200413103 (1) 玖、發明說明 【發明所屬技術之領域】 本發明是例如關於在玻璃基板或半導體晶圓等的板狀 被處理物表面使光阻液或顯像液、彩色濾光片等的塗布液 從開縫狀開口部流下並塗布的開縫式塗布機的預備吐出裝 置。200413103 (1) 发明. Description of the invention [Field of the invention] The present invention relates to, for example, applying a photoresist liquid, a developing liquid, and a color filter on the surface of a plate-like object to be treated, such as a glass substrate or a semiconductor wafer. A preliminary discharge device of a slot-type coating machine in which a coating liquid flows from a slot-shaped opening and is applied.
【先前技術】 在採用開縫式塗布機並供給塗布液到連續性地多數個 基板表面的情形，在塗布作業與塗布作業之間的待機時 間，由於與空氣的接觸使得吐出噴嘴前端部的塗布液的其 中一部份的濃度上昇。然後，按照該狀態原樣，當繼續對 接下來的基板塗布時，由於高濃度化後的塗布液而使縱向 條紋產生、薄膜破裂產生。[Prior Art] In the case where a slot coater is used and a coating liquid is supplied to a plurality of substrate surfaces continuously, the waiting time between the coating operation and the coating operation is caused by the contact with the air to cause coating at the tip of the discharge nozzle. The concentration of one part of the liquid increased. Then, in this state, when the next substrate is continuously coated, vertical streaks and thin film cracks are generated due to the high concentration of the coating liquid.
爲了解決上述的不利因素，已知有先前技術是以在保 持洗淨液的洗淨槽内配置旋轉滾筒，而且使該旋轉滾筒的 上部比洗淨液朝更上方突出，使開縫式塗布機的吐出噴嘴 接近於突出後的旋轉滾筒的表面，使多餘的塗布液從吐出 噴嘴引出而附著在旋轉滾筒的表面並去除的方式來進行。 (專利文獻1 ) 而且，關於將液體與空氣混合並噴出的2流體噴嘴是 被記載於專利文獻2及專利文獻3。 〔專利文獻1〕日本特開2 0 0 1 - 3 1 0 1 4 7號 〔專利文獻2〕日本特開2 0 0 3 - 1 4 5 0 6 2號 -5- (2) (2)200413103 〔專利文獻3〕日本特開2003-145064號 【發明內容】 〔發明所欲解決之課題〕 在上述開縫式塗布機的預備吐出裝置之中，雖然具有 朝向旋轉滾筒的表面並噴出洗淨液的噴淋噴嘴，但是從該 噴淋噴嘴噴出的洗淨液是使回收到回收槽後的洗淨液循環 使用。 如此，因爲在先前之中是從噴淋噴嘴將一度使用後的 洗淨液噴出，所以在洗淨能力之點與供給新液的情形比較 較爲不如。反之僅供應新液的情形是對成本上較爲不利。 另外，在先前例之中是雖然以藉由將洗淨後的旋轉滾 筒表面的乾燥執行排氣的方式進行，但是也有對乾燥所花 費的時間，將附著在旋轉滾筒表面而且濃縮後的塗布液很 難剝離之所說的問題。 〔用來解決課題之手段〕 爲了解決上述課題，本發明是在設置於洗淨槽内朝向 旋轉滾筒與旋轉滾筒的表面並噴出洗淨液的噴淋噴嘴的預 備吐出裝置之中，由噴出新液的新液噴淋噴嘴與噴出循環 液的循環液噴淋噴嘴來構成上述噴淋噴嘴，而且新液噴淋 噴嘴是將旋轉滾筒的旋轉方向作爲基準並使之比循環液噴 淋噴嘴位在更前方處。 藉由如此之構成，能以循環液（洗淨液）來進行粗洗 -6 - (3) (3)200413103 淨，能以新液（洗淨液）來進行完成前之最後洗淨。 循環液噴淋噴嘴是不限於一個，藉由分爲上部循環液 噴淋噴嘴與下部循環液噴淋噴嘴，來使洗淨效率更提昇。 另外，爲了儘早使旋轉滾筒的表面乾燥，也可在新液 噴淋噴嘴的上方配置將乾燥氣體噴出的氣體噴出噴嘴。 另外，藉由可調整地設置刷帚，而能有效果上地掃落 附著在旋轉滾筒的表面且濃縮後的塗布液。 另外，也可在洗淨槽内的洗淨液中以其中一部份浸漬 的滾筒刷來洗淨旋轉滾筒表面。可藉由採用滾筒刷來有效 果上地淸掃旋轉滾筒的表面。而且爲了去除附著在滾筒刷 且濃縮後的塗布液，所以也可在滾筒刷的旁邊設置旋轉 桿、噴出氣體或洗淨液的噴嘴。 而且，在洗淨槽内上下位置是設置可變的液面調整用 排液口，能以將洗淨液的液面形成比旋轉滾筒的下端還更 上方或下方的方式來調整而得的構成。 〔發明的效果〕 根據如以上說明的方式，本發明的開縫式塗佈機的預 備吐出裝置，將噴淋噴嘴分爲新液用與循環液用，將旋轉 滾筒（引液滾筒）的旋轉方向作爲基準，因爲使新液噴淋 噴嘴位於比循環液噴淋噴嘴還更前方，所以能將粗洗淨與 完成前之最後洗淨更有效率地進行。 而且，藉由設置在噴淋噴嘴的下方的刷帚，可有效果 上地掃落附著於旋轉滾筒表面的塗布液。 (4) (4)200413103 另外，藉由在噴淋噴嘴之外設置滾筒刷，可有效果上 地剝離附著於旋轉滾筒表面而且濃縮後的塗布液，可將旋 轉滾筒表面保持成淸淨化。 藉由將噴淋噴嘴變更成2流體噴嘴，能以較少的液量 來有效率地洗淨，此外可藉由設置起泡噴嘴來更有效果上 地剝離附著於旋轉滾筒表面的塗布液。 而且，藉由利用液面調整用排液構件可調整洗淨槽内 的洗淨液的液面，可採用對應於洗淨液的污穢情形之洗淨 方法，能謀求洗淨液之有效利用。 【實施方式】 以下根據添附圖示說明本發明的實施形態。此處，第 1圖是裝入本發明的預備吐出裝置的塗布裝置之全體圖， 第2圖是顯示本發明的預備吐出裝置的全體圖，第3圖是 說明關於液面調整之圖，第4圖是顯示本發明的預備吐出 裝置的其他實施例之全體圖。 針對第1圖，C爲塗布裝置，P爲預備吐出裝置，在 本實施例之中作爲塗布裝置C是雖然顯示利用線性馬達的 非接觸型，但是塗布裝置並不限定於此。 首先，塗布裝置c是透過在基座1的上面具有高度調 整機構的支撐腳2而設置平台3，而且用來將被處理基板 W從平台3抬起的銷5安裝在以未圖示的壓缸單元來昇降 的水平平板4上，使該銷5面臨平台3的貫通孔6。 另外在基座1的上面是透過線性馬達7而讓移動構件 -8- (5) (5)200413103 8在第1圖之中可朝左右方向移動地支承，而且在該移動 構件8升降自如地安裝有開縫式噴嘴9。 另一方，在基座1的其中一端側（第1圖的左側端） 是配置有預備吐出裝置p。