JP2008153584A - 半導体発光素子 - Google Patents
半導体発光素子 Download PDFInfo
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- JP2008153584A JP2008153584A JP2006342559A JP2006342559A JP2008153584A JP 2008153584 A JP2008153584 A JP 2008153584A JP 2006342559 A JP2006342559 A JP 2006342559A JP 2006342559 A JP2006342559 A JP 2006342559A JP 2008153584 A JP2008153584 A JP 2008153584A
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- light emitting
- emitting layer
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 91
- 229910052751 metal Inorganic materials 0.000 claims abstract description 64
- 239000002184 metal Substances 0.000 claims abstract description 64
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 229920005989 resin Polymers 0.000 claims abstract description 24
- 239000011347 resin Substances 0.000 claims abstract description 24
- 238000005253 cladding Methods 0.000 claims description 26
- 239000000470 constituent Substances 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 195
- 239000010931 gold Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 15
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000005530 etching Methods 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 239000010948 rhodium Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 229940077844 iodine / potassium iodide Drugs 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- VLJQDHDVZJXNQL-UHFFFAOYSA-N 4-methyl-n-(oxomethylidene)benzenesulfonamide Chemical compound CC1=CC=C(S(=O)(=O)N=C=O)C=C1 VLJQDHDVZJXNQL-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910016006 MoSi Inorganic materials 0.000 description 1
- 229910020968 MoSi2 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000000347 anisotropic wet etching Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910021340 platinum monosilicide Inorganic materials 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
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- H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
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Abstract
【解決手段】特定の波長λで発光可能なpn接合を有し、側部に形成された透光性の樹脂膜43を介して分離された複数の発光層構成部30と、発光層構成部30の第1面に配設されたオーミック接続部及び反射部を有する金属膜28と、金属膜28に接合された導電性基板11と、金属膜28が接合された面に対向する導電性基板11の面に形成された下部電極55と、発光層構成部30の第1面に対向する第2面に接続された、波長λに実質透明な透明電極51と、透明電極51を介して発光層構成部30の第2面の上部に形成された上部電極53とを備えている。
【選択図】図1
Description
(付記1) 特定の波長で発光可能なpn接合を有し、側部に形成された透光性の樹脂を介して分離された複数の発光層構成部と、前記発光層構成部の第1面に配設された金属膜と、前記金属膜に接合された導電性基板と、前記金属膜が接合された面に対向する前記導電性基板の面に形成された下部電極と、前記発光層構成部の前記第1面に対向する第2面に接続された、前記波長に実質透明な透明電極と、前記透明電極を介して前記発光層構成部の前記第2面の上部に形成された上部電極とを備えている半導体発光素子。
11 導電性基板
22 接着層
21、28 金属膜
29 オーミック形成層
30、90 発光層構成部
32 p型クラッド層
34、94 活性層
36 n型クラッド層
37 エッチング停止層
38 バッファ層
39 n型GaAs基板
41 絶縁膜
43 樹脂膜
51 透明電極
53 上部電極
55 下部電極
60 レジスト
61、81 溝
62 開口
71 ヘッダ
73 カップ部
75、76 リード
77 導電性接着材
78 Auワイヤ
79 封止樹脂
93 p型光ガイド層
95 n型光ガイド層
100 半導体発光装置
Claims (5)
- 特定の波長で発光可能なpn接合を有し、側部に形成された透光性の樹脂を介して分離された複数の発光層構成部と、
