JP3877719B2 - Pre-discharge device for slit coater - Google Patents
Pre-discharge device for slit coater Download PDFInfo
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- JP3877719B2 JP3877719B2 JP2003361347A JP2003361347A JP3877719B2 JP 3877719 B2 JP3877719 B2 JP 3877719B2 JP 2003361347 A JP2003361347 A JP 2003361347A JP 2003361347 A JP2003361347 A JP 2003361347A JP 3877719 B2 JP3877719 B2 JP 3877719B2
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- liquid
- nozzle
- fluid
- discharge device
- slit coater
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Links
- 239000007788 liquid Substances 0.000 claims description 124
- 238000004140 cleaning Methods 0.000 claims description 81
- 239000012530 fluid Substances 0.000 claims description 51
- 239000011248 coating agent Substances 0.000 claims description 31
- 238000000576 coating method Methods 0.000 claims description 31
- 230000005587 bubbling Effects 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 2
- 238000007790 scraping Methods 0.000 claims 2
- 230000037452 priming Effects 0.000 description 15
- 239000007789 gas Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000011084 recovery Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C17/00—Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces
- B05C17/02—Rollers ; Hand tools comprising coating rollers or coating endless belts
Landscapes
- Coating Apparatus (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Nozzles (AREA)
- Spray Control Apparatus (AREA)
Description
本発明は例えばガラス基板や半導体ウェーハ等の板状被処理物表面にレジスト液や現像液、カラーフィルターなどの塗布液をスリット状開口部から流下させて塗布するスリットコータの予備吐出装置に関する。 The present invention relates to a preliminary discharge device for a slit coater for applying a coating solution such as a resist solution, a developing solution, a color filter or the like to a surface of a plate-like object to be processed such as a glass substrate or a semiconductor wafer from a slit-shaped opening.
スリットコータを用いて連続的に多数の基板表面に塗布液を供給する場合、塗布作業と塗布作業との間の待機時間に、空気との接触により吐出ノズル先端部の塗布液の一部の濃度が上昇する。そして、この状態のまま、次の基板に塗布を継続すると、高濃度化した塗布液によって縦すじが発生したり、膜切れが発生する。 When supplying a coating solution to a large number of substrate surfaces continuously using a slit coater, the concentration of a part of the coating solution at the tip of the discharge nozzle due to contact with air during the waiting time between the coating operations Rises. If the coating is continued on the next substrate in this state, vertical streaks or film breakage occurs due to the highly concentrated coating solution.
上記の不利を解消すべく、洗浄液を保持する洗浄槽内に回転ローラを配置し、この回転ローラの上部を洗浄液よりも上方に突出させ、突出した回転ローラの表面にスリットコータの吐出ノズルを近接せしめ、余分な塗布液を吐出ノズルから引き出して回転ローラの表面に付着せしめて取り除くようにした先行技術がしられている。（特許文献１）
尚、液体と空気を混合して噴出する２流体ノズルについては、特許文献２および特許文献３に記載されている。
The two-fluid nozzle that mixes and ejects liquid and air is described in Patent Document 2 and Patent Document 3.
上述したスリットコータの予備吐出装置にあっては、回転ローラの表面に向けて洗浄液を噴出するシャワーノズルを備えているが、このシャワーノズルから噴出する洗浄液は回収タンクに回収した洗浄液を循環させて用いている。 The preliminary discharge device for the slit coater described above includes a shower nozzle that ejects cleaning liquid toward the surface of the rotating roller. The cleaning liquid ejected from the shower nozzle circulates the recovered cleaning liquid in a recovery tank. Used.
このように、従来にあってはシャワーノズルから１度使用した洗浄液を噴出しているので、洗浄能力の点で新液を供給する場合に比べて劣る。逆に新液のみを供給した場合にはコスト的に不利になる。 Thus, conventionally, since the cleaning liquid used once is ejected from the shower nozzle, it is inferior to the case of supplying a new liquid in terms of cleaning ability. Conversely, when only a new solution is supplied, it is disadvantageous in terms of cost.