預備吐出裝置P是如第2 Η戶斤 示，在貯留洗淨液的洗淨槽Η內旋轉自如地配置圓筒狀 引液滾筒1 2。該圓筒狀引液滾筒1 2是以不鏽鋼、銘、舒； 等所形成，其尺寸是直徑3 0〜1 0 0 m m，讓長度比開縫式 噴嘴9的長軸方向長度更稍微大地設定，而且在預備吐出 時與開縫式噴嘴9下端（噴嘴孔）的間隔是形成爲2 5〜 3 0 0 // m 〇 另外，在所開放的洗淨槽1 1上面是設置蓋體13、 1 4，而且使這些蓋體1 3、1 4的內端接近圓筒狀引液滾筒 1 2並儘可能防止洗淨液的蒸發。然後，在蓋體1 3是形成 將循環的洗淨液噴出的第1循環液噴淋噴嘴1 5，而且在 蓋體1 4是形成將空氣、氮氣氣體等的乾燥氣體噴出的噴 嘴1 6 〇 另外，將圓筒狀引液滾筒〗2的旋轉方向作爲基準， 逆從蓋體1 3朝向蓋體1 4，設置將第1刷帚丨7、第2循環 液噴淋噴嘴1 8、滾筒刷1 9、第2刷帚20以及新的洗淨液 噴出的新液噴淋噴嘴2 1。 上述第1刷帚1 7及第2刷帚2 0是可在洗淨槽1 1的 側壁透過螺栓構件1 7a、2〇a來安裝，而且藉由調整螺栓 構件的鎖入量可使對於圓筒狀引液滾筒1 2的突出量變 化。 (6) (6)200413103 另外’在洗淨槽1 1的側壁的排氣導管2 2是開口，並 且在洗淨槽Π的底部是設置洗淨滾筒刷1 9的旋轉桿2 3 及朝向滾筒刷1 9並噴出洗淨液或氮氣氣體的噴嘴2 4。 上述旋轉桿2 3並不會自行旋轉，而且與旋轉的滾筒 刷.1 9接觸並發揮將附著在滾筒刷1 9的固態狀塗布液等的 污穢去除的作用。上述噴嘴24是爲了去除附著在滾筒刷 1 9的固態狀塗布液等的污穢，所以噴出洗淨液或氮氣氣 體。另外從噴嘴2 4不使空氣噴出而以噴出氮氣氣體的方 式來進行是爲了防止洗淨液的劣化。 這些旋轉桿2 3與噴嘴2 4是也可倂用來使用，也可個 別地使用。 另外，如第3圖所示，在洗淨槽1 1的底部是形成有 與回收通道2 5連接的排液口 2 6，將洗淨槽1 1内的洗淨 液透過濾芯來回收，而且再度以從第1及第2循環液噴淋 噴嘴1 5 ' 1 8朝向引液滾筒1 2使之噴出的方式來進行。而 且，排液口 2 6的形狀是製作成朝向上方並擴張的喇叭 狀，以藉由溶劑蒸發來使濃縮後的塗布液等的回收容易地 執行的方式來進行。也可取代製作成喇叭狀的排液口 26 而使洗淨槽Π的底面全體朝向排液口 2 6並傾斜。 另外，從回收通道2 5伸長的液面調整用排液構件2 7 是貫通洗淨槽1 1的底部並面臨洗浄槽1 1内。該液面調整 用排液構件2 7是將上端製作成排液□，並且可調整上下 位置，而且製作成在最上位的位置時，洗淨液的液面是在 比引液滾筒1 2的下端形成在更上方，在最下位的位置 -10 - (7) (7)200413103 時，洗淨液的液面是比引液滾筒1 2的下端形成在更下方 的方式。另外，關於滾筒刷1 9是設定液面調整用排液構 件2 7在最上位的位置時，洗淨液的液面是比滾筒刷1 9的 上端形成在更下方，在最下位的位置時，洗淨液的液面是 比滾筒刷1 9的下端形成在更上方的方式。 藉由如以上之構成，洗淨液在淸淨的情形是將液面調 整用排液構件2 7形成高的位位置並使引液滾筒1 2的下端 直接浸漬在淸淨液中，而且在淸淨液中塗布液濃度等增加 的情形是降低液面調整用排液構件2 7的高度，使圓筒狀 引液滾筒 1 2從淸淨面的液面浮出，而且藉由沖洗噴嘴 1 5、1 8、2 1及滾筒刷1 9來洗淨引液滾筒1 2表面。 另外如第4圖所示，也可將第1循環液噴淋噴嘴1 5 置換成第1循環液2流體噴嘴2 8，將第2循環液噴淋噴 嘴1 8置換成第2循環液噴霧噴嘴2 9，將新液噴淋噴嘴2 1 置換成新液2流體噴嘴3 0。2流體噴嘴是爲了在液體吹入 氣體而形成霧狀，所以液體的表面積越大來使得附著在圓 筒狀引液滾筒12的塗布液也越易溶合而容易去除。而 且’洗淨液的使用量也可大幅地削減。 另外，在洗淨槽1 1的底部設置起泡噴嘴3 1，並且也 可與滾筒刷1 9置換，而且也可倂用。起泡噴嘴3 1是作爲 液體的噴出手段，例如，具有以噴水的方式來使某一定量 的洗淨液噴出並將附著在圓筒狀引液滾筒1 2 0勺塗布液沖 洗的方法、或接觸含有氣體的泡狀的洗淨液並將塗布液沖 洗的方法等。 -11 - (8) 200413103 另外，在第1循環液2流體噴嘴2 8之側的與液氣分 離槽（未圖示）連接的廢液通路3 2是開口，而且在新液 2流體噴嘴3 0之側的與循環用緩衝槽（未圖示）連接的 廢液通路3 3是開口。 而且’在實施例之中是雖然說明了關於設置了新液噴 淋噴嘴的預備吐出裝置，但是也可不設置新液噴淋噴嘴， 而且僅設置了循環液噴淋噴嘴的預備吐出裝置。In order to solve the above-mentioned disadvantages, the prior art is known that a rotary drum is arranged in a washing tank holding a washing liquid, and an upper part of the rotary drum is protruded upward than the washing liquid to make a slit coater. The ejection nozzle is performed close to the surface of the rotating drum after the protrusion, and the excess coating liquid is drawn out from the ejection nozzle and adheres to the surface of the rotating drum and is removed. (Patent Document 1) Patent Documents 2 and 3 describe two-fluid nozzles that mix and eject liquid and air. [Patent Document 1] Japanese Patent Laid-Open No. 2 0 0 1-3 1 0 1 4 7 [Patent Document 2] Japanese Patent Laid-Open No. 2 0 0 3-1 4 5 0 6 No. 2-5- (2) (2) 200413103 [Patent Document 3] Japanese Patent Application Laid-Open No. 2003-145064 [Summary of the Invention] [Problems to be Solved by the Invention] The preliminary discharge device of the slotted coating machine described above has a surface facing a rotating drum and sprays a cleaning solution. Spray nozzle, but the cleaning liquid sprayed from the spray nozzle is used for recycling the cleaning liquid recovered