JP2008049226A - Preliminary discharge device - Google Patents

Preliminary discharge device Download PDF

Info

Publication number
JP2008049226A
JP2008049226A JP2006225550A JP2006225550A JP2008049226A JP 2008049226 A JP2008049226 A JP 2008049226A JP 2006225550 A JP2006225550 A JP 2006225550A JP 2006225550 A JP2006225550 A JP 2006225550A JP 2008049226 A JP2008049226 A JP 2008049226A
Authority
JP
Japan
Prior art keywords
cleaning liquid
squeegee
tank
priming roller
discharge device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006225550A
Other languages
Japanese (ja)
Inventor
Atsuo Kajima
Shinji Takase
Kazunobu Yamaguchi
和伸 山口
淳生 楫間
真治 高瀬
Original Assignee
Tokyo Ohka Kogyo Co Ltd
東京応化工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd, 東京応化工業株式会社 filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP2006225550A priority Critical patent/JP2008049226A/en
Publication of JP2008049226A publication Critical patent/JP2008049226A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like

Abstract

PROBLEM TO BE SOLVED: To provide a preliminary discharge device suitable for recycling a cleaning liquid.
SOLUTION: A coating liquid discharged from a slit nozzle N onto a priming roller 11 is scraped off by a squeegee 13 and discharged to a waste liquid tank 18 through a discharge path 17. Since most of the coating liquid discharged onto the priming roller is removed by the squeegee 13, the amount of the coating liquid mixed into the cleaning liquid tank from the priming roller is reduced, and the degree of contamination of the cleaning liquid is also reduced. As a result, the consumption between cleaning liquids is reduced, and the running cost is also reduced.
[Selection] Figure 2

Description

  The present invention relates to a preliminary discharge device for a slit coater.

  When using a slit coater to continuously apply resist and developer to the surface of various substrates such as glass substrates and semiconductor wafers, the tip of the discharge nozzle comes into contact with air during the standby period between application operations. As a result, the concentration of the coating solution partially increases. If the coating operation is performed in such a state, there is a risk that vertical stripes may be generated or the film may be cut by the highly concentrated coating solution. In order to solve such a problem, a preliminary discharge device that removes a high-concentration application liquid by discharging a small amount of application liquid onto a priming roller prior to the application work is known (for example, see Patent Document 1).

  In the preliminary discharge device described above, the coating liquid is discharged onto a priming roller that is rotatably arranged in the cleaning liquid tank, and the discharged coating liquid is removed by a squeegee by the rotation of the priming roller. Further, the coating liquid remaining on the priming roller is removed by passing through the cleaning liquid in the cleaning liquid tank. The cleaned priming roller is sprayed with dry air from an air nozzle, and the next preliminary discharge is performed.

JP 2005-329340 A

  In the known preliminary discharge device described above, the cleaning liquid discharged from the cleaning liquid tank is temporarily recovered, and the recovered cleaning liquid is supplied to the shower nozzle through the recycle flow path for reuse. However, since the removal performance of the coating liquid by the squeegee is not sufficient, it passes through the cleaning liquid tank with the coating liquid remaining on the surface of the priming roller, causing a problem that the cleaning liquid in the cleaning liquid tank is contaminated. For this reason, the cleaning liquid in the cleaning liquid tank must be frequently replaced with a new liquid, and there is a disadvantage that the running cost is expensive.

An object of the present invention is to further improve the performance of removing the coating liquid discharged onto the surface of the priming roller and to realize a preliminary discharge device suitable for recycling the cleaning liquid.
Furthermore, another object of the present invention is to provide a preliminary discharge device in which the amount of new liquid used is greatly reduced.

  The preliminary discharge device according to the present invention includes a cleaning liquid tank that contains a cleaning liquid, a priming roller that is rotatably disposed in the cleaning liquid tank, and that applies a coating liquid from a slit nozzle, and jets the cleaning liquid toward the priming roller. A first cleaning liquid spray nozzle, a squeegee disposed on the rear side of the first cleaning liquid spray nozzle along the rotation direction of the priming roller, and scraping off the coating liquid adhering to the priming roller; and in the cleaning liquid tank In a preliminary discharge device comprising: a second cleaning liquid spray nozzle that sprays cleaning liquid toward the priming roller that has passed through the cleaning liquid; and an air nozzle that sprays dry air toward the priming roller that has passed through the second cleaning liquid spray nozzle A discharge path for discharging the coating liquid scraped from the priming roller by the squeegee is scanned. Provided adjacent to the over-di, the coating solution is removed by the squeegee was configured to discharge the waste liquid tank through the discharge passage.