また、従来例にあっては洗浄後の回転ローラ表面の乾燥を排気によって行うようにしているが、乾燥に時間がかかることもあり、回転ローラ表面に付着し、濃縮した塗布液を剥離し難くいという問題もある。 Also, in the conventional example, the surface of the rotating roller after cleaning is exhausted by exhaust, but it may take time to dry, and it adheres to the surface of the rotating roller and makes it difficult to remove the concentrated coating liquid. There is also a problem.
上記課題を解決すべく本発明は、洗浄槽内に回転ローラと回転ローラの表面に向かって洗浄液を噴出するシャワーノズルを配置した予備吐出装置であって、前記シャワーノズルを新液を噴出する新液シャワーノズルと循環液を噴出する循環液シャワーノズルから構成し、新液シャワーノズルは回転ローラの回転方向を基準として循環液シャワーノズルよりも前方に位置せしめ、また前記洗浄槽内には上下位置が可変な液面調整用排液部材が設けられ、この液面調整用排液部材が最上位の位置で液面は回転ローラの下端よりも上方となり、最下位の位置で液面は回転ローラの下端よりも下方となるようにした。 In order to solve the above-described problems, the present invention provides a preliminary discharge device in which a cleaning nozzle is disposed in a cleaning tank and a shower nozzle that ejects cleaning liquid toward the surface of the rotating roller. It consists of a liquid shower nozzle and a circulating liquid shower nozzle that ejects the circulating liquid, and the new liquid shower nozzle is positioned in front of the circulating liquid shower nozzle with reference to the rotation direction of the rotating roller , and is positioned above and below in the washing tank. The liquid level adjusting drainage member is provided, and the liquid level adjusting drainage member is at the uppermost position, the liquid level is above the lower end of the rotating roller, and the liquid level is at the lowermost position. It was made to be lower than the lower end of.
斯かる構成とすることで、循環液（洗浄液）で粗い洗浄を行い、新液（洗浄液）で、仕上げの洗浄を行うことができる。 With such a configuration, rough cleaning can be performed with the circulating liquid (cleaning liquid), and finishing cleaning can be performed with the new liquid (cleaning liquid).
循環液シャワーノズルとしては１つに限らず、上部循環液シャワーノズルと下部循環液シャワーノズルに分けることで，更に洗浄効率が向上する。 The number of circulating fluid shower nozzles is not limited to one, and the cleaning efficiency is further improved by dividing the circulating fluid shower nozzle into an upper circulating fluid shower nozzle and a lower circulating fluid shower nozzle.
また、回転ローラの表面の乾燥を早めるべく、新液シャワーノズルの上方に乾燥ガスを噴出するガス噴出ノズルを配置してもよい。 Moreover, in order to accelerate the drying of the surface of the rotating roller, a gas ejection nozzle for ejecting a dry gas may be disposed above the new liquid shower nozzle.
また、スキージを調整可能に設けることで、回転ローラの表面に付着し、濃縮した塗布液を効果的に掻き落とすことができる。 Further, by providing an adjustable squeegee, it is possible to effectively scrape off the concentrated coating liquid that adheres to the surface of the rotating roller.
また、洗浄槽内の洗浄液中に一部が浸漬するブラシローラにて回転ローラ表面を洗浄してもよい。ブラシローラを用いることで効果的に回転ローラの表面を清掃することができる。更にブラシローラに付着し、濃縮した塗布液を除去するため、ブラシローラの近傍に回転バー、ガスまたは洗浄液を噴出するノズルを設けてもよい。 Further, the surface of the rotating roller may be cleaned with a brush roller that is partially immersed in the cleaning liquid in the cleaning tank. The surface of the rotating roller can be effectively cleaned by using the brush roller. Further, in order to remove the concentrated coating liquid adhering to the brush roller, a rotary bar, a nozzle for ejecting gas or cleaning liquid may be provided in the vicinity of the brush roller.