to the recovery tank. In this way, because the cleaning liquid that was once used is sprayed from the spray nozzle in the past, it is not as good at the point of the cleaning capacity as when the new liquid is supplied. Conversely, the situation of supplying only new liquid is disadvantageous in terms of cost. In addition, in the previous example, although the cleaning is performed by drying the surface of the rotating drum surface after being washed, there is also a time required for drying, and the coating liquid that adheres to the surface of the rotating drum and is concentrated It is difficult to strip off what is being said. [Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention is a pre-ejecting device in a spray nozzle provided in a washing tank, which sprays a cleaning liquid toward a surface of a rotating drum and a rotating drum and sprays a cleaning solution. The new liquid spray nozzle and the circulating liquid spray nozzle that sprays the circulating liquid constitute the above spray nozzle, and the new liquid spray nozzle uses the rotation direction of the rotating drum as a reference and is positioned at a ratio of the circulating liquid spray nozzle. Further ahead. With this structure, rough washing can be performed with a circulating liquid (washing liquid) -6-(3) (3) 200413103, and final washing before completion can be performed with a new liquid (washing liquid). The circulating liquid spray nozzle is not limited to one, and the cleaning efficiency is further improved by being divided into an upper circulating liquid spray nozzle and a lower circulating liquid spray nozzle. In addition, in order to dry the surface of the rotating drum as soon as possible, a gas ejection nozzle for ejecting dry gas may be disposed above the new liquid spray nozzle. In addition, by providing an adjustable brush broom, the concentrated coating liquid adhered to the surface of the rotating drum can be effectively swept off. In addition, the surface of the rotating drum can also be cleaned with a roller brush that is partially immersed in the cleaning solution in the cleaning tank. The surface of the rotating drum can be effectively cleaned by using a roller brush. In addition, in order to remove the concentrated coating liquid adhered to the roller brush, a rotating rod, a nozzle for spraying gas or a cleaning liquid may be provided beside the roller brush. In addition, the upper and lower positions in the washing tank are provided with a variable liquid level adjustment drain port, and the structure can be adjusted to form the liquid level of the cleaning liquid above or below the lower end of the rotating drum. . [Effects of the Invention] According to the method described above, the preliminary discharge device of the slot-type coating machine of the present invention divides the spray nozzle into a new liquid and a circulating liquid, and rotates the rotary drum (priming drum). The direction is used as a reference. Since the new liquid spray nozzle is positioned further ahead than the circulating liquid spray nozzle, the rough cleaning and the final cleaning