JP2008166738A - 半導体装置の作製方法 - Google Patents
半導体装置の作製方法 Download PDFInfo
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- JP2008166738A JP2008166738A JP2007306733A JP2007306733A JP2008166738A JP 2008166738 A JP2008166738 A JP 2008166738A JP 2007306733 A JP2007306733 A JP 2007306733A JP 2007306733 A JP2007306733 A JP 2007306733A JP 2008166738 A JP2008166738 A JP 2008166738A
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- semiconductor film
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- semiconductor device
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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Abstract
【解決手段】半導体膜の表面に断面が三角形の凸部を形成する。凸部の形状は錐体または三角柱である。半導体膜の凸部に入射したレーザビームは大きく屈折され、凸部と空気との界面で全反射されながら、基板に向かって進む。また、凸部からレーザビームを半導体膜に入射させているため、絶縁膜と半導体の界面に入射したレーザビームが全反射する確率が高くなる。このように、凸部からレーザビームを半導体膜に入射させることで、レーザビームが半導体膜中を伝搬している時間が長くなり、半導体膜の吸収率を増加させることができる。
【選択図】図4
Description
本実施の形態では、断面が三角形の凸部を半導体膜の表面に形成して、半導体膜を結晶化する方法を説明する。図1乃至図5を用いて、半導体膜の結晶化方法を説明する。
本実施の形態では、表面に断面が三角形の凸部を有する絶縁膜上に半導体膜を形成して、半導体膜を結晶化する方法を説明する。図6乃至図7を用いて、半導体膜の結晶化方法を説明する。
本実施の形態では、断面が三角形の凸部を有する光吸収膜を半導体膜の表面に形成して、半導体膜を結晶化する方法を説明する。図8および図9を用いて、半導体膜の結晶化方法を説明する。
本実施の形態では、断面が三角形の凸部を有する反射防止膜を半導体膜の表面に形成して、半導体膜を結晶化する方法を説明する。図10を用いて、半導体膜の結晶化方法を説明する。
11 絶縁膜
12 半導体膜
12a 凸部
13 結晶性半導体膜
14 結晶性半導体膜
14a チャネル形成領域
14b 高濃度不純物領域
17 ゲート絶縁膜
18 ゲート電極
19 層間絶縁膜
20 電極
41 絶縁膜
42 半導体膜
43 結晶性半導体膜
44 結晶性半導体膜
50 基板
51 絶縁膜
52 半導体膜
53 保護絶縁膜
54 光吸収膜
56 結晶性半導体膜
57 結晶性半導体膜
58 絶縁膜
70 基板
71 絶縁膜
72 半導体膜
74 反射防止膜
76 結晶性半導体膜
77 結晶性半導体膜
Claims (26)
- 基板上に、断面形状が三角形である複数の凸部を表面に有する半導体膜を形成し、
前記半導体膜の上方からレーザビームを照射して、前記半導体膜を結晶化することを特徴とする半導体装置の作製方法。 - 基板上に、複数の錐体状の凸部を表面に有する半導体膜を形成し、
前記半導体膜の上方からレーザビームを照射して、前記半導体膜を結晶化することを特徴とする半導体装置の作製方法。 - 基板上に、表面に複数の三角柱状の凸部を有する半導体膜を形成し、
前記半導体膜の上方からレーザビームを照射して、前記半導体膜を結晶化し、
前記凸部の断面形状が三角形になるように、前記凸部を形成することを特徴とする半導体装置の作製方法。 - 請求項1乃至3のいずれか1項において、
前記凸部の断面の三角形は、前記凸部の先端に対応する頂角が80°以下であることを特徴とする半導体装置の作製方法。 - 基板上に、断面形状が三角形である複数の凸部を表面に有する絶縁膜を形成し、
前記絶縁膜の表面に接して半導体膜を形成し、
前記半導体膜の上方からレーザビームを照射して、前記半導体膜を結晶化する半導体装置の作製方法。 - 基板上に、表面に複数の錐体状の凸部を有する絶縁膜を形成し、
前記絶縁膜の表面に接して半導体膜を形成し、
前記半導体膜の上方からレーザビームを照射して、前記半導体膜を結晶化することを特徴とする半導体装置の作製方法。 - 基板上に、表面に複数の三角柱状の凸部を有する絶縁膜を形成し、
前記絶縁膜の表面に接して半導体膜を形成し、
前記半導体膜の上方からレーザビームを照射して、前記半導体膜を結晶化し、
前記凸部の断面形状が三角形になるように、前記凸部を形成することを特徴とする半導体装置の作製方法。 - 請求項5乃至7のいずれか1項において、
前記凸部の断面の三角形は、前記凸部の先端に対応する頂角が140°以下であることを特徴とする半導体装置の作製方法。 - 基板上に、半導体膜を形成し、
前記半導体膜上に、断面形状が三角形である複数の凸部を表面に有する光吸収膜を形成し、
前記光吸収膜の上方からレーザビームを照射して、前記半導体膜を結晶化することを特徴とする半導体装置の作製方法。 - 基板上に、半導体膜を形成し、