更に、洗浄槽内に上下位置が可変な液面調整用排液口を設け、洗浄液の液面を回転ローラの下端よりも上方または下方となるように調整し得る構成とすることが可能である。 Furthermore, it is possible to provide a liquid level adjusting drain port whose vertical position is variable in the cleaning tank so that the level of the cleaning liquid can be adjusted to be above or below the lower end of the rotating roller. .
以上に説明したように本発明に係るスリットノズルの予備吐出装置によれば、シャワーノズルを新液用と循環液用に分け、回転ローラ（プライミングローラ）の回転方向を基準として、新液シャワーノズルを循環液シャワーノズルよりも前方に位置せしめたので、粗洗浄と仕上げ洗浄を効率よく行うことができる。 As described above, according to the preliminary discharge device of the slit nozzle according to the present invention, the shower nozzle is divided into the new liquid and the circulating liquid, and the new liquid shower nozzle is based on the rotation direction of the rotating roller (priming roller). Is positioned in front of the circulating fluid shower nozzle, so that rough cleaning and finish cleaning can be performed efficiently.
しかも、シャワーノズルの下方にスキージを設けることで、回転ローラ表面に付着している塗布液を効果的に掻き落とすことができる。 In addition, by providing a squeegee below the shower nozzle, the coating liquid adhering to the surface of the rotating roller can be effectively scraped off.
また、シャワーノズルの他にブラシローラを設けることで、回転ローラ表面に付着し、濃縮した塗布液を効果的に剥離することができ、回転ローラ表面を清浄に保つことができる。 Further, by providing a brush roller in addition to the shower nozzle, the concentrated coating liquid that adheres to the surface of the rotating roller can be effectively peeled off, and the surface of the rotating roller can be kept clean.
シャワーノズルを２流体ノズルに変更することで、少ない液量で効率よく洗浄することができるし、他にバブリングノズルを設けることで回転ローラ表面に付着している塗布液をさらに効果的に剥離することができる。 By changing the shower nozzle to a two-fluid nozzle, cleaning can be performed efficiently with a small amount of liquid, and by additionally providing a bubbling nozzle, the coating liquid adhering to the surface of the rotating roller is more effectively peeled off. be able to.
更に、液面調整用排液部材によって洗浄槽内の洗浄液の液面を調整可能とすることで、洗浄液の汚れ具合に応じた洗浄方法を採用することができ、洗浄液の有効利用を図ることができる。 Furthermore, by making it possible to adjust the liquid level of the cleaning liquid in the cleaning tank by the liquid level adjusting drainage member, it is possible to employ a cleaning method according to the degree of contamination of the cleaning liquid, and to effectively use the cleaning liquid. it can.
以下に本発明の実施の形態を添付図面に基づいて説明する。ここで、図１は本発明に係る予備吐出装置を組み込んだ塗布装置の全体図、図２は本発明に係る予備吐出装置を示す全体図、図３は液面調整について説明した図、図４は本発明に係る予備吐出装置の別実施例を示す全体図である。 Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is an overall view of a coating apparatus incorporating the preliminary ejection device according to the present invention, FIG. 2 is an overall view showing the preliminary ejection device according to the present invention, FIG. 3 is a diagram explaining liquid level adjustment, and FIG. These are the whole figures which show another Example of the preliminary discharge apparatus which concerns on this invention.
図１において、Ｃは塗布装置、Ｐは予備吐出装置であり、本実施例にあっては塗布装置Ｃとして、リニアモータを利用した非接触タイプを示しているが塗布装置はこれに限定されない。 In FIG. 1, C is a coating device, and P is a preliminary ejection device. In this embodiment, the coating device C shows a non-contact type using a linear motor, but the coating device is not limited to this.
先ず、塗布装置Ｃはベース１の上面に高さ調整機構を備えた脚２を介してテーブル３を設け、図示しないシリンダユニットにて昇降する水平プレート４に被処理基板Ｗをテーブル３から持ち上げるためのピン５を取り付け、このピン５をテーブル３の貫通穴６に臨ませている。 First, the coating apparatus C is provided with a table 3 on the upper surface of the base 1 via a leg 2 having a height adjusting mechanism, and lifts the substrate W to be processed from the table 3 to a horizontal plate 4 that is lifted and lowered by a cylinder unit (not shown). The pin 5 is attached, and this pin 5 faces the through hole 6 of the table 3.