before completion can be performed more efficiently. In addition, the broom provided below the spray nozzle can effectively sweep down the coating liquid adhering to the surface of the rotating drum. (4) (4) 200413103 In addition, by providing a roller brush outside the spray nozzle, the concentrated coating liquid adhered to the surface of the rotating drum can be effectively peeled off, and the surface of the rotating drum can be kept clean. By changing the spray nozzle to a two-fluid nozzle, the liquid can be efficiently washed with a small amount of liquid, and the coating liquid adhering to the surface of the rotating drum can be more effectively peeled off by providing a foaming nozzle. In addition, the liquid level of the cleaning liquid in the cleaning tank can be adjusted by the liquid level adjusting member, and a cleaning method corresponding to the contamination of the cleaning liquid can be adopted, and the effective use of the cleaning liquid can be achieved. [Embodiment] An embodiment of the present invention will be described below with reference to the attached drawings. Here, FIG. 1 is an overall view of a coating device incorporated in the preliminary ejection device of the present invention, FIG. 2 is an overall view showing the preliminary ejection device of the present invention, and FIG. 3 is a diagram illustrating adjustment of the liquid level. FIG. 4 is an overall view showing another embodiment of the preliminary discharge device of the present invention. With reference to Fig. 1, C is a coating device and P is a preliminary discharge device. In this embodiment, the coating device C is a non-contact type using a linear motor, but the coating device is not limited to this. First, the coating device c is provided with a platform 3 through a support leg 2 having a height adjustment mechanism on the upper surface of the base 1, and a pin 5 for lifting the substrate to be processed W from the platform 3 is mounted at a pressure not shown in the figure. The pin 5 faces the through hole 6 of the platform 3 on the horizontal flat plate 4 which is lifted by the cylinder unit. In addition, the moving member -8- (5) (5) 200413103 8 is supported on the base 1 by a linear motor 7 so as to be movable in the left-right direction in FIG. 1, and the moving member 8 can be lifted and lowered freely. A slotted nozzle 9 is installed. On the other hand, a preliminary ejection device p is arranged on one end side (the left end in FIG. 1) of the base 1. As shown in the second example, the preliminary discharge device P is provided with a cylindrical drainage drum 12 rotatably arranged in a washing tank 贮 in which the washing liquid is stored. The cylindrical drainage drum 12 is made of stainless steel, Ming, Shu; etc., and its size is 30 ~ 100 mm in diameter, so that the length is set slightly larger than the length in the long axis direction of the slotted nozzle 9. In addition, the distance from the lower end (nozzle hole) of the slotted nozzle 9 during the preliminary discharge is formed to be 2 5 to 3 0 0 // m 〇 In addition, a cover body 13 is provided on the opened