  In the present invention, the coating liquid discharged on the priming roller is scraped off by a squeegee, the scraped coating liquid is discharged to a discharge path, and discharged to a waste liquid tank provided separately from the cleaning liquid tank via the discharge path. Therefore, the problem that the cleaning liquid in the cleaning liquid tank that houses the priming roller is contaminated by the coating liquid is solved. As a result, since the cleaning liquid in the cleaning liquid tank is maintained in a relatively clean state, the cleaning liquid in the cleaning liquid tank can be reused simply by providing a filter in the recycling path, and the consumption of the cleaning liquid is reduced.

  In a preferred embodiment of the preliminary discharge device according to the present invention, the squeegee is constituted by an elastically deformable resin plate or the like, arranged so that the tip of the squeegee is in close contact with the surface of the priming roller, and the coating liquid present on the surface of the priming roller is The application liquid scraped off by the squeegee is discharged to the waste liquid tank through the discharge path. If an elastic plate made of elastically deformable rubber such as polyurethane rubber, polyethylene rubber, or silicon rubber is used as the squeegee, the tip of the elastic plate can be brought into close contact with the surface of the priming roller. By rotating the priming roller in this tight contact state, the coating liquid discharged onto the priming roller is scraped off almost completely by the squeegee. Then, by discharging the scraped coating liquid to the waste liquid tank through the discharge path, the degree of contamination of the cleaning liquid in the cleaning liquid tank with the coating liquid is greatly reduced. In addition, as a constituent member of the squeegee, various plate members such as SUS and various synthetic resins can be used as materials other than the elastic rubber material.

  In the present invention, since the coating liquid discharged onto the priming roller is scraped off by the squeegee and discharged to the waste liquid tank via the discharge path, the inconvenience that the coating liquid is mixed into the cleaning liquid tank is eliminated. As a result, the cleaning liquid in the cleaning liquid tank can be reused by recycling, the consumption of new liquid is reduced, and the running cost is reduced.

FIG. 1 is a plan view of a coating apparatus to which a preliminary ejection device according to the present invention is applied, and FIG. 2 is a sectional view of the preliminary ejection device.
As shown in FIG. 1, the coating apparatus is provided with a pair of parallel rails R, R on a base B, and a mounting stage S for a substrate W is fixed at the center of the base upper surface, which is an intermediate position between the rails R, R. The moving mechanisms M, M are laid across the rails R, R so as to straddle the substrate mounting stage S, and a beam is laid between the moving mechanisms M, M before and after the frame to form a frame shape in plan view. A frame F is formed, and a slit nozzle N is attached to the frame F via an elevating device.

  A preliminary discharge device 1 is provided on one end side of the base B. The preliminary ejection device includes a preliminary ejection unit 1 and a recycling unit 2. The preliminary discharge unit 1 includes a cleaning liquid tank 10 and stores the cleaning liquid in the cleaning liquid tank 10. A priming roller 11 is rotatably disposed in the cleaning liquid tank 10. The priming roller 11 is disposed so that a part thereof is immersed in the cleaning liquid, and is cleaned with the cleaning liquid in the cleaning liquid tank by rotating in the direction of the arrow. The priming roller 11 is made of stainless steel, aluminum, titanium, carbon, chrome plating or the like, and its dimensions are set so that the diameter is 30 to 200 mm and the length is slightly longer than the length of the slit nozzle in the longitudinal direction. Various cleaning liquid injection nozzles including a two-fluid nozzle system can be used as the cleaning liquid injection nozzle.

  At the time of preliminary discharge, the slit nozzle N is positioned above the priming roller 11, and a small amount of coating liquid is discharged onto the priming roller 11 from the lower end thereof. Around the priming roller 11, a first cleaning liquid ejecting nozzle 12 and a first squeegee 13 are sequentially arranged along the arrow direction from the discharge position of the slit nozzle. Furthermore, the 2nd washing | cleaning liquid injection nozzle 14, the 2nd squeegee 15, and the air nozzle 16 are sequentially arrange | positioned through the site | part immersed in a washing | cleaning liquid.