またベース１の上面にはリニアモータ７を介して移動部材８が図１において左右方向に移動可能に支持され、この移動部材８にスリットノズル９が昇降自在に取り付けられている。 Further, a moving member 8 is supported on the upper surface of the base 1 via a linear motor 7 so as to be movable in the left-right direction in FIG. 1, and a slit nozzle 9 is attached to the moving member 8 so as to be movable up and down.
一方、ベース１の一端側（図１の左側端）には予備吐出装置Ｐが配置されている。予備吐出装置Ｐは図２に示すように、洗浄液を貯留する洗浄槽１１内に円筒状プライミングローラ１２を回転自在に配置している。この円筒状プライミングローラローラ１２はステンレス、アルミ、チタン等で形成され、その寸法は直径が３０〜１００ｍｍ、長さがスリットノズル９の長手方向長さよりも若干大きく設定され、予備吐出時にはスリットノズル９下端（ノズル孔）との間隔は２５〜３００μｍとなる。 On the other hand, a preliminary discharge device P is disposed on one end side of the base 1 (left end in FIG. 1). As shown in FIG. 2, the preliminary discharge device P has a cylindrical priming roller 12 rotatably disposed in a cleaning tank 11 for storing a cleaning liquid. The cylindrical priming roller roller 12 is made of stainless steel, aluminum, titanium or the like, and its dimensions are set to 30 to 100 mm in diameter and the length is set slightly larger than the longitudinal length of the slit nozzle 9. The distance from the lower end (nozzle hole) is 25 to 300 μm.
また、開放された洗浄槽１１上面には蓋体１３，１４を設け、これら蓋体１３，１４の内端を円筒状プライミングローラ１２に接近させて洗浄液の蒸発をできるだけ防いでいる。そして、蓋体１３には循環する洗浄液を噴出する第１循環液シャワーノズル１５を形成し、蓋体１４には空気，窒素ガスなどの乾燥ガスを噴出するノズル１６を形成している。 Further, lids 13 and 14 are provided on the opened upper surface of the cleaning tank 11, and the inner ends of the lids 13 and 14 are brought close to the cylindrical priming roller 12 to prevent evaporation of the cleaning liquid as much as possible. A first circulating liquid shower nozzle 15 for ejecting circulating cleaning liquid is formed on the lid body 13, and a nozzle 16 for ejecting dry gas such as air and nitrogen gas is formed on the lid body 14.
また、円筒状プライミングローラ１２の回転方向を基準として、蓋体１３から蓋体１４に向けて、第１スキージ１７、第２循環液シャワーノズル１８、ブラシローラ１９、第２スキージ２０および新しい洗浄液を噴出する新液シャワーノズル２１を配置している。 Further, the first squeegee 17, the second circulating liquid shower nozzle 18, the brush roller 19, the second squeegee 20, and a new cleaning liquid are passed from the lid body 13 toward the lid body 14 with reference to the rotational direction of the cylindrical priming roller 12. A new liquid shower nozzle 21 to be ejected is disposed.
前記第１スキージ１７及び第２スキージ２０は洗浄槽１１の側壁にネジ部材１７ａ、２０ａを介して取り付けられ、ネジ部材の締め込み量を調整することでプライミングローラ１２に対する突出量が変化せしめられる。 The first squeegee 17 and the second squeegee 20 are attached to the side wall of the cleaning tank 11 via screw members 17a and 20a, and the protrusion amount with respect to the priming roller 12 is changed by adjusting the tightening amount of the screw member.
また、洗浄槽１１の側壁には排気ダクト２２が開口するとともに、洗浄槽１１の底部にはブラシローラ１９を洗浄する回転バー２３及びブラシローラ１９に向けて洗浄液または窒素ガスを噴出するノズル２４を設けている。 In addition, an exhaust duct 22 is opened in the side wall of the cleaning tank 11, and a rotating bar 23 for cleaning the brush roller 19 and a nozzle 24 for ejecting cleaning liquid or nitrogen gas toward the brush roller 19 are provided at the bottom of the cleaning tank 11. Provided.