前記半導体膜上に、複数の錐体状の凸部を表面に有する光吸収膜を形成し、
前記光吸収膜の上方からレーザビームを照射して、前記半導体膜を結晶化することを特徴とする半導体装置の作製方法。 - 基板上に、半導体膜を形成し、
前記半導体膜上に、表面に複数の三角柱状の凸部を有する光吸収膜を形成し、
前記光吸収膜の上方からレーザビームを照射して、前記半導体膜を結晶化し、
前記凸部の断面形状が三角形になるように、前記凸部を形成することを特徴とする半導体装置の作製方法。 - 請求項9乃至11のいずれか1項において、
前記光吸収膜の厚さは、前記レーザビームの波長以下、前記波長の1/3以上であることを特徴とする半導体装置の作製方法。 - 請求項9乃至11のいずれか1項において、
前記光吸収膜の厚さは、600nm以下100nm以上であることを特徴とする半導体装置の作製方法。 - 請求項9乃至13のいずれか1項において、
前記凸部の断面の三角形は、底辺の長さが前記レーザビームの波長以下、前記波長の1/3以上であることを特徴とする半導体装置の作製方法。 - 請求項9乃至13のいずれか1項において、
前記凸部の断面の三角形は、底辺の長さが、600nm以下100nm以上であることを特徴とする半導体装置の作製方法。 - 請求項9乃至15のいずれか1項において、
前記光吸収膜は、金属膜であることを特徴とする半導体装置の作製方法。 - 請求項9乃至16のいずれか1項において、
前記半導体膜上に、絶縁膜を形成し、
前記絶縁膜上に光吸収膜を形成することを特徴とする半導体装置の作製方法。 - 基板上に、半導体膜を形成し、
前記半導体膜上に、断面形状が三角形である複数の凸部を表面に有する透光性の膜を形成し、
前記透光性の膜の上方からレーザビームを照射して、前記半導体膜を結晶化することを特徴とする半導体装置の作製方法。 - 基板上に、半導体膜を形成し、
前記半導体膜上に、複数の錐体状の凸部を表面に有する透光性の膜を形成し、
前記透光性の膜の上方からレーザビームを照射して、前記半導体膜を結晶化することを特徴とする半導体装置の作製方法。 - 基板上に、半導体膜を形成し、
前記半導体膜上に、表面に複数の三角柱状の凸部を有する透光性の膜を形成し、
前記透光性の膜の上方からレーザビームを照射して、前記半導体膜を結晶化し、
前記凸部の断面形状が三角形になるように、前記凸部を形成することを特徴とする半導体装置の作製方法。 - 請求項18乃至20のいずれか1項において、
前記透光性の膜の厚さは、前記レーザビームの波長以下、前記波長の1/3以上であることを特徴とする半導体装置の作製方法。 - 請求項18乃至20のいずれか1項において、
前記透光性の膜の厚さは、600nm以下100nm以上であることを特徴とする半導体装置の作製方法。 - 請求項18乃至22のいずれか1項において、
前記凸部の断面の三角形は、底辺の長さが前記レーザビームの波長以下、前記波長の1/3以上であることを特徴とする半導体装置の作製方法。 - 請求項18乃至22のいずれか1項において、
前記凸部の断面の三角形は、底辺の長さが、600nm以下100nm以上であることを特徴とする半導体装置の作製方法。 - 請求項1乃至24のいずれか1項において、
前記レーザビームは、連続発振レーザ、または疑似連続発振レーザから射出されたビームであることを特徴とする半導体装置の作製方法。 - 請求項1乃至25のいずれか1項において、
前記レーザビームの波長は、400nm以上565nm以下であることを特徴とする半導体装置の作製方法。
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010272612A (ja) * | 2009-05-20 | 2010-12-02 | Sony Corp | 固体撮像装置とその製造方法および撮像装置 |
US8524549B2 (en) | 2010-08-25 | 2013-09-03 | Samsung Display Co., Ltd. | Method of fabricating thin-film transistor substrate |
JP2015035606A (ja) * | 2010-02-26 | 2015-02-19 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
Families Citing this family (3)
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KR20130055607A (ko) | 2010-04-23 | 2013-05-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
CN102956713B (zh) | 2012-10-19 | 2016-03-09 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及其制作方法、阵列基板和显示装置 |
CN102969250B (zh) * | 2012-11-22 | 2015-08-19 | 京东方科技集团股份有限公司 | Ltps薄膜及薄膜晶体管的制备方法,阵列基板及显示装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145316A (en) * | 1981-03-04 | 1982-09-08 | Toshiba Corp | Manufacture of semicondcutor device |
