JP2008153645A5 - - Google Patents
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- Publication number
- JP2008153645A5 JP2008153645A5 JP2007305689A JP2007305689A JP2008153645A5 JP 2008153645 A5 JP2008153645 A5 JP 2008153645A5 JP 2007305689 A JP2007305689 A JP 2007305689A JP 2007305689 A JP2007305689 A JP 2007305689A JP 2008153645 A5 JP2008153645 A5 JP 2008153645A5
- Authority
- JP
- Japan
- Prior art keywords
- pulse
- radiation
- pulse energy
- current
- burst
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims 25
- 238000000034 method Methods 0.000 claims 23
- 238000005259 measurement Methods 0.000 claims 7
- 238000001459 lithography Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 230000005540 biological transmission Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 2
- 230000006698 induction Effects 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 230000000087 stabilizing effect Effects 0.000 claims 2
- 230000001960 triggered effect Effects 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 1
- 208000024891 symptom Diseases 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006060368A DE102006060368B3 (de) | 2006-12-16 | 2006-12-16 | Verfahren und Anordnung zur Stabilisierung der mittleren abgegebenen Strahlungsleistung einer gepulst betriebenen Strahlungsquelle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008153645A JP2008153645A (ja) | 2008-07-03 |
| JP2008153645A5 true JP2008153645A5 (enExample) | 2009-03-19 |
Family
ID=39526726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007305689A Pending JP2008153645A (ja) | 2006-12-16 | 2007-11-27 | パルス放射線源の放出される放射線の出力の平均を安定化するための方法及び装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7974321B2 (enExample) |
| JP (1) | JP2008153645A (enExample) |
| DE (1) | DE102006060368B3 (enExample) |
| NL (1) | NL2001094C2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101698141B1 (ko) * | 2009-12-08 | 2017-01-19 | 삼성전자 주식회사 | 마스크리스 노광장치 및 그 제어방법 |
| KR102219069B1 (ko) | 2013-06-18 | 2021-02-23 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 방법 및 시스템 |
| US9939732B2 (en) * | 2015-10-27 | 2018-04-10 | Cymer, Llc | Controller for an optical system |
| DE102016212928B3 (de) | 2016-07-14 | 2017-09-07 | Trumpf Laser Gmbh | Verfahren zur Erzeugung eines Laserpulses und Anordnung zur Erzeugung eines Treiberansteuersignals |
| JP7697779B2 (ja) | 2020-10-01 | 2025-06-24 | ギガフォトン株式会社 | 極端紫外光生成システム、及び電子デバイスの製造方法 |
| CN117791287B (zh) * | 2024-02-23 | 2024-04-30 | 深圳市智鼎自动化技术有限公司 | 激光脉冲能量控制系统及方法 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US582621A (en) * | 1897-05-18 | Combined churn and butter-worker | ||
| US3747019A (en) * | 1970-07-16 | 1973-07-17 | Union Carbide Corp | Method and means for stabilizing the amplitude and repetition frequency of a repetitively q-switched laser |
| US4804978A (en) * | 1988-02-19 | 1989-02-14 | The Perkin-Elmer Corporation | Exposure control system for full field photolithography using pulsed sources |
| JPH02177313A (ja) | 1988-12-28 | 1990-07-10 | Canon Inc | 露光制御装置 |
| JP3235078B2 (ja) * | 1993-02-24 | 2001-12-04 | 株式会社ニコン | 走査露光方法、露光制御装置、走査型露光装置、及びデバイス製造方法 |
| JP3296448B2 (ja) * | 1993-03-15 | 2002-07-02 | 株式会社ニコン | 露光制御方法、走査露光方法、露光制御装置、及びデバイス製造方法 |
| JPH07254559A (ja) * | 1994-01-26 | 1995-10-03 | Canon Inc | 走査型露光装置及びそれを用いたデバイス製造方法 |
| JP3451604B2 (ja) * | 1994-06-17 | 2003-09-29 | 株式会社ニコン | 走査型露光装置 |
| US5632739A (en) * | 1994-10-13 | 1997-05-27 | The General Hospital Corporation | Two-pulse, lateral tissue illuminator |
| JPH09190966A (ja) | 1996-01-08 | 1997-07-22 | Canon Inc | 走査型露光装置及びそれを用いたデバイスの製造方法 |
| KR100210569B1 (ko) | 1995-09-29 | 1999-07-15 | 미따라이 하지메 | 노광방법 및 노광장치, 그리고 이를 이용한 디바이스제조방법 |
| KR100500770B1 (ko) * | 1996-04-01 | 2005-12-28 | 에이에스엠엘 네델란즈 비.브이. | 리소그래픽스캐닝노광프로젝션장치 |
| US6538723B2 (en) * | 1996-08-05 | 2003-03-25 | Nikon Corporation | Scanning exposure in which an object and pulsed light are moved relatively, exposing a substrate by projecting a pattern on a mask onto the substrate with pulsed light from a light source, light sources therefor, and methods of manufacturing |
| US5982800A (en) * | 1997-04-23 | 1999-11-09 | Cymer, Inc. | Narrow band excimer laser |
| US5852621A (en) * | 1997-07-21 | 1998-12-22 | Cymer, Inc. | Pulse laser with pulse energy trimmer |
| TW448487B (en) * | 1997-11-22 | 2001-08-01 | Nippon Kogaku Kk | Exposure apparatus, exposure method and manufacturing method of device |
| JP3807933B2 (ja) | 2000-12-14 | 2006-08-09 | 株式会社ルネサステクノロジ | 投影露光装置及び投影露光方法 |
| DE10209161B4 (de) * | 2002-02-26 | 2009-09-17 | Xtreme Technologies Gmbh | Verfahren zur Energieregelung von gepulst betriebenen, gasentladungsgepumpten Strahlungsquellen |
| DE10244105B3 (de) * | 2002-02-26 | 2004-09-16 | Xtreme Technologies Gmbh | Verfahren zur Energiestabilisierung gasentladungsgepumpter, in definierten Impulsfolgen betriebener Strahlungsquellen |
| DE10219805B4 (de) * | 2002-04-30 | 2013-03-14 | Xtreme Technologies Gmbh | Verfahren zur Stabilisierung der Strahlungsleistung einer gepuist betriebenen, auf gasentladungserzeugtem Plasma basierenden Strahlungsquelle |
| FR2859545B1 (fr) | 2003-09-05 | 2005-11-11 | Commissariat Energie Atomique | Procede et dispositif de lithographie par rayonnement dans l'extreme utraviolet |
-
2006
- 2006-12-16 DE DE102006060368A patent/DE102006060368B3/de active Active
-
2007
- 2007-11-27 JP JP2007305689A patent/JP2008153645A/ja active Pending
- 2007-12-04 US US11/949,924 patent/US7974321B2/en active Active
- 2007-12-14 NL NL2001094A patent/NL2001094C2/nl active Search and Examination
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