JP2008115272A - 熱剥離性両面粘着シート及び被加工体の加工方法 - Google Patents
熱剥離性両面粘着シート及び被加工体の加工方法 Download PDFInfo
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- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
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- C09J7/40—Adhesives in the form of films or foils characterised by release liners
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- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/10—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet
- C09J2301/12—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet by the arrangement of layers
- C09J2301/124—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet by the arrangement of layers the adhesive layer being present on both sides of the carrier, e.g. double-sided adhesive tape
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- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/50—Additional features of adhesives in the form of films or foils characterized by process specific features
- C09J2301/502—Additional features of adhesives in the form of films or foils characterized by process specific features process for debonding adherents
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- C09J2400/00—Presence of inorganic and organic materials
- C09J2400/20—Presence of organic materials
- C09J2400/24—Presence of a foam
- C09J2400/243—Presence of a foam in the substrate
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68331—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding of passive members, e.g. die mounting substrate
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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Abstract
【解決手段】 熱剥離性両面粘着シートは、基材の一方の側の面に熱剥離性粘着層A、他方の側の面に粘着層Bが設けられた熱剥離性両面粘着シートであって、前記基材が多孔質基材からなることを特徴とする。前記多孔質基材としては、密度0.9g/cm3以下で且つ引張り弾性率20MPa以下のものが好ましい。基材は多孔質基材と非多孔質基材との積層体で構成されていてもよい。粘着層Bを構成する接着剤として、例えば、感圧性接着剤、紫外線硬化型粘着剤、熱剥離型粘着剤、熱可塑型粘着剤、熱硬化型粘着剤などを使用できる。
【選択図】 図1
Description
ウレタンポリマー50重量部、ブチルアクリレート40重量部、アクリル酸10重量部、光重合開始剤0.15重量部からなるUV(紫外線)反応性アクリルウレタンシロップA100重量部に対して、中空ガラスビーズ(平均粒径67μm)10重量部を配合し、UV反応性アクリルウレタンシロップBを調製した。UV反応性アクリルウレタンシロップBを、厚さ25μmのPET(ポリエチレンテレフタレート)フィルム上に、400μmの厚さで塗布し、乾燥後、UV照射により、総厚さ325μmのPET付き多孔質フィルム(アクリル−ウレタン共重合体からなる多孔質基材層/PETフィルム)を得た。別途、ブチルアクリレート100重量部、2−ヒドロキシエチルアクリレート5重量部からなるアクリル系ポリマーA100重量部に対して、イソシアネート系架橋剤3重量部、熱膨張性微小球[商品名「マツモトマイクロスフェアーF301SD」、松本油脂製薬(株)製]25重量部を配合した熱剥離性粘着剤AをPETセパレータ上に塗布、乾燥し、得られた厚さ25μmの熱剥離性粘着層を前記多孔質フィルムの多孔質側に転写した。また、ブチルアクリレート50重量部、エチルアクリレート50重量部、アクリル酸3.5重量部からなるアクリル系ポリマーB100重量部に対して、エポキシ系架橋剤0.5重量部を配合したアクリル系粘着剤Bを厚さが20μmとなるようにPETセパレータ上に塗布、乾燥し、これを前記多孔質基材のPETフィルム側に転写し、熱剥離性両面粘着シートAを得た。
ブチルアクリレート100重量部、アクリル酸4重量部からなるアクリル系ポリマー100重量部に対して、イソシアネート系架橋剤[商品名「コロネートL」、日本ポリウレタン工業(株)製]2.5重量部、熱膨張性微小球[商品名「マツモトマイクロスフェアーF80VSD」、松本油脂製薬(株)製]40重量部を配合した熱膨張性粘着剤を、厚さ50μmのPET(ポリエチレンテレフタレート)フィルム上に塗布した後、160℃の加熱工程を通して、熱膨張性微小球を膨張させて、厚さ170μmのPET付き多孔質フィルム(アクリル系共重合体からなる多孔質基材層/PETフィルム)を得た。以降は実施例1と同様の操作により、熱剥離性両面粘着シートBを得た。
中空ガラスビーズを配合しなかった点以外は、実施例1と同様の操作により、熱剥離性両面粘着シートCを得た。なお、基材の層構成は、アクリル−ウレタン共重合体からなる非多孔質基材層/PETフィルムである。
厚さ250μmのPETフィルムを基材として用いた以外は、実施例1と同様の操作により、熱剥離性両面粘着シートを得た。
チップサイズ10mm×10mm、バンプ高さ40μm、バンプピッチ130μm、ウエハ厚さ725μmのフルアレイバンプウエハ(表面最大凹凸差:40μm)に、実施例又は比較例で得られた熱剥離性両面粘着シートの熱剥離性粘着層を貼り合わせた後、裏面の粘着層にバンプウエハと同径のガラスウエハ(支持体)を貼り合わせ、ガラスウエハの浮き状態を目視で観察した。その後、バンプウエハの裏面を75μm厚まで研削し、ウエハクラックの有無を目視で観察した。最後に、加熱処理(120℃熱風乾燥機中で3分間加熱)によりバンプウエハの加熱剥離性を検証した。なお、熱剥離性両面粘着シートとバンプウエハの貼り合わせには、商品名「DR3000II−WS」[日東精機(株)製]、ガラスウエハの貼り合わせには、商品名「MA−3000II−WS」[日東精機(株)製]、ウエハ研削には、商品名「DFG−8460」[ディスコ社製]を用いた。結果を表1に示す。