前記回転バー２３はそれ自身回転するわけではなく、回転するブラシローラ１９に接触してブラシローラ１９に付着した固形状塗布液などの汚れを落とす作用を発揮する。前記ノズル２４はブラシローラ１９に付着した固形状塗布液などの汚れを落とすために、洗浄液または窒素ガスを噴出している。またノズル２４から空気を噴出させず窒素ガスを噴出するようにしたのは洗浄液の劣化を防止するためである。
これら回転バー２３とノズル２４は併用して使用しても良いし、個別に使用してもよい。
The rotating bar 23 does not rotate by itself, but exerts an effect of removing dirt such as a solid coating liquid adhering to the brush roller 19 by contacting the rotating brush roller 19. The nozzle 24 ejects cleaning liquid or nitrogen gas in order to remove dirt such as solid coating liquid adhering to the brush roller 19. The reason why the nitrogen gas is jetted without jetting air from the nozzle 24 is to prevent the cleaning liquid from deteriorating.
These rotary bars 23 and nozzles 24 may be used in combination or may be used individually.
また、図３に示すように、洗浄槽１１の底部には回収路２５につながるドレーン口２６が形成され、洗浄槽１１内の洗浄液をフィルターを介して回収し、再び第１および第２循環液シャワーノズル１５、１８からプライミングローラ１２に向けて噴出せしめるようにしている。尚、ドレーン口２６の形状は上方に向かって広がるテーパ状をなし、溶剤が蒸発することによって濃縮した塗布液などの回収が容易に行えるようにしている。ドレーン口２６をテーパ状とする代わりに洗浄槽１１の底面全体をドレーン口２６に向けて傾斜させてもよい。 Further, as shown in FIG. 3, a drain port 26 connected to the recovery path 25 is formed at the bottom of the cleaning tank 11, and the cleaning liquid in the cleaning tank 11 is recovered through a filter, and again the first and second circulating liquids. The shower nozzles 15 and 18 are ejected toward the priming roller 12. The drain port 26 has a tapered shape that extends upward, so that the concentrated coating solution can be easily recovered by evaporation of the solvent. Instead of making the drain port 26 tapered, the entire bottom surface of the cleaning tank 11 may be inclined toward the drain port 26.
また、回収路２５から伸びる液面調整用排液部材２７が洗浄槽１１の底部を貫通して洗浄槽１１内に臨んでいる。この液面調整用排液部材２７は上端を排液口とするとともに上下位置調整可能とされ、最上位の位置で洗浄液の液面がプライミングローラ１２の下端よりも上に、最下位の位置で洗浄液の液面がプライミングローラ１２の下端よりも下になるようにしている。また、ブラシローラ１９については液面調整用排液部材２７が最上位の位置で洗浄液の液面がブラシローラ１９の上端よりも下に、最下位の位置で洗浄液の液面がブラシローラ１９の下端よりも上になるように設定している。 Further, a liquid level adjusting drain member 27 extending from the recovery path 25 passes through the bottom of the cleaning tank 11 and faces the cleaning tank 11. The liquid level adjusting drain member 27 has an upper end as a drain port and can be adjusted in the vertical position. At the highest position, the liquid level of the cleaning liquid is above the lower end of the priming roller 12 and at the lowest position. The liquid level of the cleaning liquid is set lower than the lower end of the priming roller 12. As for the brush roller 19, the cleaning liquid level is lower than the upper end of the brush roller 19 when the liquid level adjusting drain member 27 is at the uppermost position, and the cleaning liquid level of the brush roller 19 is at the lowermost position. It is set to be above the lower end.