  The cleaning liquid is sprayed from the first cleaning liquid spray nozzle 12 to the coating liquid discharged onto the priming roller 11. Next, the rotation of the priming roller moves to a position facing the first squeegee 13, and the coating liquid on the priming roller is scraped off by the first squeegee 13. In the present invention, the first squeegee 13 is composed of an elastic plate such as polyurethane, polyethylene, or silicon rubber. The elastic plate is mounted so that the tip thereof is in pressure contact with the surface of the priming roller 11. Therefore, an elastically deformable restoring force acts on the elastic plate, and the tip of the elastic plate is pressed against the surface of the priming roller by the restoring force. Thus, by configuring the squeegee 13 with an elastic plate, the tip of the squeegee is in close contact with the surface of the priming roller without any gap, and the coating liquid remaining on the surface of the priming roller can be reliably scraped off.

  The coating liquid scraped off by the first squeegee is discharged to the discharge path 17 that opens on the upper surface of the squeegee, and is discharged to the waste liquid tank 18 through the discharge path 17. In this embodiment, a suction mechanism 19 is provided in the middle of the discharge path 17 in order to force the discharge to the waste liquid tank 18. As a result, the coating liquid present on the priming roller is almost removed by the first squeegee and discharged to a waste liquid tank provided separately from the cleaning liquid tank, so that the cleaning liquid in the cleaning liquid tank is contaminated with the coating liquid. Is resolved.

  Next, the priming roller passes through the cleaning liquid in the cleaning liquid tank, and the coating liquid remaining on the surface of the priming roller is removed while passing through the cleaning liquid. When it further rotates, it moves to a position facing the second shower nozzle 14. The second cleaning liquid spray nozzle 14 strongly sprays the cleaning liquid toward the surface of the priming roller 11. The remaining coating liquid is almost removed by spraying the cleaning liquid.

  The priming roller further rotates, and the cleaning liquid remaining on the surface is scraped off by the second squeegee 15. Similarly to the first squeegee, the second squeegee 15 is also composed of an elastic plate.

  Next, the air nozzle 16 moves to a position facing the air nozzle 16, dried air is ejected from the air nozzle, and the surface of the priming roller is dried.

Next, recycling will be described. A discharge hole 21 is provided at the bottom of the cleaning liquid tank 10 to discharge the cleaning liquid in the cleaning liquid tank to the circulation path. Further, the cleaning liquid tank 10 is provided with a liquid level adjusting waste liquid member 22 for adjusting the liquid level of the cleaning liquid tank, and the overflowing cleaning liquid is discharged to the circulation path. These two circulation paths are connected to one circulation path and connected to the inlet of the three-way valve 23. The first outlet of the three-way valve 23 is connected to the recycle box 25 via the first pump 24. The recycle box 25 includes a filter, the coating liquid remaining in the cleaning liquid is removed by the filter, and is supplied to the second pump 26 as a clean cleaning liquid. The second outlet of the three-way valve 23 is connected to the second pump 26 via a pipe line. The outlet of the second pump 26 is connected to the buffer tank 27. In this example, the cleaning liquid is circulated using both the discharge hole provided at the bottom of the cleaning liquid tank and the liquid level adjusting waste liquid member, but only the cleaning liquid overflowing from the liquid level adjusting waste liquid member is circulated. It is also possible to make it.

  The buffer tank 27 stores the cleaning liquid cleaned by the filter of the recycle box and is supplied with an unused cleaning liquid (new liquid). Therefore, a cleaner cleaning liquid is stored in the buffer tank. The buffer tank 27 has three outlets 27a to 27c. The first outlet 27 a supplies the cleaning liquid to the first cleaning liquid injection nozzle 12, and the second outlet 27 b supplies the cleaning liquid to the second cleaning liquid injection nozzle 14. Further, the third outlet 27c supplies a fresh cleaning liquid for cleaning the slit nozzle. By providing this recycling system, the cleaning liquid having a cleanness level close to that of the new liquid is supplied to each shower nozzle, so that the surface of the priming roller can be maintained in a cleaner state.

