JP2008112963A5 - - Google Patents

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Publication number
JP2008112963A5
JP2008112963A5 JP2007185461A JP2007185461A JP2008112963A5 JP 2008112963 A5 JP2008112963 A5 JP 2008112963A5 JP 2007185461 A JP2007185461 A JP 2007185461A JP 2007185461 A JP2007185461 A JP 2007185461A JP 2008112963 A5 JP2008112963 A5 JP 2008112963A5
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JP
Japan
Prior art keywords
workpiece
bracket
support surface
dimension
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007185461A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008112963A (ja
JP5392941B2 (ja
Filing date
Publication date
Priority claimed from US11/589,498 external-priority patent/US20080099451A1/en
Application filed filed Critical
Publication of JP2008112963A publication Critical patent/JP2008112963A/ja
Publication of JP2008112963A5 publication Critical patent/JP2008112963A5/ja
Application granted granted Critical
Publication of JP5392941B2 publication Critical patent/JP5392941B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007185461A 2006-10-30 2007-07-17 プラズマリアクタシステム用のワークピース回転装置 Expired - Fee Related JP5392941B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/589498 2006-10-30
US11/589,498 US20080099451A1 (en) 2006-10-30 2006-10-30 Workpiece rotation apparatus for a plasma reactor system

Publications (3)

Publication Number Publication Date
JP2008112963A JP2008112963A (ja) 2008-05-15
JP2008112963A5 true JP2008112963A5 (cg-RX-API-DMAC7.html) 2010-09-02
JP5392941B2 JP5392941B2 (ja) 2014-01-22

Family

ID=38481584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007185461A Expired - Fee Related JP5392941B2 (ja) 2006-10-30 2007-07-17 プラズマリアクタシステム用のワークピース回転装置

Country Status (6)

Country Link
US (1) US20080099451A1 (cg-RX-API-DMAC7.html)
EP (1) EP1918977A3 (cg-RX-API-DMAC7.html)
JP (1) JP5392941B2 (cg-RX-API-DMAC7.html)
KR (1) KR101457342B1 (cg-RX-API-DMAC7.html)
CN (1) CN101174098A (cg-RX-API-DMAC7.html)
TW (1) TWI439557B (cg-RX-API-DMAC7.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101748386B (zh) * 2008-12-18 2013-06-05 北京北方微电子基地设备工艺研究中心有限责任公司 一种等离子体加工设备
CN102486988A (zh) * 2010-12-03 2012-06-06 上海凯世通半导体有限公司 真空传输制程设备
JP6256909B2 (ja) * 2013-10-21 2018-01-10 株式会社アルバック 基板搬送装置および基板処理装置
CN104752275B (zh) * 2013-12-29 2018-01-09 北京北方华创微电子装备有限公司 工艺腔室以及半导体加工设备
CN105047512B (zh) * 2015-05-29 2017-03-15 光驰科技(上海)有限公司 具备多层载物能力的离子束刻蚀系统及其刻蚀方法
US20170352562A1 (en) * 2016-06-02 2017-12-07 Applied Materials, Inc. Dodecadon transfer chamber and processing system having the same
US9966292B2 (en) * 2016-07-12 2018-05-08 Globalfoundries Inc. Centering fixture for electrostatic chuck system
US10474027B2 (en) 2017-11-13 2019-11-12 Macronix International Co., Ltd. Method for forming an aligned mask
TWI639885B (zh) * 2017-12-11 2018-11-01 旺宏電子股份有限公司 形成對準罩幕的方法、半導體裝置以及形成一組對準罩幕的方法
CN111211082B (zh) * 2018-11-22 2022-10-25 拓荆科技股份有限公司 晶圆传输装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08213444A (ja) * 1995-02-02 1996-08-20 Kokusai Electric Co Ltd 基板搬送装置
JPH106166A (ja) * 1996-06-19 1998-01-13 Metsukusu:Kk 方向性を有するワークの搬送装置
JP3445918B2 (ja) * 1997-04-24 2003-09-16 株式会社三協精機製作所 多関節ロボット
US6216873B1 (en) * 1999-03-19 2001-04-17 Asyst Technologies, Inc. SMIF container including a reticle support structure
JP3927758B2 (ja) * 1999-06-03 2007-06-13 東京エレクトロン株式会社 基板搬送装置及び処理装置
US6537011B1 (en) * 2000-03-10 2003-03-25 Applied Materials, Inc. Method and apparatus for transferring and supporting a substrate
US20030000645A1 (en) * 2001-06-27 2003-01-02 Dornfest Charles N. Apparatus and method for reducing leakage in a capacitor stack
US6841006B2 (en) * 2001-08-23 2005-01-11 Applied Materials, Inc. Atmospheric substrate processing apparatus for depositing multiple layers on a substrate
JP2003068620A (ja) * 2001-08-28 2003-03-07 Sendai Nikon:Kk 露光装置
JP4821074B2 (ja) * 2001-08-31 2011-11-24 東京エレクトロン株式会社 処理システム
WO2005036617A1 (ja) * 2003-10-14 2005-04-21 Fuji Research Institute Corporation ワーク枚葉処理システム
JP4665468B2 (ja) * 2004-09-15 2011-04-06 凸版印刷株式会社 フォトマスク及びフォトマスクブランクスの載置方向変更装置
JP2007158011A (ja) * 2005-12-05 2007-06-21 Sharp Corp 基板搬送装置、及び基板搬送システム

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