前記発光層構成部の第1面に配設された金属膜と、
前記金属膜に接合された導電性基板と、
前記金属膜が接合された面に対向する前記導電性基板の面に形成された下部電極と、
前記発光層構成部の前記第1面に対向する第2面に接続された、前記波長に実質透明な透明電極と、
前記透明電極を介して前記発光層構成部の前記第2面の上部に形成された上部電極と、
を備えていることを特徴とする半導体発光素子。 - 特定の波長で発光可能なpn接合を有し、周囲に溝を有し、前記溝が透光性の樹脂により埋められた複数の発光層構成部と、
前記発光層構成部の第1面に配設された金属膜と、
前記金属膜に接合された導電性基板と、
前記金属膜が接合された面に対向する前記導電性基板の面に形成された下部電極と、
前記発光層構成部の前記第1面に対向する第2面に接続された、前記波長に実質透明な透明電極と、
前記透明電極を介して前記発光層構成部の前記第2面の上部に形成された上部電極と、
を備えていることを特徴とする半導体発光素子。 - 前記発光層構成部の前記第2面及び前記透光性樹脂に対向する面は、前記波長をλ、屈折率をnrとして、m・λ/(4nr)(mは正の奇数)からなる膜厚の絶縁膜に接していることを特徴とする請求項1または2に記載の半導体発光素子。
- 前記発光層構成部は、n型クラッド層と活性層との間、及び、前記活性層とp型クラッド層との間の少なくともいずれか一方に、接触するそれぞれの側の層が有する屈折率の中間の屈折率を有する光ガイド層が挿入されていることを特徴とする請求項1乃至3のいずれか1項に記載の半導体発光素子。
- 前記発光層構成部の前記透光性樹脂に対向する面は、前記第2面に対して、垂直または垂直より緩い傾斜の側面をなしていることを特徴とする請求項1乃至4のいずれか1項に記載の半導体発光素子。
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TW096148960A TWI350600B (en) | 2006-12-20 | 2007-12-20 | Semiconductor light emitting element |
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JP2010157551A (ja) * | 2008-12-26 | 2010-07-15 | Toyoda Gosei Co Ltd | Iii族窒化物半導体発光素子、およびその製造方法 |
JP2011009386A (ja) * | 2009-06-24 | 2011-01-13 | Toyoda Gosei Co Ltd | Iii族窒化物半導体発光素子およびその製造方法 |
JP2011138839A (ja) * | 2009-12-26 | 2011-07-14 | Toyoda Gosei Co Ltd | Iii族窒化物系化合物半導体素子及びその製造方法 |
JP2012503861A (ja) * | 2008-09-24 | 2012-02-09 | フィリップス ルミレッズ ライティング カンパニー リミテッド ライアビリティ カンパニー | 複合基板上に成長された半導体発光デバイス |
JP2012033800A (ja) * | 2010-08-02 | 2012-02-16 | Stanley Electric Co Ltd | 半導体発光装置 |
JP2013004631A (ja) * | 2011-06-14 | 2013-01-07 | Dowa Electronics Materials Co Ltd | 半導体発光素子およびその製造方法 |
JP2013258207A (ja) * | 2012-06-11 | 2013-12-26 | Toshiba Corp | 半導体発光素子及びその製造方法 |
WO2016056171A1 (ja) * | 2014-10-06 | 2016-04-14 | 信越半導体株式会社 | 半導体発光素子 |
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JP2010067903A (ja) | 2008-09-12 | 2010-03-25 | Toshiba Corp | 発光素子 |
DE102008051048A1 (de) * | 2008-10-09 | 2010-04-15 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterkörper |
TW201201419A (en) * | 2010-06-29 | 2012-01-01 | Semileds Optoelectronics Co | Wafer-type light emitting device having precisely coated wavelength-converting layer |
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JP2010157551A (ja) * | 2008-12-26 | 2010-07-15 | Toyoda Gosei Co Ltd | Iii族窒化物半導体発光素子、およびその製造方法 |
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JP2012033800A (ja) * | 2010-08-02 | 2012-02-16 | Stanley Electric Co Ltd | 半導体発光装置 |
JP2013004631A (ja) * | 2011-06-14 | 2013-01-07 | Dowa Electronics Materials Co Ltd | 半導体発光素子およびその製造方法 |
JP2013258207A (ja) * | 2012-06-11 | 2013-12-26 | Toshiba Corp | 半導体発光素子及びその製造方法 |
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WO2016056171A1 (ja) * | 2014-10-06 | 2016-04-14 | 信越半導体株式会社 | 半導体発光素子 |
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US20080164457A1 (en) | 2008-07-10 |
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