washing tank 11 14, and the inner ends of these covers 1 3, 1 4 are brought close to the cylindrical liquid suction drum 12 and the evaporation of the washing liquid is prevented as much as possible. Then, the cover body 13 is formed as a first circulating liquid spray nozzle 15 for ejecting the circulating cleaning liquid, and the cover body 14 is formed as a nozzle 16 for ejecting a dry gas such as air, nitrogen gas or the like. In addition, the rotation direction of the cylindrical liquid-injection drum 2 is used as a reference, and the cover 1 13 is moved toward the cover 14 in a reverse direction, and a first brush broom 7, a second circulating liquid spray nozzle 18, and a roller brush are provided. 19. The second brush broom 20 and the new liquid spray nozzle 21 from which the new cleaning liquid is sprayed. The first broom 17 and the second broom 20 can be installed through the bolt members 17a and 20a on the side wall of the washing tank 11, and can be adjusted to the circle by adjusting the locking amount of the bolt member. The amount of protrusion of the cylindrical liquid suction cylinder 12 changes. (6) (6) 200413103 In addition, 'the exhaust duct 2 2 on the side wall of the washing tank 1 1 is open, and at the bottom of the washing tank Π is a rotating rod 2 3 which is provided with a washing roller brush 19 and faces the drum. Brush 19 and spray nozzles 2 4 that spray cleaning liquid or nitrogen gas. The above-mentioned rotating lever 23 does not rotate on its own, and also comes into contact with the rotating roller brush .19 to play a role of removing contamination such as the solid coating liquid adhering to the roller brush 19. The nozzle 24 is used to remove dirt and the like from the solid coating liquid adhering to the roller brush 19, so that the cleaning liquid or nitrogen gas is sprayed. The reason for performing the spraying of nitrogen gas without spraying air from the nozzles 24 is to prevent deterioration of the cleaning solution. These rotary levers 23 and nozzles 24 can be used either individually or individually. In addition, as shown in FIG. 3, a drain port 26 connected to the recovery channel 25 is formed at the bottom of the cleaning tank 11 and the cleaning liquid in the cleaning tank 11 is passed through the filter element to recover, and It is performed again from the 1st and 2nd circulating liquid spray nozzles 15'1 8 toward the liquid-injection drum 12 and ejects it. In addition, the shape of the liquid discharge port 26 is formed into a flared shape that expands upward and is performed so that recovery of the concentrated coating liquid and the like can be easily performed by evaporation of the solvent. Instead of making the horn-shaped drain port 26, the entire bottom surface of the washing tank Π may be inclined toward the drain port 26. In addition, the liquid level adjustment drainage member 2 7 extended from the recovery channel 25 penetrates the bottom of the washing tank 11 and faces the inside of the washing tank 11. The liquid level adjusting member 27 for the liquid level adjustment is made of liquid at the upper