2 熱剥離性粘着層
3 粘着層
4 セパレータ
Claims (7)
- 基材の一方の側の面に熱剥離性粘着層A、他方の側の面に粘着層Bが設けられた熱剥離性両面粘着シートであって、前記基材が多孔質基材からなることを特徴とする熱剥離性両面粘着シート。
- 多孔質基材が密度0.9g/cm3以下で且つ引張り弾性率20MPa以下である請求項1記載の熱剥離性両面粘着シート。
- 基材が、多孔質基材と非多孔質基材との積層体で構成されている請求項1又は2記載の熱剥離性両面粘着シート。
- 粘着層Bが、感圧性接着剤、紫外線硬化型粘着剤、熱剥離型粘着剤、熱可塑型粘着剤又は熱硬化型粘着剤からなる請求項1〜3の何れかの項に記載の熱剥離性両面粘着シート。
- 請求項1〜4の何れかの項に記載の熱剥離性両面粘着シートの熱剥離性粘着層A及び粘着層Bのうち何れか一方に被加工体を貼り合わせ、他方に支持体を貼り合わせる貼り合わせ工程、貼り合わせた被加工体を加工する加工工程、及び被加工体の加工後、加熱処理により被加工体を剥離回収する剥離回収工程を含む被加工体の加工方法。
- 被加工体が電子部品又は半導体ウエハである請求項5記載の被加工体の加工方法。
- 表面最大凹凸差が10μm以上である面を有する被加工体を、前記面を熱剥離性両面粘着シートの粘着面に貼り合わせて加工する請求項5又は6記載の被加工体の加工方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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JP2006299737A JP2008115272A (ja) | 2006-11-04 | 2006-11-04 | 熱剥離性両面粘着シート及び被加工体の加工方法 |
CN200780040736XA CN101541905B (zh) | 2006-11-04 | 2007-10-29 | 热剥离性双面粘合片材及工件的加工方法 |
PCT/JP2007/071033 WO2008053840A1 (fr) | 2006-11-04 | 2007-10-29 | Feuille adhésive double face décollable sous l'action de la chaleur et procédé de traitement d'une pièce à travailler |
US12/311,980 US20090288763A1 (en) | 2006-11-04 | 2007-10-29 | Thermally strippable double faced adhesive sheet and method of working work piece |
EP07830767.5A EP2078741A4 (en) | 2006-11-04 | 2007-10-29 | DOUBLE-SIDED ADHESIVE SHEET REMOVABLE UNDER THE ACTION OF THE HEAT AND METHOD FOR TREATING A WORKPIECE |
KR1020097004892A KR101333945B1 (ko) | 2006-11-04 | 2007-10-29 | 열박리성 양면 점착 시트 및 피가공체의 가공 방법 |
TW96140908A TWI466976B (zh) | 2006-11-04 | 2007-10-31 | Hot peeling double sided adhesive sheet and processed body processing method |
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JP2006299737A JP2008115272A (ja) | 2006-11-04 | 2006-11-04 | 熱剥離性両面粘着シート及び被加工体の加工方法 |
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US (1) | US20090288763A1 (ja) |
EP (1) | EP2078741A4 (ja) |
JP (1) | JP2008115272A (ja) |
KR (1) | KR101333945B1 (ja) |
CN (1) | CN101541905B (ja) |
TW (1) | TWI466976B (ja) |
WO (1) | WO2008053840A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013203799A (ja) * | 2012-03-27 | 2013-10-07 | Nitto Denko Corp | 加熱剥離型粘着シート |
JP2016146436A (ja) * | 2015-02-09 | 2016-08-12 | 積水化学工業株式会社 | 表面に凹凸を有するウエハの処理方法 |
JP2017179132A (ja) * | 2016-03-30 | 2017-10-05 | 積水化学工業株式会社 | 両面粘着テープ |
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JP2017179132A (ja) * | 2016-03-30 | 2017-10-05 | 積水化学工業株式会社 | 両面粘着テープ |
WO2019221065A1 (ja) * | 2018-05-18 | 2019-11-21 | 積水化学工業株式会社 | 粘着テープ及び電子部品の製造方法 |
KR102406694B1 (ko) * | 2021-07-15 | 2022-06-10 | (주)인랩 | 온도 감응형 열발포 박리 테이프 및 이를 이용한 전자부품의 분리방법 |
KR20230107892A (ko) | 2021-09-02 | 2023-07-18 | 가부시키가이샤 데라오카 세이사쿠쇼 | 열박리형 점착 테이프 |
Also Published As
Publication number | Publication date |
---|---|
EP2078741A4 (en) | 2013-04-24 |
KR20090077038A (ko) | 2009-07-14 |
CN101541905B (zh) | 2013-05-01 |
TWI466976B (zh) | 2015-01-01 |
US20090288763A1 (en) | 2009-11-26 |
TW200844204A (en) | 2008-11-16 |
KR101333945B1 (ko) | 2013-11-27 |
EP2078741A1 (en) | 2009-07-15 |
CN101541905A (zh) | 2009-09-23 |
WO2008053840A1 (fr) | 2008-05-08 |
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