶縁膜を形成する段階と、
を含むことを特徴とする請求項15に記載の撮像素子の製造方法。 - 前記下部絶縁膜上に相互配線及びボンドパッドを形成する段階と、
前記上部絶縁膜内に複数のカラーフィルタを形成する段階と、
をさらに含むことを特徴とする請求項20に記載の撮像素子の製造方法。 - 前記保護パターンをエッチングマスクとして用いて前記ボンドパッドが露出するまで前記上部絶縁膜をエッチングすることをさらに含むことを特徴とする請求項21に記載の撮像素子の製造方法。
- 前記上部絶縁膜を形成する段階は、
前記下部絶縁膜上に樹脂膜を形成する段階を含むことを特徴とする請求項20に記載の撮像素子の製造方法。
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KR10-2007-0018447 | 2007-02-23 | ||
KR1020070018447A KR100881458B1 (ko) | 2007-02-23 | 2007-02-23 | 마이크로렌즈 보호패턴을 갖는 촬상소자, 카메라모듈, 및그 제조방법 |
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JP2008211209A true JP2008211209A (ja) | 2008-09-11 |
JP5590696B2 JP5590696B2 (ja) | 2014-09-17 |
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JP2008033612A Expired - Fee Related JP5590696B2 (ja) | 2007-02-23 | 2008-02-14 | 撮像素子の製造方法 |
JP2014101343A Expired - Fee Related JP5876104B2 (ja) | 2007-02-23 | 2014-05-15 | マイクロレンズ保護パターンを有する撮像素子、カメラモジュール |
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US9420155B2 (en) * | 2012-09-13 | 2016-08-16 | Apple Inc. | Compact optic design for digital image capture devices |
US20160190353A1 (en) * | 2014-12-26 | 2016-06-30 | Xintec Inc. | Photosensitive module and method for forming the same |
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US20080203508A1 (en) | 2008-08-28 |
KR100881458B1 (ko) | 2009-02-06 |
JP5876104B2 (ja) | 2016-03-02 |
JP2014150290A (ja) | 2014-08-21 |
JP5590696B2 (ja) | 2014-09-17 |
US7704779B2 (en) | 2010-04-27 |
KR20080078384A (ko) | 2008-08-27 |
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