end, and the upper and lower positions can be adjusted. When the liquid is adjusted to the highest position, the liquid level of the cleaning liquid The lower end is formed further above, and at the lowest position -10-(7) (7) 200413103, the liquid level of the cleaning liquid is formed lower than the lower end of the suction drum 12. In addition, when the roller brush 19 is set at the uppermost position of the liquid level adjustment drain member 27, the liquid level of the cleaning liquid is formed lower than the upper end of the roller brush 19 and at the lowermost position. The liquid level of the cleaning liquid is formed above the lower end of the roller brush 19. With the structure described above, when the cleaning liquid is cleaned, the drainage member 27 for adjusting the liquid surface is formed at a high position, and the lower end of the introduction roller 12 is directly immersed in the cleaning liquid, and In the case where the concentration of the coating liquid in the cleaning solution is increased, the height of the drainage member 27 for adjusting the liquid surface is lowered, and the cylindrical liquid introduction roller 12 is floated from the liquid surface of the cleaning solution. 5, 18, 21, and roller brush 19 to clean the surface of the suction cylinder 12. In addition, as shown in FIG. 4, the first circulating liquid spray nozzle 15 may be replaced with the first circulating liquid 2 fluid nozzle 28 and the second circulating liquid spray nozzle 18 may be replaced with the second circulating liquid spray nozzle. 2 9. Replace the new liquid spray nozzle 2 1 with the new liquid 2 fluid nozzle 30. The 2 fluid nozzle is designed to form a mist in the gas by blowing in the liquid, so the larger the surface area of the liquid is, the more it adheres to the cylinder. The coating liquid of the liquid drum 12 is also more easily fused and is easily removed. In addition, the amount of the 'washing liquid' can be significantly reduced. In addition, a foaming nozzle 31 is provided at the bottom of the washing tank 11 and can be replaced with a roller brush 19, or it can be used. The bubbling nozzle 31 is a means for ejecting a liquid. For example, it has a method of spraying a certain amount of cleaning solution by spraying water and rinsing a 120-spoon coating solution attached to a cylindrical liquid-injection drum, or A method of contacting a bubble-like cleaning solution containing a gas and rinsing the coating solution. -11-(8) 200413103 In addition, the waste liquid passage 3 2 connected to the liquid-gas separation tank (not shown) on the side of the first circulating liquid 2 fluid nozzle 28 is opened, and the new liquid 2 fluid nozzle 3 The waste liquid passage 33 connected to the circulation buffer tank (not shown) on the 0 side is open. In addition, in the embodiment, although the preparatory ejection device provided with a new liquid spraying nozzle was explained, the preparatory ejection device with a new liquid spraying nozzle may not be provided, and only a preparatory ejection device with a circulating liquid spraying nozzle may be provided.