JPS62160712A (ja) * | 1986-01-09 | 1987-07-16 | Agency Of Ind Science & Technol | 半導体装置の製造方法 |
JPS6477112A (en) * | 1987-09-18 | 1989-03-23 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH01258413A (ja) * | 1988-04-08 | 1989-10-16 | Hitachi Ltd | 半導体装置の製造方法 |
JPH03286520A (ja) * | 1990-04-02 | 1991-12-17 | Seiko Epson Corp | 結晶性半導体薄膜の製造方法 |
JP2003338508A (ja) * | 2002-02-22 | 2003-11-28 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその作製方法 |
JP2004343009A (ja) * | 2003-05-19 | 2004-12-02 | Hitachi Cable Ltd | レーザー照射装置及びレーザー照射方法 |
JP2004343007A (ja) * | 2003-05-19 | 2004-12-02 | Hitachi Cable Ltd | 結晶シリコン薄膜の製造方法 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5753542A (en) * | 1985-08-02 | 1998-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for crystallizing semiconductor material without exposing it to air |
JP3917205B2 (ja) * | 1995-11-30 | 2007-05-23 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP3476320B2 (ja) * | 1996-02-23 | 2003-12-10 | 株式会社半導体エネルギー研究所 | 半導体薄膜およびその作製方法ならびに半導体装置およびその作製方法 |
JP3516424B2 (ja) * | 1996-03-10 | 2004-04-05 | 株式会社半導体エネルギー研究所 | 薄膜半導体装置 |
JP4601731B2 (ja) * | 1997-08-26 | 2010-12-22 | 株式会社半導体エネルギー研究所 | 半導体装置、半導体装置を有する電子機器及び半導体装置の作製方法 |
JP2001272505A (ja) * | 2000-03-24 | 2001-10-05 | Japan Science & Technology Corp | 表面処理方法 |
US6489222B2 (en) * | 2000-06-02 | 2002-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
US6746942B2 (en) * | 2000-09-05 | 2004-06-08 | Sony Corporation | Semiconductor thin film and method of fabricating semiconductor thin film, apparatus for fabricating single crystal semiconductor thin film, and method of fabricating single crystal thin film, single crystal thin film substrate, and semiconductor device |
JP2003168646A (ja) | 2001-12-04 | 2003-06-13 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
US6767799B2 (en) * | 2001-12-28 | 2004-07-27 | Semiconductor Energy Laboratory Co., Ltd. | Laser beam irradiation method |
JP4197100B2 (ja) * | 2002-02-20 | 2008-12-17 | 大日本印刷株式会社 | 反射防止物品 |
JP3773865B2 (ja) * | 2002-03-06 | 2006-05-10 | 三洋電機株式会社 | 導光板および表示装置 |
JP2003279705A (ja) * | 2002-03-25 | 2003-10-02 | Sanyo Electric Co Ltd | 反射防止部材 |
JP3910926B2 (ja) * | 2003-02-26 | 2007-04-25 | 株式会社東芝 | 表示装置用透明基板の製造方法 |
JP4165305B2 (ja) * | 2003-06-10 | 2008-10-15 | ソニー株式会社 | 結晶質半導体材料の製造方法および半導体装置の製造方法 |
JP5159021B2 (ja) | 2003-12-02 | 2013-03-06 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
KR101188356B1 (ko) * | 2003-12-02 | 2012-10-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 레이저 조사장치, 레이저 조사방법 및 반도체장치의제조방법 |