  The present invention is not limited to the above-described embodiments, and various modifications and changes can be made. For example, a suction mechanism may be provided in a squeegee that scrapes off the coating liquid discharged onto the priming roller, and the coating liquid scraped off by the squeegee can be discharged to the discharge path via the suction mechanism. By sucking the coating liquid, it is possible to remove the coating liquid that may adhere to the priming roller by the first squeegee and prevent the generation of dust. Thus, by providing the suction mechanism, the problem that the coating liquid scraped off by the squeegee remains on the squeegee is solved.

The top view of the coating device which applied the preliminary discharge apparatus which concerns on this invention Sectional view of the preliminary discharge device

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Preliminary discharge apparatus, 2 ... Recycle part, 10 ... Cleaning liquid tank, 11 ... Priming roller, N ... Slit nozzle, 12 ... 1st cleaning liquid injection nozzle, 13 ... 1st squeegee, 14 ... 2nd cleaning liquid injection nozzle 15 ... second squeegee, 16 ... air nozzle, 17 ... discharge path, 18 ... waste liquid tank, 19 ... suction mechanism, 21 ... discharge hole, 22 ... waste liquid member for liquid level adjustment, 23 ... three-way valve, 24 ... first 25 ... recycle box, 26 ... second pump, 27 ... buffer tank, N ... slit nozzle.

Claims (6)

  1. A cleaning liquid tank that contains the cleaning liquid, a priming roller that is rotatably disposed in the cleaning liquid tank, adheres the coating liquid from the slit nozzle, a first cleaning liquid injection nozzle that sprays the cleaning liquid toward the priming roller, and a priming A squeegee that is disposed downstream of the first cleaning liquid jet nozzle along the rotation direction of the roller and scrapes off the coating liquid adhering to the priming roller, and a priming roller that has passed through the cleaning liquid in the cleaning liquid tank. In a preliminary discharge device comprising: a second cleaning liquid injection nozzle that injects the cleaning liquid toward the surface; and an air nozzle that injects dry air toward the priming roller that has passed through the second cleaning liquid injection nozzle.
    A preliminary path is provided adjacent to the squeegee to discharge the coating liquid scraped from the priming roller by the squeegee, and the coating liquid removed by the squeegee is discharged to the waste liquid tank through the discharge path. Discharge device.
  2.   2. The preliminary ejection device according to claim 1, wherein the squeegee is composed of a plate made of a synthetic resin material that can be elastically deformed.
  3.   3. The preliminary ejection device according to claim 1, wherein a suction mechanism that sucks the coating liquid scraped by the squeegee is provided in the vicinity of the squeegee, and the coating liquid sucked by the suction mechanism is passed through the discharge path. The preliminary discharge device is characterized by discharging to a waste liquid tank.
  4.   4. The preliminary discharge device according to claim 1, further comprising a buffer tank connected to the cleaning liquid tank, wherein the buffer tank is connected to the first and second cleaning liquid injection nozzles. A pre-discharge device, wherein the cleaning liquid stored in the cleaning liquid tank is supplied to the first and second cleaning liquid injection nozzles through the buffer tank and recycled.
  5.   5. The preliminary discharge apparatus according to claim 4, wherein a recycling box including a filter for removing contaminants is connected between the cleaning liquid tank and the buffer tank, and the cleaning liquid discharged from the cleaning liquid tank is made into a clean cleaning liquid by the filter. A preliminary discharge device for supplying the first and second cleaning liquid injection nozzles after the first injection.
  6. 6. The preliminary discharge device according to claim 4, wherein an unused cleaning liquid is supplied to the buffer tank, and the cleaning liquid recovered from the cleaning liquid tank and passed through the filter is mixed with the unused cleaning liquid. The preliminary ejection device is supplied to the first and second cleaning liquid ejection nozzles.