以上の如く構成することで、洗浄液が清浄な場合には液面調整用排液部材２７を高い位置としてプライミングローラ１２の下端を直接洗浄液中に浸漬せしめ、洗浄液中に塗布液濃度などが増えてきた場合には、液面調整用排液部材２７を下げ、洗浄液の液面からプライミングローラ１２を浮かせ、シャワーノズル１５、１８，２１およびブラシローラ１９によってプライミングローラ１２表面を洗浄する。 By configuring as described above, when the cleaning liquid is clean, the lower surface of the priming roller 12 is directly immersed in the cleaning liquid with the liquid level adjusting drain member 27 at a high position, and the concentration of the coating liquid increases in the cleaning liquid. In this case, the liquid level adjusting drain member 27 is lowered, the priming roller 12 is lifted from the liquid level of the cleaning liquid, and the surface of the priming roller 12 is cleaned by the shower nozzles 15, 18, 21 and the brush roller 19.
また図４に示すように、第１循環液シャワーノズル１５を第１循環液２流体ノズル２８に、第２循環液シャワーノズル１８を第２循環液スプレーノズル２９に、新液シャワーノズル２１を新液２流体ノズル３０に、置き換えることも可能である。２流体ノズルは液体に気体を吹き込んで霧状にするため、液体の表面積が大きくなり円筒状プライミングローラ１２に付着した塗布液にもよく馴染んで除去しやすくなる。さらに、洗浄液の使用量も大幅に削減することができる。 Further, as shown in FIG. 4, the first circulating fluid shower nozzle 15 is replaced with the first circulating fluid 2 fluid nozzle 28, the second circulating fluid shower nozzle 18 is replaced with the second circulating fluid spray nozzle 29, and the new fluid shower nozzle 21 is replaced with the new circulating fluid shower nozzle 21. The liquid 2 fluid nozzle 30 can be replaced. Since the two-fluid nozzle blows a gas into the liquid to form a mist, the surface area of the liquid increases, and the coating liquid adhering to the cylindrical priming roller 12 is well adapted to be easily removed. Furthermore, the amount of cleaning liquid used can be greatly reduced.
また、洗浄槽１１の底部にバブリングノズル３１を設けて、ブラシローラ１９と置き換えてもよいし、併用してもよい。バブリングノズル３１は液の噴出手段としては、例えば噴水のようにある一定量の洗浄液を噴出させて円筒状プライミングローラ１２に付着した塗布液を洗い流す方法や、気体を含んだ泡状の洗浄液を当てて塗布液を洗い流す方法などがある。 Further, a bubbling nozzle 31 may be provided at the bottom of the cleaning tank 11 to replace the brush roller 19 or may be used in combination. The bubbling nozzle 31 can be used as a means for ejecting a liquid, for example, by spraying a certain amount of cleaning liquid such as a fountain to wash away the coating liquid adhering to the cylindrical priming roller 12, or by applying a foam-like cleaning liquid containing gas. There is a method to wash away the coating solution.
また、第１循環液２流体ノズル２８の側にはトラポプタンク（図示せず）につながる廃液通路３２が、新液２流体ノズル３０の側には循環用バッファタンク（図示せず）につながる廃液通路３３が開口している。 A waste liquid passage 32 connected to a trapop tank (not shown) is provided on the first circulating fluid 2 fluid nozzle 28 side, and a waste fluid passage connected to a circulation buffer tank (not shown) is provided on the new fluid 2 fluid nozzle 30 side. 33 is open.
尚、実施例にあっては新液シャワーノズルを設けた予備吐出装置について説明したが、新液シャワーノズルを設けず、循環液シャワーノズルのみを設けた予備吐出装置としてもよい。 In the embodiment, the preliminary discharge device provided with the new liquid shower nozzle has been described. However, the preliminary discharge device provided with only the circulating liquid shower nozzle without providing the new liquid shower nozzle may be used.
本願発明によるスリットコータの予備吐出装置は、半導体製造装置のみならず液晶表示装置やプラズマディスプレイなどＩＴ関連製造装置への応用が可能です。 The slit coater pre-discharge device according to the present invention can be applied not only to semiconductor manufacturing equipment but also to IT-related manufacturing equipment such as liquid crystal displays and plasma displays.