JP4552447B2 (ja) * | 2004-02-09 | 2010-09-29 | 株式会社日立製作所 | 前面板およびそれを用いた表示装置 |
JP2006171229A (ja) | 2004-12-14 | 2006-06-29 | Matsushita Electric Ind Co Ltd | 無反射構造及び無反射構造を有する光学素子、ならびにその製造方法及びその製造方法に用いるマスク |
WO2007046290A1 (en) | 2005-10-18 | 2007-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8278739B2 (en) * | 2006-03-20 | 2012-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Crystalline semiconductor film, semiconductor device, and method for manufacturing thereof |
US7662703B2 (en) * | 2006-08-31 | 2010-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing crystalline semiconductor film and semiconductor device |
TWI438823B (zh) * | 2006-08-31 | 2014-05-21 | Semiconductor Energy Lab | 晶體半導體膜的製造方法和半導體裝置 |
-
2007
- 2007-11-27 US US11/945,891 patent/US8338278B2/en active Active
- 2007-11-28 JP JP2007306733A patent/JP5264017B2/ja not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145316A (en) * | 1981-03-04 | 1982-09-08 | Toshiba Corp | Manufacture of semicondcutor device |
JPS62160712A (ja) * | 1986-01-09 | 1987-07-16 | Agency Of Ind Science & Technol | 半導体装置の製造方法 |
JPS6477112A (en) * | 1987-09-18 | 1989-03-23 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH01258413A (ja) * | 1988-04-08 | 1989-10-16 | Hitachi Ltd | 半導体装置の製造方法 |
JPH03286520A (ja) * | 1990-04-02 | 1991-12-17 | Seiko Epson Corp | 結晶性半導体薄膜の製造方法 |
JP2003338508A (ja) * | 2002-02-22 | 2003-11-28 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその作製方法 |
JP2004343009A (ja) * | 2003-05-19 | 2004-12-02 | Hitachi Cable Ltd | レーザー照射装置及びレーザー照射方法 |
JP2004343007A (ja) * | 2003-05-19 | 2004-12-02 | Hitachi Cable Ltd | 結晶シリコン薄膜の製造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010272612A (ja) * | 2009-05-20 | 2010-12-02 | Sony Corp | 固体撮像装置とその製造方法および撮像装置 |
JP2015035606A (ja) * | 2010-02-26 | 2015-02-19 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US9911625B2 (en) | 2010-02-26 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10304696B2 (en) | 2010-02-26 | 2019-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11049733B2 (en) | 2010-02-26 | 2021-06-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11682562B2 (en) | 2010-02-26 | 2023-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8524549B2 (en) | 2010-08-25 | 2013-09-03 | Samsung Display Co., Ltd. | Method of fabricating thin-film transistor substrate |
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