〔產業上之可利用性〕 根據本案發明的開縫式塗布機的預備吐出裝置並不只 限於半導體製造裝置，也可對液晶顯示裝置或電漿顯示器 等IT關連製造裝置加以應用。 【圖式簡單說明】[Industrial Applicability] The preliminary discharge device of the slot coater according to the present invention is not limited to a semiconductor manufacturing device, and can also be applied to an IT-related manufacturing device such as a liquid crystal display device or a plasma display. [Schematic description]
第1圖是裝入本發明的預備吐出裝置的塗布裝置之全 體圖。 第2圖是本發明的預備吐出裝置的全體圖。 第3圖是說明關於液面調整之圖。 第4圖是本發明的預備吐出裝置的其他實施例之全體 圖。 〔符號說明〕 1…基座 2…支撐腳 -12- (9) (9)200413103 3…平台 4…水平平板 5·.·銷Fig. 1 is an overall view of a coating apparatus incorporated in the preliminary discharge apparatus of the present invention. Fig. 2 is an overall view of the preliminary ejection device of the present invention. Fig. 3 is a diagram explaining the liquid level adjustment. Fig. 4 is an overall view of another embodiment of the preliminary ejection device of the present invention. 〔Explanation of symbols〕 1 ... base 2 ... support feet -12- (9) (9) 200413103 3 ... platform 4 ... horizontal flat plate 5 ... pin
6…貫通孑L 7…線性馬達 8…移動構件 9···開縫式噴嘴 1 1…洗淨槽 12…圓筒狀引液滾筒 13、14…蓋體 15…第1循環液噴淋噴嘴 16…噴出乾燥氣體的噴嘴 17··· % 1 刷帚 1 7a、2 0a…螺栓構件 18…第2循環液噴淋噴嘴 1 9…滾筒刷 2 0…第2刷帚 21…新液噴淋噴嘴 22…排氣導管 23…旋轉桿 24…噴出洗淨液或氮氣氣體的噴嘴 2 5…回收通道 26.··排液口 27…液面調整用排液構件 -13- (10)200413103 28…第1循環液2流體噴嘴 29…第2循環液噴霧噴嘴 30…新液2流體噴嘴 31···起泡噴嘴 32…廢液通路（液氣分離槽）6 ... through 孑 L 7 ... linear motor 8 ... moving member 9 ... slotted nozzle 1 1 ... washing tank 12 ... cylindrical drainage drum 13, 14 ... cover 15 ... first circulating liquid spray nozzle 16… Nozzle 17 for drying gas ... 1 Brush broom 1 7a, 2 0a ... Bolt member 18 ... 2nd circulating liquid spray nozzle 1 9 ... Roller brush 2 0 ... 2nd brush broom 21 ... Fresh liquid spray Nozzle 22 ... Exhaust duct 23 ... Rotary rod 24 ... Nozzle 2 that sprays cleaning liquid or nitrogen gas ... 5 Recovery channel 26 ... Drain port 27 ... Drain member for liquid level adjustment-13- (10) 200413103 28 … The first circulation liquid 2 fluid nozzle 29… the second circulation liquid spray nozzle 30… new liquid 2 fluid nozzle 31 ··· bubble nozzle 32… waste liquid passage (liquid-gas separation tank)
3 3…廢液通路（循環用緩衝槽） C…塗布裝置 P…預備吐出裝置3 3 ... Waste liquid channel (buffer tank for circulation) C ... Coating device P ... Preparation discharge device
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