１…ベース
２…脚
３…テーブル
４…水平プレート
５…ピン
６…貫通穴
７…リニアモータ
８…移動部材
９…スリットノズル
１１…洗浄槽
１２…円筒状プライミングローラ
１３，１４…蓋体
１５…第１循環液シャワーノズル
１６…乾燥ガスを噴出するノズル
１７…第１スキージ
１７ａ、２０ａ…ネジ部材
１８…第２循環液シャワーノズル
１９…ブラシローラ
２０…第２スキージ
２１…新液シャワーノズル
２２…排気ダクト
２３…回転バー
２４…洗浄液または窒素ガスを噴出するノズル
２５…回収路
２６…ドレーン口
２７…液面調整用排液部材
２８…第１循環液２流体ノズル
２９…第２循環液シャワーノズル
３０…新液２流体ノズル
３１…バブリングノズル
３２…廃液通路（トラップタンク）
３３…廃液通路（循環用バッファタンク）
Ｃ…塗布装置
Ｐ…予備吐出装置。
DESCRIPTION OF SYMBOLS 1 ... Base 2 ... Leg 3 ... Table 4 ... Horizontal plate 5 ... Pin 6 ... Through-hole 7 ... Linear motor 8 ... Moving member 9 ... Slit nozzle 11 ... Cleaning tank 12 ... Cylindrical priming rollers 13, 14 ... Cover 15 ... 1st circulating fluid shower nozzle 16 ... nozzle 17 which ejects dry gas ... 1st squeegee 17a, 20a ... screw member 18 ... 2nd circulating fluid shower nozzle 19 ... brush roller 20 ... 2nd squeegee 21 ... new liquid shower nozzle 22 ... Exhaust duct 23 ... Rotating bar 24 ... Nozzle 25 for jetting cleaning liquid or nitrogen gas ... Recovery path 26 ... Drain port 27 ... Liquid level adjusting drain member 28 ... First circulating fluid 2 fluid nozzle 29 ... Second circulating fluid shower nozzle 30 ... New liquid 2 fluid nozzle 31 ... Bubbling nozzle 32 ... Waste liquid passage (trap tank)
33 ... Waste liquid passage (circulation buffer tank)
C: coating device P: preliminary ejection device.
Claims (12)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003361347A JP3877719B2 (en) | 2002-11-07 | 2003-10-22 | Pre-discharge device for slit coater |
| KR1020030077470A KR20040041012A (en) | 2002-11-07 | 2003-11-04 | A pre-discharging apparatus for a slit coater |
| TW092130979A TWI284567B (en) | 2002-11-07 | 2003-11-05 | A pre-discharging apparatus for a slit coater |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002323554 | 2002-11-07 | ||
| JP2003361347A JP3877719B2 (en) | 2002-11-07 | 2003-10-22 | Pre-discharge device for slit coater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004167476A JP2004167476A (en) | 2004-06-17 |
| JP3877719B2 true JP3877719B2 (en) | 2007-02-07 |
Family
ID=32716019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003361347A Expired - Lifetime JP3877719B2 (en) | 2002-11-07 | 2003-10-22 | Pre-discharge device for slit coater |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP3877719B2 (en) |
| KR (1) | KR20040041012A (en) |
| TW (1) | TWI284567B (en) |
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|---|---|---|---|---|
| KR101484272B1 (en) * | 2008-11-28 | 2015-01-20 | 주식회사 디엠에스 | chemical solution pre-discharging apparatus |
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-
2003
- 2003-10-22 JP JP2003361347A patent/JP3877719B2/en not_active Expired - Lifetime
- 2003-11-04 KR KR1020030077470A patent/KR20040041012A/en not_active Application Discontinuation
- 2003-11-05 TW TW092130979A patent/TWI284567B/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101484272B1 (en) * | 2008-11-28 | 2015-01-20 | 주식회사 디엠에스 | chemical solution pre-discharging apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20040041012A (en) | 2004-05-13 |
| JP2004167476A (en) | 2004-06-17 |
| TWI284567B (en) | 2007-08-01 |
| TW200413103A (en) | 2004-08-01 |
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