JP2006225550A 2006-08-22 2006-08-22 Preliminary discharge device Pending JP2008049226A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006225550A JP2008049226A (en) 2006-08-22 2006-08-22 Preliminary discharge device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006225550A JP2008049226A (en) 2006-08-22 2006-08-22 Preliminary discharge device
TW096116519A TWI327488B (en) 2006-08-22 2007-05-09
CNA2007101304339A CN101130185A (en) 2006-08-22 2007-07-19 Pre-spraying device
KR1020070083177A KR100890503B1 (en) 2006-08-22 2007-08-20 Pre-discharging apparatus

Publications (1)

Publication Number Publication Date
JP2008049226A true JP2008049226A (en) 2008-03-06

Family

ID=39127682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006225550A Pending JP2008049226A (en) 2006-08-22 2006-08-22 Preliminary discharge device

Country Status (4)

Country Link
JP (1) JP2008049226A (en)
KR (1) KR100890503B1 (en)
CN (1) CN101130185A (en)
TW (1) TWI327488B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101062208B1 (en) 2009-04-29 2011-09-05 주식회사 디지아이 Inspection device for print head
JP2014160612A (en) * 2013-02-20 2014-09-04 Toppan Printing Co Ltd Letterpress printing device, method of manufacturing organic el element, and organic el element

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102378653A (en) * 2009-03-30 2012-03-14 丰田自动车株式会社 Coating die and coating apparatus comprising the same
JP5154510B2 (en) * 2009-06-05 2013-02-27 東京エレクトロン株式会社 Priming processing method and priming processing apparatus
JP5121778B2 (en) * 2009-06-26 2013-01-16 東京エレクトロン株式会社 Priming processing method and priming processing apparatus
CN102707585A (en) * 2011-11-25 2012-10-03 京东方科技集团股份有限公司 Photoresist recovery system
CN103645607B (en) * 2013-12-19 2016-09-07 合肥京东方光电科技有限公司 coating system
CN106423755B (en) * 2016-11-22 2019-06-25 京东方科技集团股份有限公司 Coating apparatus, the method and its clean method that coating fluid is recycled using it

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004121980A (en) * 2002-10-02 2004-04-22 Toppan Printing Co Ltd Method and apparatus for preliminary discharge
JP3877719B2 (en) * 2002-11-07 2007-02-07 東京応化工業株式会社 Pre-discharge device for slit coater
JP4429073B2 (en) * 2004-05-20 2010-03-10 タツモ株式会社 Pre-discharge device for slit coater

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101062208B1 (en) 2009-04-29 2011-09-05 주식회사 디지아이 Inspection device for print head
JP2014160612A (en) * 2013-02-20 2014-09-04 Toppan Printing Co Ltd Letterpress printing device, method of manufacturing organic el element, and organic el element

Also Published As

Publication number Publication date
KR20080019165A (en) 2008-03-03
CN101130185A (en) 2008-02-27
TWI327488B (en) 2010-07-21
TW200810842A (en) 2008-03-01
KR100890503B1 (en) 2009-03-26

Similar Documents

Publication Publication Date Title
JP5258811B2 (en) Slit nozzle cleaning device and coating device
JP3653198B2 (en) Nozzle for drying, drying apparatus and cleaning apparatus using the same
TWI244719B (en) Substrate processing apparatus and substrate cleaning unit
KR100458211B1 (en) Cleaning apparatus
KR101184720B1 (en) Cleaning apparatus for slit nozzle
US4611553A (en) Suction nozzle
US4393778A (en) Device for washing blanket cylinder of rotary offset press
JP2005013837A (en) Cleaning device for slit nozzle for coating apparatus and coating apparatus
TWI293578B (en) Nozzle cleaning apparatus and substrate processing apparatus
JP4708726B2 (en) Cleaning unit, coating apparatus and method having the same
CN100450643C (en) Regulating apparatus and regulating method for slit spray nozzle front end
EP1826157B1 (en) Method and device for washing conveyor belts
RU2330758C2 (en) Method and device for printing press cylinder cleaning
US20030127530A1 (en) Device and method for cleaning glue-application nozzles
TWI335245B (en) Discharge nozzle cleaning apparatus
TWI327897B (en)
TWI382882B (en) Panel washing machine and washing method
KR101099007B1 (en) Preliminary spout apparatus for slit coater
JP2003151948A (en) Apparatus and method of treating surface
JP2001237208A (en) Cleaning method of cleaning surface of polishing device and cleaning device
US20090000499A1 (en) Device and Method for Chambered Doctor Blade
JP3877719B2 (en) Pre-discharge device for slit coater
JP2004243663A (en) Wiping device and its operation method
DE19830488A1 (en) Cleaning device for cylinders of printing presses
TWI227035B (en) Substrate processing device of transporting type